CN109596099A - The obliquity sensor of one type rotary transformer - Google Patents
The obliquity sensor of one type rotary transformer Download PDFInfo
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- CN109596099A CN109596099A CN201910025797.3A CN201910025797A CN109596099A CN 109596099 A CN109596099 A CN 109596099A CN 201910025797 A CN201910025797 A CN 201910025797A CN 109596099 A CN109596099 A CN 109596099A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
- G01C2009/182—Measuring inclination, e.g. by clinometers, by levels by using liquids conductive
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Abstract
The present invention relates to the obliquity sensors of a type rotary transformer, including sensitive structure and shell；The sensitive structure receives pole plate including first, transmitting pole plate and second receives pole plate, described first receives pole plate, transmitting pole plate and second receives pole plate sequence successively stacked spaced apart forms similar sandwich structure and is placed in the shell, described first receives pole plate, transmitting pole plate and second receives that pole plate size is identical and spacing is identical between adjacent two pole plate, and described first receives pole plate, second receives pole plate and shell constitutes closing cylindrical space；Sealed set has dielectric liquid in the closing cylindrical space, and under any angle, the dielectric liquid liquid level is overlapped with the center of three pieces of pole plates.The present invention proposes variable electrode area differential capacitance type inclination angle sensitive device structure, and high sensitivity, wide dynamic range, frequency response characteristic is good, low in cost, can sense at the inclination angle in testing field and be widely applied in test equipment measurement.
Description
Technical field
The present invention relates to a kind of obliquity sensors, especially with regard to the obliquity sensor of a type rotary transformer.
Background technique
Obliquity sensor is will to be converted to corresponding electric signal output relative to the inclination angle of datum level or change of pitch angle,
To find out counter-bevel value.Obliquity sensor mainly includes sensitive structure, demodulator circuit and backoff algorithm.Existing obliquity sensor
Sensitive structure mainly has the gentle body pendulum-type obliquity sensor of solid pendulum, liquid pendulum-type.Now there are three types of obliquity sensors not
With degree there are some problems, such as the narrow dynamic range of liquid pendulum-type obliquity sensor, dynamic response frequency is low, and solid
Pendulum obliquity sensor structure process is complicated, and resisting strong impact and the ability of vibration are poor.Pendulum type in-gas inclination senser
Sensitive-mass is gas, and gas motion control is complex, and the factor for influencing its movement is more, and precision is unable to reach army and uses force
The requirement of device system.
The sensitive structure of condenser type inclination angle sensing is mostly to pass through detection electricity by segmenting electrode in diametrical direction at present
Hold the detection realized to inclination angle, this Method And Principle is simple, but there are blind area, cannot achieve 0~360 degree of gamut
Measurement.Moreover, existing sensor and method be in many of engineer application field limitation, such as to the adaptability of the environment of plant,
The inhibition etc. of Hz noise, to need high speed acquisition, calculating cycle length, power consumption height etc..
With the development of Precision Manufacturing Technology, the high-precision tilt angle sensor that oneself has is not able to satisfy accuracy requirement, research
Preferably intelligent high-precision tilt angle sensor is of great significance the higher performance of resolving power.
Summary of the invention
In view of the above-mentioned problems, the object of the present invention is to provide a kind of obliquity sensors of the class rotary transformer of gamut.
To achieve the above object, the present invention takes following technical scheme: the obliquity sensor of a type rotary transformer, packet
Include sensitive structure and shell；The sensitive structure receives pole plate including first, transmitting pole plate and second receives pole plate；Described first
Receive pole plate, transmitting pole plate and second receives pole plate sequence successively stacked spaced apart forms similar sandwich structure and is placed in described
In shell, described first receive pole plate, transmitting pole plate and second receive that pole plate size is identical and between adjacent two pole plate between
Away from identical, described first receives pole plate, second receives pole plate and shell constitutes closing cylindrical space；In the closing cylindrical space
It is provided with dielectric liquid, under any angle, the dielectric liquid liquid level is overlapped with three pieces of pole plate centers.
