CN109613412A - The method of analysis STDF detection data in real time - Google Patents
The method of analysis STDF detection data in real time Download PDFInfo
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- CN109613412A CN109613412A CN201811558577.9A CN201811558577A CN109613412A CN 109613412 A CN109613412 A CN 109613412A CN 201811558577 A CN201811558577 A CN 201811558577A CN 109613412 A CN109613412 A CN 109613412A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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Abstract
The present invention provides a kind of method of STDF detection data of analysis in real time, comprising: real time data acquisition step and real-time analytical procedure, real time data acquisition step are acquired and are packaged to STDF with fixed frequency.Real-time analytical procedure carries out dismantling merging according to rule to the data packet received, obtains the partial data of single for analysis.The method of real-time analysis STDF detection data of the invention, analyzes STDF file in real time, and to help in time the exception in quickly discovery test process, production loss is preferably minimized.
Description
Technical field
The present invention relates to a kind of methods of STDF detection data of analysis in real time, belong to semiconductor test field.
Background technique
Industry is tested in semiconductor CP, tester table test result is mostly with STDF (Standard Test Data Format) format guarantor
It deposits.After the completion of existing system is all On-Wafer Measurement, STDF file import system is analyzed, this analysis means are too stagnant
Afterwards, the result of analysis, which can only test subsequent wafer, plays the role of one with reference to correction, and because next wafer
It cannot also be analyzed in real time in test process, lead to whether calibration accurately can not also be verified in time.
Summary of the invention
The purpose of the present invention is to provide a kind of methods of STDF detection data of analysis in real time, divide in real time STDF file
Analysis quickly finds the exception in test process in time, production loss is preferably minimized.
Present invention employs following technical solutions:
A kind of method of real-time analysis STDF detection data characterized by comprising
Real time data acquisition step and real-time analytical procedure,
Real time data acquisition step is as follows:
Whether step 1: monitoring has new STDF file to generate；
Step 2: check whether the increased size of file reaches the setting of single acquisition size of data according to fixed frequency；
Step 3: it if STDF file growth >=single acquisition size of data N, intercepts the STDF file of this N length, and presses
Format predetermined be packaged into data packet transmission, the Message Index of data packet on the basis of the original add up 1；
Step 4: the end position of record current file interception records current Message Index；
Step 5: repeating step 2 to step 4,
Step 6: step 1 is repeated.
Real-time analytical procedure is as follows:
Step 7: after receiving new STDF data packet, unpacking according to format predetermined in step 3,
Whether step 8: it is complete and continuous to verify the data that receive,
Step 9: initially setting up 2 byte queues, and one is used to deposit Header, and length 4 is named as
HeaderQueue；One is used to store the Record of remainder after one complete Record of composition, and length is not fixed, and names
For RecordBufferQueue, judge whether HeaderQueue has length for 4 Header, if so, entering step ten
Two, if it is not, ten are then entered step,
Step 10: the Header that intercepted length is 4 from data packet is added in HeaderQueue,
Step 11: marking the data coordinates intercepted in the packet, subsequently into step 9, is judged again
The step of Header that the whether existing length of HeaderQueue is 4,
Step 12: one STDF Header of initialization,
Whether effective step 13: judging Header data, if so, 14 are entered step, if it is not, entering step ten
Five,
Step 14: obtaining the remainder of STDF record: L (record), subsequently into step 10 six,
Step 15: losing invalid data,
Step 10 six: comparing L (record) and L (RecordBufferQueue)+[L (MSG)-L (header)], if knot
Fruit is greater than 17 then being entered step, if result is equal to 18 being entered step, if result is less than entering step ten
Nine,
Wherein, L (record) is the length that a complete record removes Header some residual in data packet,
L (RecordBufferQueue) is the length of record extra after parsing last time,
L (MSG) is the length for the data packet that single receives,
L (header) is the length of header,
Step 10 seven: result is that the data that this is received greater than explanation are imperfect, and length is inadequate, by L (MSG)-L
(Header) data-pushing of length is into RecordBufferQueue,
Step 10 eight, parsing wait until a complete STDF record,
Step 10 nine, result are less than then having combined current data, there are also extra data, then 1. by L (record)-L
(RecordBufferQueue) data of length and the data of original RecordBufferQueue are merged into a complete STDF
Record, 2. by the datacycle of remaining L (MSG)-L (header)-L (record)-L (RecordBufferQueue) length
It calculates.
