CN109603329B - Reduction furnace tail gas treatment system - Google Patents
Reduction furnace tail gas treatment system Download PDFInfo
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- CN109603329B CN109603329B CN201910098752.9A CN201910098752A CN109603329B CN 109603329 B CN109603329 B CN 109603329B CN 201910098752 A CN201910098752 A CN 201910098752A CN 109603329 B CN109603329 B CN 109603329B
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- tail gas
- reducing furnace
- filter screen
- treatment system
- metal
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- 230000009467 reduction Effects 0.000 title description 21
- 239000007789 gas Substances 0.000 claims abstract description 122
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 54
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000001257 hydrogen Substances 0.000 claims abstract description 35
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 35
- 238000001914 filtration Methods 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 34
- 239000011863 silicon-based powder Substances 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 16
- 235000013312 flour Nutrition 0.000 claims description 15
- 229910021487 silica fume Inorganic materials 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 abstract description 25
- 239000000843 powder Substances 0.000 abstract description 13
- 229910021417 amorphous silicon Inorganic materials 0.000 description 16
- 239000002994 raw material Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 4
- 239000005052 trichlorosilane Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000002918 waste heat Substances 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910001566 austenite Inorganic materials 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/58—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in parallel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
- B01D46/2403—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies characterised by the physical shape or structure of the filtering element
- B01D46/2411—Filter cartridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/4218—Influencing the heat transfer which act passively, e.g. isolations, heat sinks, cooling ribs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/48—Removing dust other than cleaning filters, e.g. by using collecting trays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/88—Replacing filter elements
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Thermal Sciences (AREA)
- Silicon Compounds (AREA)
Abstract
The application discloses a reducing furnace tail gas treatment system, which comprises a filtering device arranged at a reducing furnace tail gas outlet, wherein the filtering device is sequentially connected with a tail gas cooler, a hydrogen preheater, a silica powder filter and a silica powder collector.
Description
Technical Field
The invention relates to the field of tail gas treatment of a reduction working section in the production process of polycrystalline silicon, in particular to a tail gas treatment system of a reduction furnace.
Background
At present, the main technology for producing polysilicon at home and abroad is the Siemens improvement method, and high-purity trichlorosilane and hydrogen are mixed according to a certain proportion and deposited in a reducing furnace to form polysilicon. The reaction temperature of the reduction process is about 1080-1100 ℃, and a great amount of heat and amorphous silicon powder are entrained in tail gas generated in the reduction furnace section.
In the conventional process production, the tail gas is recycled to preheat the raw materials, but when the tail gas is recycled, a large amount of amorphous silicon powder can enter the pipeline and the heat exchanger to cause pipeline blockage. In order to fully utilize the waste heat of the tail gas, the tail gas is cooled by a cooling coil, amorphous silicon powder contained in the tail gas is filtered by a tail gas filter before the tail gas is recovered, and the filtered tail gas enters a recovery system for treatment.
However, in the conveying process of the tail gas of the reduction furnace through the tail gas cooling coil pipe and the subsequent pipeline, if the temperature is too low, amorphous silicon powder is deposited on the wall of the coil pipe and the pipeline, and the cooling effect of the coil pipe is reduced after the time, so that the energy consumption of the system is increased.
Disclosure of Invention
In view of the above, the application provides a reducing furnace tail gas treatment system, which is characterized in that amorphous silicon powder in reducing furnace tail gas is filtered, waste heat is utilized step by step, and then residual silicon powder in reducing section tail gas is filtered, so that the waste heat of the tail gas can be utilized to the greatest extent, and meanwhile, the amorphous silicon powder in the tail gas is ensured to be deposited in pipelines and equipment as little as possible, the cleaning and maintenance period of the equipment is prolonged, and the energy consumption of the system is reduced.
In order to solve the technical problems, the technical scheme provided by the application is that the reducing furnace tail gas treatment system comprises a filtering device arranged at a reducing furnace tail gas outlet, wherein the filtering device is sequentially connected with a tail gas cooler, a hydrogen preheater, a silicon powder filter and a silicon powder collector.
Preferably, the metal filter screen comprises a metal filter screen positioned at an inner layer and a metal pipe sleeved on the periphery of the metal filter screen, an opening is formed in the top of the metal filter screen, the opening is communicated with a reducing furnace tail gas outlet, a circle of outwards folded fixing edges are arranged at the opening of the metal filter screen, and the fixing edges can be installed and fixed in the reducing furnace, so that the metal filter screen penetrates through the reducing furnace tail gas outlet.
Preferably, the metal tube has an upper end cross-sectional area greater than a lower end cross-sectional area.