The obliquity sensor, it is preferable that the transmitting pole plate uses two-sided annular structure, every one side annulus
Shape structure includes guard electrode inside and outside first, is set as emission electrode between guard electrode inside and outside described first.
The obliquity sensor, it is preferable that described first, which receives pole plate and second, receives pole plate and be all made of circular knot
Structure, described first receives at the top of pole plate and second receives pole plate bottom and be all made of glass capsulation.
The obliquity sensor, it is preferable that described first receive pole plate include second inside and outside guard electrode, described second
It sets gradually first between inside and outside guard electrode receive electrode, second receive electrode and third receives electrode, described first receives
Electrode and third receive electrode be connected with each other with the transmitting pole plate constitute parallel plate electrode capacitor C1, described second receive electrode with
Emit pole plate and constitutes parallel plate electrode capacitor C2；Wherein, three electrodes that receive are respectively by two off-centre operations along X-direction point
It cuts to be formed, two off-centre operations are respectively as follows:
In formula, a indicates the eccentricity of two off-centre operations, r1Indicate the radius of the first off-centre operation, r2Indicate the second off-centre operation
Radius, wherein X-axis is parallel with inclination angle face to be measured, and Y-axis is vertical with inclination angle face to be measured.
The obliquity sensor, it is preferable that described second receives pole plate protects using inside and outside annular structure, including third
Electrode is protected, the 4th is set gradually between guard electrode inside and outside the third and receives electrode, the 5th, which receives electrode and the 6th, receives electricity
Pole, the described 4th, which receives electrode and the 6th, receives electrode interconnection and transmitting pole plate composition parallel plate electrode capacitor C3, institute
It states the 5th and receives electrode and transmitting pole plate constitutes measurement capacitor C4, wherein three described to receive electrode respectively by third off-centre operation
Divide to be formed along Y direction with the 4th off-centre operation, third off-centre operation and the 4th off-centre operation are as follows:
In formula, a indicates the eccentricity of two off-centre operations, r1Indicate the radius of third off-centre operation, r2Indicate the 4th off-centre operation
Radius.
The obliquity sensor, it is preferable that four tunnel capacitance sizes are obtained according to integration theorem and equivalent circuit diagram are as follows:
In formula: ε indicates the dielectric constant of dielectric liquid, S1、S2、S3、S4Respectively indicate above-mentioned capacitor C1, C2, C3, C4
Equivalent positive area, θ indicates surveyed inclination angle.
The obliquity sensor, it is preferable that the obliquity sensor further includes demodulator circuit, and the demodulator circuit includes one
A control module, a DDS carrier wave generation module, four C-V conversions and high-pass filtering module, two switches demodulation modules, two
A differential amplification and low-pass filtering module and two ADC quantization modules；The control module controls the DDS carrier wave and generates mould
Block generates the carrier signal of setpoint frequency, and carrier signal is output to the emission electrode and switch demodulation module；Four C-V
Conversion and high-pass filtering module are used to the capacitance signal that four tunnels are modulated by obliquity information being changed to voltage signal, and by voltage signal
In direct current and low frequency signal removal；Each demodulation module that switchs is according to the switching of the DDS carrier wave generation module
When ordered pair two-way voltage signal carry out subtraction and filtering processing, removed the voltage differential signal of carrier wave all the way；Each difference
The voltage differential signal for dividing amplification and low-pass filtering module to be used to demodulate on the switch output carries out differential amplification and low-pass filtering,
Obtain mutually orthogonal analog voltage signal；Each ADC quantization modules are converted to the orthogonal analog voltage signal of two-way
Digital signal；The digital signal that the control module receives the ADC quantization modules completes the resolving of quadrature signal, obtains
Obliquity information.
