CN209576024U - A kind of reduction tail gas treatment system - Google Patents
A kind of reduction tail gas treatment system Download PDFInfo
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- CN209576024U CN209576024U CN201920186520.4U CN201920186520U CN209576024U CN 209576024 U CN209576024 U CN 209576024U CN 201920186520 U CN201920186520 U CN 201920186520U CN 209576024 U CN209576024 U CN 209576024U
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- tail gas
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Abstract
The utility model discloses a kind of reduction tail gas treatment system, filter device including reduction furnace offgas outlet is arranged in, the filter device is connected with exhaust gas cooler in turn, hydrogen preheater, silicon powder filter and silicon powder collector, reduction tail gas treatment system described herein can first to after the unformed silicon powder filtering in reduction furnace exhaust gas step by step using refiltering remaining silicon powder in reduction workshop section's tail gas after waste heat, the waste heat of tail gas can utmostly be utilized, guarantee that the unformed silicon powder in tail gas is few as far as possible simultaneously to be deposited in pipeline and equipment, extend equipment and cleans the time between overhauls(TBO), reduce system energy consumption.
Description
Technical field
The utility model relates to workshop section's the field of tail gas treatment, in particular to a kind of reduction furnace are restored in polysilicon production process
Exhaust treatment system.
Background technique
Currently, the main technique technology of production polysilicon is " Siemens's improved method ", high-purity trichlorosilane and hydrogen both at home and abroad
After gas is mixed in a certain ratio, deposition forms polysilicon in reduction furnace.The reaction temperature of reducing process is taken the photograph in 1080- 1100
Family name's degree or so restores the tail gas generated in furnace section and has carried a large amount of heat and unformed silicon powder secretly.
In conventional art production process, tail gas preheats raw material by recycling, but to tail gas into
Row, which recycles, to be made, and a large amount of unformed silicon powder can enter in pipeline and heat exchanger, causes line clogging.Traditional reduction furnace
Vent gas treatment mode in order to make full use of waste heat from tail gas, by tail gas first pass through cooling coil it is cooling after, into before tail gas recycle
The unformed silicon powder contained in tail gas is filtered down by exhaust gas filter, filtered tail gas enters recovery system processing.
But furnace exhaust gas is restored in the transmission process of tail gas cooling coil and subsequent pipeline, if temperature is too low to be led
It causes unformed silicon powder to deposit in the tube wall of coil pipe and pipeline, will lead to the decline of coil pipe cooling effect over time, increase system energy
Consumption.
Utility model content
In view of this, the application provides a kind of reduction tail gas treatment system, first to the unformed silicon in reduction furnace exhaust gas
The remaining of tail gas can be utmostly utilized using silicon powder remaining in reduction workshop section's tail gas is refiltered after waste heat step by step after powder filtering
Heat, while guaranteeing that the unformed silicon powder in tail gas is few as far as possible and being deposited in pipeline and equipment, extend equipment and clean the time between overhauls(TBO),
Reduce system energy consumption.
In order to solve the above technical problems, technical solution provided by the utility model is in view of this, the application provides one kind
Tail gas treatment system, the filter device including reduction furnace offgas outlet is arranged in are restored, the filter device is connected in turn
Exhaust gas cooler, hydrogen preheater, silicon powder filter and silicon powder collector.
Preferably, including being located at the metal screen of internal layer and being sleeved on the metal tube of metal screen periphery, the metal filter
Opening is provided at the top of net, the opening and reduction furnace offgas outlet connection, the opening of the metal screen are provided with a circle
The fixed edge turned down outward, fixed edge can be fixed in reduction furnace, and metal screen is made to pass through reduction furnace offgas outlet.
Preferably, the upper end area of section of the metal tube is greater than lower end area of section.
Preferably, the first tube side connection filter device of the exhaust gas cooler, the first of the exhaust gas cooler
Shell side is for being passed through heat exchange medium.
