CN109578276A - A kind of vacuum pump - Google Patents
A kind of vacuum pump Download PDFInfo
- Publication number
- CN109578276A CN109578276A CN201710894806.3A CN201710894806A CN109578276A CN 109578276 A CN109578276 A CN 109578276A CN 201710894806 A CN201710894806 A CN 201710894806A CN 109578276 A CN109578276 A CN 109578276A
- Authority
- CN
- China
- Prior art keywords
- cavity
- motor
- roots
- gear
- bearing bore
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000004907 gland Anatomy 0.000 claims abstract description 14
- 230000001050 lubricating effect Effects 0.000 claims abstract description 5
- 238000012856 packing Methods 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 241000196324 Embryophyta Species 0.000 claims 1
- 238000007789 sealing Methods 0.000 abstract description 7
- 238000005086 pumping Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 3
- 239000004809 Teflon Substances 0.000 abstract description 2
- 229920006362 Teflon® Polymers 0.000 abstract description 2
- 239000004519 grease Substances 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 8
- 238000012545 processing Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012932 thermodynamic analysis Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/026—Lubricant separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/06—Silencing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The present invention discloses a kind of vacuum pump, and the two sides of Roots's cavity are arranged in bearing bore, gear cavity, and motor cavity is connect with bearing bore, is respectively provided with gland seal device between the bearing bore and Roots's cavity and between Roots's cavity and gear cavity；The gland seal device is arranged on power rotor axis and driven rotor axis；The motor is that armature spindle shields variable-frequency motor；The bearing bore, gear cavity are respectively provided with lubricating arrangement；The intracavitary setting gas and oil separating plant of bearings at both ends；The present invention is small in size, and pumping speed is big, energy saving and space；Frequency control, long service life；Using Teflon class lips axle envelope, the maintenance cycle of pump is extended；Using gas and oil separating plant, the leakage problem to oil vapour to vacuum chamber is solved；Using rotor and pump shaft one, structure of the motor stator outside grease chamber solves motor dynamic sealing and motor vibration problems；The assembly of gear uses heat expansion assembling structure, reduces the degree of unbalancedness and vibration in movement portion.
Description
Technical field
The present invention relates to a kind of vacuum pump technology field, specifically a kind of Roots vaccum pump.
Background technique
Roots vaccum pump is evolved by Roots blower, including high vacuum multi-stage roots pump, middle vacuum Roots blower pump
With the dry type lobe pump of discharging directly into atmosphere, it is widely used in the industries such as chemical industry, papermaking, metallurgy, film preparation, food and IC equipment
Common a kind of vacuum pump in industry.The research and manufacture of domestic Roots vaccum pump are more early, but it is stringent to be suitable for IC equipment industry
It is required that Roots's dry pump it is actually rare, cause the equipment to rely on import for a long time.
The operating temperature that ventilation type Roots's dry pump meets IC equipment industry is high, long-term operating is stable, noise is low, maintenance is simple
List cleans numerous requirements such as oil-free, is a kind of very promising dry roughing pump.Currently, except processing and matching requirements
Outside the restraining factors such as precision is high, difficulty of processing is big, disposable investment is big, design theory is in urgent need to be improved, especially includes Roots's molded line
Improvement, the reduction of processing cost, the determination in gap, the calculating of leakage rate, the thermodynamic analysis in pump etc..
Summary of the invention
In order to overcome in existing lobe pump technology, ultimate vacuum is low, consumption power is big, volume is big, cannot be used for IC equipment
Deficiency, the present invention provide a kind of Roots vaccum pump, novel Roots's dry pump suitable for IC equipment.To achieve the goals above,
Structure of the invention design is achieved in that
A kind of vacuum pump, including motor cavity, bearing bore, Roots's cavity, gear cavity, motor, power rotor axis, driven rotor
Axis, driven gear, driving gear, driving and driven roots rotor, it is characterised in that: the bearing bore, gear cavity are arranged in Roots's chamber
The two sides of body, motor cavity are connect with bearing bore, are respectively provided between the bearing bore and Roots's cavity and between Roots's cavity and gear cavity
Gland seal device；The gland seal device is arranged on power rotor axis and driven rotor axis；The motor is that armature spindle shields frequency conversion
Motor；The bearing bore, gear cavity are respectively provided with lubricating arrangement；The intracavitary setting gas and oil separating plant of bearings at both ends；The master
Dynamic armature spindle, driven rotor axis are mounted between bearing bore and gear cavity by fixing device, and power rotor spindle motor side is fixing end；
The gland seal device includes packing ring, lips axle envelope, and the packing ring, lips axle envelope are successively sleeved on power rotor axis and driven
On armature spindle.
