CN201344126Y - Oil-less dry type screw vacuum pump - Google Patents

Oil-less dry type screw vacuum pump Download PDF

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Publication number
CN201344126Y
CN201344126Y CNU2008202259612U CN200820225961U CN201344126Y CN 201344126 Y CN201344126 Y CN 201344126Y CN U2008202259612 U CNU2008202259612 U CN U2008202259612U CN 200820225961 U CN200820225961 U CN 200820225961U CN 201344126 Y CN201344126 Y CN 201344126Y
Authority
CN
China
Prior art keywords
screw rod
exhaust
oil
driven
initiatively
Prior art date
Application number
CNU2008202259612U
Other languages
Chinese (zh)
Inventor
孙成忠
陈宗武
张东庆
郭金光
Original Assignee
山东伯仲真空设备有限公司
孙成忠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山东伯仲真空设备有限公司, 孙成忠 filed Critical 山东伯仲真空设备有限公司
Priority to CNU2008202259612U priority Critical patent/CN201344126Y/en
Application granted granted Critical
Publication of CN201344126Y publication Critical patent/CN201344126Y/en

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Abstract

The utility model belongs to the field of vacuum pumps, in particular to an oil-less dry type screw vacuum pump. A pump body, an exhaust end cover, a front cover and a rear cover are provided with water channels which are communicated with one another, the circulating water in the water channels can cool the screws well, reducing the working temperature of the driving screw and the driven screw, and a mechanical seal in the exhaust end cover can completely isolate the pump cavity from bearings and a gearbox, thus ensuring the working pressure of the pump cavity and preventing the phenomena of oil return. A framework oil seal in the rear cover protects the working environment of the rear bearing, so that the bearing can be reliably lubricated by grease for a long time; the anti-corrosion coatings of the pump body, the driving screw, the driven screw, an exhaust guard plate, a front positioning guard plate and a rear positioning guard plate all which can ensure the utility model to be adapted to most of the environments with corrosive gas, and the utility model has the advantages of low screw working temperature, safety, durability and wide application range.

