CN106643455B - A kind of condenser type rotation displacement transducer - Google Patents
A kind of condenser type rotation displacement transducer Download PDFInfo
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- CN106643455B CN106643455B CN201611215195.7A CN201611215195A CN106643455B CN 106643455 B CN106643455 B CN 106643455B CN 201611215195 A CN201611215195 A CN 201611215195A CN 106643455 B CN106643455 B CN 106643455B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
Abstract
The present invention relates to a kind of condenser types to revolve displacement transducer, which is characterized in that the displacement sensor includes sensitive structure and demodulator circuit；Sensitive structure includes dynamic ruler and scale, and dynamic ruler and scale are arranged in parallel, and moves the sinusoidal sensitive electrode of ruler inside parallel setting two, coupling electrode is arranged between two sinusoidal sensitive electrodes, and two sinusoidal sensitive electrodes and coupling electrode are equipotentiality body；Two acquisition electrodes are arranged in scale inside parallel, setting excitation electrode between two acquisition electrodes；Demodulator circuit includes that rotation becomes demodulation module, C-V conversion module, differential amplification module, error compensation module and power module, rotation becomes demodulation module outgoing carrier signal and obtains the orthogonal rotation varying signal of bigness scale amount through C-V conversion module and differential amplification module after processing is sent to sensitive structure and carefully measure orthogonal rotation varying signal, and carry out error compensation after rotation change demodulation module obtains the displacement of bigness scale amount and thin measurement is displaced and obtain absolute displacement, the present invention can be widely applied in Non-Contact Displacement Capacitance Sensor.
Description
Technical field
The present invention relates to a kind of displacement sensors, revolve displacement transducer especially with regard to a kind of condenser type, belong to displacement
Sensor field.
Background technique
With the continuous development of science and technology, the demand of high precision position shift measurement and non-cpntact measurement is more and more, capacitor
The application surface of micro-measuring technique is also more and more wider, with distribution capacity existing for capacitance sensor and it is non-linear the disadvantages of obtain gram
Clothes, high-precision, high stability capacitance measurement product come out one after another, the achievable resolution ratio of high-accuracy capacitor micrometer is high,
And there is preferable Frequency Response, therefore become the several of high-precision micromotion platform feedback control in recent years and predominantly detect sensor
One of.
But existing capacitive displacement transducer still has the disadvantages of small range and poor dynamic, especially cannot
Take into account high-precision and wide range.
Summary of the invention
In view of the above-mentioned problems, the object of the present invention is to provide the condenser type rotations that one kind can take into account high-precision and wide range to become
Displacement sensor.
To achieve the above object, the present invention takes following technical scheme：A kind of condenser type rotation displacement transducer, feature
It is, which includes sensitive structure and demodulator circuit；The sensitive structure includes dynamic ruler and scale disposed in parallel,
The dynamic ruler includes two sinusoidal sensitive electrodes and a coupling electrode, and the scale includes two acquisition electrodes and an excitation electrode；Institute
The inside parallel setting number of cycles difference of ruler and not described two sinusoidal sensitive electrodes of common divisor are stated, described two is sinusoidal quick
The coupling electrode is set between sense electrode, and described two sinusoidal sensitive electrodes and coupling electrode are equipotentiality body；The scale
Two acquisition electrode is arranged in inside parallel, and the excitation electrode is arranged between two acquisition electrode；Two acquisition electrode
Bigness scale amount capacitor and thin measurement capacitor are formed with two sinusoidal sensitive electrode faces, the excitation electrode and coupling electrode face are formed
Coupled capacitor；The demodulator circuit include rotation become demodulation module, C-V conversion module, differential amplification module, error compensation module and
Power module；The rotation becomes demodulation module and sends the excitation electrode after processing for the carrier signal of output, and passes through institute
It states coupled capacitor and is applied to the coupling electrode, carrier signal is transmitted to described two sinusoidal sensitive electrodes by the coupling electrode,
And two acquisition electrode is applied to by bigness scale amount capacitor and thin measurement capacitor respectively and obtains bigness scale amount capacitance signal and carefully surveys
Capacitance signal is measured, bigness scale amount capacitance signal and thin measurement capacitance signal are respectively successively through the C-V conversion module and differential amplification
Module obtains the orthogonal rotation varying signal of bigness scale amount and carefully measures orthogonal rotation varying signal, the orthogonal rotation varying signal of bigness scale amount and carefully measures orthogonal
Rotation varying signal becomes demodulation module through the rotation and obtains the displacement of bigness scale amount and thin measurement displacement, and the error compensation module is to bigness scale amount
Displacement and thin measurement displacement carry out that absolute displacement is obtained by calculation after error compensation, the power module be used for for each component into
Row power supply.
