CN109622478A - Cleaning device after crystal bar slice - Google Patents
Cleaning device after crystal bar slice Download PDFInfo
- Publication number
- CN109622478A CN109622478A CN201910096686.1A CN201910096686A CN109622478A CN 109622478 A CN109622478 A CN 109622478A CN 201910096686 A CN201910096686 A CN 201910096686A CN 109622478 A CN109622478 A CN 109622478A
- Authority
- CN
- China
- Prior art keywords
- flushing
- arc
- shaped slot
- slice
- crystal bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 61
- 239000013078 crystal Substances 0.000 title claims abstract description 58
- 238000011010 flushing procedure Methods 0.000 claims abstract description 124
- 230000000694 effects Effects 0.000 claims abstract description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 19
- 238000004080 punching Methods 0.000 claims description 3
- 206010016825 Flushing Diseases 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000007791 liquid phase Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning In General (AREA)
Abstract
The present invention provides cleaning device after a kind of crystal bar slice, belongs to monocrystalline silicon production technical field of processing equipment.Including fixation kit and pressurization cleaning assembly, the cleaning assembly that pressurizes includes left flushing cisterns and right flushing cisterns, left flushing cisterns offers right arc-shaped slot, left arc-shaped slot is offered on right flushing cisterns, at least one right flushing linear slit is provided in the axial direction in the cambered surface of right arc-shaped slot, at least one left flushing linear slit is provided in the axial direction in the cambered surface of left arc-shaped slot, cleansing medium in left flushing cisterns and right flushing cisterns is sprayed by right flushing linear slit and left flushing linear slit under pressure, crystal bar after the slice being sticked between right arc-shaped slot and the left arc-shaped slot is rinsed.The device can disposably complete the flushing to whole crystal bar, and cleaning efficiency is high.High-pressure wash medium can be rinsed slice, cleaning effect is good well into the linear slit to the crystal bar after slice.Slice is solved apart from small, the weak technical problem of mass transfer in liquid phase effect.
Description
Technical field
The invention belongs to monocrystalline silicon production technical field of processing equipment, and in particular to cleaning device after a kind of crystal bar slice.
Background technique
Large scale semiconductor slice uses multi-wire saw more, and the principle of multi-wire saw is the steel wire by a high-speed motion
The cutting blade material being attached on steel wire is driven to rub silicon rod, to reach cutting effect, this mechanism is also referred to as: from
By grinding and cutting.Semiconductor slice after cutting such as cannot be cleaned thoroughly in time, will cause the silicon carbide and silicon in particle loaded fluid
Powder deposits to silicon chip surface, causes silicon wafer dirty.
However, the gap between adjacent two panels slice is very narrow, original slice cleaning equipment, cleaning spray after multi-wire saw
When leaching, clear water cannot be completely into linear slit be arrived, to cannot clean up the mortar of silicon chip surface, cleaning efficiency is low, cleaning
It is ineffective, and will appear the bad phenomenons such as streamers when cleaning.
Summary of the invention
In view of the deficiencies of the prior art, the crystal bar that the present invention provides that a kind of cleaning efficiency is high, cleaning effect is good is clear after being sliced
Cleaning device.
The technical solution adopted by the present invention to solve the technical problems is:
Cleaning device after a kind of crystal bar slice, including fixation kit and pressurization cleaning assembly, the fixation kit will be for that will be sliced
Crystal bar afterwards is fixed on the pressurization cleaning assembly；The pressurization cleaning assembly includes left flushing cisterns and right flushing cisterns, described
It is provided with medium inlet on left flushing cisterns and the right flushing cisterns and pressurization mouth, the left flushing cisterns offer right arc card
Slot offers left arc-shaped slot on the right flushing cisterns, and the right arc-shaped slot is oppositely arranged with the left arc-shaped slot, will
Crystal bar after slice is sticked between the right arc-shaped slot and the left arc-shaped slot；Edge in the cambered surface of the right arc-shaped slot
At least one right flushing linear slit axially is offered, is provided in the axial direction at least one left flushing in the cambered surface of the left arc-shaped slot
Linear slit, the left flushing cisterns and the cleansing medium in the right flushing cisterns under pressure by the right flushing linear slit with it is described
Left flushing linear slit sprays, and rushes to the crystal bar after the slice being sticked between the right arc-shaped slot and the left arc-shaped slot
It washes.
