CN109597178A - Optical registration equipment and optical registration method - Google Patents
Optical registration equipment and optical registration method Download PDFInfo
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- CN109597178A CN109597178A CN201710916845.9A CN201710916845A CN109597178A CN 109597178 A CN109597178 A CN 109597178A CN 201710916845 A CN201710916845 A CN 201710916845A CN 109597178 A CN109597178 A CN 109597178A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
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Abstract
The invention discloses a kind of optical registration equipment and optical registration method.Optical registration equipment includes connecting piece, optical path induction element, first light source, second light source, the first focus control, optical viewfinder and image processor.Connecting piece and the first object link.Optical path induction element is engaged with connecting piece and is set between the first object and the second object.First light source and second light source are respectively arranged between the first object and optical path induction element and between the second object and optical path induction element.First focus control is engaged with connecting piece, optical path induction element, first light source and second light source.Optical viewfinder is set to the side of optical path induction element, to receive the first image of the first object transmitted via optical path induction element and the second image of the second object.Image processor is configured to receive and handles the first image and the second image.The present invention can promote the contraposition efficiency of two objects, promote product qualification rate, reduce research and development and volume production cost.
Description
Technical field
The invention relates to a kind of contraposition equipment and alignment methods, and in particular to a kind of optical registration equipment with
Optical registration method.
Background technique
With the fast development of manufacturing technology, various industrial machines are for precision, such as the contraposition of double objects or double component
The requirement of precision also greatly improves.The application of the technique of counterpoint of double objects is quite extensive, such as the male model of die forming machine and mother
The contraposition of mould, the engagement contraposition of semiconductor crystal wafer and the combination of flat-panel screens contraposition etc..
The contraposition of the male model and master mold of the mold of general molding machine is to rely on ruler of the machine operations personnel repetition than contacting piece
It is very little come space coordinate distance between adjustment male model and master mold.However, carrying out disposable mode transfer in this way takes about 4
Hour, it is very time-consuming, it is unfavorable for research and development and volume production.Moreover, the artificial prolonged mode transfer that repeats is also easy to produce human error, so make
Shorten at die life, product is not inconsistent customer specifications, void consumption wire rod, and manufacturing cost increases.Furthermore operator is for a long time in oil
Adjustment work is carried out under compression ring border can not only adsorb excessive oil gas, unhealthful, and will cause work fatigue, tend to have artificial safety
Problem.
Summary of the invention
Therefore, a purpose of the invention is exactly to provide a kind of optical registration equipment and optical registration method, utilizes light
Learn images capture technique, the horizontal reverse with optical paths induction elements such as single image-taking device combination triangular prisms, on single image projecting
To the respective image and characteristic point for obtaining two objects, operator can quickly carry out the contraposition of this two objects whereby.Therefore not only
The alignment operation time of two objects can substantially be shortened, contraposition efficiency is promoted, reduce artificial safety accident, can more reduce artificial mistake
Difference promotes product qualification rate, reduces research and development and volume production cost.
Above-mentioned purpose according to the present invention proposes that a kind of optical registration equipment is applicable in align the first object and the second object
Part.This optical registration equipment includes connecting piece, optical path induction element, first light source, second light source, the first focus control, optics
Image-taking device and image processor.Connecting piece and the first object link.Optical path induction element is engaged and is set to connecting piece
Between first object and the second object.First light source and second light source are engaged with connecting piece, and are respectively arranged on the first object and light
Between pass guiding element and between the second object and optical path induction element, to irradiate the first object and the second object.First adjusts
Coke installation is engaged with connecting piece, optical path induction element, first light source and second light source, wherein the first focus control is configured to
Adjust the distance between optical path induction element and the first object.Optical viewfinder is set to the side of optical path induction element, to connect
Receive the first image of the first object transmitted via the optical path induction element and the second image of the second object.Image processor
It is configured to receive and handles the first image and the second image that optical viewfinder transmits.
An embodiment according to the present invention, the first above-mentioned object are the master mold of mold, and the second object is the male model of mold.
An embodiment according to the present invention, above-mentioned optical path induction element are triangular prism lens group or reflection microscope group.