Further, the method for real-time analysis STDF detection data of the invention, also has a feature in that in step 1,
The fixed frequency for acquiring STDF is 20Hz.
Further, the method for real-time analysis STDF detection data of the invention, also has a feature in that single acquisition
Size of data N is 10K.
Further, the method for real-time analysis STDF detection data of the invention, also has a feature in that in step 3,
The format of data packet is as follows:
Further, the method for real-time analysis STDF detection data of the invention, also has a feature in that in step 8,
Whether complete and continuous method is the data that verification receives: judging whether Message Index is equal to the last number received
Whether it is equal to setting length N according to Index+1 and STDF Message Length.
Advantageous effect of the invention
The method of real-time analysis STDF detection data of the invention, has the advantages that
1. real-time, verified, real-time row be can control in Millisecond.Probe card often tests a chip, full wafer circle
Brilliant statistical analysis, or even the statistic analysis result of entire production batch immediately just come out, and analyze software in real time and provide simultaneously
Regulation engine makes quickly alarm and shuts down response according to the customized rule of user.
2. the entire analytic process of this method does not need artificially to participate in.It from the real-time acquisition of STDF file, analyzes, alarm.
3. process provides a kind of quick STDF to disassemble, combined method.Ensure the interim text that tester table generates
Part can also parse information.
4. the test of the problem of reduction.Method minimum analytical unit before is wafer, this real-time method minimum analytical unit is
Chip by some chip, or has tested the segment chip of completion, can accurately analyze exception, stops test in time, than
As continuous chip failing increases severely suddenly；Chip failing shows regularity, etc. these exceptions in wafer can be real-time
Even if test process is found the problem.Even before testing begins, it can also be surveyed according to the information judgement provided in STDF file
Whether the program of examination, step, parameter are arranged accurately.
Detailed description of the invention
Fig. 1 is the integrated stand composition of real-time analyzer；
Fig. 2 is the flow chart of data acquisition；
Fig. 3 is the flow chart that real-time STDF data merge parsing.
Specific embodiment
Illustrate a specific embodiment of the invention below in conjunction with attached drawing.
As shown in Figure 1, entire real-time analyzer is made of 4 parts, and real-time STDF data dismantling transmission, real-time STDF number
It is parsed according to merging, in real time analysis statistics, abnormality processing regulation management.Real-time STDF data dismantling transmission:
Because the project of different test products, test is different, thus test machine one chip of every test need when
Between it is also different, the test result of generation is even more multifarious.So using fixed frequency when the dismantling of STDF data
The mode of acquisition, frequency acquisition are set in 20HZ, and single acquisition size of data is N, and the range of N measures setting according to the collected data
It within the scope of 10K-10M, can both guarantee collecting efficiency in this way, acquisition real-time is also ensured, defaults in present embodiment
It is set as 10K.The data definition transmitted every time is as follows:
Table 1 transmits data definition
As shown in Fig. 2, STDF data dismantling transmission process is as follows in real time:
Step S1: whether have new STDF file generate, if so, into rapid S2 step by step: if it is not, then entering step if monitoring
S3。
Step S2: the Message Index of STDF file is assigned a value of 0, index and is counted again.
Step S3: check whether the increased size of file reaches single acquisition size of data N, this embodiment party according to fixed frequency
10K is set as in formula, judge STDF file increase whether >=single acquisition size of data if the determination result is YES then enters step
S4, if it is not, then continuing to monitor；
Whether the growth of STDF file is judged >=single acquisition size of data, if so, S3 is entered step, if it is not, then returning to
Step S1；
Step S4: the file of this N length is intercepted, and is packaged into data packet by the format that table 1 defines and sends；
Step S5: the Message Index of data packet on the basis of the original add up 1；Record the knot of current file interception
Until beam, current Message Indexer is recorded；
It repeats the above steps.