Preferably, the first shell side segmentation of the exhaust gas cooler has several cavitys, and it is automatically controlled that the cavity is connected with one
Switching valve, the exit of the first tube side of the exhaust gas cooler are provided with the first temperature-detecting device, the first temperature inspection
It surveys device and connects the automatically controlled switching valve, the temperature-detecting device is used to detect the exit of the first tube side of exhaust gas cooler
Exhaust temperature control automatically controlled switching valve, the number of cavities that heat exchange is participated in adjustment shell side adjusts heat exchange efficiency.
Preferably, the second tube side of the hydrogen preheater connects the first tube side of the exhaust gas cooler, the hydrogen
Second shell side of preheater is for being passed through hydrogen.
Preferably, the outlet of the second tube side of the hydrogen preheater is provided with second temperature detection device, the hydrogen
The inlet of second shell side of preheater is provided with volume control device, and the second temperature detection device is electrically connected the flow
Control device adjusts the flow of hydrogen for the exhaust temperature according to the exit of the second tube side.
Preferably, be distributed with multiple filter cores in the silicon powder filter along the vertical direction, the filter core be ceramic element or
Silicon nitride filter core.
Preferably, it is provided with a cushion chamber on the pipeline between the silicon powder filter and the silicon powder collector, it is described
The area of section of cushion chamber is greater than the area of section of the pipeline.
Compared with prior art, detailed description are as follows by the application:
This application discloses a kind of reduction tail gas treatment system, tail gas carries out again after first passing through filter device primary filtration
Heat exchange, can be effectively prevented excessive unformed silicon powder in tail gas and enters in pipeline and result in blockage, while go out in reduction furnace exhaust gas
Filter device is just arranged in mouth, can utmostly reduce heat waste caused by filtering silicon powder, exchange heat again after first filtering, guarantor
Making full use of for tail gas heat quantity is demonstrate,proved.
The upper end area of section of metal tube is greater than lower end area of section, and metal tube upper end diameter is larger, can increase also
Former furnace exhaust gas outlet diameter also corresponds to play the role of variable diameter switching pipeline section, metal tube area of section while increasing flow
Reducing part can make the unformed silicon powder entered between metal tube upper end and metal screen be deposited in variable diameter region, prevent excess
Unformed silicon powder pipeline is entered by filter device, play the role of second of filtering.
Automatically controlled switching valve adjusts the quantity of the cavity of the first shell side internal reference and heat exchange according to the exhaust temperature of submitting, in turn
It adjusts the first tube side and participates in the cavity area ratio of heat exchange, realize the whole of heat exchange efficiency, avoid tail gas excessive because of heat exchange
Temperature reduces the attachment and deposition for leading to unformed silicon powder in exhaust gas cooler, while will not drop because of the adjustment of heat exchanger effectiveness
The actual flow of first shell side internal thermal exchange media of low exhaust gas cooler, can sufficiently meet the need of reduction furnace actual production
It asks.
The second temperature detection device detects the temperature of the second tube side exit tail gas of the hydrogen preheater, and root
The hydrogen flowing quantity that the second shell side of hydrogen preheater is passed through is adjusted according to the temperature of tail gas.Hydrogen can after preheat in gaseous mixture with
It is re-fed into reduction furnace after trichlorosilane mixing, therefore, the fluctuating change of flow will not influence the demand of reduction furnace unstrpped gas
It uses.
The ceramic element or the silicon nitride filter core can effectively avoid silicon powder attached on the filter core of silicon powder filter
Or deposition.
Silicon powder buffered in cushion chamber can to avoid silicon powder because impact causes tiny silicon powder to flow backward back in silicon powder filter,
It can further prevent silicon powder in silicon powder filter as tail gas is discharged, improve the effect of tail gas filtering purification.
Detailed description of the invention
Fig. 1 is the system schematic of the utility model；
Fig. 2 is the structural schematic diagram of filter device 1 in the utility model.
Specific embodiment
In order to make those skilled in the art more fully understand the technical solution of the utility model, with reference to the accompanying drawing and have
The utility model is described in further detail for body embodiment.