An embodiment according to the present invention, above-mentioned first light source and second light source are annular light source.
An embodiment according to the present invention, above-mentioned optical viewfinder are camera apparatus.
An embodiment according to the present invention, above-mentioned optical registration equipment also include that the second focus control is set to the second object
On, wherein the second focus control is configured to adjustment the distance between optical path induction element and the second object.
Above-mentioned purpose according to the present invention separately proposes a kind of optical registration method.In this method, in the first object and
Optical registration equipment is set between two objects.Optical registration equipment includes optical path induction element, first light source, second light source, light
Learn image-taking device and image processor.First light source and second light source are respectively arranged on the first object and optical path induction element
Between and the second object and optical path induction element between.Optical viewfinder is set to the side of optical path induction element.At image
Reason device is connect with optical viewfinder signal.The first object and the second object are irradiated respectively using first light source and second light source
Part.The first image and the second object of the first object for guiding via optical path induction element are obtained using optical viewfinder
Second image.The first image and the second image are received and processed using image processor, and is obtained in the first of the first image
Second central point of heart point and the second image.Using image processor calculate the space of first nodal point and the second central point away from
From.The position of the second object is adjusted, according to space length to align first nodal point and the second central point.
An embodiment according to the present invention, above-mentioned optical registration equipment also include connecting piece, the first focus control and
Second focus control.Connecting piece and the first object link.First focus control and connecting piece, optical path induction element, first light source,
And second light source engagement.Second focus control is set on the second object.
An embodiment according to the present invention, above-mentioned the first image and that the first object is obtained using optical viewfinder
When the second image of two objects, adjusted comprising being utilized respectively the first focus control and the second focus control optical path induction element with
The distance between first object and the distance between optical path induction element and the second object.
An embodiment according to the present invention, above-mentioned optical path induction element be triangular prism, lens group or reflection microscope group,
First light source and second light source are annular light source, and optical viewfinder is camera apparatus.
An embodiment according to the present invention, it is above-mentioned to calculate first nodal point and the second central point using image processor
When the space length, comprising calculating the pixel distance of first nodal point and the second central point and pixel distance being converted into sky
Between distance.
Compared with prior art, the present invention operator can quickly carry out the contraposition of two objects through the invention, this is not only
The alignment operation time of two objects can substantially be shortened, contraposition efficiency is promoted, reduce artificial safety accident, can more reduce artificial mistake
Difference promotes product qualification rate, reduces research and development and volume production cost.
Detailed description of the invention
For above and other purpose, feature, advantage and embodiment of the invention can be clearer and more comprehensible, said now in conjunction with attached drawing
It is bright as follows:
Fig. 1 is a kind of optical registration apparatus schematic diagram being painted according to one embodiment of the present invention；
Fig. 2 is a kind of optical registration apparatus schematic diagram being painted according to one embodiment of the present invention；
Fig. 3 is a kind of optical registration apparatus schematic diagram being painted according to one embodiment of the present invention；And
Fig. 4 is the flow chart for being painted a kind of optical registration method according to one embodiment of the present invention.
Specific embodiment
Fig. 1 is please referred to, is a kind of optical registration apparatus schematic diagram being painted according to one embodiment of the present invention.
The optical registration equipment 100 of present embodiment is single image-taking device horizontal bidirectional capture Position Design.Optical registration equipment 100 can
Applied to the contraposition of two objects, such as the contraposition of two material layers or two wafers in semiconductor technology, die forming machine
Contraposition and the combination contraposition of flat-panel screens of male model and master mold etc..In some embodiments, optical registration equipment 100
Mainly may include connecting piece 110, optical path induction element 120, first light source 130, second light source 140, the first focus control 150,
Optical viewfinder 160 and image processor 170.Upper in application, optical registration equipment 100 is arranged in the first object
180 and second between object 190.In some illustrative examples, the first object 180 and the second object 190 may respectively be molding machine
Mold master mold and male model.
Connecting piece 110 can link with the first object 180.For example, connecting piece 110 can by setting up, locking, fix,
The modes such as absorption to link with the first object 180.In some illustrative examples, connecting piece 110 can be strong magnets.
