CN109623139B - Water-guided laser processing device and system - Google Patents

Water-guided laser processing device and system Download PDF

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Publication number
CN109623139B
CN109623139B CN201811507530.XA CN201811507530A CN109623139B CN 109623139 B CN109623139 B CN 109623139B CN 201811507530 A CN201811507530 A CN 201811507530A CN 109623139 B CN109623139 B CN 109623139B
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laser
liquid
gas
chamber
water
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CN109623139A (en
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张广义
张文武
王玉峰
茹浩磊
郭春海
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Abstract

The application discloses water guide laser processing device and system belongs to laser processing technical field. The water guide laser processing device comprises: the device comprises a frame structure, a laser transmission pipeline and a laminar flow assembly; the frame structure sequentially comprises a focusing chamber, a liquid chamber and a gas chamber from top to bottom; the laser transmission pipeline is fixed in the liquid chamber along the propagation direction of the laser, and a window filter is fixed at the lower end of the laser transmission pipeline; the liquid chamber is provided with a liquid inlet; a laminar flow assembly is fixed in a first annular space formed by the laser transmission pipeline and the liquid chamber, so that liquid entering the liquid chamber forms stable laminar flow along the propagation direction of laser, and the laser emitted by the laser transmission pipeline is coated. The device improves the total reflection efficiency of the laser and the coupling power between the laser and the liquid, thereby obtaining the high-power coupling water-guide laser and improving the processing depth of the laser.

Description

Water-guided laser processing device and system
Technical Field
The application relates to a water-guiding laser processing device and system, and belongs to the technical field of laser processing.
Background
The water-guided laser machining technique is a technique for machining by guiding laser light with a fine water jet, and the laser light propagating in water is totally reflected at the interface between the water beam and the air due to the difference in refractive index between the laser light in water and the air, and is confined in the water beam, which functions as a light guide fiber.
At present, patent CN108262556A discloses a high-power coupling water-guided laser processing device, which includes a liquid chamber and a window lens, wherein the liquid chamber includes a focusing lens, a supporting structure and a liquid converging and conducting device, the inner wall of the liquid converging and conducting device is coated with a total reflection layer, and the total reflection coating and the method of rotating the water-guided laser are utilized to improve the laser coupling power and further expand the depth capability of laser processing. Patent CN108581224A discloses a rotary laser processing device and its application, laser processing system and method, the device includes: the laser device comprises a supporting part and a contraction flow conduction device, wherein liquid coupled with laser is communicated in the supporting part; the contraction flow conduction device is arranged below the supporting part and communicated with the supporting part; wherein, a liquid cavity and an encapsulation gas layer are arranged in the contraction flow conduction device; the packaging gas layer is arranged outside the liquid cavity; the diameter of the cross section of the liquid cavity is gradually reduced along the transmission direction of the laser, a transmission end is formed, and a main shaft of the transmission end and a main optical axis of the laser incline at an acute angle; the contracted flow conduction device rotates around the main optical axis of the laser, and the machining depth is improved by the mode of rotating laser machining in the patent.
However, in the water-guided laser processing device in the prior art, when the liquid and the laser are coupled, the coupling power is still relatively low and the total reflection efficiency of the laser is also relatively low, so that the output power of the laser is relatively low, and the processing depth of the laser cannot meet the requirements of some occasions.
Disclosure of Invention
According to one aspect of the application, a water-guide laser processing device is provided, which improves the total reflection efficiency of laser and the coupling power between the laser and liquid, thereby obtaining high-power coupling laser, improving the processing depth of the laser, and enabling the processing depth to reach more than 10 mm.
The water-jet guided laser processing device includes: the device comprises a frame structure, a laser transmission pipeline and a laminar flow assembly;
the frame structure sequentially comprises a focusing chamber, a liquid chamber and a gas chamber from top to bottom;
the laser transmission pipeline is fixed in the liquid chamber along the propagation direction of laser, and a window filter is fixed at the lower end of the laser transmission pipeline;
the liquid chamber is provided with a liquid inlet;
the laminar flow assembly is fixed in a first annular space formed by the laser transmission pipeline and the liquid chamber, so that liquid entering the liquid chamber forms stable laminar flow along the propagation direction of laser, and the laser emitted by the laser transmission pipeline is coated.