Further, the demodulator circuit further includes amplification module, prepositive low frequency filter module, carrier signal conditioning module
With postposition low-pass filtering module；The carrier signal that the amplification module is used to become the rotation demodulation module output amplifies place
Reason；The prepositive low frequency filter module is for being filtered the signal exported through the pre-amplifying module；The load
Wave signal conditioning module is for improving the signal exported through the prepositive low frequency filter module；The postposition low-pass filtering
Module is for being filtered the signal exported through the differential amplification module.
Further, the relative displacement information of the dynamic ruler and scale is converted to by bigness scale amount capacitor and thin measurement capacitor
Four tunnel bigness scale amount capacitance signals and four tunnels carefully measure capacitance signal, and detailed process is：Described two sinusoidal sensitive electrodes are function
f1(x)=d+ τ (sin (2 π N*x/D+1)) and function f2(x) strip region that=d+ τ (sin (2 π N*x/D-1)) is surrounded, wherein
D indicates the distance of coupling electrode described in the sinusoidal sensitive electrode center deviation, and τ indicates the one of the sinusoidal sensitive electrode width
Half, N indicate the sinusoidal cycles number for being included in strip region, and D indicates the corresponding length of N number of sinusoidal cycles；In the sine
In one sinusoidal cycles of sensitive electrode, the acquisition electrode of face is divided into a rectangular area at interval of 90 °, one just
Four rectangular areas being divided into the string period are expressed as S0、S90、S180And S270, four rectangular areas are again by the sine
The center line of sensitive electrode is divided into eight rectangular areas up and down, is expressed as SOn 0、SOn 90、SOn 180、SOn 270、SUnder 0、SUnder 90、
SUnder 180And SUnder 270, by region SOn 0Join domain SUnder 180, region SOn 90Join domain SUnder 270, region SOn 180Join domain SUnder 0And
Region SOn 270Join domain SUnder 90The positive area of the sinusoidal sensitive electrode and acquisition electrode is obtained with the dynamic ruler and scale phase
To four face region S of change in displacement1、S2、S3And S4, it is expressed as：
S1=A+B sin (2 π N*x/D)；
S2=A-B sin (2 π N*x/D)；
S3=A+B cos (2 π N*x/D)；
S4=A-B cos (2 π N*x/D),
Wherein, A indicates the DC component of the sinusoidal sensitive electrode, and B indicates the amplitude of the sinusoidal sensitive electrode.It will be every
Four face regions that sine sensitive electrode described in one sinusoidal cycles and acquisition electrode are formed, which accordingly connect, to be obtained：
S1=N* (A+B sin (2 π N*x/D))；
S2=N* (A-B sin (2 π N*x/D))；
S3=N* (A+B cos (2 π N*x/D))；
S4=N* (A-B cos (2 π N*x/D)),
The multistage capacitor that four face regions in one sinusoidal cycles are formed is expressed as C1、C2、C3And C4, and
By the multistage capacitor C of N number of sinusoidal cycles in described two sinusoidal sensitive electrodes1、C2、C3And C4Corresponding connection obtains four tunnel bigness scales
Measure capacitance signal CN1、CN2、CN3And CN4And four tunnel carefully measure capacitance signal CN1、CN2、CN3And CN4。
Further, four tunnel bigness scale amount capacitance signals and four tunnels carefully measure capacitance signal through the C-V conversion module and difference
Two-way bigness scale amount sine rotation varying signal is obtained after dividing amplification module and two-way carefully measures sinusoidal rotation varying signal, and detailed process is：Four
It is equal that road bigness scale amount capacitance signal and four tunnels carefully measure the four road voltage signals that capacitance signal is converted by the C-V conversion module
It can be expressed as：
U1=U sin (wt) * (A+B sin (2 π N*x/D))；
U2=U sin (wt) * (A-B sin (2 π N*x/D))；
U3=U sin (wt) * (A+B cos (2 π N*x/D))；
U4=U sin (wt) * (A-B cos (2 π N*x/D)),
Wherein, U indicate output voltage amplitude, sin (wt) indicate it is described rotation become demodulation module output frequency into w just
String pumping signal；The thin measurement voltage signal of the thick measurement voltage signal in four roads and four tunnels, which inputs in the differential amplification module, obtains two
Road bigness scale amount sine rotation varying signal and two-way carefully measure sinusoidal rotation varying signal, are expressed as：
UThick sin=U sin (wt) sin (2 π N2*xSlightly/D)；
UThick cos=U sin (wt) cos (2 π N2*xSlightly/D)；
UThin sin=U sin (wt) sin (2 π N1*xCarefully/D)；
UThin cos=U sin (wt) cos (2 π N1*xCarefully/ D),
Wherein, N1And N2The sinusoidal number of sine sensitive electrode described in bigness scale amount capacitor and thin measurement capacitor is respectively indicated,
And N1And N2There is no common divisor, xSlightlyIt indicates to resolve obtained bigness scale amount displacement, xCarefullyIt indicates to resolve obtained thin measurement displacement.