The obliquity sensor, it is preferable that the dielectric fluid when shell rotation, in the closing cylindrical space
Body fluid face keeps stable under the effect of gravity, and the positive area between electrode changes, capacitance C1, C2 of output, C3,
C4 changes, and exports four road voltage values after C-V conversion:
In formula, U1、U2、U3、U4Respectively indicate the four transformed voltage values of road capacitor C-V, AcIt is the times magnification of C-V conversion
Number, UeIt is the range value of carrier signal；
The obliquity sensor, it is preferable that four road voltage signals are by switch demodulation differential amplification to remove carrier wave
Signal obtains two-way voltage differential signal:
Usin=U1-U2=Ucos (θ) (5)
Ucos=U3-U4=Ucos (θ) (6)
In formula, Usin、UcosIndicate that, by switch demodulation differential amplification to remove carrier signal, U indicates input signal
Amplitude, it is tilt angle that input control module, which resolves, after ADC is sampled.
The obliquity sensor, it is preferable that since obliquity sensor is there are DC error, range error, phase error,
The signal recently entered is caused to be become from formula (5) and formula (6):
Us=U (1+AS)·sin(θ+φ)+Δs (7)
Uc=U (1+AC)·cosθ+Δc (8)
In formula, USAnd UCIndicate the actual signal output of error, AS、ACRespectively indicate range error, Δs、ΔcTable respectively
Show that DC error, φ indicate phase error.
The obliquity sensor, it is preferable that the relative dielectric constant of the dielectric liquid is greater than 2.5, the coefficient of viscosity
Less than 0.2kg/m.
The invention adopts the above technical scheme, which has the following advantages:
1, the measurement capacitor design of sensitive structure is circumferencial direction by the present invention, very effective dead zone can be overcome to ask
Topic realizes gamut measurement；Demodulator circuit is designed as to the operating mode of switch demodulation+FPGA, calculating can be greatly lowered
Period and power consumption；
2, gamut obliquity sensor of the invention, including sensitive structure and demodulator circuit, the sensor are high using liquid
Degree of purity dielectric substance under the effect of gravity realize the measurement to inclination angle with the characteristic of housing into rotation, survey by liquid level stabilizing, electrode
In amount without moving machinery moving component, structure is simple, high reliablity, versatile；
3, the present invention completes differential capacitor when change of pitch angle using liquid high cleanliness dielectric substance as moving electrodes
The purpose of device Parameters variation, no mechanical movement components, stability, reliability, environmental suitability greatly improve；
4, the present invention is provided with elimination of the switch demodulation completion to carrier wave, and AD may be implemented and adopt to the high speed of variable capacitance
Collection, can improve the dynamic characteristic of sensor, also can realize high-acruracy survey by smothing filtering；
To sum up, the present invention proposes variable electrode area differential capacitance type inclination angle sensitive device structure, this condenser type inclination angle
The features such as sensor has simple and reliable for structure, high sensitivity, and wide dynamic range, frequency response characteristic is good, low in cost, simultaneously
Reducing temperature influences capacitance type sensor, reduces installation error, improves the angle sensing capability of sensitive structure, and it is suitable to improve environment
Ying Xing can be sensed for the inclination angle in testing field and test equipment be provided the practical technique suitable for intelligence control system, can be with
It is designed and produced with circuit integrating, reaches miniaturized devices level.
Detailed description of the invention
Fig. 1 is the obliquity sensor structural schematic diagram of class rotary transformer of the invention；
Fig. 2 is the three-dimensional section view of class rotary transformer obliquity sensor of the invention；
Fig. 3 is class rotary transformer obliquity sensor working mechanism schematic diagram of the invention；
Fig. 4 is that inventive sensor first receives pole plate schematic diagram；
Fig. 5 is inventive sensor transmitting pole plate schematic diagram；
Fig. 6 is that inventive sensor second receives pole plate schematic diagram；
Fig. 7 is inventive sensor sensitive structure demodulator circuit schematic illustration；
Fig. 8 is obliquity sensor output signal schematic diagram of the present invention；
Fig. 9 is error compensation flow diagram of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
As shown in Figures 1 to 3, the obliquity sensor of class rotary transformer provided by the invention, including sensitive structure 1 and shell
2。
Sensitive structure 1 receives pole plate 3 including first, transmitting pole plate 4 and second receives pole plate 5, wherein first receives pole plate
3, emit pole plate 4 and second to receive pole plate 5 and can use annular structure.