Optionally, the laminar flow assembly comprises at least one annular filter screen, the upper portion of the liquid chamber is provided with a plurality of liquid inlets along its circumference, and the annular filter screen is located below the plurality of liquid inlets.
Optionally, the laminar flow module includes a first annular filter screen, a second annular filter screen, and an energy storage member, the second annular filter screen is located below the first annular filter screen, and the energy storage member is sandwiched between the first annular filter screen and the second annular filter screen;
preferably, the energy accumulating member is a sponge.
Optionally, the laminar flow assembly further includes a third annular filter screen and a flow guide member, the third annular filter screen is located below the second annular filter screen, and the flow guide member is sandwiched between the second annular filter screen and the third annular filter screen;
preferably, the flow guide member is a plurality of flow guide pipes.
Optionally, a focusing lens mounted within the focusing chamber is slidable along the propagation direction of the laser light.
Optionally, a bottom end of the liquid chamber forms a first throat, and the first throat is located below the window lens; and a second necking is formed at the bottom end of the gas chamber and is positioned below the first necking.
The ratio of the inner diameter of the liquid chamber to the inner diameter of the first constriction can be selected by a person skilled in the art according to actual production needs, and the application is not restricted thereto. Preferably, the ratio of the inner diameter of the liquid chamber to the inner diameter of the first constriction is greater than 10: 1.
optionally, a gas filtering device is fixed in a second annular space formed by the gas chamber and the first necking, a plurality of gas inlets are arranged on the upper portion of the gas chamber along the circumferential direction of the gas chamber, and the gas filtering device is located below the plurality of gas inlets.
Optionally, the liquid in the liquid chamber is water and the gas in the gas chamber is nitrogen.
According to another aspect of the present application, there is also provided a water guided laser machining system including: an electric control system, a laser, an optical element, a liquid transmission unit, a gas transmission unit and any one of the water-guided laser processing devices;
the electric control system is respectively connected with the laser, the gas transmission unit and the liquid transmission unit and is used for controlling the laser, the gas transmission unit and the liquid transmission unit;
the optical element is positioned between the laser and the water-guided laser processing device and is used for guiding laser generated by the laser into the water-guided laser processing device;
the liquid transmission unit is connected with a liquid chamber in the water-jet guided laser processing device and is used for guiding liquid into the liquid chamber;
the gas transmission unit is connected with a gas chamber in the water-jet guided laser processing device and used for guiding gas into the gas chamber.
The beneficial effects that this application can produce include:
1) the application provides a water-conducting laser processing device, through at the fixed laminar flow subassembly in the first annular space that laser transmission pipeline and liquid cavity formed to make the liquid that gets into in the liquid cavity form stable laminar flow, laminar flow liquid parcel forms the liquid beam so that laser propagates in this liquid beam around the laser beam, and stable laminar flow liquid beam has improved the total reflection efficiency of laser.
2) The application provides a water-conducting laser processing device, because liquid has stable laminar flow characteristic, consequently improved the stability of system, reduced destruction and damage that the light scattering brought, improved light-liquid coupling power.
3) The water-conducting laser processing device provided by the application has higher total reflection efficiency and light-liquid coupling power, so that high-power coupling laser can be output, namely, the laser can reach kilowatt-level power under the micron scale, and the processing depth reaches more than 10 mm.
4) The application provides a water guide laser processing device, technical cost is low.
Drawings
Fig. 1 is a schematic structural diagram of a water-guided laser processing apparatus provided in this embodiment;
fig. 2 is a schematic diagram of water-guided laser conduction in the water-guided laser processing apparatus provided in this embodiment;
fig. 3 is a block diagram of a water-guided laser processing system according to this embodiment.
List of parts and reference numerals:
100 a frame structure; 101 a focusing chamber; 1011 a focusing lens;
102 a liquid chamber; 1021 a first throat; 1022 a liquid inlet;
103 a gas chamber; 1031 a second necking; 1032 a gas inlet;
1033 a gas filtering device; 200 laser transmission pipelines; 201 a window lens;
301 annular filter screen; 3011 a first annular filter screen;
3012 a second annular filter; 3013 a third annular filter;
302 an energy storage member; 303 a flow guide member;
11 an electronic control system; 12 a laser; 13 an optical element;
14 a liquid transfer unit; 15 a gas delivery unit;
16 water guide laser processing device; 17 workpiece.