Further, the error compensation module carries out error compensation and obtains absolutely to the displacement of bigness scale amount and thin measurement displacement
Displacement, is embodied as：The sine wave and cosine wave table of varying signal are revolved by the two-way sine that the differential amplification module obtains
It is shown as：
Wherein, x indicates dynamic ruler 1-1 at a distance from the measurement point of scale 1-2 relative displacement and origin；A0And B0Indicate orthogonal
The DC component of string varying signal；AmAnd BmIndicate the amplitude of orthogonal string varying signal,WithFor signal amplitude error source；WithIt indicates the sum of higher hamonic wave, is harmonic component error source；δeIt indicates electric noise, is
Noise source；It is expressed as through the compensated penalty function of the error compensation module：
xR=xC+(A cos(2πN*x/D)+B cos(4πN*x/D)+C cos(8πN*x/D))
Wherein, xRFor compensated shift value, xCFor the shift value before compensation, A, B and C are the parameter of penalty function, xSlightlyWith
xCarefullyX is obtained after compensatedR is thickAnd xR is thin, then by formula xR is thick≈n*xR is thinIt calculates thin measurement displacement and is displaced weight relative to bigness scale amount
Multiple number of cycles n, and pass through formula xIt is real=n*xR is thinAbsolute displacement is calculated.
The invention adopts the above technical scheme, which has the following advantages：1, the present invention is based on rotations to become demodulation techniques reality
The measurement being now displaced is compared existing Non-Contact Displacement Capacitance Sensor, can be easier to realize under single incentive action
High-precision and large range measuring, dynamic tracking capabilities are more prominent.2, the present invention becomes demodulation module through rotation by two-way measurement
Thin displacement and bigness scale displacement are obtained, and then absolute by obtaining after error compensation module progress error compensation according to coresidual theorem
Displacement, circuit structure is simple and easy to operate, is excellent in physics and mechanical contamination, can be widely applied to contactless electricity
Hold in displacement sensor.
Detailed description of the invention
Fig. 1 is the principle of the present invention schematic diagram；
Fig. 2 is the structural schematic diagram of scale and dynamic ruler in the present invention；
Fig. 3 is the schematic diagram of the section structure of Fig. 2；
Fig. 4 is the distribution of electrodes schematic diagram that ruler is moved in the present invention；
Fig. 5 is the distribution of electrodes schematic diagram of scale in the present invention；
Fig. 6 is the connection schematic diagram that capacitor is measured in the present invention；
Fig. 7 is equivalent circuit diagram of the invention；
Fig. 8 is the modulated rear standard COS function waveform diagram exported of sensitive structure in the present invention；
Fig. 9 is the modulated rear standard SIN function waveform diagram exported of sensitive structure in the present invention；
Figure 10 is the waveform diagram of thin measuring signal and thick measuring signal that the present invention exports.
Specific embodiment
Come to carry out detailed description to the present invention below in conjunction with attached drawing.It should be appreciated, however, that attached drawing has been provided only more
Understand the present invention well, they should not be interpreted as limitation of the present invention.