Description

The oil-free dry screw vacuum pump
Technical field
The utility model belongs to field of vacuum, is specifically related to a kind of oil-free dry screw vacuum pump.
Background technique
As the vacuum pump of air-extractor, the difference along with industry needs has various forms of vacuum pumps, and the product of leading this technical field of twentieth century is the pump of oil lubrication and sealing, and this class pump is discharged mist of oil, has seriously polluted environment; Along with industrial development and requirement on environmental protection, traditional oil seal type vacuum pump has not satisfied current many-sided technical requirements, be mainly reflected in following two aspects: the one, be representative with the semicon industry, require the vacuum pump oil vapor that between being evacuated, do not backflow, in order to avoid workpiece is contaminated, usually using the oil seal type vacuum pump is at suction port cold-trap to be installed to catch oil vapor, is zero but also be difficult to accomplish to backflow; The 2nd, be representative with the petrochemical industry, require vacuum pump can extract coercibility steam in a large number, or poisonous, corrosive gas, or contain the gas of molecule, because pump oil plays effects such as lubricated, sealing, cooling in oil seal type mechanical pump operation process, above-mentioned gas makes pump oiliness energy deterioration, inefficacy with pump oil long term result.Screw vacuum pump has and does not have oily, simple in structure, as not have easily damaged parts, life-span length advantage, not having mist of oil discharges, do not pollute workpiece, but the screw vaccum pump of prior art, under the single-stage state, carry out high pressure compressed, can produce a lot of compression heat, between the cylindrical of helical rotor or screw thread and pump housing inwall, be difficult to the maintenance gap, and cause deadlocked accident; When requiring vacuum pump work, the high speed development of science and technology and requirement on environmental protection and special industry do not pollute workpiece; can extract condensable gas; or corrosive gas; have gas of molecule or the like, and the above oil-free dry vacuum pump of the pumping speed 30L/S product of also not meeting the need of market particularly of the vacuum pump on the current Domestic market.
The model utility content
The purpose of this utility model is to solve the defective that prior art dry vacuum screw pump extruder temperature is too high, application area is little, provides a kind of screw rod operating temperature low, the oil-free dry screw vacuum pump of applied range.
The utility model is to realize by the following technical programs:
It is a kind of oil-free dry screw vacuum pump, comprise the pump housing, the pump housing is provided with intakeport, pump housing two ends are provided with protecgulum and bonnet, it is characterized in that being provided with between the pump housing and the protecgulum exhaust end cap, relief opening is positioned at the bottom of exhaust end cap, be provided with intermeshing active screw rod and driven screw rod in the pump housing, initiatively the two ends of screw rod and driven screw rod are with bearing and bearing support support fixation, described bearing and bearing support are fixed on exhaust end cap and the bonnet, initiatively screw rod and driven screw rod have adopted uniform pitch, big helical pitch, two-sided asymmetric molded lines, initiatively screw rod and driven screw rod are more than or equal to 2 helical pitches, initiatively screw rod upper recess surface and the big footpath of driven screw rod helix are gripped altogether, and driven screw rod concave surface is gripped altogether with the big footpath of active screw rod helix, and initiatively screw rod convex surface and driven screw rod convex surface are mutually conjugate spiral camber.It is minimum that this molded lines design has guaranteed that inter-stage leaks, the advantage that pumping efficiency and ultimate vacuum are high.
Initiatively the two ends of screw rod and driven screw rod are equipped with repeated hole, along helix and Hand of spiral, extend 0.2~0.5 helical pitch inwards from end face.Go the shape of repeated hole identical with Hand of spiral or approximate identical, can guarantee the static balancing and the dynamic balancing of active screw rod and driven screw rod with the shape of the screw rod at place, place.
Be provided with mechanical seal in the exhaust end cap, be provided with reinforced seal in the bonnet.
Initiatively screw rod is connected with motor by coupling, initiatively on screw rod and the driven screw rod meshed gears is housed, and initiatively screw rod drives driven screw rod synchronous backward running.
The pump housing, exhaust end cap, bonnet, the preceding water channel that communicates that is covered with.
Pump housing exhaust side is provided with 1-3 aeration hole.Prevent that condensable gas from condensing, outside its excavationg pump, the effect that the dry cryogenic gas that enters from exhaust port has the cooling screw operating temperature simultaneously.
The exhaust end cap is provided with the prelocalization backplate with the position that the active screw rod combines, and the position that the exhaust end cap combines with driven screw rod is provided with the exhaust backplate, and the position that bonnet combines with active screw rod and driven screw rod is provided with location, back backplate.The utility model is adjusted the end clearance between active screw rod, driven screw rod and exhaust backplate, prelocalization backplate, location, the back backplate and is adjusted the initiatively gap between screw rod, the driven screw rod by assembling, make two gaps of screw rod when rotary work suitable, thereby guarantee that the utility model reaches technical requirements when proper functioning.
The surface of the pump housing, active screw rod, driven screw rod, exhaust backplate, prelocalization backplate, location, back backplate is equipped with the thick corrosion-inhibiting coating of 0.05-0.5mm.
