CN201746334U - Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus - Google Patents
Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus Download PDFInfo
- Publication number
- CN201746334U CN201746334U CN2010202588388U CN201020258838U CN201746334U CN 201746334 U CN201746334 U CN 201746334U CN 2010202588388 U CN2010202588388 U CN 2010202588388U CN 201020258838 U CN201020258838 U CN 201020258838U CN 201746334 U CN201746334 U CN 201746334U
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- China
- Prior art keywords
- cleaning apparatus
- tail gas
- reducing furnace
- dust removing
- furnace tail
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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Abstract
The utility model provides a polysilicon reducing furnace tail gas outlet structure with a dust removing apparatus, which comprises a gas inlet pipe, a three-way valve, a lower end connecting pipe and a blind plate that are connected in sequence; also comprises a horizontal connecting pipe, which is connected with a third port of the three-way valve; the dust removing apparatus which is arranged in a cavity body formed by connecting the gas inlet pipe, the three-way valve and the lower end connecting pipe in sequence. The dust removing apparatus and the cavity are arranged coaxially. The dust removing apparatus is a cylinder-shaped screening mesh, the lateral face of which is provided with screening holes. Compared with the previous structure, the utility model has positive and obvious effects. According to the utility model, the dust removing apparatus is arranged in the tail gas outlet pipe, silicon powders and silicon blocks are prevented from entering into subsequent apparatuses based on the filtrating and gravitational functions of the dust removing apparatus to enable the silicon powders and the silicon blocks to be stacked in the blind plate and the dust removing apparatus. the stacked silicon powders and silicon blocks can be cleaned up by dismounting the blind plate. The utility model ensures the unblocking of the reducing furnace tail gas pipe and the cleaning degree of the subsequent apparatus process gas, and greatly reduces the abrasive erosion on the subsequent apparatuses.
Description
Technical field
The utility model relates to Siemens process polycrystalline silicon reduction furnace device structure, particularly has the tail gas export structure of the polycrystalline silicon reducing furnace of cleaning apparatus.
Background technology
In recent years, domestic production of polysilicon technology high-speed development was produced polysilicon now and was adopted Siemens Method mostly.Utilize Siemens Method to produce polysilicon, reduction furnace is a nucleus equipment, generally needs to be provided with the tail gas outlet and will react back gas derivation reduction furnace on reduction furnace.In process of production, amorphous silica powder that portion gas reaction generates and misoperation are fallen excellent phenomenon and the silicon rod fragment that produces, can enter the tail gas outlet conduit.Enter not easy to clean of the silica flour of tail gas outlet conduit and silico briquette, silica flour after the accumulation and silico briquette can cause the pipeline ventilation not smooth, influences silicon rod and grow.And dust can be brought to follow-up equipment, and follow-up equipment is resulted in blockage and detrimentally affect such as abrasion.
The utility model content
The purpose of this utility model is to provide a kind of polycrystalline silicon reducing furnace tail gas export structure with cleaning apparatus, is used to solve reduction furnace tail gas outlet conduit because of the accumulation of silica flour and silico briquette and stops up and the problem of easy cleaning not.
For solving the problems of the technologies described above, the technical solution of the utility model is that polycrystalline silicon reducing furnace tail gas export structure comprises the inlet pipe, threeway, lower end pipe connecting, the blind plate that connect successively; Also comprise: horizontal connection tube is connected with the 3rd port of described threeway; Cleaning apparatus is arranged in the cavity that is in turn connected to form by described inlet pipe, described threeway and described lower end pipe connecting.Described cleaning apparatus and the coaxial setting of described cavity.The external diameter of described cleaning apparatus agrees with mutually with the internal diameter of described cavity.Described cleaning apparatus length longitudinally covers in the port that described horizontal connection tube is connected with described threeway at least fully.Described cleaning apparatus is cylindric screen cloth, and its side is provided with sieve aperture.The sectional area sum of described sieve aperture is greater than the sectional area sum of described inlet pipe.Described blind plate passes through down, and end flanges is connected with described lower end pipe connecting.Described cavity is vertically to be provided with.