As shown in Fig. 1~5, condenser type rotation displacement transducer of the invention includes sensitive structure 1 and demodulator circuit 2, quick
Feel structure 1 include an a dynamic ruler 1-1 and scale 1-2, demodulator circuit 2 include one rotation become demodulation module 2-1, an amplification module 2-2,
One prepositive low frequency filter module 2-3, a carrier signal conditioning module 2-4, four C-V conversion module 2-5, two differential amplification module 2-
6, a postposition low-pass filtering module 2-7, an error compensation module 2-8, a main processor modules 2-9 and a power module 2-10,
Wherein, it moves ruler 1-1 and scale 1-2 to be arranged in parallel, moving ruler 1-1 includes a two sine sensitive electrode 1-1-1 and coupling electrode 1-1-
2, scale 1-2 include the excitation of two acquisition electrode 1-2-1 and one electrode 1-2-2.
Movement parts are fixedly connected on the outside of dynamic ruler 1-1, the inside parallel setting number of cycles for moving ruler 1-1 is different and no public
Coupling electrode 1-1-2 is set between the two of approximate number sinusoidal sensitive electrode 1-1-1, two sinusoidal sensitive electrode 1-1-1, and two is sinusoidal quick
Sense electrode 1-1-1 and coupling electrode 1-1-2 is equipotentiality body；Two acquisition electrode 1-2-1 are arranged in the inside parallel of scale 1-2, and two adopt
Setting excitation electrode 1-2-2 between collector 1-2-1；The sinusoidal sensitive electrode 1-1-1 face of two acquisition electrode 1-2-1 and two is formed
Bigness scale amount capacitor and thin measurement capacitor, motivate electrode 1-2-2 and coupling electrode 1-1-2 face to form coupled capacitor.
Rotation becomes demodulation module 2-1 for the carrier signal of output through amplification module 2-2, prepositive low frequency filter module 2-3 and load
It is sent to excitation electrode 1-2-2 after wave signal conditioning module 2-4, and coupling electrode 1-1-2 is applied to by coupled capacitor, couples
Carrier signal is transmitted to two sinusoidal sensitive electrode 1-1-1 by electrode 1-1-2, and passes through bigness scale amount capacitor and thin measurement capacitor respectively
It is applied to that two acquisition electrode 1-2-1 obtain four tunnel bigness scale amount capacitance signals and carefully to measure capacitance signal (unlimited as example on four tunnels
In this, can be determined according to actual needs), four tunnel bigness scale amount capacitance signals and four tunnels carefully measure capacitance signal and pass through respectively
One C-V conversion module 2-5 is converted into voltage signal.Convert the thick measurement voltage signal in tetra- road Hou and the thin measurement voltage signal in four tunnels
By obtaining the orthogonal rotation varying signal of two-way bigness scale amount after two differential amplification module 2-6 and two-way carefully measures orthogonal rotation varying signal, two
The orthogonal rotation varying signal of road bigness scale amount and two-way carefully measure orthogonal rotation varying signal and lead to after postposition low-pass filtering module 2-7 is filtered
Overwinding becomes demodulation module 2-1 and obtains the displacement of bigness scale amount and thin measurement displacement.Error compensation module 2-8 is to the displacement of bigness scale amount and thin survey
Amount displacement carries out error compensation, and combines the displacement of compensated bigness scale amount and thin measurement displacement to obtain absolute position according to coresidual theorem
Move and be sent in main processor modules 2-9, power module 2-10 be used to revolve for condenser type of the invention displacement transducer into
Row power supply.