Preferably, the first tube side of the exhaust gas cooler is connected with the filtering device, and the first shell side of the exhaust gas cooler is used for introducing a heat exchange medium.
Preferably, the first shell side of the exhaust gas cooler is divided into a plurality of cavities, the cavities are connected with an electric control switching valve, a first temperature detection device is arranged at the outlet of the first tube side of the exhaust gas cooler and connected with the electric control switching valve, the temperature detection device is used for detecting the exhaust gas temperature control electric control switching valve at the outlet of the first tube side of the exhaust gas cooler, and the number of the cavities participating in heat exchange in the shell side is adjusted to adjust heat exchange efficiency.
Preferably, the second tube side of the hydrogen preheater is connected with the first tube side of the tail gas cooler, and the second shell side of the hydrogen preheater is used for introducing hydrogen.
Preferably, a second temperature detection device is arranged at the outlet of the second tube side of the hydrogen preheater, a flow control device is arranged at the inlet of the second shell side of the hydrogen preheater, and the second temperature detection device is electrically connected with the flow control device and is used for adjusting the flow of hydrogen according to the temperature of tail gas at the outlet of the second tube side.
Preferably, a plurality of filter elements are distributed in the silica powder filter along the vertical direction, and the filter elements are ceramic filter elements or silicon nitride filter elements.
Preferably, a buffer cavity is arranged on the pipeline between the silica powder filter and the silica powder collector, and the cross-sectional area of the buffer cavity is larger than that of the pipeline.
Compared with the prior art, the application has the following detailed description:
The application discloses a reducing furnace tail gas treatment system, wherein the tail gas is subjected to preliminary filtration by a filtering device and then subjected to heat exchange, so that the blockage caused by excessive amorphous silicon powder in the tail gas entering a pipeline can be effectively prevented, meanwhile, the filtering device is arranged at a tail gas outlet of the reducing furnace, the heat waste caused by filtering the silicon powder can be reduced to the greatest extent, the heat is exchanged after the filtration, and the full utilization of the heat of the tail gas is ensured.
The upper end cross-sectional area of the metal pipe is larger than the lower end cross-sectional area, the diameter of the upper end of the metal pipe is larger, the flow rate can be increased by increasing the diameter of the tail gas outlet of the reduction furnace, the effect of reducing the section of the switching pipe is achieved, the reduced section of the cross-sectional area of the metal pipe can enable amorphous silicon powder entering between the upper end of the metal pipe and the metal filter screen to be accumulated in a reducing area, excessive amorphous silicon powder is prevented from entering a pipeline through a filter device, and the effect of secondary filtration is achieved.
The electric control switching valve adjusts the quantity of the cavities participating in heat exchange in the first shell pass according to the temperature of the sent tail gas, and then adjusts the ratio of the first tube pass to the area of the cavities participating in heat exchange, so that the heat exchange efficiency is improved, the adhesion and deposition of amorphous silicon powder in the tail gas cooler caused by the reduction of the excessive temperature of the heat exchange of the tail gas are avoided, meanwhile, the actual flow of heat exchange medium in the first shell pass of the tail gas cooler is not reduced due to the adjustment of the heat exchange efficiency, and the actual production requirement of a reducing furnace can be fully met.
The second temperature detection device detects the temperature of the tail gas at the outlet of the second tube side of the hydrogen preheater, and adjusts the flow of hydrogen introduced into the second shell side of the hydrogen preheater according to the temperature of the tail gas. The hydrogen can be mixed with trichlorosilane in the mixed gas after being preheated and then sent into the reducing furnace, so that the fluctuation and change of the flow rate can not influence the requirement of the raw material gas of the reducing furnace.
The ceramic filter element or the silicon nitride filter element can effectively avoid the attachment or deposition of silica powder on the filter element of the silica powder filter.
The silicon powder is buffered in the buffer cavity, so that the silicon powder can be prevented from flowing back into the silicon powder filter due to tiny silicon powder caused by impact, the silicon powder can be further prevented from being discharged along with tail gas in the silicon powder filter, and the effect of filtering and purifying the tail gas is improved.
Drawings
FIG. 1 is a schematic diagram of a system of the present invention;
Fig. 2 is a schematic structural view of a filtering device 1 according to the present invention.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.