As shown, a kind of reduction tail gas treatment system, including filter device 1, filter device 1 are arranged in reduction furnace tail
Gas outlet 6, tail gas sequentially enter exhaust gas cooler 2, hydrogen preheater 3, silicon powder filter 4 and silicon after the filtering of filter device 1
Powder collector 5；Tail gas again carries out in advance hydrogen by hydrogen preheater 3 with after heat exchange medium heat exchange in exhaust gas cooler 2
Heat guarantees that tail gas is sent by adjusting the hydrogen flowing quantity being passed through in 2 heat exchange area of exhaust gas cooler and hydrogen preheater 3
Proper temperature when silicon powder filter 4 prevents on the premature tube wall for being deposited on pipeline of the unformed silicon powder being mingled in tail gas.Silicon powder
Filter 4 further filtering tail gas in remaining unformed silicon powder, remove solid particulate matter tail gas be sent into silicon powder filter 4 into
Row separation and processing, the silicon powder that silicon powder filter 4 obtains are sent into silicon powder collector 5 and are stored.
Specifically, filter device 1 described herein includes being located at the metal screen 11 of internal layer and being sleeved on metal screen
The metal tube 12 of 11 peripheries, the top of the metal screen 11 are provided with opening, the opening and reduction furnace offgas outlet 6
Logical, the opening of the metal screen 11 is provided with the fixed edge 13 that a circle turns down outward, and fixed edge 13 is fixed on reduction furnace
It is interior, so that metal screen 11 is passed through reduction furnace offgas outlet 6.
The metal screen 11 of the application weight is preferably the cylindrical metal strainer 11 of bottom seal, and the metal screen 11 is by Ovshinsky
Body is just made, and when the decline of the filter effect of metal screen 11 influences tail gas flow velocity, can dismantle metal screen 11 and filter to metal
Net 11 reinstalls after cleaning.
The upper end area of section of the metal tube 12 is greater than lower end area of section, 12 upper end of metal tube and metal screen 11
Between gap it is larger, the pipeline for guaranteeing connection reduction furnace offgas outlet 6 while the flux increase of metal tube 12 can be made
Caliber increases without variation and also corresponds to play variable diameter switching pipeline section while 6 diameter of reduction furnace offgas outlet increases flow
Effect, further, since 11 flow velocity of metal screen is larger having just enter into for tail gas, the tiny nothing adhered on metal screen 11 is fixed
Type silicon powder is easy to receive tail gas impact into the gap between metal tube 12 and metal screen 11, therefore, 12 section face of metal tube
Product, which reduces, can make the unformed silicon powder entered between 12 upper end of metal tube and metal screen 11 be deposited in variable diameter region, prevent
The unformed silicon powder of amount enters pipeline by filter device 1, causes line clogging.
First tube side 21 of the exhaust gas cooler 2 connects the filter device 1, and the tail gas by filtering is cold by tail gas
But the heat exchange medium that device 2 and the first shell side 22 are passed through carries out heat exchange, and heat exchange medium described herein can be polycrystalline
The unstrpped gas that Si reduction workshop section uses, or water or air etc. other be used for tail gas carry out heat exchange other Jie
Matter.When for unstrpped gas, unstrpped gas can by with tail gas heat exchange, fully absorb the heat of tail gas, make unstrpped gas
The pre-heating temperature elevation before being sent into reduction furnace saves the energy consumed by heating unstrpped gas, saves production cost.