In a preferred embodiment, two sine sensitive electrode 1-1-1 in the present invention are function f1(x)=d+ τ
(sin (2 π N*x/D+1)) and function f2(x) strip region that=d+ τ (sin (2 π N*x/D-1)) is surrounded, as shown in fig. 6, its
In, d indicates the distance of sinusoidal sensitive electrode 1-1-1 center deviation coupling electrode 1-1-2, and τ indicates sinusoidal sensitive electrode 1-1-1 wide
The half of degree, N indicate the sinusoidal cycles number for being included in strip region, and D indicates the corresponding length of N number of sinusoidal cycles.Just
In a sinusoidal cycles of string sensitive electrode 1-1-1, the acquisition electrode 1-2-1 of face is divided into a rectangle region at interval of 90 °
Domain, four rectangular areas being divided into a sinusoidal cycles are expressed as S0、S90、S180And S270, four rectangular areas are again
Eight rectangular areas are divided into up and down by the center line of sinusoidal sensitive electrode 1-1-1, are expressed as SOn 0、SOn 90、SOn 180、
SOn 270、SUnder 0、SUnder 90、SUnder 180And SUnder 270, by region SOn 0Join domain SUnder 180, region SOn 90Join domain SUnder 270, region SOn 180Even
Meet region SUnder 0And region SOn 270Join domain SUnder 90Obtain the right opposite of sine sensitive electrode 1-1-1 and acquisition electrode 1-2-1
Four face region S of product servo-actuated ruler 1-1 and scale 1-2 relative displacement variation1、S2、S3And S4, it is expressed as：
S1=A+B sin (2 π N*x/D)；
S2=A-B sin (2 π N*x/D)；
S3=A+B cos (2 π N*x/D)；
S4=A-B cos (2 π N*x/D),
Wherein, A indicates the DC component of sinusoidal sensitive electrode 1-1-1, and B indicates the amplitude of sinusoidal sensitive electrode 1-1-1.It will
Four face regions that sine sensitive electrode 1-1-1 and acquisition electrode 1-2-1 is formed in each sinusoidal cycles, which accordingly connect, to be obtained：
S1=N* (A+B sin (2 π N*x/D))；
S2=N* (A-B sin (2 π N*x/D))；
S3=N* (A+B cos (2 π N*x/D))；
S4=N* (A-B cos (2 π N*x/D)),
The multistage capacitor that four face regions in one sinusoidal cycles are formed is expressed as C1、C2、C3And C4, and
By the multistage capacitor C of N number of sinusoidal cycles in two sinusoidal sensitive electrode 1-1-11、C2、C3And C4Corresponding connection obtains four tunnel bigness scales
Measure capacitance signal CN1、CN2、CN3And CN4And four tunnel carefully measure capacitance signal CN1、CN2、CN3And CN4, at this point, moving ruler 1-1 and determining
The relative displacement information of ruler 1-2 is by bigness scale amount capacitor and thin measurement capacitor is converted to four tunnel bigness scale amount capacitance signals and four tunnels are thin
Measure capacitance signal.
In a preferred embodiment, as shown in fig. 7, four obtained tunnel bigness scale amount capacitance signals and four tunnels carefully measure electricity
Hold signal to be illustrated as by the four road voltage signals that C-V conversion module 2-5 is converted into：
U1=U sin (wt) * (A+B sin (2 π N*x/D))；
U2=U sin (wt) * (A-B sin (2 π N*x/D))；
U3=U sin (wt) * (A+B cos (2 π N*x/D))；
U4=U sin (wt) * (A-B cos (2 π N*x/D)),
Wherein, U indicates the amplitude of output voltage, can be calculated by d, τ and D, and sin (wt) indicates that rotation becomes solution mode transfer
The sinusoidal excitation signal that the frequency of block 2-1 output is w；The thin measurement voltage signal input two of the thick measurement voltage signal in four roads and four tunnels
Two-way bigness scale amount sine rotation varying signal is obtained in differential amplification module 2-6 and two-way carefully measures sinusoidal rotation varying signal such as Fig. 8~10
It is shown, it is expressed as：
UThick sin=U sin (wt) sin (2 π N2*xSlightly/D)；
UThick cos=U sin (wt) cos (2 π N2*xSlightly/D)；
UThin sin=U sin (wt) sin (2 π N1*xCarefully/D)；
UThin cos=U sin (wt) cos (2 π N1*xCarefully/ D),
Wherein, N1And N2Respectively indicate the sine of sinusoidal sensitive electrode 1-1-1 in bigness scale amount capacitor and thin measurement capacitor
Number, to realize absolute measurement, N in design1And N2There is no common divisor, obtained two-way bigness scale amount sine rotation varying signal and two-way is thin