Real-time STDF data merge parsing:
Multiple segment data merging is carried out to separate again.STDF agreement regulation, effectively record is by Header for each
(4bytes)+Record two parts composition.The STDF Message of single transmission may be the partial content of a record,
It is also likely to be to be made of multiple records.So must again be combined the STDF Message that each receives, could solve
Effective information is precipitated.Fig. 3 is the flow chart for merging STDF message:
2 byte queues are initially set up, one is used to deposit Header, and length 4 is named as HeaderQueue；One use
Store the Record of remainder after one complete Record of composition, length is not fixed, is named as
RecordBufferQueue。
Step S6: it after receiving new STDF data packet, unpacks according to format predetermined in table 1.What verification received
Whether data are complete and continuous: whether Message Index is equal to last data Index+1, the STDF Message received
Whether Length is equal to setting length N.
Step S7: judging whether HeaderQueue has length for 4 Header, if so, S10 is entered step, if
It is no, then enter step S8.
Step S8: intercepted length is the Header of 4-L (header) from data packet MSG, is added in HeaderQueue,
Wherein L (header) indicates the incomplete part header that last time data split out.
Step S9: marking the data coordinates intercepted in the packet, subsequently into step S7, is judged again
The step of Header that the whether existing length of HeaderQueue is 4.If Header length is equal to 4, S10 is entered step, just
One STDF Header of beginningization.
Step S10: one STDF Header of initialization,
Whether effective step S11: judging Header data, if so, S13 is entered step, if it is not, S12 is entered step,
The length and format of Header be it is fixed, and Type, SubType in the protocol each value be also have it is special
It is all effective that the definition of meaning, which is not any data,.If the data parsed no longer protocol definition range is only interior.This
Record is not handled, and is directly abandoned.
Step S12: invalid data is lost.
Step S13: obtaining the remainder of STDF record: L (record), subsequently into step S14,
Step S14: compare L (record) and L (RecordBufferQueue)+[L (MSG)-L (header)], if result
For greater than, then enter step S15, if result be equal to, enter step S16, if result be less than, enter step S17,
Wherein, L (record) is the length that a complete record removes Header some residual in data packet,
L (RecordBufferQueue) is the length of record extra after parsing last time,
L (MSG) is the length for the data packet that single receives,
L (header) is the length of header,
Step S15: result is that the data that this is received greater than explanation are imperfect, and length is inadequate, by L (MSG)-L
(Header) data-pushing of length is into RecordBufferQueue,
Step S16, parsing wait until a complete STDF record,
Step S17, result are less than then having combined current data, there are also extra data, then 1. by L (record)-L
(RecordBufferQueue) data of length and the data of original RecordBufferQueue are merged into a complete STDF
Record, 2. by the datacycle of remaining L (MSG)-L (header)-L (record)-L (RecordBufferQueue) length
It calculates.
Claims (5)
1. a kind of method of the STDF detection data of analysis in real time characterized by comprising
Real time data acquisition step and real-time analytical procedure,
Real time data acquisition step is as follows:
Whether step 1: monitoring has new STDF file to generate；
Step 2: check whether the increased size of file reaches the setting of single acquisition size of data according to fixed frequency；
Step 3: if STDF file growth >=single acquisition size of data N, the STDF file of this N length is intercepted, and by preparatory
The format of definition be packaged into data packet transmission, the Message Index of data packet on the basis of the original add up 1；
Step 4: the end position of record current file interception records current Message Index；
Step 5: repeating step 2 to step 4,
Step 6: step 1 is repeated.