Detailed Description
The present application will be described in detail with reference to examples, but the present application is not limited to these examples.
The application provides a water-guiding laser processing device, includes: a frame structure 100, a laser transmission pipeline 200 and a laminar flow assembly; the frame structure 100 comprises a focusing chamber 101, a liquid chamber 102 and a gas chamber 103 from top to bottom; the laser transmission pipeline 200 is fixed in the liquid chamber 102 along the propagation direction of laser, and a window filter 201 is fixed at the lower end of the laser transmission pipeline 200; the liquid chamber 102 is provided with a liquid inlet 1022; a laminar flow assembly is fixed in a first annular space formed by the laser transmission pipeline 200 and the liquid chamber 102 so as to enable the liquid entering the liquid chamber 102 to form stable laminar flow and form a coating on the laser emitted by the laser transmission pipeline 200.
Specifically, the upper section of the frame structure 100 forms a focusing chamber 101, the middle section of the frame structure 100 forms a liquid chamber 102, and the lower section of the frame structure 100 forms a gas chamber 103. The gas in the gas chamber 103 is used to coat the liquid flowing out of the liquid chamber 102 to propagate the laser light in the liquid.
The application provides a water-conducting laser processing device, through be fixed with the laminar flow subassembly in the first annular space that laser transmission pipeline and liquid cavity formed, thereby realized that the liquid that gets into in the liquid cavity forms stable laminar flow, laminar flow liquid parcel forms the liquid beam so that laser propagates in this liquid beam around the laser beam, stable laminar flow liquid beam has improved the total reflection efficiency and the light-liquid coupling power of laser, thereby obtain powerful output laser, improved the depth of processing of laser.
Optionally, the laminar flow assembly comprises at least one annular filter screen 301, the upper portion of the liquid chamber 102 being provided with a plurality of liquid inlets 1022 along its circumference, the annular filter screen 301 being located below the plurality of liquid inlets 1022.
Specifically, the inner peripheral wall of the annular filter 301 is sleeved on and abutted against the outer wall of the laser transmission pipeline 200, and the outer peripheral wall of the annular filter 301 is abutted against the inner cavity wall of the liquid chamber 102, so that the liquid entering from the liquid inlet 1022 flows into the liquid chamber 102 through the annular filter 301. The annular filter screen 301 improves the uniformity of the fluid and is beneficial to forming stable laminar flow of the fluid. The liquid inlets 1022 are uniformly arranged along the upper peripheral wall of the liquid chamber 102. The number of the annular filter screens 301 can be 1, or 2, or certainly, can also be 3, and the annular filter screens 301 are uniformly arranged on the outer wall of the laser transmission pipeline 200 along the propagation direction of the laser, so that the flow effect of the liquid in the liquid chamber 102 is improved in a multi-layer step-by-step manner.
Optionally, the laminar flow module includes a first annular filter 3011, a second annular filter 3012, and the energy storage member 302, the second annular filter 3012 is located below the first annular filter 3011, and the energy storage member 302 is sandwiched between the first annular filter 3011 and the second annular filter 3012. Preferably, the energy accumulating member 302 is a sponge.
Specifically, the space formed by the first and second annular filters 3011 and 3012 and the wall of the liquid chamber 102 is entirely filled with sponge. The sponge body has a specific energy storage effect, and stores the fluid entering the liquid chamber 102, so that the stable laminar flow of the fluid is formed.
Optionally, the laminar flow assembly further includes a third annular filter 3013 and a flow guide member 303, the third annular filter 3013 is located below the second annular filter 3012, and the flow guide member 303 is sandwiched between the second annular filter 3012 and the third annular filter 3013.
Preferably, the flow guide member 303 is a plurality of flow guide pipes 303.
In one particular example, the flow directing members 303 are a plurality of flow directing tubes 303. The plurality of flow guide pipes 303 are installed in a space formed by the second annular filter 3012 and the third annular filter 3013 and the cavity wall of the liquid chamber 102, the upper ends of the flow guide pipes 303 abut against the second annular filter 3012, and the lower ends of the flow guide pipes 303 abut against the third annular filter 3013, so that the flow direction of the liquid along the flow guide pipes 303 is consistent with the propagation direction of the laser, that is, the fluid forms a stable laminar flow in the propagation direction of the laser.