Referring once again to Fig. 1, optical path induction element 120 is set between the first object 180 and the second object 190.Optical path is drawn
Guiding element 120 can be engaged indirectly by the first focus control 150 with connecting piece 110, can by the first focus control 150 of operation
Drive optical path induction element 120.Optical path induction element 120 can be formed by single optical element or by multiple optical elements,
In these optical elements can be lens or reflecting mirror.In some illustrative examples, optical path induction element 120 can be triangular prism.
The use of single optical element can not only simplify light path design, and the device of optical registration equipment 100 can also be made more light and handy.When
So, optical path induction element 120 can also be lens group or reflection microscope group.
As shown in Figure 1, first light source 130 is set between the first object 180 and optical path induction element 120, to irradiate first
Object 180.First light source 130 can be engaged indirectly by the first focus control 150 with connecting piece 110, be adjusted by operation first
Coke installation 150 can drive first light source 130.In some illustrative examples, first light source 130 is annular light source, such first object
The light that part 180 reflects after irradiating can pass through the first light source 130 of annular and be drawn into optical path induction element 120 by optical path
Guiding element 120 guides.
Second light source 140 is set between the second object 190 and optical path induction element 120, to irradiate the second object 190.The
Two light sources 140 can be engaged indirectly by the first focus control 150 with connecting piece 110, can by the first focus control 150 of operation
Drive second light source 140.Relative position between first light source 130, second light source 140 and optical path induction element 120
It is fixed, with benefit focusing.In some illustrative examples, second light source 140 is annular light source, is designed whereby, the second object 190 is through shining
The light for penetrating rear reflection can pass through second light source 140 and enter optical path induction element 120 to be guided by optical path induction element 120.
First light source 130 and second light source 140 may be, for example, circular or polygonal ring shape, preferably circular ring shape.In some particular cases
In son, first light source 130 and second light source 140 can be the other than ring types light sources such as dotted or strip, as long as first light source 130 and second
Light source 140 can effectively irradiate the first object 180 and the second object 190 and the first object 180 and the second object 190 are after irradiating
Reflected light can smoothly enter into optical path induction element 120.
First focus control 150 is adjacent to optical path induction element 120.In some embodiments, as shown in Figure 1, first adjusts
Coke installation 150 may be provided on connecting piece 110.In addition, the first focus control 150 and the first object 180 are located at connecting piece
110 opposite two sides.First focus control 150 may include adjustment element 152 and load-carrying unit 154, wherein adjustment element 152 with
Load-carrying unit 154 links.Adjustment element 152 can be annular in shape, and is rotatably arranged on connecting piece 110.Optical path induction element
120, first light source 130 and second light source 140 can be fixed on load-carrying unit 154.It is removable by operation adjustment element 152
Load-carrying unit 154 is moved to change the distance between load-carrying unit 154 and the first object 180, can adjust 154 institute of load-carrying unit whereby
The distance between optical path induction element 120, first light source 130 and second light source 140 and the first object 180 of carrying, and reach
To the effect of the first object 180 of focusing.
Referring to figure 2., in another embodiment, the first focus control 210 of optical registration equipment 100a can be sliding rail
Device, and be set between the first object 180 and the second object 190.First focus control 210 is engaged with connecting piece 110.First
Focus control 210 may include sliding rail 210a and sliding part 210b, and wherein sliding part 210b is arranged on sliding rail 210a, and can be in cunning
It is slided on rail 210a.Sliding part 210b can be plate, with benefit carrying.Optical path induction element 120, first light source 130 and second
Light source 140 is to be arranged on the sliding part 210b of the first focus control 210, and pass through the first focus control 210 and connection
Part 110 engages indirectly.For example, optical path induction element 120, first light source 130 and second light source 140 can each other it
Between the fixed mode in relative position and relative distance be arranged on the sliding part 210b of the first focus control 210.Therefore, optical path
The combination of induction element 120, first light source 130 and second light source 140 can be via the carrying of sliding part 210b and in sliding rail
The upper synchronizing moving of 210a.By mobile sliding part 210b, optical path induction element 120, first light source 130 and second are moved
The combination of light source 140, to adjust position of the optical path induction element 120 on sliding rail 210a, and regulating optical path induction element
120 and first the distance between the object 180, and then achieve the effect that the first object 180 of focusing.