Preferably, the left flushing linear slit is staggered with the right flushing linear slit, a plurality of left flushing linear slit and institute
Right flushing linear slit is stated to be located on different levels.
Preferably, the left linear slit and the right width for rinsing linear slit of rinsing is 0.5mm~2mm.
Preferably, two right flushing linear slits, the arc of the left arc-shaped slot are offered in the cambered surface of the right arc-shaped slot
Two left flushing linear slits are offered on face.
Preferably, the radian of the cambered surface of the right arc-shaped slot and the left arc-shaped slot is 150 °~165 °.
Preferably, mud flush linear slit is offered at the upper edge of the right arc-shaped slot and the left arc-shaped slot.
Preferably, cleaning device further includes pedestal after the crystal bar slice, and the right flushing cisterns is fixedly installed in the base
On seat, the left flushing cisterns is slidably connected on the pedestal.
Preferably, the fixation kit includes at least one feed screw disposed in parallel, described feed screw one end spiral shell
It is connected on the pedestal, the other end is bolted in the left flushing cisterns, rotates the feed screw, drives the left flushing cisterns close
Or far from the right flushing cisterns.
Preferably, the fixation kit includes two feed screws disposed in parallel, the two sides of the left flushing cisterns
It is provided with connection otic placode, the feed screw extends through and be threadedly coupled the connection otic placode, the both ends of the feed screw
It is bolted on the pedestal, and end is provided with handle.
Preferably, the pedestal is the cabinet of upper end opening, including two pieces of cant boards being oppositely arranged, the right flushing cisterns
Both ends be fixedly installed on the cant board, the both ends of the left flushing cisterns are slidably connected on the cant board.
As shown from the above technical solution, the present invention provides cleaning devices after crystal bar slice, the beneficial effect is that: it will be to clear
Crystal bar after the slice washed is clipped between the left arc-shaped slot and the right arc-shaped slot, using the fixation kit by institute
State left arc-shaped slot and the right arc-shaped slot fasten so that the cambered surface of the left arc-shaped slot and the right arc-shaped slot with to
The cylinder of crystal bar after the slice of cleaning fits closely, at this point, the cleansing medium in the left flushing cisterns and the right flushing cisterns
It is sprayed under pressure by the right junction for rinsing linear slit and the left flushing linear slit and the linear slit of the crystal bar after slice,
Crystal bar after the slice being sticked between the right arc-shaped slot and the left arc-shaped slot is rinsed, disposable completion pair
The flushing of whole crystal bar, cleaning efficiency are high.Secondly, by the right high-pressure wash rinsing linear slit and the left flushing linear slit and spraying
Medium can be rinsed slice, cleaning effect is good well into the linear slit to the crystal bar after slice.
Detailed description of the invention
Fig. 1 is cleaning device structural schematic diagram after crystal bar slice.
Fig. 2 is the partial enlarged view of A portion shown in Fig. 1.
Fig. 3 is cleaning device top view after the slice of crystal bar shown in Fig. 1.
Fig. 4 be after the slice of crystal bar shown in Fig. 3 cleaning device A-A to cross section view.
Fig. 5 is the partial enlarged view of B portion shown in Fig. 4.
In figure: cleaning device 10, fixation kit 100, handle 110, pressurization cleaning assembly 200, medium enter after crystal bar slice
Mouth 201, pressurization mouth 202, pressure controller 203, left flushing cisterns 210, right arc-shaped slot 211, right flushing linear slit 2111, engaging lug
It is plate 212, right flushing cisterns 220, left arc-shaped slot 221, Zuo Chongxi linear slit 2211, mud flush linear slit 2112, pedestal 300, edge-on
Plate 310.
Specific embodiment
Below in conjunction with attached drawing of the invention, technical solution and technical effect to the embodiment of the present invention are done further detailed
It is thin to illustrate.