The flow guide pipe 303 may be a metal pipe, a plastic pipe, a ceramic pipe, or a glass pipe, and has a smooth pipe wall, which is beneficial to forming a laminar flow of liquid. Preferably, the draft tube 303 is a glass tube. The draft tube 303 may be a solid tube or may be a hollow tube. When the delivery tube 303 is a hollow tube, fluid may flow from the core of the tube, or from between the tube and the tube.
In another specific example, the flow guide member 303 is a plurality of sheet-shaped flow guide fences. Specifically, a plurality of sheet-shaped air guide fences are interposed between the second annular filter 3012 and the third annular filter 3013. The plurality of flaky flow guide grids are uniformly distributed along the outer peripheral wall of the laser transmission pipeline 200, each flow guide grid is positioned in the radial extension direction of the laser transmission pipeline 200 to form a star-ray shape, the inner end of each flaky flow guide grid abuts against the outer wall of the laser transmission pipeline 200, the outer end of each flaky flow guide grid abuts against the inner wall of the liquid chamber 102, the upper end of each flaky flow guide grid abuts against the second annular filter screen 3012, and the lower end of each flaky flow guide grid abuts against the third annular filter screen 3013.
Alternatively, the focusing lens 1011 installed in the focusing chamber 101 may slide in the propagation direction of the laser light.
Specifically, the focusing lens 1011 is slidable along the propagation direction of the laser light to adjust the focusing position of the laser light, preferably, the focusing position is the position of the liquid outlet of the liquid chamber 102. And the incidence angle of the laser in the liquid-gas layer during total reflection can be adjusted, so that the total reflection efficiency is improved.
Optionally, a first throat 1021 is formed at the bottom end of the liquid chamber 102, and the first throat 1021 is located below the window lens 201; the bottom end of the gas chamber 103 forms a second throat 1031, and the second throat 1031 is located below the first throat 1021.
Specifically, the first throat 1021 is a cambered throat concave towards the liquid chamber 102, as shown in fig. 1, the diameter of the first throat 1021 gradually decreases along the propagation direction of the laser. The first necking 1021 is beneficial to keeping the liquid processed by the laminar flow component in a laminar flow state continuously, so that the laser can realize total reflection on a liquid-gas layer, the laser can form efficient coupling with the fluid, and damage caused by laser scattering are reduced.
The second throat 1031 is a cambered throat that is concave toward the gas chamber 103, and as shown in fig. 1, the diameter of the second throat 1031 gradually decreases in the propagation direction of the laser light. In the gas chamber 103 a gas is injected, which gas forms the necessary conditions for total reflection of the laser light with the liquid. The second throat 1031 achieves a compression effect of the gas on the laser-coated liquid column flowing out of the first throat 1021, and as shown in fig. 2, the diameter of the liquid column is further reduced to increase the output power of the laser. The gas in the gas chamber 103 may be a high pressure gas to achieve a better compression effect.
In the present application, the inner diameter of the liquid chamber 102 is preferably much larger than the inner diameter of the first constriction 1021, which is important for achieving a stable laminar flow of the liquid. The inner diameter of the first throat 1021 at the outlet is preferably larger than the inner diameter of the second throat 1031 at the outlet. The inner diameters of the first and second throats 1021, 1031 are both in the millimeter scale.
Optionally, the ratio of the inner diameter of the liquid chamber 102 to the inner diameter of the first constriction 1021 is greater than 10: 1.
optionally, a gas filtering device 1033 is fixed in a second annular space formed by the gas chamber 103 and the first throat 1021, the upper portion of the gas chamber 103 is provided with a plurality of gas inlets 1032 along the circumferential direction thereof, and the gas filtering device 1033 is located below the plurality of gas inlets 1032.
Specifically, the gas filtering device 1033 may be a filter screen or a filter grid. The gas filtering device 1033 may improve the uniformity of the gas. The plurality of gas inlets 1032 may be uniformly arranged along the circumferential wall of the gas chamber 103.
Alternatively, the liquid in the liquid chamber 102 is water and the gas in the gas chamber 103 is nitrogen.