First, which receives pole plate 3, transmitting pole plate 4, with second receives the sequence of pole plate 5 successively stacked spaced apart forms similar sandwich
Structure is simultaneously placed in shell 2, and first receive electrode 1 and second receive electrode 5 inner ring be all made of glass capsulation formed see
Examine window.First receives pole plate 3, second receives pole plate 4 and 2 three of shell and constitute a closing cylindrical space.Close cylindrical space
Interior sealed set has high dielectric constant, low viscosity coefficient (relative dielectric constant is greater than 2.5, and the coefficient of viscosity is less than 0.2kg/m.s)
Dielectric liquid 6 (such as silicone oil, turpentine oil etc.).Preferably, the volume of dielectric liquid is two points for closing cylindrical space
One of, under any angle, liquid levels are overlapped with the center of above-mentioned three pieces of annulus pole plates, as shown in Figure 3.In work, entirely
When obliquity sensor is rotated around the axis (Z axis) perpendicular to paper, the liquid level of dielectric liquid 6 of cylindrical space is closed always
It is overlapped with O point, i.e., the liquid level of liquid is overlapped with the center of three pieces of circular pole plates.Wherein, first receives pole plate 3, transmitting pole plate 4
Receiving pole plate 5 with second, spacing is d between any two, and three pole plate sizes are identical, and internal diameter is R1, and outer diameter is R2.
As shown in figure 4, the present embodiment defines, X-axis is parallel with inclination angle face to be measured, and Y-axis and inclination angle face to be measured are hung down
Directly, first to receive pole plate 3 include inside and outside guard electrode 31, set gradually between inside and outside guard electrode 41 first receive electrode 31,
Second receives electrode 32 and third receives electrode 33, and three receive electrode and divide shape along X-direction by two off-centre operations respectively
At two off-centre operation formula are respectively as follows:
In formula, a indicates the eccentricity of two off-centre operations, r1Indicate the radius of off-centre operation one, r2Indicate the half of off-centre operation two
Diameter.
Wherein, first receives electrode 31 and third receives electrode 33 and is connected with each other that (interconnection refers to by adding in PCB
Cabling is realized between half storey in work) common parallel plate electrode capacitor C1 is constituted with transmitting pole plate 4, second receives electrode 32 and hair
Emitter-base bandgap grading plate 4 constitutes parallel plate electrode capacitor C2.
As shown in figure 5, transmitting pole plate 4 can use two-sided annular structure, every one side annular structure includes inside and outside
Guard electrode 41, is emission electrode 42 between inside and outside guard electrode 41, i.e. the two-sided distribution of emission electrode, and front and back sides same position is equal
For inside and outside guard electrode and emission electrode.
As shown in fig. 6, second to receive pole plate 5 include inside and outside guard electrode 51, successively it is spaced between inside and outside guard electrode 51
It is arranged the 4th and receives electrode 52, the 5th receives electrode 53 and the 6th receives electrode 54, and three receive electrode respectively by off-centre operation one
Divide to be formed along Y direction with off-centre operation two, off-centre operation one and two formula of off-centre operation are respectively as follows:
Wherein, the 4th receives electrode 52 and the 6th and receives the interconnection of electrode 54, constitutes with transmitting pole plate 4 common parallel
Plates capacitance C3 (ibid), the 5th receives electrode 53 and the transmitting composition measurement of pole plate 4 capacitor C4.
According to the available four tunnels capacitance size of integration theorem and equivalent circuit diagram are as follows:
In formula: ε indicates dielectric constant, S1、S2、S3、S4Respectively indicate the equivalent right opposite of above-mentioned capacitor C1, C2, C3, C4
Product, θ indicate surveyed inclination angle.
The following detailed description of the obliquity sensor working principle of class rotary transformer of the invention.