The lubricating arrangement is the active disc being arranged on the power rotor axis of bearing bore, the electricity on driven rotor axis
The driven disc of pusher side and the driven disc of gear side in gear cavity on driven rotor axis is set.
The fixed device includes shaft end fixture nut, motor side bearing gland, bearing, bearing supporting ring.
The principal and subordinate is dynamic, and roots rotor shape line is identical is made of two sections of circular arcs.
The motor cavity, gear cavity and Roots's cavity have Kong Liantong.
The present invention has the advantage that
The previous lobe pump of the pump is small in size compared to having, and pumping speed is big, energy saving and space, in the identical situation of pumping speed
The volume of pump is reduced, while reducing gas impact, reduces noise, dry pump machine can also be formed with multistage vacuum pump
Group；Frequency control, flexibility starting, complete machine impact small, long service life.And complete machine overload protection, there is failure automatic protection, no
It will appear destructive damage；Using novel special Teflon class lips axle envelope, wearability is increased, coefficient of friction is reduced,
Extend the maintenance cycle of pump；And gas and oil separating plant is used, the air filtration that charge of oil chamber is connected to pump chamber by stomata makes
Charge of oil chamber and dry pump chamber pressure balance, reach balance pressure seal, solve the leakage problem to oil vapour to vacuum chamber；Using
Rotor and pump shaft one, structure of the motor stator outside grease chamber solve motor dynamic sealing and motor vibration problems；Gear
Assembly use heat expansion assembling structure, reduce the degree of unbalancedness and vibration in movement portion；Vacuum ring can be kept in pumping process
Border is not contaminated, is suitable for the industries such as semiconductor, petrochemical industry, metallurgy, food, medicine, electronics, packaging, printing.
Detailed description of the invention
Fig. 1 is Roots vaccum pump figure；
Fig. 2 is Figure 1B-B sectional view；
Fig. 3 is perspective view；
Fig. 4 is Fig. 1 C-C sectional view.
Wherein: 1, shaft end fixture nut, 2, motor side bearing gland 3, the driven disc 4 of motor side, bearing 5, bearing branch
Pushing out ring 6, packing ring 7, bearing bore 8, lips axle envelope 9, Roots's cavity 10, driven rotor axis 11, power rotor axis 12, sealing ring
13, the driven disc 17 of sealing ring 14, gear cavity 15, gear side axle pressure cap 16, gear side, driven gear 18, driving gear
19, rectangular seal 20, active disc 21, motor cavity 22, electricity secret seal 23, driving axle housing 24, armature spindle shield frequency conversion
Motor 25, rotor 26, gas and oil separating plant.