As shown in the figure, the reducing furnace tail gas treatment system comprises a filtering device 1, wherein the filtering device 1 is arranged at a reducing furnace tail gas outlet 6, and tail gas is filtered by the filtering device 1 and sequentially enters a tail gas cooler 2, a hydrogen preheater 3, a silicon powder filter 4 and a silicon powder collector 5; the tail gas is preheated through the hydrogen preheater 3 after exchanging heat with the heat exchange medium in the tail gas cooler 2, and the heat exchange area of the tail gas cooler 2 and the hydrogen flow introduced into the hydrogen preheater 3 are adjusted to ensure that the temperature is proper when the tail gas is fed into the silicon powder filter 4 and prevent amorphous silicon powder mixed in the tail gas from being deposited on the pipe wall of a pipeline prematurely. The silica fume filter 4 further filters the residual amorphous silica fume in the tail gas, the tail gas from which the solid particles are removed is sent to the silica fume filter 4 for separation and treatment, and the silica fume obtained by the silica fume filter 4 is sent to the silica fume collector 5 for storage.
Specifically, the filtering device 1 in the application comprises a metal filter screen 11 positioned at an inner layer and a metal pipe 12 sleeved at the periphery of the metal filter screen 11, an opening is arranged at the top of the metal filter screen 11 and communicated with the tail gas outlet 6 of the reduction furnace, a circle of fixing edges 13 which are turned outwards are arranged at the opening of the metal filter screen 11, and the fixing edges 13 are fixedly arranged in the reduction furnace so that the metal filter screen 11 passes through the tail gas outlet 6 of the reduction furnace.
The heavy metal filter screen 11 is preferably a cylindrical metal filter screen 11 with a sealed bottom, the metal filter screen 11 is made of austenite, and when the filtering effect of the metal filter screen 11 is reduced and the flow speed of tail gas is affected, the metal filter screen 11 can be disassembled, and the metal filter screen 11 can be cleaned and then returned.
The upper end cross-sectional area of the metal pipe 12 is larger than the lower end cross-sectional area, the gap between the upper end of the metal pipe 12 and the metal filter screen 11 is larger, the flux of the metal pipe 12 can be increased, the pipe diameter of a pipeline connected with the tail gas outlet 6 of the reduction furnace is not required to be changed, the diameter of the tail gas outlet 6 of the reduction furnace is increased, the flow rate is increased, the effect of a reducing switching pipe section is achieved, in addition, as the flow rate of tail gas just entering the metal filter screen 11 is larger, fine amorphous silicon powder attached to the metal filter screen 11 is easy to receive the impact of tail gas and enter the gap between the metal pipe 12 and the metal filter screen 11, and therefore, the cross-sectional area of the metal pipe 12 is reduced, amorphous silicon powder entering the upper end of the metal pipe 12 and the metal filter screen 11 is accumulated in the reducing area, and excessive amorphous silicon powder is prevented from entering the pipeline through the filter device 1, so that the pipeline is blocked.
The first tube side 21 of the tail gas cooler 2 is connected with the filtering device 1, and the filtered tail gas exchanges heat with a heat exchange medium introduced by the first shell side 22 through the tail gas cooler 2. When the raw material gas is used as the raw material gas, the heat of the tail gas can be fully absorbed through heat exchange with the tail gas, so that the raw material gas is preheated and heated before being sent into a reduction furnace, the energy consumed for heating the raw material gas is saved, and the production cost is saved.
The utility model discloses a high-efficiency heat exchange furnace, including tail gas cooler 2, first shell side 22 of tail gas cooler 2 is divided into a plurality of cavity 23, the cavity 23 is with the even segmentation of tail gas cooler 2 into a plurality of space, an automatically controlled diverter valve 24 is all connected to the entry of cavity 23, the exit of the first tube side 21 of tail gas cooler 2 is provided with first temperature detection device 25, first temperature detection device 25 connects automatically controlled diverter valve 24, first temperature detection device 25 is used for detecting the automatically controlled diverter valve 24 of tail gas temperature control of the exit of the first tube side 21 of tail gas cooler 2, adjusts the quantity of the cavity 23 that participates in the heat exchange in the first shell side 22, and when the quantity of participating in the heat exchange cavity 23 changes, the ratio of first tube side 21 and the cavity 23 area that participates in the heat exchange has changed, realizes the linkage adjustment of heat exchange efficiency, avoids tail gas to lead to the attachment and deposit of amorphous silica flour in the tail gas cooler 2 because the excessive temperature reduction of heat exchange, can not reduce the actual flow 22 of the first shell side heat exchange medium of tail gas cooler 2 because of the adjustment of heat exchange efficiency, when the tail gas cooler is used for detecting the temperature reduction of the actual flow, can not lead to the reduction of the actual flow of the heat exchange gas, can not lead to the reduction of the actual flow of the raw materials, can not be guaranteed because the reduction of the actual flow is effective, can be reduced, when the reduction of the raw materials can not be guaranteed, and the raw materials can be reduced, can effectively, and the raw materials can be reduced, and the raw materials can not be reduced.