The utlity model has compact structure, pumping speed is big, degree of vacuum is high, can discharging directly into atmosphere, workpiece does not have friction, life-span length, safety durable, advantage applied widely.The pump housing of the present utility model, exhaust end cap, protecgulum, after be covered with the water channel that communicates, the circulating water in the water channel plays good cooling action to screw rod, has reduced the initiatively operating temperature of screw rod and driven screw rod; Mechanical seal in the exhaust end cap is isolated pump chamber and bearing and gear-box fully, has guaranteed the working pressure of pump chamber, has stopped to return oily phenomenon.Outside framework oil seal in the bonnet has been protected the working environment of rear bearing, makes bearing obtain the proper lubrication of grease for a long time; The corrosion-inhibiting coating of the pump housing, active screw rod, driven screw rod, exhaust backplate, prelocalization backplate, location, back backplate makes the utility model can be competent at the big multiple environment that etchant gas is arranged, and has solved the difficult problem of this respect in the past.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the A portion enlarged diagram among Fig. 1;
Fig. 3 is the structural representation of the utility model active screw rod and driven screw rod.
As shown in FIG.: 1 rear bearing; 2 back skeleton oil sealings; 3 bonnets; 4 driven screw rods; 5 active screw rods; 6 pump housings; 7 aeration mouths; 8 prelocalization backplates; 9 mechanical seals; 10 front-end bearing pedestals; 11 fore bearings; The 12-1 gear; The 12-2 gear; 13 expansion sets; 14 Front Cover Bearing; 15 protecgulum outside framework oil seals; 16 coupling; 17 electric machine supports; 18 motors; 19 protecgulums; 20 protecgulum water channels; 21 end cap water channels; 22 relief openings; 23 end caps; 24 exhaust backplates; 25 pump housing water channels; 26 intakepories; Location, 27 back backplate; 28 rear bearing blocks; 29 bonnet water channels; 30 active screw rod corrosion-inhibiting coatings; Location, 31 back backplate corrosion-inhibiting coating; 32 pump housing coatings; 33 driven screw rods remove repeated hole; 34 active screw rods remove repeated hole; 35 active screw rod concave surfaces; 36. the big footpath of active screw rod helix; 37 active screw rod upper recess surface; 38 active screw rod convex surfaces; 39 active screw rods remove repeated hole; 40 driven screw rods remove repeated hole; 41 driven screw rod concave surfaces; The big footpath of 42 driven screw rods helix; 43 driven screw rod upper recess surface; 44 driven screw rod convex surfaces.
Embodiment
As shown in Figure 1, electric machine support 17 is fixed on the protecgulum 19, become one with the utility model, the motor 18 that is fixed on the electric machine support 17 connects initiatively screw rod 5 by coupling 16, gear 12-1 is fixed on the active screw rod by expansion set 13, gear 12-2 on the driven screw rod 4 fixes with the same manner, gear 12-2 is identical with the gear 12-1 number of teeth, driven screw rod 4 run-in synchronism in the opposite direction under the drive of active screw rod 5, intermeshing active screw rod 5, driven screw rod 4 is placed in the pump housing 6, two ends fore bearing 11 and rear bearing 1 support fixation, fore bearing 11, front-end bearing pedestal 10 and rear bearing 1, rear bearing block 28 is separately fixed on exhaust end cap 23 and the bonnet 3, exhaust end cap 23 is provided with prelocalization backplate 8 with the position that active screw rod 5 combines, exhaust end cap 23 is provided with exhaust backplate 24 with the position that driven screw rod 4 combines, bonnet 3 and active screw rod 5, the position of driven screw rod 4 combinations is provided with location, back backplate 27, adjust initiatively screw rod 5 by assembling, driven screw rod 4 and exhaust backplate 24, prelocalization backplate 6, end clearance between the backplate 27 of location, back and adjustment be screw rod 5 initiatively, gap between the driven screw rod 4, make two gaps of screw rod when rotary work suitable, thereby guarantee that the utility model reaches technical requirements when proper functioning, mechanical seal 9 is installed in the exhaust end cap 23, outside framework oil seal 2 is installed on the bonnet 3, from two ends pump chamber is sealed.The axle external part Front Cover Bearing 14 of screw rod 5 has initiatively increased the motion fulcrum of input shaft, and protecgulum outside framework oil seal 15 prevents that effectively the oil of gear-box from leaking outside.Pump housing water channel 25 and exhaust end cap water channel 21, bonnet water channel 29, protecgulum water channel 20 communicate.Intakeport 26 is arranged on the pump housing 6 tops, and relief opening 22 is arranged on exhaust end cap 23 belows.
As shown in Figure 2, the surface of the pump housing 6 is provided with pump housing corrosion-inhibiting coating 32, initiatively the surface of screw rod 5 is provided with initiatively that the surface of screw rod corrosion-inhibiting coating 30, location, back backplate 27 is provided with location, back backplate corrosion-inhibiting coating 31, it is identical that corrosion-inhibiting coating on the driven screw rod and screw rod initiatively are provided with, and it is identical that being provided with of backplate 27 located in the corrosion-inhibiting coating on exhaust backplate 24, the prelocalization backplate 6 and back.
As shown in Figure 3, initiatively screw rod 5 and driven screw rod 4 have adopted uniform pitch, big helical pitch, two-sided asymmetric molded lines, initiatively screw rod 5 and driven screw rod 4 are more than or equal to 2 helical pitches, the both ends of the surface of active screw rod 5 are provided with initiatively, and screw rod goes repeated hole 34 and active screw rod to remove repeated hole 39, the both ends of the surface of driven screw rod 4 are provided with driven screw rod and go repeated hole 33 and driven screw rod to remove repeated hole 40, the above-mentioned repeated hole that goes is in the moulding of when casting, can keep the initiatively dynamic balancing and the static balancing of screw rod 5 and driven screw rod 4.Initiatively screw rod upper recess surface 37 is gripped altogether with the big footpath of driven screw rod helix 42, and driven screw rod concave surface 41 is gripped altogether with the big footpath of active screw rod helix 36, and initiatively screw rod convex surface 38 and driven screw rod convex surface 44 are mutually conjugate spiral camber.
In the utility model when work, is without any need for working medium, pumped gas sucks the pump housing 6 from intakeport 26, push gas to exhaust end by active screw rod 5 and driven screw rod 4, directly arrange to atmosphere by relief opening 22, the no any pollution of working procedure cleaning, through test, use the utility model limiting vacuum can reach about 5Pa-30Pa, realized oil-free dry vacuum work state fully.
The utility model is not limited to above embodiment, will be as the screw pump of relatively large specification without electric machine support, directly be placed on the chassis special the fixedly pump housing and motor.