Specific embodiment
As Figure 1-Figure 4, the present invention includes shaft end fixture nut 1, motor side bearing gland 2, motor side is driven gets rid of oil
Disk 3, bearing supporting ring 5, packing ring 6, bearing bore 7, lips axle envelope 8, Roots's cavity 9, driven rotor axis 10, actively turns bearing 4
The driven disc 16 of sub- axis 11, sealing ring 12, sealing ring 13, gear cavity 14, gear side axle pressure cap 15, gear side, driven tooth
Wheel 17, rectangular seal 19, active disc 20, motor cavity 21, electricity secret seal 22, driving axle housing 23, turns driving gear 18
Sub- axis shields variable-frequency motor 24, rotor 25, gas and oil separating plant 26, and bearing bore 7 and gear cavity are installed in 9 both ends of Roots's cavity
14, bearing 4, bearing supporting ring 5, lips axle envelope 8 are sequentially arranged in 7 bearing block of bearing bore and gear cavity bearing bore bearing block
It is interior, it is equipped with motor side bearing gland 2 and gear side axle pressure cap 15 in bearing side, it is corresponding that power rotor axis 11 is mounted on bearing bore
Position, motor side are fixing end, and power rotor axis 11, bearing supporting ring 5, bearing 4 abut against on bearing gland 2, and adjust master
The gap of dynamic armature spindle and bearing bore；11 gear side of power rotor axis is movable end, uses waveform in gear side axle pressure cap 15
Spring fixing bearing.Power rotor spindle motor side is installed by driving axle housing 23 and active disc 20,10 two sides of driven rotor axis peace
Equipped with the driven disc 3 of motor side and the driven disc 16 of gear side, installation filter pad is fixed on actively in shaft end fixture nut 1
Armature spindle and driven rotor axis have stomata shaft end, and main driven gear 18,17 is mounted on master and slave armature spindle corresponding positions in gear cavity 14
It sets.The principal and subordinate is dynamic, and roots rotor shape line is identical is made of two sections of circular arcs.Outside the pump housing and bearing bore disposed outside water cooling
Plate is cooling, has water cooling tube inside motor, and heat will not be occurred under operating condition that is continuous and taking out high temperature by, which enabling the invention to, embraces
Dead phenomenon；Using perfluoropolyether pumping fluid to gear and bearing lubrication, which has low-vapor pressure, chemical inertness, thermostabilization
Property it is high the advantages that, and use equilibrium air pressure sealing structure and lips axle envelope, guarantee pump chamber in cleaning it is oil-free；Armature spindle shields frequency conversion
Motor 24, motor cavity 21, gear cavity 14 are all made of aluminium alloy production, small in size, light-weight and the processing is simple, pass through frequency conversion
Motor and previous lobe pump pumping speed bigger than equal conditions acquisition, frequency control, flexibility starting, complete machine impact is small, reduces shake
It is dynamic, long service life, and it is energy saving, power consumption is reduced, is easy to reach vacuum requirement；Gear and armature spindle use heat expansion mistake
It is full of assembly method；The pump does not set vent relief valve；The pump housing is horizontal.
Claims (3)
1. a kind of vacuum pump, including motor cavity, bearing bore, Roots's cavity, gear cavity, motor, power rotor axis, driven rotor
Axis, driven gear, driving gear, driving and driven roots rotor, it is characterised in that: the bearing bore, gear cavity are arranged in Roots's chamber
The two sides of body, motor cavity are connect with bearing bore, are respectively provided between the bearing bore and Roots's cavity and between Roots's cavity and gear cavity
Gland seal device；The gland seal device is arranged on power rotor axis and driven rotor axis；The motor is that armature spindle shields frequency conversion
Motor；The bearing bore, gear cavity are respectively provided with lubricating arrangement；The intracavitary setting gas and oil separating plant of bearings at both ends；The master
Dynamic armature spindle, driven rotor axis are mounted between bearing bore and gear cavity by fixing device, and power rotor spindle motor side is fixing end；
The gland seal device includes packing ring, lips axle envelope, and the packing ring, lips axle envelope are successively sleeved on power rotor axis and driven
On armature spindle；The lubricating arrangement is the active disc being arranged on the power rotor axis of bearing bore, on driven rotor axis
The driven disc of motor side and the driven disc of gear side in gear cavity on driven rotor axis is set；The fixed device packet
Include shaft end fixture nut, motor side bearing gland, bearing, bearing supporting ring.
2. vacuum pump according to claim 1, it is characterised in that: it is identical by two sections of circles that the principal and subordinate moves roots rotor shape line
Arc composition.
3. vacuum pump according to claim 1, it is characterised in that: the motor cavity, gear cavity and Roots's cavity have Kong Lian
It is logical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710894806.3A CN109578276A (en) | 2017-09-28 | 2017-09-28 | A kind of vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710894806.3A CN109578276A (en) | 2017-09-28 | 2017-09-28 | A kind of vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109578276A true CN109578276A (en) | 2019-04-05 |
Family
ID=65912463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710894806.3A Pending CN109578276A (en) | 2017-09-28 | 2017-09-28 | A kind of vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109578276A (en) |
-
2017
- 2017-09-28 CN CN201710894806.3A patent/CN109578276A/en active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190405 |
|
| WD01 | Invention patent application deemed withdrawn after publication |