CN208269826U - A kind of angle measurement unit of micro motor - Google Patents
A kind of angle measurement unit of micro motor Download PDFInfo
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- CN208269826U CN208269826U CN201820500733.5U CN201820500733U CN208269826U CN 208269826 U CN208269826 U CN 208269826U CN 201820500733 U CN201820500733 U CN 201820500733U CN 208269826 U CN208269826 U CN 208269826U
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- electrode
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- measurement unit
- micro motor
- angle measurement
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Abstract
The utility model discloses a kind of angle measurement unit of micro motor, and the angle measurement unit includes: several top electrodes and electrode under several；The upper bed-plate of micro motor is arranged in multiple top electrodes, and multiple top electrodes are on an annulus centered on stator, and the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor, and multiple lower electrodes are on an annulus centered on rotor, and the top electrode and the lower electrode form multiple capacitance structures.The utility model detects the state of micro motor using capacitive way, for improving the anti-interference ability and detection accuracy of device.
Description
Technical field
The utility model relates to angle measurement unit fields, more particularly to a kind of angle measurement unit of micro motor.
Background technique
Micro motor is also micro motor or micromotor, is that volume, capacity are smaller, output power is generally at hundreds of watts or less
Motor and purposes, performance and environmental condition require special motor.It is usually used in control system, realizes dynamoelectric signal or energy
The functions such as detection, resolving, amplification, execution or conversion, or loaded for gearing, also can be used as the AC DC electric of equipment
Source.
Currently, micro motor mainly has an application of several respects: microrobot, miniature low-power-consumption drive and miniature
Medicine detects device.Wherein microrobot be using micro motor size is small, operating voltage is low, control feature with high accuracy, can
For mobile platform, micromechanics assembly, maintenance, nanometer positioning etc..It can be used as direction controlling component in robot platform, collect
At in camera or direction sensor.For miniature low-power-consumption drive, the direction is mainly used for driving rotatable platform,
And multifunctional application is carried out, such as optical information sensing.Meanwhile micro motor high-precision control and continuity turning power can be with
Driving is provided for gyroscope.In can be applied not only to positioning, navigation and counting, the self-calibration of gyroscope can also be realized.
The research and production of micromation motor are carried out using MEMS technology, are current foreign countries in the field to reach use above purpose
The emphasis of research.In addition, low-power drive is also a big feature of the device, it is able to achieve micro-system control and integrated circuit collection
At.Still further aspect application is miniature medical detection device, which realizes miniature work mainly also with rotatable platform
Tool operation, intravenous imaging etc..Especially in intravenous imaging progress, rotatable platform is instead of traditional phased array
Column.Because of the introducing of micro supersonic motor, solves relatively thick, the longer bring of torsion bar existing for rotatable platform and shakes severity,
Problem not easy to control.
MEMS (Micro-Electro-Mechanical System, MEMS) piezo actuator (piezo actuator
Transduction is realized using the piezoelectric effect of piezoelectric material, is converted mechanical energy output for input electrical signal, is that the field MEMS is normal
One of actuator) there is small in size, light weight, be easy to integrated, cheap with base structure, and by the solid-state of material
Crystallization effect generates displacement, and displacement resolution is high, High power output, and it is big to bear load, fast response time, and it is excellent that instantaneous acceleration is big etc.
Gesture has received widespread attention, and is a kind of suitable for demands such as micro motor offer high-resolution positioning, high dynamic motion features
MEMS actuator technology.
But based on the micro motor of piezo actuator by piezoelectric material creep, nonlinear influence its motion profile and position
Shifting precision is all relatively low, therefore, it is necessary to implement feedback control to the micro motor based on piezo actuator, is held to make to increase
Row structure obtains movement in line.And implementing feedback control or the most important ring of closed-loop control is exactly to being performed
The motion state of structure is accurately monitored.
For traditional or larger-size piezo-electric motor or ultrasound electric machine, there are many sides for carrying out status monitoring
Formula, including mechanical, optical profile type and magneto-electric etc..Wherein mechanical sensor precision is limited, and exports without electric signal；Optics
Sensor structure is complicated, and to environmental requirement height, expensive, measurement angle is small；Magnetoelectric sensor is compact-sized, precision compared with
Height, measurement output is generally electric signal, easily by late-class circuit modulation treatment.Magnetoelectric sensor mainly includes potentiometer type, electricity
Sense formula, Hall-type, mistor formula, reluctance type, magnetostriction type, magnetic-grid-type and condenser type etc..It is existing in industry at present
Sensor it is each it is advantageous also have the shortcomings that respective, if potentiometer type angle sensor structure is simple, output signal is strong, adapt to shake
It is dynamic to wait environment, but it is contact type measurement, and life of product and reliability are bad, and precision is not general also high；For another example photoelectric coding
Device has the advantages that precision is high, response is fast, but its structure is relative complex, is difficult to be integrated into MEMS system.
Utility model content
The purpose of the utility model is to provide a kind of angle measurement units of micro motor, using capacitive way come to micro motor
State detected, for improving the anti-interference ability and detection accuracy of device.
To achieve the above object, the utility model provides following scheme:
A kind of angle measurement unit of micro motor, the angle measurement unit include: under several top electrodes and several
Electrode；The upper bed-plate of micro motor is arranged in multiple top electrodes, and multiple top electrodes are in one centered on stator
On annulus, the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor, multiple described
Lower electrode is on an annulus centered on rotor, and the top electrode and the lower electrode form multiple capacitance structures.
Optionally, multiple top electrodes are divided into first group of electrode, second group of electrode and third group electrode, and described first group
The phase difference of electrode and second group of electrode is 180 °, and the phase difference of first group of electrode and the third group electrode is
90°。
Optionally, first group of electrode includes one or more first top electrodes, and multiple first top electrodes are in parallel
Connection；Second group of electrode includes one or more second top electrodes, and multiple second top electrodes are connected in parallel；Described
Three groups of electrodes include one or more third top electrodes, and multiple third top electrodes are connected in parallel.
Optionally, shielded layer is provided between the top electrode and the upper bed-plate.
Optionally, the first insulating layer is provided between the top electrode and the shielded layer.
Optionally, the upper surface of the top electrode is provided with second insulating layer.
Optionally, the shape of the top electrode is round or fan-shaped, and the shape of the lower electrode is round or fan-shaped.
According to specific embodiment provided by the utility model, the utility model discloses following technical effects:
(1) status monitoring, strong antijamming capability, since capacitor is mechanical structure are carried out to micro motor using condenser type detection
And processed together with micro motor, it is insensitive to mechanical oscillation or thermal stress etc., and electronic component is not present, environment is adapted to
Power is strong.
(2) capacitance detecting may exist absolute zero point, that is, mechanical zero point, and often turning an angle can
To carry out zero point correction.
(3) capacitive detecting structure is simple, therefore is easy to be integrated among MEMS micro motor, difficulty of processing and processing cost
Aspect has very big advantage, and due to being platform integration processing, will not occupy additional space.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only the utility model
Some embodiments for those of ordinary skill in the art without any creative labor, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the angle measurement unit embodiment of the utility model micro motor；
Fig. 2 is lower electrode and rotor structure top plan view；
Fig. 3 is two kinds of schematic shapes of lower electrode；
Fig. 4 is top electrode and stator structure top plan view；
Fig. 5 is upper/lower electrode relative position schematic diagram；
Fig. 6-a is projection one of the upper/lower electrode along angular turn direction；
Fig. 6-b is projection two of the upper/lower electrode along angular turn direction；
Fig. 7 is variation relation of the electrode capacitance value with angle.
Drawing reference numeral is as follows:
1- upper bed-plate, 2- stator, 3- shielded layer, the first insulating layer of 4-, 5- top electrode, 6- second insulating layer, 7- friction
Layer, electrode under 8-, 9- rotor, 10- rotor base plate, 11- lower bottom base, 12- bonding structure.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The purpose of the utility model is to provide a kind of angle measurement units of micro motor, its working principle is that in angular turn
When, the variation of capacitance is caused using the variation of relative area between two parallel-plate electrodes, designs reasonable capacitive junctions
Structure obtains precise information by measuring the variation of capacitance to obtain angle value.
Wherein descending electrode is the rotor containing capacitor array, powers on stator extremely containing capacitive detection sensor.Work as angle
When degree rotation, the capacitance before upper/lower electrode can be changed correspondingly, by calculating and algorithm, can establish capacitance and
Rotational angle for relationship.In the actual operation process, capacitor array structure and circuit structure are adjusted, so that output voltage
It is in Sine distribution with rotational angle, the angle position that processing is obtained with each moment is carried out to the voltage signal detected,
Feedback control signal is provided for entire micro motor.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing and have
Body embodiment is described in further detail the utility model.
Fig. 1 is the structural schematic diagram of the angle measurement unit embodiment of the utility model micro motor.It is described as described in Fig. 1
Angle measurement unit includes: several top electrodes 5 and electrode 8 under several；The upper of micro motor is arranged in multiple top electrodes 5
Pedestal 1, multiple top electrodes 5 are on an annulus centered on stator 2, and the stator 2 is arranged in the upper bed-plate 1
On；The lower electrode 8 is arranged on the rotor base plate 10 of micro motor, and multiple lower electrodes 8 are in one centered on rotor 9
Annulus on, the top electrode 5 forms multiple capacitance structures with the lower electrode 8.
Upper bed-plate 1 is used to support top electrode 5 and stator 2.
Stator 2, for driving rotor 8 to rotate.
Shielded layer 3 is provided between top electrode 5 and upper bed-plate 1.Shielded layer 3, for shielding making an uproar for stator 2 and surrounding
Sound improves detection accuracy.
The first insulating layer 4 is provided between top electrode 5 and shielded layer 3, for insulation screen 3 and top electrode 5.
The upper surface of top electrode 5 is provided with second insulating layer 6, top electrode 5 and lower electrode 8 is prevented to be in electrical contact and prevent
Top electrode 5 and ground are in electrical contact.
Frictional layer 7 is additionally provided between stator 2 and rotor 9.
Bonding structure 12 can be to be bonded together with a whole frame, is also possible to two frames and upper bottom respectively
Seat is connected, then is bonded together.
The overall structure of the utility model mainly includes the top structure containing top electrode 5 and stator 2 and containing lower electricity
The bottom structure of pole 8 and rotor 9.During real work, stator 2 and 5 detection structure of top electrode are stationary, rotor 9
It rotates together with lower 8 structure of electrode to periodically change the area between top electrode 5 and lower electrode 8, to change up and down
Capacitor between electrode, the variation by detecting capacitance can obtain the variation of angle.Rotor base plate 10 be used to support and
Rotor 9 and lower electrode 8 are connected, overall structure is then to be packaged together (bonding: to be bonded two panels by 12 bonding structure
Surface cleaning, the homogeneity of atomically flating or heterogeneous semiconductor material or metal material are through surface clean and activation processing, one
It binds directly under fixed condition or is combined by bonding agent, become bonding chip by Van der Waals force, molecular force even atomic force
The technology of one).In technological design, two-part structure is independently designed and is processed, and is finally packaged together again, therefore is made
Standby difficulty is also opposite to decrease.
1, bottom structure (including lower electrode, rotor and pedestal)
The core of capacitance detecting is the shape and distribution of capacitance electrode, and typical layout is as shown in Figure 2.As shown in Fig. 2,
Lower electrod-array includes that the electrode of certain amount N is annularly distributed, and the radius of annular distribution is R.Wherein, most intermediate annulus generation
Table is exactly rotor 9 in Fig. 1, and what outmost annulus represented is exactly the rotor base plate 10 in Fig. 1.Lower electrode 8 is with rotor 9
It processes together, wherein the quantity of lower electrode 8 can be adjusted according to the demand of practical application and actual processing method.When
Rotor 9 and lower electrode 8 after processing is completed, will be assembled together with the pedestal of rotor base plate 10 in Fig. 1, form one completely
Bottom structure.
Wherein, the shape of electrode can be circle and be also possible to sector, as shown in Figure 3.
2, top structure (including top electrode and stator)
Fig. 4 is top electrode and stator structure top plan view, as shown in figure 4, wherein top electrode structure includes 9 electrodes
(being also possible to 6 electrodes or 3 electrodes), wherein 51,54, No. 57 electrodes are connected in parallel to form first group of electrode,
52,55, No. 58 electrodes are connected in parallel to form second group of electrode, and 53,56, No. 59 electrodes are connected in parallel to be formed
Third group electrode.First group of electrode and second group of motor phases difference are 180 °, and first group of electrode is with third group motor phases difference
90 °, i.e., when first group of electrode and lower electrode are completely coincident, second group of electrode just at two electrodes 1/2 at, third
Group electrode is just at the 1/4 of two electrodes.For top electrode structure, the shape of electrode is either circle, is also possible to
It is fan-shaped.Entire top structure processing is realized by the technique of MEMS flow, and the extraction of electrode by TSV or can lead to
The mode for crossing fly line is realized.(TSV, full name are Through Silicon Vias, i.e. interconnecting silicon through holes, are the transmission of electric signal
Channel.)
3, for the capacitance detecting design principle of MEMS micro motor (MEMS: complete entitled MEMS (MEMS, Micro-
Electro-Mechanical System), also referred to as microelectromechanical systems, micro-system, micromechanics etc. are in microelectronics skill
Grow up on the basis of art (semiconductor processing technology), it is micro- to have merged photoetching, burn into film, LIGA, silicon micromachined, non-silicon
The high-tech electronic mechanical devices of the technologies production such as processing and precision machinery processing)
For plane-parallel capacitor, capacitance is
Wherein, S is the masked area of pole plate, unit m2；The node coefficient of ε medium between pole plate；D is two parallel poles
Distance between plate, unit m；ε0For the dielectric constant in vacuum, size is 8.854 × 10-12F/m；εrThe medium between pole plate
Relative dielectric constant, for air εr≈1.When measured parameter changes so that S, d or ε in formula change, capacitor
Amount C also changes therewith.If keeping two of them parameter constant, and only change one of parameter, so that it may the change of the parameter
Change the variation for being converted to capacitance, just can be exchanged into electricity output by measuring circuit.For the utility model, mainly change
The masked area of pole-changing plate changes the size of capacitance.
Fig. 5 gives the schematic diagram of the relative position of upper/lower electrode, wherein dotted line be include three groups of outs of phase difference
Top electrode, solid line are the lower electrod-array that quantity is N.For each electrode, capacitance is
Wherein C1 represents the capacitance of upper/lower electrode overlapping region, and C2 represents the capacitance of Non-overlapping Domain.ε1Indicate the
The dielectric constant of the insulating materials of two insulating layers 6, ε2Indicate the dielectric constant of air, ε2=1, S1Indicate second insulating layer 6
The area of insulating materials, S2The area for indicating lower electrode 8, in this utility model, S1=S2, d1Indicate the thickness of second insulating layer 6
Degree, d2Indicate the distance between second insulating layer 6 and lower electrode 8.
Fig. 6-a and Fig. 6-b gives two kind projections of the upper/lower electrode along angular turn direction, and wherein Fig. 6-a is top electrode
For circle, lower electrode is fan-shaped schematic diagram, and Fig. 6-b is that upper/lower electrode is all circular schematic diagram.It can be obviously from figure
Out, first group with second group of electrode there are 180 ° of phase difference, there are 90 ° of phase differences for first group and third group.When angle changes
When change, the variation of capacitance can be obtained by calculating the variation of relative area.By taking the structure of Fig. 6-a as an example, it is calculated
The variation of capacitor and angle is as shown in fig. 7, wherein descend the number of electrod-array is 12 (or 16 or other are a
Number).
From figure 7 it can be seen that the relationship of capacitance and angle is close to continuous sine relation.In actual detection, meeting
The detection circuit of capacitor is further added, so that the angle of final voltage value and rotation is in complete Sine distribution.And in number
According in treatment process, zero point value is determined in such a way that first group of capacitor and second group of capacitor subtract each other, it in this process, can
To exclude interference of the environment to capacitance, precision is improved；The direction of rotation is judged using first group of capacitor and third group capacitor,
I.e. when first group of capacitor is in maximum value, the variation tendency of third group capacitor is judged, be then for pros if increasing
To if reduction, then be negative direction.
Specific case used herein is expounded the principles of the present invention and embodiment, above embodiments
Explanation be merely used to help understand the method and its core concept of the utility model；Meanwhile for the general technology of this field
Personnel, based on the idea of the present invention, there will be changes in the specific implementation manner and application range.In conclusion
The content of the present specification should not be construed as a limitation of the present invention.
Claims (7)
1. a kind of angle measurement unit of micro motor, which is characterized in that the angle measurement unit include: several top electrodes and
Several lower electrodes；The upper bed-plate of micro motor is arranged in multiple top electrodes, and multiple top electrodes are in one with stator
Centered on annulus on, the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor,
Multiple lower electrodes are on an annulus centered on rotor, and the top electrode and the lower electrode form multiple capacitors
Structure.
2. angle measurement unit according to claim 1, which is characterized in that multiple top electrodes are divided into first group of electricity
Pole, second group of electrode and third group electrode, the phase difference of first group of electrode and second group of electrode are 180 °, described the
The phase difference of one group of electrode and the third group electrode is 90 °.
3. angle measurement unit according to claim 2, which is characterized in that first group of electrode includes one or more
First top electrode, multiple first top electrodes are connected in parallel；Second group of electrode includes one or more second top electrodes,
Multiple second top electrodes are connected in parallel；The third group electrode includes one or more third top electrodes, and multiple described the
Three top electrodes are connected in parallel.
4. angle measurement unit according to claim 1, which is characterized in that between the top electrode and the upper bed-plate
It is provided with shielded layer.
5. angle measurement unit according to claim 4, which is characterized in that between the top electrode and the shielded layer
It is provided with the first insulating layer.
6. angle measurement unit according to claim 1, which is characterized in that the upper surface of the top electrode is provided with
Two insulating layers.
7. angle measurement unit according to claim 1, which is characterized in that the shape of the top electrode is round or fan
Shape, the shape of the lower electrode are round or fan-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201820500733.5U CN208269826U (en) | 2018-04-10 | 2018-04-10 | A kind of angle measurement unit of micro motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820500733.5U CN208269826U (en) | 2018-04-10 | 2018-04-10 | A kind of angle measurement unit of micro motor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108253882A (en) * | 2018-04-10 | 2018-07-06 | 中国工程物理研究院电子工程研究所 | A kind of angle measurement unit of micro motor |
| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
-
2018
- 2018-04-10 CN CN201820500733.5U patent/CN208269826U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108253882A (en) * | 2018-04-10 | 2018-07-06 | 中国工程物理研究院电子工程研究所 | A kind of angle measurement unit of micro motor |
| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
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Granted publication date: 20181221 Termination date: 20210410 |