Real-time analytical procedure is as follows:
Step 7: after receiving new STDF data packet, unpacking according to format predetermined in step 3,
Whether step 8: it is complete and continuous to verify the data that receive,
Step 9: initially setting up 2 byte queues, and one is used to deposit Header, and length 4 is named as HeaderQueue；One
A Record for being used to store remainder after one complete Record of composition, length is not fixed, is named as
RecordBufferQueue,
Judge that the whether existing length of HeaderQueue walks if so, entering step 12 if it is not, then entering for 4 Header
Rapid ten,
Step 10: the Header that intercepted length is 4 from data packet is added in HeaderQueue,
Step 11: marking the data coordinates intercepted in the packet, subsequently into step 9, is judged again
The step of Header that the whether existing length of HeaderQueue is 4,
Step 12: one STDF Header of initialization,
Whether effective step 13: judging Header data, if so, 14 are entered step, if it is not, 15 are entered step,
Step 14: obtaining the remainder of STDF record: L (record), subsequently into step 10 six,
Step 15: losing invalid data,
Step 10 six: compare L (record) and L (RecordBufferQueue)+[L (MSG)-L (header)], if result is
Be greater than, then enter step 17, if result be equal to, enter step 18, if result be less than, enter step 19,
Wherein, L (record) is the length for removing Header some residual in complete data packet, L (RecordBufferQueue)
It is the length of record extra after parsing last time, L (MSG) is the length for the data packet that single receives,
L (header) is the length of header,
Step 10 seven: result is that the data that this is received greater than explanation are imperfect, and length is inadequate, and L (MSG)-L (Header) is long
The data-pushing of degree into RecordBufferQueue,
Step 10 eight, parsing wait until a complete STDF record,
Step 10 nine, result are less than then having combined current data, there are also extra data, then 1. by L (record)-L
(RecordBufferQueue) data of length and the data of original RecordBufferQueue are merged into a complete STDF
Record, 2. by the datacycle of remaining L (MSG)-L (header)-L (record)-L (RecordBufferQueue) length
It calculates.
2. the method for the STDF detection data of analysis in real time as described in claim 1, it is characterised in that: in step 1, acquisition
The fixed frequency of STDF is 20Hz.
3. the method for the STDF detection data of analysis in real time as described in claim 1, it is characterised in that: the data of single acquisition are big
Small N is 10K.
4. the method for the STDF detection data of analysis in real time as described in claim 1, it is characterised in that: in step 3, data packet
Format be as follows:
5. the method for the STDF detection data of analysis in real time as described in claim 1, it is characterised in that: in step 8, verification is received
To data it is whether complete and continuous method is: judge whether Message Index is equal to the data Index that the last time receives
Whether+1 and STDF Message Length is equal to setting length N.
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| CN111639015A (en) * | 2020-05-22 | 2020-09-08 | 赵银波 | STDF (Standard template distribution function) rapid increment analysis method capable of adjusting analysis period and analysis point |
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| CN113468124A (en) * | 2021-09-02 | 2021-10-01 | 江苏泰治科技股份有限公司 | Method and equipment for rapidly and fully analyzing STDF (standard document format distribution) file |
| CN113960453A (en) * | 2021-11-02 | 2022-01-21 | 上海御渡半导体科技有限公司 | Test device and test method for rapidly generating STDF (standard test definition distribution) data |
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| CN114928605A (en) * | 2022-07-15 | 2022-08-19 | 江苏泰治科技股份有限公司 | Big data dynamic scheduling method and system for chip tester |
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| CN113468124A (en) * | 2021-09-02 | 2021-10-01 | 江苏泰治科技股份有限公司 | Method and equipment for rapidly and fully analyzing STDF (standard document format distribution) file |
| CN113468124B (en) * | 2021-09-02 | 2021-11-30 | 江苏泰治科技股份有限公司 | Method and equipment for rapidly and fully analyzing STDF (standard document format distribution) file |
| CN113960453A (en) * | 2021-11-02 | 2022-01-21 | 上海御渡半导体科技有限公司 | Test device and test method for rapidly generating STDF (standard test definition distribution) data |
| CN113960453B (en) * | 2021-11-02 | 2023-12-01 | 上海御渡半导体科技有限公司 | Test device and test method for rapidly generating STDF data |
| CN114928605A (en) * | 2022-07-15 | 2022-08-19 | 江苏泰治科技股份有限公司 | Big data dynamic scheduling method and system for chip tester |
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Address after: Room 318, No.28, Yuanwen Road, Minhang District, Shanghai 200000 Patentee after: Shanghai Corelli Software Co.,Ltd. Address before: Room 318, 28 Yuanwen Road, Minhang District, Shanghai 201100 Patentee before: SHANGHAI GLORYSOFT Co.,Ltd. |