Please refer to Fig. 1 to Fig. 5, in an embodiment, cleaning device 10 after a kind of crystal bar slice, for the crystal bar after slice
It is cleaned, including fixation kit 100 and pressurization cleaning assembly 200, the fixation kit 100 are used to consolidate the crystal bar after slice
Due on the pressurization cleaning assembly 200, the fixation kit 100 can be clamp or bolt and nut, be also possible to squeeze relatively
Pressing plate.
The pressurization cleaning assembly 200 includes left flushing cisterns 210 and right flushing cisterns 220, the left flushing cisterns 210 with it is described
Medium inlet 201 and pressurization mouth 202, the medium inlet 201 is provided on right flushing cisterns 220 to be used for the left flushing cisterns
210 with the right flushing cisterns 220 in inject cleansing medium, which is preferably deionized water, and the pressurization mouth 202 is used for
Pressurized equipment is connected, to pressurize to the left flushing cisterns 210 with the cleansing medium in the right flushing cisterns 220, the pressurized equipment
Preferably hydraulic equipment.It is additionally provided with pressure controller 203 on the left flushing cisterns 210 and the right flushing cisterns 220, with control
The pressure of cleansing medium.
The left flushing cisterns 210 offers right arc-shaped slot 211, offers left arc-shaped slot on the right flushing cisterns 220
221, the right arc-shaped slot 211 is oppositely arranged with the left arc-shaped slot 221, and the crystal bar after slice is sticked in the right side
Between arc-shaped slot 211 and the left arc-shaped slot 221.It is provided in the axial direction at least in the cambered surface of the right arc-shaped slot 221
One right flushing linear slit 2111 is provided in the axial direction at least one left flushing linear slit in the cambered surface of the left arc-shaped slot 221
2211, the left flushing cisterns 210 is with the cleansing medium in the right flushing cisterns 220 under pressure by the right flushing linear slit
2111 with left flushings linear slit 2211 ejection, to being sticked between the right arc-shaped slot 211 and the left arc-shaped slot 221
Slice after crystal bar be rinsed.
In the present embodiment, when being rinsed operation to the crystal bar after slice, first by the crystal bar after slice to be cleaned
Be sticked between the right arc-shaped slot 211 and the left arc-shaped slot 221, and make the left arc-shaped slot 221 with it is described
The cambered surface of right arc-shaped slot 211 and the cylinder of the crystal bar after slice to be cleaned fit closely.To the left flushing cisterns 210 and institute
It states in right flushing cisterns 220 and injects cleansing medium, then pressurize to the left flushing cisterns 210 and the right flushing cisterns 220, clearly
Medium is washed under pressure, by the right line for rinsing linear slit 2111 and the left flushing linear slit 2211 and the crystal bar after slice
The junction of seam sprays, to the crystal bar after the slice being sticked between the right arc-shaped slot 211 and the left arc-shaped slot 221
It is rinsed.And it is described it is right rinse linear slit 2111 and it is described it is left rinse linear slit 2211 be sliced cylinder junction due to close
Fitting, cleansing medium only have less leakage.
In the present embodiment, due to can disposably complete the cleaning of one whole crystal bar, cleaning efficiency is substantially increased.
Meanwhile cleansing medium high pressure effect under, can adequately enter in the gap of two neighboring slice, to slicing single crystal silicon into
Row thoroughly rinses, and cleaning effect is splendid.Secondly, in the right flushing linear slit 2111 and the left flushing linear slit 2211 and slice
The cleansing medium of the junction of the linear slit of crystal bar afterwards, high pressure is sprayed in covering of the fan, and has certain atomizing effect, therefore is weakened
The risk that streamers generate, the yield rate after slice cleaning have marked improvement.
In one specific embodiment, the left flushing linear slit 2211 is staggered with the right flushing linear slit 2111, more
Left flushing linear slit 2211 described in item is located on different levels with the right flushing linear slit 2111, to expand the height of the left and right sides
The flushing contact surface of cleansing medium and crystal bar slice is pressed, and then enhances cleaning effect, left and right sides water flow is avoided directly to cross.