The present invention is due to being provided with liquid high cleanliness dielectric liquid 6, when inclination angle changes, the variable medium in inside
Area capacitance changes.It generates sinusoidal excitation signal and acts on emission electrode 4, such as: generate the carrier wave sine letter of a 50KHz
Number, which is arranged in the emission electrode 4 of sensitive structure, three pieces of pole plates by sandwich structure, receives electrode by certain
Pattern is distributed, and in the closing cylindrical space of composition under the action of liquid, when the plane run-off the straight where obliquity sensor, is connect
It is changed by the capacitor between electrode and emission electrode, the capacitor that 4 tunnels are modulated by obliquity information is obtained on receiving electrode and is become
Change signal.The present invention is handled using the capacitance change signal that demodulator circuit is modulated 4 tunnels by obliquity information.
As shown in Fig. 7~8, demodulator circuit 7 includes four C-V conversion modules, four high-pass filtering modules, a DDS load
Wave generation module, two switch demodulation modules, two differential amplification modules, two low-pass filtering modules, two ADC quantization modules
With a FPGA control module.
FPGA control module controls DDS carrier wave generation module, and DDS carrier wave generation module generates the square wave that frequency is 20kHz,
Square wave is respectively outputted to emission electrode 4 and switch demodulation module；
Four C-V conversion modules are used to the capacitance signal that four tunnels are modulated by obliquity information being changed to voltage signal；
Four high-pass filtering modules be used for by voltage signal direct current and low frequency signal remove；
Ordered pair two-way voltage signal is subtracted when each switching for switching demodulation module according to DDS carrier wave generation module
Method and filtering processing are removed the voltage differential signal of carrier wave all the way；
Low-pass filtering module is dry for removing the low frequency of the carrier signal of DDS generation before being used to that emission electrode 4 to be arranged in
It disturbs；
The voltage differential signal that each differential amplification and low-pass filtering module are used to switch demodulation output carries out differential amplification
And low-pass filtering, obtain mutually orthogonal analog voltage signal；
The orthogonal analog voltage signal of two-way is converted to digital signal by every ADC quantization modules；
The digital signal that control module receives the ADC quantization modules completes the resolving of quadrature signal, obtained inclination angle
Information, specific implementation process are as follows:
When shell 2 rotates, 6 liquid level of dielectric liquid closed in cylindrical space keeps stable under the effect of gravity, electricity
Positive area between pole changes, and capacitance C1, C2, C3, C4 of output change, and exports four after C-V is converted
Road voltage value:
In formula, U1、U2、U3、U4Respectively indicate the four transformed voltage values of road capacitor C-V, AcIt is the times magnification of C-V conversion
Number, UeIt is the range value of carrier signal；
Four road voltages remove the interference of low-frequency noise, such as 50Hz power frequency by high-pass filtering, by switch demodulation
With differential amplification to remove carrier signal, two paths of signals is obtained:
Usin=U1-U2=Ucos (θ) (5)
Ucos=U3-U4=Ucos (θ) (6)
In formula, Usin、UcosIndicate that, by switch demodulation differential amplification to remove carrier signal, U indicates input signal
Amplitude, it is tilt angle that input FPGA control module, which resolves, after the sampling of ADC quantization modules, from formula as can be seen that this hair
The bright gamut measurement that may be implemented to 360 °.
Since obliquity sensor is there are DC error, range error, phase error causes the signal recently entered by formula
(5) become with formula (6):
Us=U (1+AS)·sin(θ+φ)+Δs (7)
Uc=U (1+AC)·cosθ+Δc (8)
In formula, USAnd UCIndicate the actual signal output of error, AS、ACRespectively indicate range error, Δs、ΔcTable respectively
Show that DC error, φ indicate phase error.The signal that AD is acquired in ideal is formula (5) and formula (6), and obliquity sensor is practical
The signal form such as formula (7) and (8) that AD is acquired in work.
In above-described embodiment, it is preferable that as shown in figure 9, the present invention is additionally provided with error compensation, recognized by error compensation
Five margins of error and it is compensated, the specific work process of error compensation above out are as follows:
1, FPGA module control ADC quantization modules complete the acquisition to two paths of signals, and FPGA module is using acquisition with accidentally
The orthogonal signalling of difference are completed inclination angle and are resolved, and the arc tangent that solution process mainly passes through calculating orthogonal signalling is realized；
2, the orthogonal signalling of ADC quantization modules acquisition are pre-processed, mainly includes that system conversion and gross error are picked
It removes, this is the prior art, and this will not be repeated here；
3, the error function model of formula (7) and formula (8) is substituted into, and defines error variance AS、AC、Δs、Δc,φ；AS、
ACRespectively indicate range error, Δs、ΔcDC error is respectively indicated, φ indicates phase error；
4, error variance is scanned for using gradient descent method, when meeting the termination condition of definition, terminates search, terminates
Condition includes the number of iterations and gradient magnitude etc.；
5, the error variance A that will be calculatedS、AC、Δs、Δc, φ, substitute into formula (7) and formula (8), completion error
Compensation process, orthogonal signalling sin, cos after being corrected, then resolve angles obtain the inclination angle updated.
To sum up, the present invention uses two-way orthogonal signalling Differential Input, reduces total caused by the variation such as temperature, humidity in environment
Mould error bring influences；And using the dielectric liquid material filling of the high dielectric constants such as silicone oil, low melting point improve scale because
Son and temperature applicable range, the electrode that the further present invention designs have guard electrode in inner ring outer ring, for eliminating plate electricity
The influence for holding edge effect, improves the accuracy of sensitive structure.
According to the disclosure and teachings of the above specification, those skilled in the art in the invention can also be to above-mentioned embodiment party
Formula carries out change and modification appropriate.Therefore, the invention is not limited to the specific embodiments disclosed and described above, to this
Some modifications and changes of invention should also be as falling into the scope of the claims of the present invention.In addition, although this specification
In use some specific terms, these terms are merely for convenience of description, does not limit the present invention in any way.
Claims (10)
1. the obliquity sensor of a type rotary transformer, which is characterized in that including sensitive structure and shell；
The sensitive structure receives pole plate including first, transmitting pole plate and second receives pole plate；
Described first receives pole plate, transmitting pole plate and second receives pole plate sequence successively stacked spaced apart forms similar sandwich structure
And be placed in the shell, described first receives pole plate, transmitting pole plate and second receives that pole plate size is identical and adjacent two institute
It is identical to state spacing between pole plate, described first receives pole plate, second receives pole plate and shell and constitute closing cylindrical space；
It is provided with dielectric liquid in the closing cylindrical space, under any angle, the dielectric liquid liquid level and three pieces
The pole plate center is overlapped.
2. obliquity sensor according to claim 1, which is characterized in that the transmitting pole plate is using two-sided circular knot
Structure, every one side annular structure includes guard electrode inside and outside first, is set as between guard electrode inside and outside described first
Emission electrode.
3. obliquity sensor according to claim 1, which is characterized in that described first, which receives pole plate and second, receives pole plate
It is all made of annular structure, described first receives at the top of pole plate and second receives pole plate bottom and be all made of glass capsulation.
4. obliquity sensor according to claim 1, which is characterized in that described first, which receives pole plate, includes the second inside and outside guarantor
Electrode is protected, first is set gradually inside and outside described second between guard electrode and receives electrode, second receives electrode and third receives electricity
Pole, described first receives electrode and third receives electrode and is connected with each other and transmitting pole plate composition parallel plate electrode capacitor C1, institute
It states second and receives electrode and transmitting pole plate composition parallel plate electrode capacitor C2；Wherein, three it is described receive electrode respectively by two partially
Heart circle is divided to be formed along X-direction, and two off-centre operations are respectively as follows:
(x-a)2+y2=r1 2
In formula, a indicates the eccentricity of two off-centre operations, r1Indicate the radius of the first off-centre operation, r2Indicate the half of the second off-centre operation
Diameter, wherein X-axis is parallel with inclination angle face to be measured, and Y-axis is vertical with inclination angle face to be measured.
5. obliquity sensor according to claim 4, which is characterized in that described second receives pole plate using circular knot
Guard electrode inside and outside structure, including third sets gradually the 4th between guard electrode inside and outside the third and receives electrode, and the 5th receives
Electrode and the 6th receives electrode, and the described 4th, which receives electrode and the 6th, receives electrode and be connected with each other to constitute with the transmitting pole plate to put down
Row plates capacitance C3, the described 5th receives electrode and transmitting pole plate composition measurement capacitor C4, wherein three electrodes that receive divide
Do not divided to be formed along Y direction by third off-centre operation and the 4th off-centre operation, third off-centre operation and the 4th off-centre operation are as follows:
(y-a)2+x2=r1 2
In formula, a indicates the eccentricity of two off-centre operations, r1Indicate the radius of third off-centre operation, r2Indicate the half of the 4th off-centre operation
Diameter.
6. obliquity sensor according to claim 5, which is characterized in that obtain four according to integration theorem and equivalent circuit diagram
Road capacitance size are as follows:
In formula: ε indicates the dielectric constant of dielectric liquid, S1、S2、S3、S4Respectively indicate the equivalent of above-mentioned capacitor C1, C2, C3, C4
Positive area, θ indicate surveyed inclination angle.
7. obliquity sensor according to claim 6, which is characterized in that the obliquity sensor further includes demodulator circuit, institute
Stating demodulator circuit includes a control module, a DDS carrier wave generation module, four C-V conversions and high-pass filtering module, two
Switch demodulation module, two differential amplifications and low-pass filtering module and two ADC quantization modules；
The control module controls the carrier signal that the DDS carrier wave generation module generates setpoint frequency, and carrier signal is output to
The emission electrode and switch demodulation module；
Four C-V conversions and high-pass filtering module are used to for the capacitance signal that four tunnels are modulated by obliquity information to be changed to voltage letter
Number, and by voltage signal direct current and low frequency signal remove；
Each switch demodulation module according to ordered pair two-way voltage signal when the switching of the DDS carrier wave generation module into
Row subtraction and filtering processing are removed the voltage differential signal of carrier wave all the way；
Each differential amplification and low-pass filtering module are used to the voltage differential signal of the switch demodulation output carrying out difference
Amplification and low-pass filtering, obtain mutually orthogonal analog voltage signal；
The orthogonal analog voltage signal of two-way is converted to digital signal by each ADC quantization modules；
The digital signal that the control module receives the ADC quantization modules completes the resolving of quadrature signal, obtained inclination angle
Information.
8. obliquity sensor according to claim 7, which is characterized in that when shell rotation, the closing cylinder
Dielectric liquid liquid level in space keeps stable under the effect of gravity, and the positive area between electrode changes, output
Capacitance C1, C2, C3, C4 change, and export four road voltage values after C-V conversion:
In formula, U1、U2、U3、U4Respectively indicate the four transformed voltage values of road capacitor C-V, AcIt is the amplification factor of C-V conversion, Ue
It is the range value of carrier signal；
Four road voltage signals, to remove carrier signal, obtain two-way voltage differential signal by switch demodulation differential amplification:
Usin=U1-U2=Ucos (θ) (5)
Ucos=U3-U4=Ucos (θ) (6)
In formula, Usin、UcosIndicate that, by switch demodulation differential amplification to remove carrier signal, U indicates the amplitude of input signal,
It is tilt angle that input control module, which resolves, after ADC is sampled.
9. obliquity sensor according to claim 8, which is characterized in that since there are DC error, width for obliquity sensor
Error is spent, phase error causes the signal recently entered to be become from formula (5) and formula (6):
Us=U (1+AS)·sin(θ+φ)+Δs (7)
Uc=U (1+AC)·cosθ+Δc (8)
In formula, USAnd UCIndicate the actual signal output of error, AS、ACRespectively indicate range error, Δs、ΔcIt respectively indicates straight
Stream error, φ indicate phase error.
10. described in any item obliquity sensors according to claim 1~8, which is characterized in that the dielectric liquid it is opposite
Dielectric constant is greater than 2.5, and the coefficient of viscosity is less than 0.2kg/m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910025797.3A CN109596099B (en) | 2019-01-11 | 2019-01-11 | Inclination angle sensor of similar rotary transformer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910025797.3A CN109596099B (en) | 2019-01-11 | 2019-01-11 | Inclination angle sensor of similar rotary transformer |
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