The application also provides a water-guided laser processing system, including: an electronic control system 11, a laser 12, an optical element 13, a liquid transmission unit 14, a gas transmission unit 15 and the water-guided laser processing device 16;
the electric control system 11 is respectively connected with the laser 12, the gas transmission unit 15 and the liquid transmission unit 14 and is used for controlling the operation of the laser 12, the gas transmission unit 15 and the liquid transmission unit 14;
the optical element 13 is positioned between the laser 12 and the water-guided laser processing device 16 and is used for guiding the laser generated by the laser 12 into the water-guided laser processing device 16;
the liquid delivery unit 14 is connected to the liquid chamber 102 in the water-guided laser machining apparatus 16 for introducing liquid into the liquid chamber 102;
the gas delivery unit 15 is connected to the gas chamber 103 in the water-jet guided laser processing apparatus 16 for introducing gas into the gas chamber 103.
Example 1
Fig. 1 is a schematic structural diagram of a water-guided laser processing apparatus provided in this embodiment, fig. 2 is a schematic conduction diagram of water-guided laser in the water-guided laser processing apparatus provided in this embodiment, and the following specifically describes this embodiment with reference to fig. 1 and fig. 2.
As shown in fig. 1, the laser processing apparatus provided in this embodiment includes a focusing chamber 101, a liquid chamber 102, and a gas chamber 103, and a focusing lens 1011 is slidably mounted in the focusing chamber 101.
The laser transmission pipeline 200 is installed at the center of the liquid chamber 102, the upper end of the laser transmission pipeline 200 is fixed on the bottom wall of the focusing chamber 101, the lower end of the laser transmission pipeline 200 is installed with the window lens 201, and a certain distance is reserved between the window lens 201 and the first reducing part 1021. The laminar flow subassembly includes first annular filter screen 3011, the annular filter screen 3012 of second, the annular filter screen 3013 of third, cavernosum and many honeycomb ducts, and the cavernosum is located between first annular filter screen 3011 and the annular filter screen 3012 of second, and many honeycomb ducts are located between the annular filter screen 3012 of second and the annular filter screen 301 of third. A plurality of liquid inlets 1022 are uniformly distributed on the cavity wall of the liquid chamber 102 above the first annular filter screen 3011.
A gas filtering device 1033 is disposed in the gas chamber 103, and the gas filtering device 1033 is located in a second annular space formed by the first throat 1021 and the gas chamber 103. The gas filtering device 1033 is annular and is disposed around an outer peripheral wall of a throat 1021. A plurality of gas inlets 1032 are evenly distributed on the wall of the gas chamber 103 above the gas filtering device 1033.
In this embodiment, the laser light propagates along the focusing chamber, the liquid chamber, and the gas chamber in sequence. When the laser enters the focusing chamber, a focusing lens in the focusing chamber generates a focusing effect on the laser, and the focusing lens is used for adjusting an incident angle when the laser is subjected to total reflection so as to improve the total reflection efficiency of the laser. Laser enters a laser transmission pipeline positioned in the liquid cavity from the focusing cavity, passes through the window lens and enters the liquid cavity, laminar flow liquid in the liquid cavity coats the laser, and then enters the gas cavity from the liquid cavity, and gas in the gas cavity coats the laminar flow liquid, so that the laser is totally reflected at a liquid-gas laminar flow interface.
As shown in fig. 2, the laser light is totally reflected at the interface of the liquid-gas laminar flow;
in order to ensure the total reflection effect of the laser on the liquid-gas interface, the following conditions should be satisfied:
Figure BDA0001899834830000081
wherein, theta 1 is the incident angle of the interface of the laser and the liquid-gas laminar flow, theta 2 is the refraction angle, and n1 and n2 are the refraction indexes of the light, the water and the nitrogen respectively. Supposing that theta 2 is 90 degrees, namely the laser is totally reflected at the liquid-gas laminar interface, at this time, the calculated theta 1 is the minimum incident angle of the total reflection of the laser and the liquid-gas laminar interface, and as long as the incident angle of the laser and the liquid-gas laminar interface is not less than theta 1, the laser can be totally reflected at the liquid-gas laminar interface. By utilizing the total reflection effect of the liquid-gas laminar flow interface, the device transmits laser light to the surface of the workpiece 400 to be processed for material removal.
Example 2
Fig. 3 is a block diagram of a water-guided laser processing system according to this embodiment, and the following description is made in detail with reference to fig. 3.
The water-jet guided laser processing system in the embodiment includes an electronic control system 11, and the electronic control system 11 is electrically connected to a laser 12, a liquid transmission unit 14, and a gas transmission unit 15, respectively. The laser light generated by the laser 12 enters the focusing chamber 101 of the water-guided laser processing apparatus 16 through the optical element 13, and is focused by the focusing lens 1011. The laser is transmitted by a laser transmission pipeline 200, processed by a window lens 201, coated by laminar flow liquid in a liquid chamber 102, contracted flow compression processed by a gas chamber 103, and the total reflection effect of a liquid-gas laminar flow interface, and the like in sequence to reach the workpiece performance, and the material is deeply processed.
The liquid transfer unit 14 communicates with the liquid chamber 102, and the liquid chamber 102 is filled with water.
The gas transfer unit 15 communicates with the gas chamber 103, and injects nitrogen gas into the gas chamber 103.
Although the present application has been described with reference to a few embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application as defined by the appended claims.

Claims (7)

1. A water guided laser processing apparatus, comprising: the device comprises a frame structure, a laser transmission pipeline and a laminar flow assembly;
the frame structure sequentially comprises a focusing chamber, a liquid chamber and a gas chamber from top to bottom;
the laser transmission pipeline is fixed in the liquid chamber along the propagation direction of laser, and a window lens is fixed at the lower end of the laser transmission pipeline;
the liquid chamber is provided with a liquid inlet;
the laminar flow assembly is fixed in a first annular space formed by the laser transmission pipeline and the liquid chamber so that liquid entering the liquid chamber forms stable laminar flow along the propagation direction of laser, and therefore the laser emitted by the laser transmission pipeline is coated;
the laminar flow assembly comprises at least one annular filter screen, the upper part of the liquid chamber is provided with a plurality of liquid inlets along the circumferential direction of the liquid chamber, and the annular filter screen is positioned below the plurality of liquid inlets;
the laminar flow component comprises a first annular filter screen, a second annular filter screen and an energy storage component, the second annular filter screen is positioned below the first annular filter screen, and the energy storage component is clamped between the first annular filter screen and the second annular filter screen;
a first necking is formed at the bottom end of the liquid chamber and is positioned below the window lens;
a second necking is formed at the bottom end of the gas chamber and is positioned below the first necking;
a gas filtering device is fixed in a second annular space formed by the gas chamber and the first necking, a plurality of gas inlets are formed in the upper part of the gas chamber along the circumferential direction of the gas chamber, and the gas filtering device is positioned below the plurality of gas inlets;
the laminar flow subassembly still includes annular filter screen of third and water conservancy diversion component, the annular filter screen of third is located the below of the annular filter screen of second, just it is equipped with to press from both sides between the annular filter screen of second and the annular filter screen of third the water conservancy diversion component.
2. The water guided laser machining apparatus according to claim 1, wherein the energy accumulating member is a sponge.
3. The water guided laser machining apparatus according to claim 2, wherein the flow guide member is a plurality of flow guide pipes.
4. The water guided laser machining apparatus of claim 1, wherein a focusing lens installed in the focusing chamber is slidable in a propagation direction of the laser light.
5. The water guided laser machining apparatus of claim 1, wherein a ratio of an inner diameter of the liquid chamber to an inner diameter of the first throat is greater than 10: 1.
6. the water guided laser machining apparatus of claim 1, wherein the liquid in the liquid chamber is water and the gas in the gas chamber is nitrogen.
7. A water guided laser machining system, comprising: an electric control system, a laser, an optical element, a liquid transmission unit, a gas transmission unit, and the water guided laser processing device according to any one of claims 1 to 6;
the electric control system is respectively connected with the laser, the gas transmission unit and the liquid transmission unit and is used for controlling the laser, the gas transmission unit and the liquid transmission unit;
the optical element is positioned between the laser and the water-guided laser processing device and is used for guiding laser generated by the laser into the water-guided laser processing device;
the liquid transmission unit is connected with a liquid chamber in the water-jet guided laser processing device and is used for guiding liquid into the liquid chamber;
the gas transmission unit is connected with a gas chamber in the water-jet guided laser processing device and used for guiding gas into the gas chamber.
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