The utility model is compared with existing structure, and its effect is actively with significant.The utility model is provided with cleaning apparatus in the tail gas export pipeline, utilize the filteration of cleaning apparatus and action of gravity to stop silica flour and silico briquette enters follow-up equipment, and it is deposited in blind plate and the cleaning apparatus.Can regularly silica flour and the silico briquette piled up be cleared up by the dismounting blind plate, and can take off cleaning apparatus and clean.The utility model has guaranteed the unimpeded of reduction furnace exhaust pipe, and the degree of cleaning of follow-up equipment process gas greatly reduce the abrasion of silica flour to follow-up equipment.
Description of drawings
Fig. 1 is the polycrystalline silicon reducing furnace tail gas export structure front section view of the utility model band cleaning apparatus.
Description of reference numerals in the polycrystalline silicon reducing furnace tail gas export structure accompanying drawing of the utility model band cleaning apparatus:
End flanges 30-stationary installation 40-lower end pipe connecting under the 10-blind plate 20-
50-threeway 60-cleaning apparatus 61-sieve aperture 70-inlet pipe
80-horizontal connection tube 90-horizontal flange 100-cavity
Embodiment
Be described in further details below in conjunction with the polycrystalline silicon reducing furnace tail gas export structure of accompanying drawing the utility model band cleaning apparatus.
As shown in Figure 1, the polycrystalline silicon reducing furnace tail gas export structure of the utility model band cleaning apparatus comprises: the inlet pipe 70 of Lian Jieing, threeway 50, lower end pipe connecting 40, blind plate 10 successively; Horizontal connection tube 80 is connected with the 3rd port of described threeway 50; Blind plate 10 is by end flanges 20 and stationary installation 30 are connected with lower end pipe connecting 40 down.
During works better, the tail gas that is carrying silica flour at first enters inlet pipe 70, enter the cleaning apparatus 60 that is positioned in threeway 50 and lower end pipe connecting 40 cavitys 100 when arriving threeway 50, under the filteration of the sieve aperture 61 of cleaning apparatus 60, overwhelming majority silica flour is stopped at cleaning apparatus 60 inwalls, and owing to action of gravity is fallen on the blind plate 10.Because the lower end of threeway 50 is sealed by blind plate 10, the filtering tail gas of process enters horizontal connection tube 80 and horizontal flange 90 from the horizontal ends outlet of threeway 50, and horizontal flange 90 is connected the tail gas device for transferring with follow-up pipeline.If because misoperation is when causing silico briquette to drop into inlet pipe 70, because the filteration and the action of gravity of the sieve aperture 61 of cleaning apparatus 60, silico briquette drops and is accumulated on the blind plate 10, and can not enter in the follow-up pipeline.Reach and can unclamp that stationary installation 30 is taken off blind plate 10 and cleaning apparatus 60 cleans after a certain amount of when being accumulated in silica flour on the blind plate 10 and silico briquette, can also be according to service condition routine cleaning blind plate 10 and cleaning apparatus 60.
Claims (8)
1. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus is characterized in that, comprising: the inlet pipe of Lian Jieing, threeway, lower end pipe connecting, blind plate successively; Also comprise horizontal connection tube, be connected with the 3rd port of described threeway; And cleaning apparatus, be arranged in the cavity that is in turn connected to form by described inlet pipe, described threeway and described lower end pipe connecting.
2. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 1 is characterized in that: described cleaning apparatus and the coaxial setting of described cavity.
3. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 2 is characterized in that: the external diameter of described cleaning apparatus agrees with mutually with the internal diameter of described cavity.
4. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 3 is characterized in that: described cleaning apparatus length longitudinally covers in the port that described horizontal connection tube is connected with described threeway at least fully.
5. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 1 is characterized in that: described cleaning apparatus is cylindric screen cloth, and its side is provided with sieve aperture.
6. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 5 is characterized in that: the sectional area sum of described sieve aperture is greater than the sectional area sum of described inlet pipe.
7. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 1 is characterized in that: end flanges was connected with described lower end pipe connecting under described blind plate passed through.
8. the polycrystalline silicon reducing furnace tail gas export structure of band cleaning apparatus according to claim 1 is characterized in that: described cavity is for vertically being provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202588388U CN201746334U (en) | 2010-07-15 | 2010-07-15 | Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202588388U CN201746334U (en) | 2010-07-15 | 2010-07-15 | Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201746334U true CN201746334U (en) | 2011-02-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202588388U Expired - Fee Related CN201746334U (en) | 2010-07-15 | 2010-07-15 | Polysilicon reducing furnace tail gas outlet structure with dust removing apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN201746334U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102231357A (en) * | 2011-05-12 | 2011-11-02 | 陕西建工集团设备安装工程有限公司 | Construction method for controlling cleanliness of electronic-grade multicrystal-silicon process pipe |
| CN102500176A (en) * | 2011-11-11 | 2012-06-20 | 南通申东冶金机械有限公司 | Online type oxygen filter |
| CN108726481A (en) * | 2017-04-13 | 2018-11-02 | 新特能源股份有限公司 | A kind of processing unit of polycrystalline silicon reduction exhaust |
| CN109097832A (en) * | 2018-09-25 | 2018-12-28 | 天通银厦新材料有限公司 | A kind of dedusting attemperator of sapphire finishing stove |
| CN109603329A (en) * | 2019-01-31 | 2019-04-12 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
| CN110013955A (en) * | 2018-01-09 | 2019-07-16 | 宝山钢铁股份有限公司 | It is a kind of for filtering the filter device of bulky grain sundries in pulvis |
| CN115318017A (en) * | 2022-07-28 | 2022-11-11 | 青海丽豪半导体材料有限公司 | TCS precooling reduction tail gas economizer |
-
2010
- 2010-07-15 CN CN2010202588388U patent/CN201746334U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102231357A (en) * | 2011-05-12 | 2011-11-02 | 陕西建工集团设备安装工程有限公司 | Construction method for controlling cleanliness of electronic-grade multicrystal-silicon process pipe |
| CN102231357B (en) * | 2011-05-12 | 2012-09-12 | 陕西建工集团设备安装工程有限公司 | Construction method for controlling cleanliness of electronic-grade multicrystal-silicon process pipe |
| CN102500176A (en) * | 2011-11-11 | 2012-06-20 | 南通申东冶金机械有限公司 | Online type oxygen filter |
| CN108726481A (en) * | 2017-04-13 | 2018-11-02 | 新特能源股份有限公司 | A kind of processing unit of polycrystalline silicon reduction exhaust |
| CN108726481B (en) * | 2017-04-13 | 2020-04-28 | 新特能源股份有限公司 | Treatment device for polycrystalline silicon reduction tail gas |
| CN110013955A (en) * | 2018-01-09 | 2019-07-16 | 宝山钢铁股份有限公司 | It is a kind of for filtering the filter device of bulky grain sundries in pulvis |
| CN109097832A (en) * | 2018-09-25 | 2018-12-28 | 天通银厦新材料有限公司 | A kind of dedusting attemperator of sapphire finishing stove |
| CN109603329A (en) * | 2019-01-31 | 2019-04-12 | 内蒙古通威高纯晶硅有限公司 | A kind of reduction tail gas treatment system |
| CN109603329B (en) * | 2019-01-31 | 2024-07-12 | 内蒙古通威高纯晶硅有限公司 | Reduction furnace tail gas treatment system |
| CN115318017A (en) * | 2022-07-28 | 2022-11-11 | 青海丽豪半导体材料有限公司 | TCS precooling reduction tail gas economizer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110216 Termination date: 20160715 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |