CN108253882A - A kind of angle measurement unit of micro motor - Google Patents
A kind of angle measurement unit of micro motor Download PDFInfo
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- CN108253882A CN108253882A CN201810315630.6A CN201810315630A CN108253882A CN 108253882 A CN108253882 A CN 108253882A CN 201810315630 A CN201810315630 A CN 201810315630A CN 108253882 A CN108253882 A CN 108253882A
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- 238000005259 measurement Methods 0.000 title claims abstract description 22
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
Abstract
The present invention discloses a kind of angle measurement unit of micro motor, and the angle measurement unit includes：Several top electrodes and electrode under several；Multiple top electrodes are arranged on the upper bed-plate of micro motor, and multiple top electrodes are on an annulus centered on stator, and the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor, and multiple lower electrodes are on an annulus centered on rotor, and the top electrode forms multiple capacitance structures with the lower electrode.The present invention is detected using capacitive way come the state to micro motor, for improving the antijamming capability of device and accuracy of detection.
Description
Technical field
The present invention relates to angle measurement unit field, more particularly to a kind of angle measurement unit of micro motor.
Background technology
Micro motor is also micro motor or micromachine, is that volume, capacity are smaller, output power is generally below hundreds of watts
Motor and purposes, performance and environmental condition require special motor.It is usually used in control system, realizes dynamoelectric signal or energy
The functions such as detection, resolving, amplification, execution or conversion or loaded for gearing, also can be as the AC DC electric of equipment
Source.
At present, micro motor mainly has the application of several respects：Microrobot, miniature low-power-consumption drive and miniature
Medicine detects device.Wherein microrobot is to utilize the characteristics of micro motor size is small, operating voltage is low, control accuracy is high, can
For mobile platform, micromechanics assembling, repair, nanometer positioning etc..It can be used as direction controlling component in robot platform, collect
Into in camera or direction sensor.For miniature low-power-consumption drive, the direction is mainly used for driving rotatable platform,
And multifunctional application is carried out, such as optical information sensing.Meanwhile micro motor high-precision control and continuity turning power can be with
Driving is provided for gyroscope.It can be applied not only to position, navigate and count in counting, can also realize the self-calibration of gyroscope.
The research and making of micromation motor are carried out using MEMS technology, is current external in the field to reach use above purpose
The emphasis of research.In addition, low-power drive is also a big feature of the device, micro-system control and integrated circuit collection can be realized
Into.Still further aspect application is miniature medical detection device, which realizes miniature work mainly also with rotatable platform
Tool operation, intravenous imaging etc..Especially in intravenous imaging progress, rotatable platform is instead of traditional phased array
Row.Because of the introducing of micro supersonic motor, solve that torsion bar existing for rotatable platform is relatively thick, the longer shaking brought is severe,
The problem of not easy to control.
MEMS (Micro-Electro-Mechanical System, MEMS) piezo actuator (piezo actuator
Transduction is realized using the piezoelectric effect of piezoelectric material, and input electrical signal is converted into mechanical energy output, is that MEMS fields are normal
One of actuator) there is small, light weight, be easy to integrate with basal body structure, be cheap, and by the solid-state of material
Crystallization effect generates displacement, and displacement resolution is high, High power output, and it is big to bear load, fast response time, and it is excellent that instantaneous acceleration is big etc.
Gesture has received widespread attention, and is that a kind of micro motor that is suitable for provides the demands such as high-resolution positioning, high dynamic motion feature
MEMS actuator technology.
But based on the micro motor of piezo actuator by piezoelectric material creep, nonlinear influence its movement locus and position
Shifting precision is all relatively low, therefore, it is necessary to implement feedback control to the micro motor based on piezo actuator, so as to be held increase
Row structure obtains movement in line.And it is exactly to being performed to implement feedback control or the most important ring of closed-loop control
The motion state of structure is accurately monitored.
For traditional either larger-size piezo-electric motor or ultrasound electric machine, there are many sides for carrying out status monitoring
Formula, including mechanical, optical profile type and magneto-electric etc..Wherein mechanical sensor precision is limited, and without electric signal output；Optics
Sensor structure is complicated, and to environmental requirement height, expensive, measurement angle is small；Magnetoelectric sensor is compact-sized, precision compared with
Height measures output and is generally electric signal, easily by late-class circuit modulation treatment.Magnetoelectric sensor mainly includes potentiometer type, electricity
Sense formula, Hall-type, mistor formula, reluctance type, magnetostriction type, magnetic-grid-type and condenser type etc..It is existing in industry at present
Sensor it is each it is advantageous also have the shortcomings that respective, if potentiometer type angle sensor structure is simple, output signal is strong, adapt to shake
It is dynamic to wait environment, but it is contact type measurement, and life of product and reliability are bad, and precision is not general also high；For another example photoelectric coding
Utensil has the advantages of precision is high, response is fast, but its structure is relative complex, it is difficult to be integrated into MEMS system.
Invention content
The object of the present invention is to provide a kind of angle measurement unit of micro motor, using capacitive way come the shape to micro motor
State is detected, for improving the antijamming capability of device and accuracy of detection.
To achieve the above object, the present invention provides following schemes：
A kind of angle measurement unit of micro motor, the angle measurement unit include：Under several top electrodes and several
Electrode；Multiple top electrodes are arranged on the upper bed-plate of micro motor, and multiple top electrodes are in one centered on stator
On annulus, the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor, multiple described
Lower electrode is on an annulus centered on rotor, and the top electrode forms multiple capacitance structures with the lower electrode.
Optionally, multiple top electrodes are divided into first group of electrode, second group of electrode and third group electrode, described first group
The phase difference of electrode and second group of electrode is 180 °, and the phase difference of first group of electrode and the third group electrode is
90°。
Optionally, first group of electrode includes one or more first top electrodes, and multiple first top electrodes are in parallel
Connection；Second group of electrode includes one or more second top electrodes, and multiple second top electrodes are connected in parallel；Described
Three groups of electrodes include one or more third top electrodes, and multiple third top electrodes are connected in parallel.
Optionally, it is provided with shielded layer between the top electrode and the upper bed-plate.
Optionally, the first insulating layer is provided between the top electrode and the shielded layer.
Optionally, the upper surface of the top electrode is provided with second insulating layer.
Optionally, for the shape of the top electrode to be round or fan-shaped, the shape of the lower electrode is round or fan-shaped.
According to specific embodiment provided by the invention, the invention discloses following technique effects：
(1) it is detected using condenser type and status monitoring, strong antijamming capability, since capacitance is mechanical structure is carried out to micro motor
And processed together with micro motor, it is insensitive to mechanical oscillation or thermal stress etc., and there is no electronic components, and environment is adapted to
Power is strong.
(2) capacitance detecting may have absolute zero, that is, the zero of machinery, and often turn an angle can
To carry out zero point correction.
(3) capacitive detecting structure is simple, therefore is easy to be integrated among MEMS micro motors, difficulty of processing and processing cost
Aspect has very big advantage, and due to being platform integration processing, will not occupy additional space.
Description of the drawings
It in order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the structure diagram of the angle measurement unit embodiment of micro motor of the present invention；
Fig. 2 is lower electrode and rotor structure top plan view；
Fig. 3 is two kinds of schematic shapes of lower electrode；
Fig. 4 is top electrode and stator structure top plan view；
Fig. 5 is upper/lower electrode relative position schematic diagram；
Fig. 6 is projection of the upper/lower electrode along angular turn direction；
Fig. 7 is variation relation of the electrode capacitance value with angle.
Drawing reference numeral is as follows：
1- upper bed-plates, 2- stators, 3- shielded layers, the first insulating layers of 4-, 5- top electrodes, 6- second insulating layers, 7- frictional layers,
Electrode under 8-, 9- rotors, 10- rotor base plates, 11- lower bottom bases, 12- bonding structures.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.
The object of the present invention is to provide a kind of angle measurement unit of micro motor, operation principle be in angular turn,
Using the variation of relative area between two parallel-plate electrodes so as to cause the variation of capacitance, the capacitance structure of reasonable design,
Precise information is obtained so as to obtain angle value by the variation for measuring capacitance.
Electrode is wherein descended to power on the extremely stator containing capacitive detection sensor for the rotor containing capacitor array.Work as angle
When degree rotation, the capacitance before upper/lower electrode can change correspondingly, by calculating and algorithm, can set up capacitance with
Rotational angle for relationship.In practical operating process, capacitor array structure and circuit structure are adjusted so that output voltage
It is in Sine distribution with rotational angle, the angle position that processing is obtained with each moment is carried out to the voltage signal detected,
Feedback control signal is provided for entire micro motor.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, it is below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Fig. 1 is the structure diagram of the angle measurement unit embodiment of micro motor of the present invention.As described in Figure 1, the angle
Measuring device includes：Several top electrodes 5 and electrode 8 under several；Multiple top electrodes 5 are arranged on the upper bed-plate of micro motor
1, multiple top electrodes 5 are on an annulus centered on stator 2, and the stator 2 is arranged on the upper bed-plate 1；
The lower electrode 8 is arranged on the rotor base plate 10 of micro motor, and multiple lower electrodes 8 are in one centered on rotor 9
On annulus, the top electrode 5 forms multiple capacitance structures with the lower electrode 8.
Upper bed-plate 1 is used to support top electrode 5 and stator 2.
Stator 2, for rotor 8 to be driven to rotate.
Shielded layer 3 is provided between top electrode 5 and upper bed-plate 1.Shielded layer 3, for shielding making an uproar for stator 2 and surrounding
Sound improves accuracy of detection.
The first insulating layer 4 is provided between top electrode 5 and shielded layer 3, for insulation screen 3 and top electrode 5.
The upper surface of top electrode 5 is provided with second insulating layer 6, top electrode 5 and lower electrode 8 is prevented to be in electrical contact and prevent
Top electrode 5 is in electrical contact with ground.
Frictional layer 7 is additionally provided between stator 2 and rotor 9.
Bonding structure 12 can be that two frames and upper bottom are bonded together or distinguished with an integrally frame
Seat is connected, then is bonded together.
The overall structure of the present invention mainly includes the top structure containing top electrode 5 and stator 2 and contains lower 8 He of electrode
The bottom structure of rotor 9.During real work, stator 2 and 5 detection structure of top electrode are stationary, rotor 9 and lower electricity
8 structure of pole is rotated together so as to periodically change the area between top electrode 5 and lower electrode 8, so as to change upper/lower electrode it
Between capacitance, by detecting the variation of capacitance with regard to the variation of angle can be obtained.Rotor base plate 10 is to be used to support and connect to turn
Son 9 and lower electrode 8, overall structure are then to be packaged together (to be bonded by 12 bonding structure：Bonding is clear by two panels surface
Clean, atomically flating homogeneity or heterogeneous semiconductor material or metal material are through surface clean and activation process, in certain condition
Under combined directly in conjunction with or by bonding agent, by Van der Waals force, molecular force even atomic force make what bonding chip was integrally formed
Technology).In technological design, two-part structure is independently designed and is processed, and is finally packaged together again, therefore prepares difficulty
Also it is opposite to decrease.
1st, bottom structure (including lower electrode, rotor and pedestal)
The core of capacitance detecting is shape and the distribution of capacitance electrode, and typical layout is as shown in Figure 2.As shown in Fig. 2,
The electrode that lower electrod-array includes certain amount N is annularly distributed, and the radius of annular distribution is R.Wherein, most intermediate annulus generation
Table is exactly rotor 9 in Fig. 1, and what outmost annulus represented is exactly the rotor base plate 10 in Fig. 1.Lower electrode 8 is with rotor 9
It processes together, wherein the quantity of lower electrode 8 can be adjusted according to the demand of practical application and the processing method of reality.When turn
It after son 9 and lower electrode 8 machine, will be assembled together with the pedestal of rotor base plate in Fig. 1 10, form a complete bottom
Portion's structure.
Wherein, it can also be sector that the shape of electrode, which can be circle, as shown in Figure 3.
2nd, top structure (including top electrode and stator)
Fig. 4 is top electrode and stator structure top plan view, as shown in figure 4, wherein upper electrode arrangement includes 9 electrodes
(can also be 6 electrodes or 3 electrodes), wherein 51,54, No. 57 electrodes are connected in parallel to form first group of electrode,
52nd, 55, No. 58 electrodes are connected in parallel to form second group of electrode, and 53,56, No. 59 electrodes are connected in parallel to form
Three groups of electrodes.First group of electrode and second group of motor phases difference are 180 °, and first group of electrode is with third group motor phases difference
90 °, i.e., when first group of electrode and lower electrode are completely superposed, second group of electrode just at two electrodes 1/2 at, third
Group electrode is just at the 1/4 of two electrodes.For upper electrode arrangement, the shape of electrode either it is round or
It is fan-shaped.Entire top structure processing is to realize that the extraction of electrode can also lead to by TSV by the technique of MEMS flows
The mode for crossing fly line is realized.(TSV, full name are Through Silicon Vias, i.e. interconnecting silicon through holes, are the transmission of electric signal
Channel.)
3rd, for the capacitance detecting design principle (MEMS of MEMS micro motors：Complete entitled MEMS (MEMS, Micro-
Electro-Mechanical System), also referred to as microelectromechanical systems, micro-system, micromechanics etc. are in microelectronics skill
Grow up on the basis of art (semiconductor fabrication), it is micro- to have merged photoetching, burn into film, LIGA, silicon micromachined, non-silicon
The high-tech electronic mechanical devices that the technologies such as processing and precision machinery processing make)
For plane-parallel capacitor, capacitance is
Wherein, masked areas of the S for pole plate, unit m2；The node coefficient of ε media between pole plate；D is two parallel plate electrodes
Between distance, unit m；ε0For the dielectric constant in vacuum, size is 8.854 × 10-12F/m；εrThe phase of medium between pole plate
To dielectric constant, for air εr≈1.When measured parameter changes so that S, d or ε in formula change, capacitance C
Change therewith.If keeping two of which parameter constant, and only change one of parameter, so that it may which the variation of the parameter is converted
For the variation of capacitance, electricity output is just can be exchanged by measuring circuit.For the present invention, mainly change the screening of pole plate
The size that capping accumulates to change capacitance.
Fig. 5 gives the schematic diagram of the relative position of upper/lower electrode, and wherein dotted line is to include three groups of out of phase differences
Top electrode, solid line are the lower electrod-array that quantity is N.For each electrode, capacitance is
Wherein C1 represents the capacitance of upper/lower electrode overlapping region, and C2 represents the capacitance of Non-overlapping Domain.ε1Represent the
The dielectric constant of the insulating materials of two insulating layers 6, ε2Represent the dielectric constant of air, ε2=1, S1Represent the exhausted of second insulating layer 6
The area of edge material, S2Represent the area of lower electrode 8, in this invention, S1=S2, d1Represent the thickness of second insulating layer 6, d2Table
Show the distance between second insulating layer 6 and lower electrode 8.
Fig. 6 gives projection of the upper/lower electrode along angular turn direction, and wherein Fig. 6-a are extremely round to power on, lower electrode
For fan-shaped schematic diagram, Fig. 6-b are that upper/lower electrode is all circular schematic diagram.From the graph, it is apparent that first group and the
Two groups of electrodes are there are 180 ° of phase difference, and there are 90 ° of phase differences for first group and third group.When angulation change, can pass through
The variation for calculating relative area obtains the variation of capacitance.The capacitance being calculated by taking the structure of Fig. 6-a as an example and the change of angle
Change as shown in fig. 7, the number for wherein descending electrod-array is 12 (or 16 or other numbers).
From figure 7 it can be seen that the relationship of capacitance and angle is close to continuous sine relation.In practical detection, meeting
Further add the detection circuit of capacitance so that final voltage value is in complete Sine distribution with the angle rotated.And in number
According in processing procedure, zero value is determined in a manner that first group of capacitance and second group of capacitance subtract each other, it in this process, can
To exclude interference of the environment to capacitance, precision is improved；The direction of rotation is judged using first group of capacitance and third group capacitance,
I.e. when first group of capacitance is in maximum value, the variation tendency of third group capacitance is judged, be then for pros if increasing
To if reduction, then be negative direction.
Specific case used herein is expounded the principle of the present invention and embodiment, and above example is said
The bright method and its core concept for being merely used to help understand the present invention；Meanwhile for those of ordinary skill in the art, foundation
The thought of the present invention, in specific embodiments and applications there will be changes.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (7)
1. a kind of angle measurement unit of micro motor, which is characterized in that the angle measurement unit includes：Several top electrodes and
Several lower electrodes；Multiple top electrodes are arranged on the upper bed-plate of micro motor, and multiple top electrodes are in one with stator
Centered on annulus on, the stator is arranged on the upper bed-plate；The lower electrode is arranged on the rotor base plate of micro motor,
Multiple lower electrodes are on an annulus centered on rotor, and the top electrode forms multiple capacitances with the lower electrode
Structure.
2. angle measurement unit according to claim 1, which is characterized in that multiple top electrodes are divided into first group of electricity
Pole, second group of electrode and third group electrode, the phase difference of first group of electrode and second group of electrode is 180 °, described the
The phase difference of one group of electrode and the third group electrode is 90 °.
3. angle measurement unit according to claim 2, which is characterized in that first group of electrode includes one or more
First top electrode, multiple first top electrodes are connected in parallel；Second group of electrode includes one or more second top electrodes,
Multiple second top electrodes are connected in parallel；The third group electrode includes one or more third top electrodes, and multiple described the
Three top electrodes are connected in parallel.
4. angle measurement unit according to claim 1, which is characterized in that between the top electrode and the upper bed-plate
It is provided with shielded layer.
5. angle measurement unit according to claim 4, which is characterized in that between the top electrode and the shielded layer
It is provided with the first insulating layer.
6. angle measurement unit according to claim 1, which is characterized in that is provided in the upper surface of the top electrode
Two insulating layers.
7. angle measurement unit according to claim 1, which is characterized in that the shape of the top electrode is round or fan
Shape, the shape of the lower electrode is round or fan-shaped.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044253A (en) * | 2019-05-27 | 2019-07-23 | 中国工程物理研究院电子工程研究所 | A kind of micro motor and embedded angle measurement unit |