Referring to figure 3., in yet another embodiment, the first focus control 220 of optical registration equipment 100b can be sliding
Device, and be set between the first object 180 and the second object 190.Connecting piece 230 may be, for example, the elongated body of rod, connecting piece 230
One end is bonded on the first object 180.The first object 180 that the extending direction of connecting piece 230 can be engaged for example perpendicular to it
Surface.First focus control 220 may include load-bearing part 222, fastener 224 and adjustment element 226, wherein load-bearing part 222
It is engaged with fastener 224, fastener 224 is then movably disposed on connecting piece 230.Fastener 224 can be for example along rod-shaped
Connecting piece 230 extending direction it is mobile.Load-bearing part 222 can be plate, with benefit carrying.Optical path induction element 120, first light source
130 and second light source 140 be be arranged on the load-bearing part 222 of the first focus control 220, and pass through the first focus control
220 and engaged indirectly with connecting piece 230.For example, optical path induction element 120, first light source 130 and second light source 140
Can between relative position and the fixed mode of relative distance be arranged on the load-bearing part 222 of the first focus control 220.
Since load-bearing part 222 is combined with fastener 224, the movement of fastener 224 can drive load-bearing part, in this way, optical path
Induction element 120, first light source 130 and second light source 140 combination can via the carrying of load-bearing part 222 synchronizing moving.
Adjustment element 226 is engaged with connecting piece 230 and fastener 224.In some instances, adjustment element 226 can be rotation
Button, and by rotation adjustment element 226, it is mobile along connecting piece 230 to move fastener 224.In specific examples, pass through rotation
Turn adjustment element 226, the engagement between fastener 224 and connecting piece 230 can be unclamped, operator can be in a manual manner at this time
After the mobile fastener 224 to required position of connecting piece 230, then adjustment element 226 is rotated by 224 company of being fixed on of fastener
It ties on part 230.By mobile fastener 224, optical path induction element 120, first light source 130 and second light source are moved
140 combination, to adjust position of the optical path induction element 120 on connecting piece 230, and regulating optical path induction element 120 with
The distance between first object 180, and then achieve the effect that the first object 180 of focusing.
In some embodiments, optical registration equipment 100 also includes the second focus control 200.Second focus control 200 can
On the second object 190, and operates the second focus control 200 and move the second object 190.For example, the second object
190 when being the male model of molding machine, and the second focus control 200 can be the electronic hand wheel on male model device, by rotating electronic hand wheel,
Removable second object 190, and adjustable the distance between second object 190 and optical path induction element 120, and reach focusing the
The effect of two objects 190.
Referring once again to Fig. 1, optical viewfinder 160 is set to the side of optical path induction element 120, wherein the first object
180 and second the light that is reflected through irradiation of object 190 by after optical path induction element 120 can from optical path induction element 120 this
It projects side.Optical viewfinder 160 can receive the light for guiding and transmitting via optical path induction element 120, wherein the first object 180
The light that is reflected constitutes the first image of the first object 180, and the light that the second object 190 is reflected constitutes the of the second object 190
Two images.For example, optical viewfinder 160 can be the camera apparatus comprising camera lens.
Image processor 170 is connect with 160 signal of optical viewfinder, by received first object 180
Second image of one image and the second object 190 sends image processor 170 to.For example, image processor 170 with
The mode that optical viewfinder 160 can be electrically connected achievees the purpose that signal connects, can also be with the side of the wireless telecommunications such as bluetooth
Formula achievees the purpose that signal connects.In some embodiments, image processor 170 can have image process unit for computer etc.
Device.Image processor 170 receives the first image and the second object for the first object 180 that optical viewfinder 160 transmits
After second image of part 190, the first image and the second image are handled.For example, during image processing, shadow
As processing unit 170 can first nodal point the first image and the second image is arranged side by side, finding out the first image and the second image
Second central point calculates the pixel distance between first nodal point and the second central point and will be in first nodal point and second
The pixel distance of heart point is converted into space length.Image processor 170 may include display, can be by the of the first object 180
Second image of one image and the second object is shown in the display, is watched for operator, with benefit operation.