The second tube side 31 of the hydrogen preheater 3 is connected with the first tube side 21 of the tail gas cooler 2, the tail gas subjected to heat exchange and temperature reduction by the tail gas cooler 2 is sent to the hydrogen preheater 3, hydrogen in the second shell side 32 of the hydrogen preheater 3 is preheated, the hydrogen can be mixed with trichlorosilane to form raw material gas after being preheated, the raw material gas is sent to the tail gas cooler 2 for gradual preheating, and heat carried in the tail gas is fully utilized.
In conclusion, the system can effectively avoid the temperature drop of tail gas caused by excessive heat exchange, further avoid the adhesion of amorphous silicon powder on subsequent equipment and pipelines, avoid the blockage caused by the adhesion of amorphous silicon powder, reduce the heat exchange efficiency and reduce the investment cost and the operation cost.
The inlet of the second shell side 32 of the hydrogen preheater 3 is provided with a flow control device 34, the outlet of the second tube side 31 of the hydrogen preheater 3 is provided with a second temperature detection device 33, the second temperature detection device 33 is electrically connected with the flow control device 34, the second temperature detection device 33 detects the temperature of the tail gas at the outlet of the second tube side 31 of the hydrogen preheater 3, and the flow of the hydrogen introduced by the second shell side 32 of the hydrogen preheater 3 is regulated according to the temperature of the tail gas. The hydrogen can be mixed with trichlorosilane in the mixed gas after being preheated and then sent into the reducing furnace, so that the fluctuation and change of the flow rate can not influence the requirement of the raw material gas of the reducing furnace.
The silica powder filter 4 is internally provided with a plurality of filter elements 41 which are arranged along the vertical direction, the filter elements 41 are hollow columnar ceramic filter elements or hollow silicon nitride filter elements, and the silica powder filter 4 is used for filtering fine silica powder mixed in tail gas. The ceramic filter element or the silicon nitride filter element can effectively avoid the adhesion or deposition of silica powder on the filter element 41 of the silica powder filter 4, and ensure the filtration efficiency of the silica powder filter 4. The bottom of the silicon powder filter 4 is connected with a silicon powder collector 5 through an electric control valve 42.
Be provided with a buffer chamber 7 on the pipeline between silica flour collector 5 and the silica flour filter 4, when the silica flour that piles up in the silica flour filter 4 need send into silica flour collector 5, the silica flour is buffering in buffer chamber 7 can avoid the silica flour to lead to tiny silica flour to flow backward back in the silica flour filter 4 because of striking, can further prevent that the silica flour from following the tail gas discharge in the silica flour filter 4, guarantees the filter effect of silica flour filter 4.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that the above-mentioned preferred embodiment should not be construed as limiting the invention, and the scope of the invention should be defined by the appended claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.
Claims (7)
1. The reducing furnace tail gas treatment system comprises a filtering device (1) arranged at a reducing furnace tail gas outlet (6), wherein the filtering device (1) is sequentially connected with a tail gas cooler (2), a hydrogen preheater (3), a silicon powder filter (4) and a silicon powder collector (5);
The filtering device (1) comprises a metal filter screen (11) positioned at an inner layer and a metal pipe (12) sleeved on the periphery of the metal filter screen (11), an opening is formed in the top of the metal filter screen (11), the opening is communicated with a reducing furnace tail gas outlet (6), a circle of outwards turned fixed edges (13) are arranged in the opening of the metal filter screen (11), the fixed edges (13) are installed and fixed in the reducing furnace, the metal filter screen (11) penetrates through the reducing furnace tail gas outlet (6), and the metal filter screen (11) is a columnar metal filter screen with the bottom sealed;
the upper end cross-sectional area of metal pipe (12) is greater than the lower extreme cross-sectional area, and the clearance between metal pipe (12) upper end and metal filter screen (11) is great, metal pipe (12) cross-sectional area reduces can make the amorphous silica flour that gets into between metal pipe (12) upper end and metal filter screen (11) pile up in reducing area, prevents excessive amorphous silica flour from getting into the pipeline through filter equipment (1).
2. A reducing furnace off-gas treatment system according to claim 1, characterized in that the first tube side (21) of the off-gas cooler (2) is connected to the filter device (1), and that the first shell side (22) of the off-gas cooler (2) is adapted to be fed with a heat exchange medium.