In still another embodiment, the left linear slit and the right width for rinsing linear slit of rinsing is 0.5mm~2mm,
So that the left flushing cisterns 210 obtains enough pressure with the cleansing medium in the right flushing cisterns 220, guarantee the left punching
Washing linear slit 2211 and the right high-pressure wash medium for rinsing the ejection of linear slit 2111 has enough impact forces and penetration, extends
Distance is rinsed, expands cleaning area, further enhances the effect of cleaning.
In still another embodiment, two right flushing linear slits 2111 are offered in the cambered surface of the right arc-shaped slot 211,
Two left flushing linear slits 2211 are offered in the cambered surface of the left arc-shaped slot 221, so that by the left flushing linear slit 2211
The face to be cleaned being entirely sliced can be covered with the right high-pressure wash medium for rinsing the ejection of linear slit 2111, and then enhances cleaning
Effect.
In still another embodiment, the right arc-shaped slot 211 and the radian of the cambered surface of the left arc-shaped slot 221 are
150 °~165 °, when the surface of the right arc-shaped slot 211 and the left arc-shaped slot 221 and crystal bar after slice to be cleaned
After contact, certain space is respectively reserved in upper and lower two sides so that cleansing medium carry pollution medium and reserved from the space,
Guarantee cleaning effect.
In yet another embodiment, opened up at the right arc-shaped slot 211 and the upper edge of the left arc-shaped slot 221
There is mud flush linear slit 2112, it will be clear from the cleansing medium with pollution medium flowed out above crystal bar after slice to be cleaned
Wash clean prevents pollution medium from penetrated into the linear slit of crystal bar again, and then guarantees the effect of cleaning.
Continuing with reference to Fig. 1, it further includes pedestal 300 that cleaning, which fills 10, in a preferred embodiment, after the crystal bar slice, described
Right flushing cisterns 220 is fixedly installed on the pedestal 300, and the left flushing cisterns 210 is slidably connected on the pedestal.It is described solid
Determining component 100 includes at least one feed screw disposed in parallel, and described feed screw one end is bolted on the pedestal 300,
The other end is bolted in the left flushing cisterns 210, rotates the feed screw, drives the left flushing cisterns 210 close to or far from institute
State right flushing cisterns.
In the present embodiment, the right flushing cisterns 220 is installed on the pedestal 300 with the left flushing cisterns 210, makes it
Stablize, prevents during pressurizeing cleaning, the right flushing cisterns 220 is subjected to displacement with the left flushing cisterns 210, influences to clean
Effect.Meanwhile using the feed screw, after making the right flushing cisterns 220 and the left flushing cisterns 210 and slice to be cleaned
Crystal bar is in close contact, close between crystal bar after the raising right flushing cisterns 220 and the left flushing cisterns 210 and slice to be cleaned
Sealing property, and then enhance the effect of cleaning.
In one specific embodiment, the fixation kit 100 includes two feed screws disposed in parallel, the left side
The two sides of flushing cisterns 210 are provided with connection otic placode 212, and the feed screw extends through and is threadedly coupled the connection otic placode
212, the both ends of the feed screw are bolted on the pedestal 300, and end is provided with handle 110.By the handle,
Facilitate the rotation feed screw, and then can effectively increase torque, improves the right flushing cisterns 220 and the left flushing cisterns
210 and slice to be cleaned after sealing performance between crystal bar, and then enhance the effect of cleaning.
In yet another embodiment, the pedestal 300 is the cabinet of upper end opening, and two pieces including being oppositely arranged edge-on
The both ends of plate 310, the right flushing cisterns 220 are fixedly installed on the cant board 310, and the both ends of the left flushing cisterns 210 are sliding
It is dynamic to be connected on the cant board 310.It collects, avoids clear in the medium gravity flow such as cabinet of the pedestal 300 after flushing
Dielectric leakage is washed, site work environment is polluted, is also convenient for focusing on cleansing medium or being recycled.
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, those skilled in the art can understand all or part of the processes for realizing the above embodiment, and wants according to right of the present invention
Made equivalent variations is sought, is still belonged to the scope covered by the invention.