Using optical paths induction elements 120 such as the single optical viewfinder 160 of optical registration equipment 100 and triangular prisms,
It can be in the image and central point etc. of reversed respectively the first object 180 of acquisition and the second object 190 of the level on single image projecting
Characteristic point.Recycle the sky between image center point of the image processor 170 to calculate the first object 180 and the second object 190
Between distance.Whereby, operator can quickly carry out the contraposition of the first object 180 and the second object 190.Therefore, with this optics pair
Position equipment 100 not only can substantially shorten the alignment operation time of the first object 180 and the second object 190, promote contraposition efficiency, drop
Low artificial safety accident can more reduce human error, promote product qualification rate, reduce research and development and volume production cost.
Referring to Fig. 1 and Fig. 4, wherein Fig. 4 is a kind of optical registration being painted according to one embodiment of the present invention
The flow chart of method.When carrying out the optical registration between two articles, step 300 can be first carried out, it will for example above-mentioned embodiment party
The optical registration equipment 100 of formula is arranged between the first object 180 and the second object 190.In some embodiments, optics pair
Position equipment 100 may include optical path induction element 120, first light source 130, second light source 140, optical viewfinder 160, Yi Jiying
As processing unit 170.In some illustrative examples, optical registration equipment 100 more optionally includes connecting piece 110, first
Focus control 150 and the second focus control 200.Optical path induction element 120, first light source 130, second light source 140 and
First focus control 150 can be bonded on indirectly on connecting piece 110 by the first focus control 150.
As shown in Figure 1, when optical registration equipment 100 is arranged between the first object 180 and the second object 190, optical path
For induction element 120 between the first object 180 and the second object 190, first light source 130 is located at the first object 180 and optical path
Between induction element 120, second light source 140 is between the second object 190 and optical path induction element 120.Optical viewfinder
160 are located at the side of optical path induction element 120, and image processor 170 is connect with 160 signal of optical viewfinder.?
In one preferred embodiment, optical path induction element 120 is triangular prism, and first light source 130 and second light source 140 are annular light source,
Optical viewfinder 160 is camera apparatus.
When optical registration equipment 100 is arranged, connecting piece 110 can be fixed on the first object 180.In some illustrative examples
In, the operation of setting optical registration equipment 100 also initialization procedure and progress light comprising carrying out image processor 170
Learn the correction of image-taking device 160.
Then, carry out step 310, with using first light source 130 and second light source 140 irradiate respectively the first object 180 with
Second object 190.When first light source 130 irradiates the first object 180, the first object 180 understands reflected light and generates the first image；
Likewise, second object 190 understands reflected light and generates the second image when second light source 140 irradiates the second object 190.Constitute the
The reflected light of one image after first light source 130 enter optical path induction element 120, the guidance through optical path induction element 120 and
After converting travelling route, directive optical viewfinder 160.Similarly, the reflected light for constituting the second image passes through second light source 140
Enter optical path induction element 120 afterwards, after travelling route is converted in the guidance of optical path induction element 120, directive optical image-taking dress
Set 160.
Next, step 320 can be carried out, guided with being obtained using optical viewfinder 160 through optical path induction element 120
The first object 180 the first image and the second object 190 the second image.In some embodiments, the first object 180 and
The image of two objects 190 can obtain respectively, first can irradiate the first object 180 with first light source 130 and obtain the first object
After 180 the first image, then the second object 190 irradiated to obtain the second image of the second object 190 with second light source 140.Also
The second image of the second object 190 can be first obtained, then obtains the first image of the first object 180.
It, can be first when obtaining the first image of the first object 180 using optical viewfinder 160 in some illustrative examples
Move optical path induction element 120 using the first focus control 150, with adjust optical path induction element 120 and the first object 180 it
Between distance, to obtain the first object 180 clearly the first image.Then, the second object is obtained using optical viewfinder 160
When 190 the second image, two objects 190 that can be moved using the second focus control 200, to adjust the second object 190 and light
The distance between pass guiding element 120, to obtain the second object 190 clearly the second image.