| CN117329965A (en) * | 2023-12-01 | 2024-01-02 | 珠海格力电器股份有限公司 | Angle detection device |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5189323A (en) * | 1991-12-19 | 1993-02-23 | The Trustees Of Princeton University | Rotary, vertical-drive, tethered micromotor |
| CN1109583A (en) * | 1993-10-19 | 1995-10-04 | 汉斯·乌尔里希·迈耶 | Instrument for measuring length or angles |
| DE10255578A1 (en) * | 2002-11-28 | 2004-06-09 | Valeo Wischersysteme Gmbh | Device for capacitive determination of motor shaft rotation angle and revolution rate has oscillation circuit with capacitor with electrodes rotatable relative to each other and microcontroller |
| US20060028215A1 (en) * | 2004-08-06 | 2006-02-09 | John Berting | System and method for measurement of small-angle or small-displacement |
| KR20090109854A (en) * | 2008-04-16 | 2009-10-21 | (주)케이엠비앤센서 | Non-contact capacitive type rotation sensor and angular detecting circuit using the same |
| EP2270433A2 (en) * | 2009-07-04 | 2011-01-05 | Camille Bauer AG | Capacitative rotation angle sensor |
| CN103968750A (en) * | 2014-05-09 | 2014-08-06 | 重庆理工大学 | Electric field type time-grating angular displacement sensor |
| JP2016031332A (en) * | 2014-07-30 | 2016-03-07 | 栃木県 | Capacitance type angle detecting device |
| JP2017072468A (en) * | 2015-10-07 | 2017-04-13 | アルプス電気株式会社 | Input device |
| CN106643470A (en) * | 2016-12-26 | 2017-05-10 | 清华大学 | Absolute type capacitor angle displacement measurement sensor |
| US20170350731A1 (en) * | 2014-12-17 | 2017-12-07 | Oriental Motor Co. Ltd. | Electrostatic encoder |
| CN208269826U (en) * | 2018-04-10 | 2018-12-21 | 中国工程物理研究院电子工程研究所 | A kind of angle measurement unit of micro motor |
-
2018
- 2018-04-10 CN CN201810315630.6A patent/CN108253882A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5189323A (en) * | 1991-12-19 | 1993-02-23 | The Trustees Of Princeton University | Rotary, vertical-drive, tethered micromotor |
| CN1109583A (en) * | 1993-10-19 | 1995-10-04 | 汉斯·乌尔里希·迈耶 | Instrument for measuring length or angles |
| DE10255578A1 (en) * | 2002-11-28 | 2004-06-09 | Valeo Wischersysteme Gmbh | Device for capacitive determination of motor shaft rotation angle and revolution rate has oscillation circuit with capacitor with electrodes rotatable relative to each other and microcontroller |
| US20060028215A1 (en) * | 2004-08-06 | 2006-02-09 | John Berting | System and method for measurement of small-angle or small-displacement |
| KR20090109854A (en) * | 2008-04-16 | 2009-10-21 | (주)케이엠비앤센서 | Non-contact capacitive type rotation sensor and angular detecting circuit using the same |
| EP2270433A2 (en) * | 2009-07-04 | 2011-01-05 | Camille Bauer AG | Capacitative rotation angle sensor |
| CN103968750A (en) * | 2014-05-09 | 2014-08-06 | 重庆理工大学 | Electric field type time-grating angular displacement sensor |
| JP2016031332A (en) * | 2014-07-30 | 2016-03-07 | 栃木県 | Capacitance type angle detecting device |
| US20170350731A1 (en) * | 2014-12-17 | 2017-12-07 | Oriental Motor Co. Ltd. | Electrostatic encoder |
| JP2017072468A (en) * | 2015-10-07 | 2017-04-13 | アルプス電気株式会社 | Input device |
| CN106643470A (en) * | 2016-12-26 | 2017-05-10 | 清华大学 | Absolute type capacitor angle displacement measurement sensor |
| CN208269826U (en) * | 2018-04-10 | 2018-12-21 | 中国工程物理研究院电子工程研究所 | A kind of angle measurement unit of micro motor |
Non-Patent Citations (2)
| Title |
|---|
| 张健, 沈德新, 卢建国, 王渭源: "微型压电超声马达定子表面振动特性分析", 压电与声光, no. 01, pages 64 - 67 * |
| 黄晓刚;刘武;邵诗逸;陈文元;张卫平;: "磁悬浮转子微陀螺电容结构设计", 传感器与微系统, no. 01, pages 41 - 43 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044253A (en) * | 2019-05-27 | 2019-07-23 | 中国工程物理研究院电子工程研究所 | A kind of micro motor and embedded angle measurement unit |
| CN117329965A (en) * | 2023-12-01 | 2024-01-02 | 珠海格力电器股份有限公司 | Angle detection device |
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