Claims (10)
1. cleaning device after a kind of crystal bar slice, which is characterized in that including fixation kit and pressurization cleaning assembly, described fixed group
Part is used to the crystal bar after slice being fixed on the pressurization cleaning assembly；
The pressurization cleaning assembly includes left flushing cisterns and right flushing cisterns, is respectively provided on the left flushing cisterns and the right flushing cisterns
There are medium inlet and pressurization mouth, the left flushing cisterns to offer right arc-shaped slot, left arc card is offered on the right flushing cisterns
Slot, the right arc-shaped slot are oppositely arranged with the left arc-shaped slot, and the crystal bar after slice is sticked in the right arc card
Between slot and the left arc-shaped slot；
At least one right flushing linear slit, the cambered surface of the left arc-shaped slot are provided in the axial direction in the cambered surface of the right arc-shaped slot
On be provided in the axial direction at least one left flushing linear slit, the cleansing medium in the left flushing cisterns and the right flushing cisterns is in pressure
By the right flushing linear slit and left flushings linear slit ejection under effect, to being sticked in the right arc-shaped slot and the left arc
The crystal bar after slice between card slot is rinsed.
2. cleaning device after crystal bar slice as described in claim 1, which is characterized in that the left flushing linear slit and the right punching
It washes linear slit to be staggered, a plurality of left flushing linear slit is located on different levels with the right flushing linear slit.
3. cleaning device after crystal bar as claimed in claim 1 or 2 slice, which is characterized in that the left flushing linear slit with it is described
The right width for rinsing linear slit is 0.5mm~2mm.
4. cleaning device after crystal bar slice as claimed in claim 3, which is characterized in that opened in the cambered surface of the right arc-shaped slot
Equipped with two right flushing linear slits, two left flushing linear slits are offered in the cambered surface of the left arc-shaped slot.
5. cleaning device after crystal bar as claimed in claim 1 or 2 slice, which is characterized in that the right arc-shaped slot with it is described
The radian of the cambered surface of left arc-shaped slot is 150 °~165 °.
6. cleaning device after crystal bar slice as claimed in claim 5, which is characterized in that the right arc-shaped slot and the left arc
Mud flush linear slit is offered at the upper edge of shape card slot.
7. cleaning device after crystal bar slice as claimed in claim 1 or 2, which is characterized in that clean dress after the crystal bar slice
Setting further includes pedestal, and the right flushing cisterns is fixedly mounted on the base, and the left flushing cisterns is slidably connected to the pedestal
On.
8. cleaning device after crystal bar slice as claimed in claim 7, which is characterized in that the fixation kit includes at least one
Feed screw disposed in parallel, described feed screw one end are bolted on the pedestal, and the other end is bolted in the left flushing cisterns,
The feed screw is rotated, drives the left flushing cisterns close to or far from the right flushing cisterns.
9. cleaning device after crystal bar slice as claimed in claim 8, which is characterized in that the fixation kit includes being arranged in parallel
Two feed screws, the two sides of the left flushing cisterns are provided with connection otic placode, and the feed screw extends through and spiral shell
Line connects the connection otic placode, and the both ends of the feed screw are bolted on the pedestal, and end is provided with handle.
10. cleaning device after crystal bar slice as claimed in claim 7, which is characterized in that the pedestal is the case of upper end opening
Body, including two pieces of cant boards being oppositely arranged, the both ends of the right flushing cisterns are fixedly installed on the cant board, the left punching
The both ends of tank-washer are slidably connected on the cant board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910096686.1A CN109622478A (en) | 2019-01-31 | 2019-01-31 | Cleaning device after crystal bar slice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910096686.1A CN109622478A (en) | 2019-01-31 | 2019-01-31 | Cleaning device after crystal bar slice |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109622478A true CN109622478A (en) | 2019-04-16 |
Family
ID=66064556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910096686.1A Pending CN109622478A (en) | 2019-01-31 | 2019-01-31 | Cleaning device after crystal bar slice |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109622478A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
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2019
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|---|---|---|---|---|
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110435026A (en) * | 2019-08-11 | 2019-11-12 | 赫晓苓 | A kind of photovoltaic slice device that can cut conversion and break-resistance in real time |
| CN110435026B (en) * | 2019-08-11 | 2021-06-04 | 安徽伟迈信息技术有限公司 | Photovoltaic section device capable of cutting, converting and preventing breakage in real time |
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