Then, step 330 can be carried out, to receive acquired by optical viewfinder 160 using image processor 170
Second image of the first image of the first object 180 and the second object 190, and image is carried out to the first image and the second image
Processing, so as to obtaining the first nodal point of the first image and the second central point of the second image.In some embodiments, image
Processing unit 170 obtain the first image first nodal point and the second image the second central point when can be used Hough conversion
The algorithms such as (Hough transform) method, block search method, Sobel (Sobel) method or binaryzation.
In some illustrative examples, when the master mold for the mold that the first object 180 is molding machine, the second object 190 is male model
When, can first with optical viewfinder 160 obtain master mold sharp image after, using image processor 170 to this image into
Row image processing and the central point for obtaining master mold recycle optical viewfinder 160 to obtain the sharp image of male model, then utilize
Image processor 170 obtains the central point of male model to the progress image processing of this image.
Obtain the second of the first nodal point of the first image of the first object 180 and the second image of the second object 190
After central point, step 340 can be carried out, to calculate between first nodal point and the second central point using image processor 170
Space length.Since the first image of the acquirement of optical viewfinder 160 with the second image is made of many pixels,
When calculating the space length between first nodal point and the second central point using image processor 170, can first it calculate in first
Pixel distance between heart point and the second central point, recycle such as amount calculation by this pixel distance be converted into space away from
From.For example, it is assumed that the size of the image frame of entire screen is 68mm in coordinate X-axis, and this image frame is in X-axis
Each row have 1280 pixels, therefore size of each pixel in X-axis is 68mm/1280=0.053125mm.If first
The first nodal point of image differs 10 pixels with the second central point of the second image in X-axis, and space length at this time is
10x0.053125mm=0.53125.
Then, step 350 is carried out, to remove optical registration equipment 100, and is calculated according to image processor 170
The first object 180 the first image first nodal point and two articles 190 the second image the second central point between
Space length adjust the position of the second object 190, so as to the second central point of contraposition and first nodal point.
In some illustrative examples, when the first object 180 and the second object are respectively the male model and master mold of die forming machine,
Image processor 170 can be further by the space between the first nodal point of the first image and the second central point of the second image
Distance is converted into the X angle and Y angle that male model answers mode transfer.Then, operator can answer the X angle and Y angle of mode transfer according to male model
To adjust male model.
By above-mentioned embodiment it is found that an advantage of the invention is exactly optical registration equipment and optics because of the invention
Alignment method is using optical image-taking technology, with optical paths induction elements such as single image-taking device combination triangular prisms, in single shadow
As the reversed image and characteristic point for respectively obtaining two objects of level in projection, operator can quickly carry out this two object whereby
Contraposition.Therefore, it not only can substantially shorten the alignment operation time of two objects, promote contraposition efficiency, reduce artificial safety accident, more
Human error can be reduced, product qualification rate is promoted, reduces research and development and volume production cost.
Although the present invention is disclosed as above with embodiment, however, it is not to limit the invention, any in this technical field
Middle technical staff, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations, therefore guarantor of the invention
Subject to shield range ought be defined depending on claim.
Claims (11)
1. a kind of optical registration equipment is applicable in align the first object and the second object, which is characterized in that the optical registration is set
It is standby comprising:
Connecting piece links with first object；
Optical path induction element is engaged with the connecting piece and is set between first object and second object；
First light source and second light source engage with the connecting piece and are respectively arranged on first object and the optical path guiding element
Between part and between second object and the optical path induction element, to irradiate first object and second object
Part；
First focus control connects with the connecting piece, the optical path induction element, the first light source and the second light source
It closes, wherein first focus control is configured to adjust the distance between the optical path induction element and first object；
Optical viewfinder is transmitted with reception via the optical path induction element set on the side of the optical path induction element
Second image of the first image of first object and second object；And
Image processor is configured to receive and handles first image that the optical viewfinder transmits and described the
Two images.