3. The reducing furnace tail gas treatment system according to claim 2, wherein the first shell side (22) of the tail gas cooler (2) is divided into a plurality of cavities (23), the cavities (23) are connected with an electric control switching valve (24), a first temperature detection device (25) is arranged at the outlet of the first tube side (21) of the tail gas cooler (2), the first temperature detection device (25) is connected with the electric control switching valve (24), the first temperature detection device (25) is used for detecting the tail gas temperature at the outlet of the first tube side (21) of the tail gas cooler (2), controlling the electric control switching valve (24) and adjusting the quantity of the cavities (23) with internal parameters of the first shell side (22) and heat exchange.
4. A reducing furnace off-gas treatment system according to claim 1, characterized in that the second tube side (31) of the hydrogen preheater (3) is connected to the first tube side (21) of the off-gas cooler (2), and the second shell side (32) of the hydrogen preheater (3) is adapted to be fed with hydrogen.
5. The reducing furnace exhaust gas treatment system according to claim 4, wherein a second temperature detection device (33) is arranged at the outlet of the second tube side (31) of the hydrogen preheater (3), a flow control device (34) is arranged at the inlet of the second shell side (32) of the hydrogen preheater (3), and the second temperature detection device (33) is electrically connected with the flow control device (34) and is used for adjusting the flow of hydrogen according to the exhaust gas temperature at the outlet of the second tube side (31).
6. The reducing furnace tail gas treatment system according to claim 1, wherein a plurality of filter elements (41) are distributed in the silicon powder filter (4) along the vertical direction, and the filter elements (41) are ceramic filter elements.
7. A reducing furnace off-gas treatment system according to claim 1, characterized in that a buffer chamber (7) is provided in the conduit between the silica fume filter (4) and the silica fume collector (5), the buffer chamber (7) having a cross-sectional area larger than the cross-sectional area of the conduit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910098752.9A CN109603329B (en) | 2019-01-31 | 2019-01-31 | Reduction furnace tail gas treatment system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910098752.9A CN109603329B (en) | 2019-01-31 | 2019-01-31 | Reduction furnace tail gas treatment system |
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| CN109603329A CN109603329A (en) | 2019-04-12 |
| CN109603329B true CN109603329B (en) | 2024-07-12 |
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| CN112110633B (en) * | 2020-09-30 | 2023-01-13 | 湖北理工学院 | Dryer system with tail gas treatment system and use method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201746334U (en) * | 2010-07-15 | 2011-02-16 | 上海森松新能源设备有限公司 | Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus |
| CN103466629A (en) * | 2013-09-06 | 2013-12-25 | 上海森松环境技术工程有限公司 | Temperature control and energy saving system and process for polycrystalline silicon reduction furnaces |
| CN103608201A (en) * | 2011-06-23 | 2014-02-26 | 丰田自动车株式会社 | Vehicle |
| CN209576024U (en) * | 2019-01-31 | 2019-11-05 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0121375D0 (en) * | 2001-09-04 | 2001-10-24 | Ashe Morris Ltd | Temperature control systems |
| CN102730695B (en) * | 2012-06-19 | 2014-12-24 | 内蒙古盾安光伏科技有限公司 | Heat recovery and utilization method and system in polysilicon recovery process, and polysilicon recovery process using method and system |
| CN204672053U (en) * | 2015-06-08 | 2015-09-30 | 新特能源股份有限公司 | A kind of silica flour filter |
| CN205045831U (en) * | 2015-10-16 | 2016-02-24 | 武汉东立光伏电子有限公司 | Prepare device of bar -shaped polycrystalline silicon |
| CN107352545A (en) * | 2016-05-09 | 2017-11-17 | 新特能源股份有限公司 | Using the method and polycrystalline silicon reduction system of polycrystalline silicon reduction system production polysilicon |
| CN106996576A (en) * | 2017-05-19 | 2017-08-01 | 青岛诚信环保科技有限公司 | A kind of novel energy-conserving heater |
-
2019
- 2019-01-31 CN CN201910098752.9A patent/CN109603329B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201746334U (en) * | 2010-07-15 | 2011-02-16 | 上海森松新能源设备有限公司 | Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus |
| CN103608201A (en) * | 2011-06-23 | 2014-02-26 | 丰田自动车株式会社 | Vehicle |
| CN103466629A (en) * | 2013-09-06 | 2013-12-25 | 上海森松环境技术工程有限公司 | Temperature control and energy saving system and process for polycrystalline silicon reduction furnaces |
| CN209576024U (en) * | 2019-01-31 | 2019-11-05 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
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| CN109603329A (en) | 2019-04-12 |
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