The sinusoidal rotation varying signal of measurement becomes demodulation module 2-1 by rotation and resolves to obtain bigness scale amount displacement xSlightlyWith thin measurement displacement xCarefully。
In a preferred embodiment, condenser type of the invention rotation displacement transducer needs to lead to after completing displacement measurement
It crosses error compensation module 2-8 and carries out error compensation, due to the presence of all kinds of errors, obtained by two differential amplification module 2-6
The sine wave and cosine wave of two-way sine rotation varying signal are expressed as：
Wherein, x indicates to move ruler 1-1 at a distance from the measurement point of scale 1-2 relative displacement and origin, A0And B0Indicate orthogonal
The DC component of string varying signal；AmAnd BmIndicate the amplitude of orthogonal string varying signal,WithFor signal amplitude error source；WithIt indicates the sum of higher hamonic wave, is harmonic component error source；δeIndicate that electricity is made an uproar
Sound is noise source, and absolute displacement signal is made of above-mentioned four part, trigonometric function model protection is established, through error compensation mould
The compensated penalty function of block 2-8 is expressed as：
xR=xC+(A cos(2πN*x/D)+B cos(4πN*x/D)+C cos(8πN*x/D))
Wherein, xRFor compensated shift value, xCFor the shift value before compensation, A, B and C are the parameter of penalty function, xSlightlyWith
xCarefullyX is obtained after compensatedR is thickAnd xR is thin, then by formula xR is thick≈n*xR is thinIt calculates thin measurement displacement and is displaced weight relative to bigness scale amount
Multiple number of cycles n, and pass through formula xIt is real=n*xR is thinAbsolute displacement is calculated and is sent in main processor modules 2-9.?
Utilize the bigness scale amount displacement x after error compensationSlightlyWith thin measurement displacement xCarefullyIt obtains having used coresidual theorem during absolute displacement.
In a preferred embodiment, the spacing for moving ruler 1-1 and scale 1-2 can be set to 1mm.
In a preferred embodiment, every C-V conversion module 2-5 can use the feedback capacity and 100M of 10pF
Feedback resistance, for guaranteeing high s/n ratio and the loss of minimum error.
Below by the specifically used process of the specific embodiment condenser type that the present invention will be described in detail rotation displacement transducer：
For the present invention in use, movement parts to be measured are connected dynamic ruler 1-1, rotation at this time becomes demodulation module 2-1 output carrier wave all the way
In on excitation electrode 1-2-2, excitation electrode 1-2-2's signal function and coupling electrode 1-1-2 intercouples in coupling electrode 1-1-2
Upper generation voltage, and then a carrier signal is generated on two sinusoidal sensitive electrode 1-1-1, two sinusoidal sensitive electrode 1-1-1
With two acquisition electrode 1-2-1 faces, by the modulation of two sinusoidal sensitive electrode 1-1-1 sinusoidal cycles, in two acquisition electrode 1-2-1
The orthogonal signalling for being displaced by modulates information are obtained, orthogonal signalling are through C-V conversion module 2-5, differential amplification module 2-6 and postposition
Orthogonal rotation varying signal is converted to after low-pass filtering module 2-7, rotation becomes demodulation module 2-1 and becomes by the complete pairwise-orthogonal rotation of carrier signal
The demodulation of signal simultaneously obtains the displacement of bigness scale amount and thin measure is displaced, then by error compensation module 2-8 to the displacement of bigness scale amount and carefully
The error of measurement displacement compensates, and finally combines the displacement of compensated bigness scale amount and thin measurement displacement to obtain according to coresidual theorem
Absolute displacement.
The various embodiments described above are merely to illustrate the present invention, wherein the structure of each component, connection type and manufacture craft etc. are all
It can be varied, all equivalents and improvement carried out based on the technical solution of the present invention should not exclude
Except protection scope of the present invention.