2. optical registration equipment as described in claim 1, which is characterized in that first object is the master mold of mold, described
Second object is the male model of the mold.
3. optical registration equipment as described in claim 1, which is characterized in that the optical path induction element is triangular prism, thoroughly
Microscope group or reflection microscope group.
4. optical registration equipment as described in claim 1, which is characterized in that each first light source and the second light source
For annular light source.
5. optical registration equipment as described in claim 1, which is characterized in that the optical viewfinder is camera apparatus.
6. optical registration equipment as described in claim 1, which is characterized in that the optical registration equipment also includes the second focusing
Device is set on second object, wherein second focus control be configured to adjust the optical path induction element with it is described
The distance between second object.
7. a kind of optical registration method, characterized by comprising:
Optical registration equipment is set between the first object and the second object, wherein the optical registration equipment includes:
Optical path induction element；
First light source and second light source, are respectively arranged between first object and the optical path induction element and described
Between two objects and the optical path induction element；
Optical viewfinder, set on the side of the optical path induction element；And
Image processor is connect with the optical viewfinder signal；
First object and second object are irradiated respectively using the first light source and the second light source；
The first image of first object guided via the optical path induction element is obtained using the optical viewfinder
And the second image of second object；
First image and second image are received and processed using the image processor, and obtains first shadow
Second central point of the first nodal point of picture and second image；
The space length of the first nodal point Yu second central point is calculated using the image processor；And
The position of second object is adjusted, according to the space length to align the first nodal point and second center
Point.
8. optical registration method as claimed in claim 7, which is characterized in that the optical registration equipment also includes:
Connecting piece links with first object；
First focus control connects with the connecting piece, the optical path induction element, the first light source and the second light source
It closes；And
Second focus control is set on second object.
9. optical registration method as claimed in claim 8, which is characterized in that obtain described the using the optical viewfinder
When second image of first image of one object and second object, comprising being utilized respectively first focusing
Device adjusts the distance between the optical path induction element and first object and described with second focus control
The distance between optical path induction element and second object.
10. optical registration method as claimed in claim 7, which is characterized in that:
The optical path induction element is triangular prism, lens group or reflection microscope group；
Each first light source and the second light source are annular light source；And
The optical viewfinder is camera apparatus.
11. optical registration method as claimed in claim 7, which is characterized in that using described in image processor calculating
When the space length of first nodal point and second central point, include:
Calculate the pixel distance of the first nodal point Yu second central point；And
The pixel distance is converted into the space length.
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| CN201710916845.9A CN109597178B (en) | 2017-09-30 | 2017-09-30 | Optical alignment equipment and optical alignment method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844874A (en) * | 2005-04-08 | 2006-10-11 | 研能科技股份有限公司 | Optical assembly testing and adjusting method |
| TW200944747A (en) * | 2008-04-16 | 2009-11-01 | Univ Nat Formosa | Image measurement device and method for dimensional parameters of saw |
| CN101661186A (en) * | 2009-09-28 | 2010-03-03 | 友达光电(厦门)有限公司 | Aligning device |
| TW201350908A (en) * | 2012-06-04 | 2013-12-16 | Wintek Corp | Multi-focal optical alignment apparatus and alignment method for multiple stacking substrates |
| CN106068472A (en) * | 2014-03-10 | 2016-11-02 | 住友电气工业株式会社 | The manufacture method of optical module |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844874A (en) * | 2005-04-08 | 2006-10-11 | 研能科技股份有限公司 | Optical assembly testing and adjusting method |
| TW200944747A (en) * | 2008-04-16 | 2009-11-01 | Univ Nat Formosa | Image measurement device and method for dimensional parameters of saw |
| CN101661186A (en) * | 2009-09-28 | 2010-03-03 | 友达光电(厦门)有限公司 | Aligning device |
| TW201350908A (en) * | 2012-06-04 | 2013-12-16 | Wintek Corp | Multi-focal optical alignment apparatus and alignment method for multiple stacking substrates |
| CN106068472A (en) * | 2014-03-10 | 2016-11-02 | 住友电气工业株式会社 | The manufacture method of optical module |
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