Segmentation has several cavitys 23 in first shell side 22 of the exhaust gas cooler 2, and cavity 23 is equal by exhaust gas cooler 2
Even to be divided into several spaces, the entrance of the cavity 23 is all connected with an automatically controlled switching valve 24, and the of the exhaust gas cooler 2
The exit of one tube side 21 is provided with the first temperature-detecting device 25, and first temperature-detecting device 25 connects described automatically controlled cut
Valve 24 is changed, first temperature-detecting device 25 is used to detect the tail gas temperature in the exit of the first tube side 21 of exhaust gas cooler 2
It spends and controls automatically controlled switching valve 24, the quantity of the cavity 23 of heat exchange is participated in the first shell side of adjustment 22, when participation heat exchange cavity
When 23 quantity variation, the first tube side 21 is changed with 23 area ratio of cavity for participating in heat exchange, realizes heat exchange efficiency
Linkage adjustment, avoid tail gas from leading in exhaust gas cooler 2 attachment of unformed silicon powder and heavy because of the reduction of heat exchange excess temperature
Product, while the reality of 22 internal thermal exchange media of the first shell side of exhaust gas cooler 2 will not be reduced because of the adjustment of heat exchanger effectiveness
Flow both can effectively adjust tail gas heat exchanger effectiveness, temperature is avoided to drop when exhaust gas cooler 2 is used for preheating material gas
It is low that unformed silicon powder is caused to adhere to, the flow of unstrpped gas can also be effectively ensured, will not cause because of heat exchanger effectiveness is adjusted
Raw material gas flow reduces, and is unable to satisfy the demand of reduction furnace actual production.
Second tube side 31 of hydrogen preheater 3 connects the first tube side 21 of the exhaust gas cooler 2, by exhaust gas cooler
Tail gas after 2 heat exchange coolings is sent into hydrogen preheater 3, and preheats to the hydrogen in the second shell side 32 of hydrogen preheater 3,
Hydrogen can be mixed to form unstrpped gas with trichlorosilane after preheat, and unstrpped gas is re-fed into exhaust gas cooler 2 and preheats step by step,
Make full use of the heat carried secretly in tail gas.
To sum up, this system can be avoided effectively because excessively heat exchange causes exhaust temperature to decline, and then avoid follow-up equipment
Adhere to silicon powder unformed on pipeline, avoids unformed silicon powder attachment from resulting in blockage and reduce heat exchange efficiency, reduce cost of investment
With operating cost.
The entrance of second shell side 32 of hydrogen preheater 3 is provided with volume control device 34, the hydrogen preheater 3
The outlet of second tube side 31 is provided with second temperature detection device 33, and the second temperature detection device 33 is electrically connected flow control dress
34 are set, the second temperature detection device 33 detects the temperature of the 31 exit tail gas of the second tube side of the hydrogen preheater 3,
And the hydrogen flowing quantity that 3 second shell side 32 of hydrogen preheater is passed through is adjusted according to the temperature of tail gas.Hydrogen can be after preheat mixed
It closes and is re-fed into reduction furnace after being mixed in gas with trichlorosilane, therefore, the fluctuating change of flow will not influence reduction furnace unstripped gas
The demand of body uses.
Multiple filter cores 41 placed along the vertical direction are provided in the silicon powder filter 4, filter core 41 is hollow column
Ceramic element or hollow silicon nitride filter core, the silicon powder filter 4 is for filtering the tiny silicon powder being mingled in tail gas.It is described
Ceramic element or the silicon nitride filter core can effectively avoid silicon powder from adhering to or deposit on the filter core 41 of silicon powder filter 4,
Guarantee the filter efficiency of silicon powder filter 4.The bottom of the silicon powder filter 4 is connected with silicon powder collection by motor-operated control valve 42
Device 5.
A cushion chamber 7 is provided on pipeline between the silicon powder collector 5 and silicon powder filter 4, when silicon powder filter 4
When the silicon powder of interior accumulation needs to be sent into silicon powder collector 5, silicon powder buffers in cushion chamber 7 to be caused carefully to avoid silicon powder because of impact
Small silicon powder flows backward back in silicon powder filter 4, can further prevent silicon powder in silicon powder filter 4 as tail gas is discharged, and protects
Demonstrate,prove the filter effect of silicon powder filter 4.
Above are merely preferred embodiments of the utility model, it is noted that above-mentioned preferred embodiment should not regard
For limitations of the present invention, the protection scope of the utility model should be defined by the scope defined by the claims..For
For those skilled in the art, without departing from the spirit and scope of the utility model, it can also make several
Improvements and modifications, these improvements and modifications also should be regarded as the protection scope of the utility model.