Claims (8)

1, a kind of oil-free dry screw vacuum pump, comprise the pump housing, the pump housing is provided with intakeport, pump housing two ends are provided with protecgulum and bonnet, it is characterized in that being provided with between the pump housing and the protecgulum exhaust end cap, relief opening is positioned at the bottom of exhaust end cap, be provided with intermeshing active screw rod and driven screw rod in the pump housing, initiatively the two ends of screw rod and driven screw rod are with bearing and bearing support support fixation, described bearing and bearing support are fixed on exhaust end cap and the bonnet, initiatively screw rod and driven screw rod have adopted uniform pitch, big helical pitch, two-sided asymmetric molded lines, initiatively screw rod and driven screw rod are more than or equal to 2 helical pitches, initiatively screw rod upper recess surface and the big footpath of driven screw rod helix are gripped altogether, and driven screw rod concave surface is gripped altogether with the big footpath of active screw rod helix, and initiatively screw rod convex surface and driven screw rod convex surface are mutually conjugate spiral camber.
2, oil-free dry screw vacuum pump according to claim 1, the two ends that it is characterized in that active screw rod and driven screw rod are equipped with repeated hole, go the shape of repeated hole identical, in the screw rod body, extend 0.2~0.5 helical pitch from both ends of the surface along helix and Hand of spiral with the shape and the Hand of spiral of the screw rod at place, place.
3, oil-free dry screw vacuum pump according to claim 1 is characterized in that being provided with mechanical seal in the exhaust end cap, is provided with reinforced seal in the bonnet.
4, oil-free dry screw vacuum pump according to claim 1 is characterized in that initiatively screw rod is connected with motor by coupling, initiatively on screw rod and the driven screw rod meshed gears is housed, and initiatively screw rod drives driven screw rod synchronous backward running.
5, oil-free dry screw vacuum pump according to claim 1 is characterized in that the pump housing, exhaust end cap, bonnet, the preceding water channel that communicates that is covered with.
6, oil-free dry screw vacuum pump according to claim 1 is characterized in that pump housing exhaust side is provided with 1-3 aeration hole.
7, oil-free dry screw vacuum pump according to claim 1, it is characterized in that the exhaust end cap is provided with the prelocalization backplate with the position that the active screw rod combines, the position that the exhaust end cap combines with driven screw rod is provided with the exhaust backplate, and the position that bonnet combines with active screw rod and driven screw rod is provided with location, back backplate.
8,, it is characterized in that the surface of the pump housing, active screw rod, driven screw rod, exhaust backplate, prelocalization backplate, location, back backplate is equipped with the thick corrosion-inhibiting coating of 0.05-0.5mm according to claim 1 or 7 described oil-free dry screw vacuum pumps.
CNU2008202259612U 2008-11-21 2008-11-21 Oil-less dry type screw vacuum pump CN201344126Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008202259612U CN201344126Y (en) 2008-11-21 2008-11-21 Oil-less dry type screw vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2008202259612U CN201344126Y (en) 2008-11-21 2008-11-21 Oil-less dry type screw vacuum pump

Publications (1)

Publication Number Publication Date
CN201344126Y true CN201344126Y (en) 2009-11-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2008202259612U CN201344126Y (en) 2008-11-21 2008-11-21 Oil-less dry type screw vacuum pump

Country Status (1)

Country Link
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101876268A (en) * 2010-03-31 2010-11-03 芜湖杰锋汽车动力系统有限公司 Mechanical supercharger structure
CN102242714A (en) * 2010-05-10 2011-11-16 北京朗禾科技有限公司 Compound seal device of claw type dry vacuum pump
CN102410219A (en) * 2011-11-24 2012-04-11 威海智德真空科技有限公司 Vertical dry type screw rod vacuum pump
CN102410224A (en) * 2010-08-26 2012-04-11 维科普兰德有限两合公司 Vacuum pump
CN102644601A (en) * 2012-04-16 2012-08-22 北京朗禾真空设备有限公司 Novel vertical oil-less pump
CN102852798A (en) * 2012-08-14 2013-01-02 杭州新安江工业泵有限公司 Roots vacuum pump cooling system
CN105889068A (en) * 2016-06-12 2016-08-24 无锡市四方真空设备有限公司 Screw vacuum pump with piston ring sealing and mechanical sealing structures
CN106678041A (en) * 2017-02-21 2017-05-17 东北大学 External balance type screw vacuum pump
CN109441810A (en) * 2018-12-10 2019-03-08 江阴爱尔姆真空设备有限公司 A kind of oil-free dry screw vacuum pump
CN109723643A (en) * 2018-12-20 2019-05-07 江阴爱尔姆真空设备有限公司 A kind of screw vacuum pump for clearing up dust
CN110886699A (en) * 2019-11-29 2020-03-17 海门市晶盛真空设备有限公司 Pump case of screw vacuum pump

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101876268B (en) * 2010-03-31 2013-08-07 芜湖杰锋汽车动力系统有限公司 Mechanical supercharger structure
CN101876268A (en) * 2010-03-31 2010-11-03 芜湖杰锋汽车动力系统有限公司 Mechanical supercharger structure
CN102242714A (en) * 2010-05-10 2011-11-16 北京朗禾科技有限公司 Compound seal device of claw type dry vacuum pump
CN102410224A (en) * 2010-08-26 2012-04-11 维科普兰德有限两合公司 Vacuum pump
CN102410219A (en) * 2011-11-24 2012-04-11 威海智德真空科技有限公司 Vertical dry type screw rod vacuum pump
CN102644601A (en) * 2012-04-16 2012-08-22 北京朗禾真空设备有限公司 Novel vertical oil-less pump
CN102644601B (en) * 2012-04-16 2014-12-17 北京朗禾众鑫真空科技有限公司 Novel vertical oil-less pump
CN102852798A (en) * 2012-08-14 2013-01-02 杭州新安江工业泵有限公司 Roots vacuum pump cooling system
CN102852798B (en) * 2012-08-14 2015-05-20 杭州新安江工业泵有限公司 Roots vacuum pump cooling system
CN105889068A (en) * 2016-06-12 2016-08-24 无锡市四方真空设备有限公司 Screw vacuum pump with piston ring sealing and mechanical sealing structures
CN106678041A (en) * 2017-02-21 2017-05-17 东北大学 External balance type screw vacuum pump
CN106678041B (en) * 2017-02-21 2018-05-25 东北大学 A kind of outer balance type screw vacuum pump
CN109441810A (en) * 2018-12-10 2019-03-08 江阴爱尔姆真空设备有限公司 A kind of oil-free dry screw vacuum pump
CN109723643A (en) * 2018-12-20 2019-05-07 江阴爱尔姆真空设备有限公司 A kind of screw vacuum pump for clearing up dust
CN110886699A (en) * 2019-11-29 2020-03-17 海门市晶盛真空设备有限公司 Pump case of screw vacuum pump

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20091023

Address after: Shandong province Zibo city Zhangdian District Ma Shang Zhen Xiao Tao Cun, zip code: 255090

Co-patentee after: Sun Chengzhong

Patentee after: Shandong Bozhong Vacuum Equipment Co. Ltd.

Address before: Shandong province Zibo city Zhangdian District Ma Shang Zhen Xiao Tao Cun, zip code: 255090

Patentee before: Shandong Bozhong Vacuum Equipment Co. Ltd.

C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: 255090 Shandong Province, Zibo city Zhangdian District Ma Shang Zhen small village

Co-patentee after: Sun Chengzhong

Patentee after: Shandong Bozhong Vacuum Equipment Co., Ltd.

Address before: 255090 Shandong Province, Zibo city Zhangdian District Ma Shang Zhen small village

Co-patentee before: Sun Chengzhong

Patentee before: Shandong Bozhong Vacuum Equipment Co. Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20091111