Claims (5)
1. a kind of condenser type revolves displacement transducer, which is characterized in that the displacement sensor includes sensitive structure and demodulator circuit；
The sensitive structure includes dynamic ruler and scale disposed in parallel, and the dynamic ruler includes two sinusoidal sensitive electrodes and a coupling electricity
Pole, the scale include two acquisition electrodes and an excitation electrode；The inside parallel setting number of cycles of the dynamic ruler is different and does not have
There are described two sinusoidal sensitive electrodes of common divisor, the coupling electrode, and described two are set between described two sinusoidal sensitive electrodes
Sinusoidal sensitive electrode and coupling electrode are equipotentiality body；Two acquisition electrode is arranged in the inside parallel of the scale, and described two adopt
The excitation electrode is set between collector；Two acquisition electrode and two sinusoidal sensitive electrode faces formed bigness scale amount capacitors and
Thin measurement capacitor, the excitation electrode and coupling electrode face form coupled capacitor；
The demodulator circuit includes that rotation becomes demodulation module, C-V conversion module, differential amplification module, error compensation module and power supply
Module；The rotation becomes demodulation module and sends the excitation electrode after processing for the carrier signal of output, and passes through the coupling
It closes capacitor and is applied to the coupling electrode, carrier signal is transmitted to described two sinusoidal sensitive electrodes by the coupling electrode, and is divided
Two acquisition electrode is not applied to by bigness scale amount capacitor and thin measurement capacitor and obtains bigness scale amount capacitance signal and thin measurement electricity
Hold signal, bigness scale amount capacitance signal and thin measurement capacitance signal are respectively successively through the C-V conversion module and differential amplification module
It obtains the orthogonal rotation varying signal of bigness scale amount and carefully measures orthogonal rotation varying signal, the orthogonal rotation varying signal of bigness scale amount and carefully measure orthogonal rotation and become
Signal becomes demodulation module through the rotation and obtains the displacement of bigness scale amount and thin measurement displacement, and the error compensation module is displaced bigness scale amount
Absolute displacement is obtained by calculation after carrying out error compensation with thin measurement displacement, the power module is used to be supplied for each component
Electricity.
2. a kind of condenser type as described in claim 1 revolves displacement transducer, which is characterized in that the demodulator circuit further includes
Amplification module, prepositive low frequency filter module, carrier signal conditioning module and postposition low-pass filtering module；
The carrier signal that the amplification module is used to become the rotation demodulation module output amplifies processing；
The prepositive low frequency filter module is for being filtered the signal exported through the pre-amplifying module；
The carrier signal conditioning module is for improving the signal exported through the prepositive low frequency filter module；
The postposition low-pass filtering module is for being filtered the signal exported through the differential amplification module.
3. a kind of condenser type as claimed in claim 2 revolves displacement transducer, which is characterized in that the phase of the dynamic ruler and scale
To displacement information is by bigness scale amount capacitor and thin measurement capacitor is converted to four tunnel bigness scale amount capacitance signals and four tunnels carefully measure capacitor
Signal, detailed process are：
Described two sinusoidal sensitive electrodes are function f1(x)=d+ τ (sin (2 π N*x/D+1)) and function f2(x)=d+ τ (sin (2
π N*x/D-1)) strip region that surrounds, wherein d indicate coupling electrode described in the sinusoidal sensitive electrode center deviation away from
From τ indicates the half of the sinusoidal sensitive electrode width, and N indicates the sinusoidal cycles number for being included in strip region, and D indicates N
The corresponding length of a sinusoidal cycles；
In a sinusoidal cycles of the sinusoidal sensitive electrode, the acquisition electrode of face is divided into one at interval of 90 °
Rectangular area, four rectangular areas being divided into a sinusoidal cycles are expressed as S0、S90、S180And S270, four rectangles
Region is divided into eight rectangular areas up and down by the center line of the sinusoidal sensitive electrode again, is expressed as SOn 0、SOn 90、
SOn 180、SOn 270、SUnder 0、SUnder 90、SUnder 180And SUnder 270, by region SOn 0Join domain SUnder 180, region SOn 90Join domain SUnder 270, region