Claims (9)
1. a kind of reduction tail gas treatment system, which is characterized in that including the filter device in reduction furnace offgas outlet (6) is arranged
(1), the filter device (1) is connected with exhaust gas cooler (2), hydrogen preheater (3), silicon powder filter (4) and silicon powder in turn
Collector (5).
2. a kind of reduction tail gas treatment system according to claim 1, which is characterized in that the metal including being located at internal layer
Strainer (11) and the metal tube (12) for being sleeved on metal screen (11) periphery are provided with out at the top of the metal screen (11)
Mouthful, the opening and reduction furnace offgas outlet (6) connection, the opening of the metal screen (11) are provided with what a circle turned down outward
Fixed edge (13), fixed edge (13) can be fixed in reduction furnace, and metal screen (11) is made to pass through reduction furnace offgas outlet
(6)。
3. a kind of reduction tail gas treatment system according to claim 2, which is characterized in that the metal tube (12) it is upper
End section area is greater than lower end area of section.
4. a kind of reduction tail gas treatment system according to claim 1, which is characterized in that the exhaust gas cooler (2)
The first tube side (21) connect the filter device (1), the first shell side (22) of the exhaust gas cooler (2) is for being passed through hot friendship
Change medium.
5. a kind of reduction tail gas treatment system according to claim 4, which is characterized in that the exhaust gas cooler (2)
The first shell side (22) segmentation have several cavitys (23), the cavity (23) is connected with an automatically controlled switching valve (24), the tail
The exit of the first tube side (21) of Gas Cooler (2) is provided with the first temperature-detecting device (25), first temperature detection
Device (25) connects the automatically controlled switching valve (24), and first temperature-detecting device (25) is for detecting exhaust gas cooler (2)
The exhaust temperature in exit of the first tube side (21) control automatically controlled switching valve (24), participate in heat in adjustment the first shell side (22) and hand over
Cavity (23) the quantity adjustment heat exchange efficiency changed.
6. a kind of reduction tail gas treatment system according to claim 1, which is characterized in that the hydrogen preheater (3)
The second tube side (31) connect the first tube side (21) of the exhaust gas cooler (2), the second shell side of the hydrogen preheater (3)
(32) for being passed through hydrogen.
7. a kind of reduction tail gas treatment system according to claim 6, which is characterized in that the hydrogen preheater (3)
The outlet of the second tube side (31) be provided with second temperature detection device (33), the second shell side of the hydrogen preheater (3)
(32) inlet is provided with volume control device (34), and the second temperature detection device (33) is electrically connected the flow control
Device (34) is used to adjust the flow of hydrogen according to the exhaust temperature in the exit of the second tube side (31).
8. a kind of reduction tail gas treatment system according to claim 1, which is characterized in that the silicon powder filter (4)
It is inside distributed with along the vertical direction multiple filter cores (41), the filter core (41) is ceramic element or silicon nitride filter core.
9. a kind of reduction tail gas treatment system according to claim 1, which is characterized in that the silicon powder filter (4)
It is provided with a cushion chamber (7) on pipeline between the silicon powder collector (5), the area of section of the cushion chamber (7) is greater than
The area of section of the pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920186520.4U CN209576024U (en) | 2019-01-31 | 2019-01-31 | A kind of reduction tail gas treatment system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920186520.4U CN209576024U (en) | 2019-01-31 | 2019-01-31 | A kind of reduction tail gas treatment system |
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| Publication Number | Publication Date |
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| CN209576024U true CN209576024U (en) | 2019-11-05 |
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ID=68355177
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109603329A (en) * | 2019-01-31 | 2019-04-12 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
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2019
- 2019-01-31 CN CN201920186520.4U patent/CN209576024U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109603329A (en) * | 2019-01-31 | 2019-04-12 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
| CN109603329B (en) * | 2019-01-31 | 2024-07-12 | 内蒙古通威高纯晶硅有限公司 | Reduction furnace tail gas treatment system |
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