SOn 180Join domain SUnder 0And region SOn 270Join domain SUnder 90Obtain the right opposite of the sinusoidal sensitive electrode and acquisition electrode
Four face region S that product changes with the dynamic ruler and scale relative displacement1、S2、S3And S4, it is expressed as：
S1=A+Bsin (2 π N*x/D)；
S2=A-Bsin (2 π N*x/D)；
S3=A+Bcos (2 π N*x/D)；
S4=A-BCos (2 π N*x/D),
Wherein, A indicates the DC component of the sinusoidal sensitive electrode, and B indicates the amplitude of the sinusoidal sensitive electrode, by it is each just
Four face regions that sine sensitive electrode described in the string period and acquisition electrode are formed, which accordingly connect, to be obtained：
S1=N* (A+Bsin (2 π N*x/D))；
S2=N* (A-Bsin (2 π N*x/D))；
S3=N* (A+Bcos (2 π N*x/D))；
S4=N* (A-Bcos (2 π N*x/D)),
The multistage capacitor that four face regions in one sinusoidal cycles are formed is expressed as C1、C2、C3And C4, and will be described
The multistage capacitor C of N number of sinusoidal cycles in two sinusoidal sensitive electrodes1、C2、C3And C4Corresponding connection obtains four tunnel bigness scale amount capacitors
Signal CN1、CN2、CN3And CN4And four tunnel carefully measure capacitance signal CN1、CN2、CN3And CN4。
4. a kind of condenser type as claimed in claim 3 revolves displacement transducer, which is characterized in that four tunnel bigness scale amount capacitance signals
Capacitance signal is carefully measured with four tunnels, and two-way bigness scale amount sine rotation change letter is obtained after the C-V conversion module and differential amplification module
Number and two-way carefully measure it is sinusoidal revolve varying signal, detailed process is：
Four tunnel bigness scale amount capacitance signals and four tunnels carefully measure the four road voltages that capacitance signal is converted by the C-V conversion module
Signal is illustrated as：
U1=Usin (wt) * (A+Bsin (2 π N*x/D))；
U2=Usin (wt) * (A-Bsin (2 π N*x/D))；
U3=Usin (wt) * (A+Bcos (2 π N*x/D))；
U4=Usin (wt) * (A-Bcos (2 π N*x/D)),
Wherein, U indicates the amplitude of output voltage, and sin (wt) indicates that the rotation becomes the frequency that demodulation module exports and swashs into the sine of w
Encourage signal；It is thick that two-way is obtained in the thick measurement voltage signal in four roads and four tunnels thin measurement voltage signal input the differential amplification module
The sinusoidal rotation varying signal of measurement and two-way carefully measure sinusoidal rotation varying signal, are expressed as：
UThick sin=Usin (wt) sin (2 π N2*xSlightly/D)；
UThick cos=Usin (wt) cos (2 π N2*xSlightly/D)；
UThin sin=Usin (wt) sin (2 π N1*xCarefully/D)；
UThin cos=Usin (wt) cos (2 π N1*xCarefully/ D),
Wherein, N1And N2Respectively indicate the sinusoidal number of sine sensitive electrode described in bigness scale amount capacitor and thin measurement capacitor, and N1
And N2There is no common divisor, xSlightlyIt indicates to resolve obtained bigness scale amount displacement, xCarefullyIt indicates to resolve obtained thin measurement displacement.
5. a kind of condenser type as claimed in claim 4 revolves displacement transducer, which is characterized in that the error compensation module pair
The displacement of bigness scale amount and thin measurement displacement carry out error compensation and obtain absolute displacement, are embodied as：
The two-way sine obtained by the differential amplification module revolves the sine wave of varying signal and cosine wave is expressed as：
Wherein, x indicates dynamic ruler 1-1 at a distance from the measurement point of scale 1-2 relative displacement and origin；A0And B0Indicate that orthogonal string becomes
The DC component of signal；AmAnd BmIndicate the amplitude of orthogonal string varying signal,WithFor signal amplitude error source；WithIt indicates the sum of higher hamonic wave, is harmonic component error source；δeIt indicates electric noise, is
Noise source；It is expressed as through the compensated penalty function of the error compensation module：
xR=xc+(Acos(2πN*x/D)+Bcos(4πN*x/D)+Ccos(8πN*x/D))
Wherein, xRFor compensated shift value, xcFor the shift value before compensation, A, B and C are the parameter of penalty function, xSlightlyAnd xCarefullyThrough
X is obtained after compensationR is thickAnd xR is thin, then by formula xR is thick≈n*xR is thinIt is duplicate relative to the displacement of bigness scale amount to calculate thin measurement displacement
Number of cycles n, and pass through formula xIt is real=n*xR is thinAbsolute displacement is calculated.
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| CN109059744A (en) * | 2017-06-13 | 2018-12-21 | 南京理工大学 | Micro-displacement signal detection system and measurement method based on ADA2200 |
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