CN106678041B - A kind of outer balance type screw vacuum pump - Google Patents
A kind of outer balance type screw vacuum pump Download PDFInfo
- Publication number
- CN106678041B CN106678041B CN201710091367.2A CN201710091367A CN106678041B CN 106678041 B CN106678041 B CN 106678041B CN 201710091367 A CN201710091367 A CN 201710091367A CN 106678041 B CN106678041 B CN 106678041B
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- Prior art keywords
- gear
- vacuum pump
- rotor
- screw vacuum
- balance type
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with or adaptation to specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0021—Systems for the equilibration of forces acting on the pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
Abstract
The invention belongs to dry vacuum pump technical fields, and in particular to a kind of outer balance type screw vacuum pump.Technical scheme is as follows：A kind of outer balance type screw vacuum pump, including motor, the pump housing, gear-box two, speed increasing gear train, synchronous gear wheel set, power rotor and driven rotor, the pump housing is equipped with gear-box one, and the motor and gear-box two are separately positioned on the both ends of the pump housing；The power rotor and driven rotor are arranged in the pump housing；The speed increasing gear train and synchronous gear wheel set are mounted on the both ends of the power rotor and driven rotor；The speed increasing gear train is arranged in gear-box one, and the synchronous gear wheel set is arranged in gear-box two.Outer balance type screw vacuum pump provided by the invention, it is therefore intended that while improving the axially loaded equilibrium problem of screw vacuum pump, realize that screw vacuum pump discharge zero is lost, gear and transition axis connecting mode, compact-sized, stable drive are arranged using bilateral.
Description
Technical field
The invention belongs to dry vacuum pump technical fields, and in particular to a kind of outer balance type screw vacuum pump.
Background technology
With electronics industry, chemical industry, film industry, freeze-drying flourish, more and more industry requirements
Have it is clean, without vacuum environment existing for oil vapour as its production basis, therefore market to the demand of dry pump also increasingly
Urgently.
The research of screw type dry vacuum pump is initially to be applied to semi-conductor industry and liquid crystal display manufacturing industry, day
Sheet, Germany, the U.S., TaiWan, China etc. are all the countries and regions for carrying out development work earlier.Present screw rod dry vacuum pump
Because its pumping speed scope is wide, simple and compact for structure, pumping chamber element without friction, long lifespan, low energy consumption, without oily pollution the advantages that, extensively
It is general to be applied to the fields such as electronics, nuclear energy, chemical industry, medicine, food industry.
In order to reach the pumping performance for improving screw vacuum pump, optimization screw compression ability, reduce the mesh such as rotor thermal deformation
, researcher develops the structure of following several more typical screw-type vacuum pumps with improved structure：
The Chinese patent of Application No. 200910098378.9 discloses a kind of screw vacuum pump of double-screw structure,
In screw rod be three screw rods, another root screw rod is double threaded screw, and molded line mode and the engagement for giving two screw rods are bent
Line.Design in this way, often increase level-one, need to only increase the spiro rod length of half of helical pitch of double threaded screw, screw rod relative length compared with
Short, efficient, smooth running, noise is small.But due to being asymmetrical rotor, there are certain difficulty in processing, processing is again
Miscellaneous, cost is higher.
The Chinese patent of 102979731 B of Publication No. CN discloses a kind of Twin-screw vacuum pump molded lines of rotor and design
Method.The molded line that the design method determines has the path of contact of closing and continuous contact line, and open-work area is small, and volumetric efficiency is high,
And the type face processing formed is relatively simple, processing cost is low, but for how to balance screw rod axially loaded, does not propose preferably
Solution.
The Chinese patent of Application No. 201410261216.3 discloses a kind of novel double-screw vacuum pump, using difference
Two screw rods of diameter, identical compared with diameter screw with the number of turns, the seal line of formation is one times more, improves the limit to be formed
Vacuum degree.But since diameter is different, annular seal space volume changes, and flow is caused to be reduced, and two screw rods stress also has
Institute's difference, is not easy to balance.
The Chinese patent of 102937094 B of Publication No. CN discloses a kind of dry screw vacuum pump varying pitch screw,
Constant lead screw is replaced with varying pitch screw.Vacuum pump equipped with the type, for reducing energy requirement, reducing noise, reduction
Internal operating temperature, diminution structure space and reduction manufacturing expense provide optimal selection.But due to there is internal pressure
Contracting, therefore how gas must be subject to trim gas active force, which not yet considers to rotor there are active force.
The Chinese patent of 103062056 B of Publication No. CN discloses a kind of screw type with assembled screw rod rotor
Dry vacuum pump by the collocation of multistage cored screw formula rotor sheet, can form the screw vacuum pump and varying pitch of uniform pitch
Screw vacuum pump, the advantages of both can also taking into account is combined, enriches product category, reduce manufacture and maintenance expense
With.But cored screw rotor sheets at different levels are using being bolted on axis, what the increase of connecting portion reduced equipment can
By property, and screw rotor is poor to the adaptability of thermal deformation.
The Chinese patent of 203308712 U of Publication No. CN discloses a kind of varying pitch double threaded screw vacuum pump, the change
The rotor of screw pitch double threaded screw vacuum pump is varying pitch double threaded screw rotor, and rotor screw pitch presses from air entry to exhaust outlet and waits differences
Row successively decrease, and improve pumping efficiency, reduce exhaust noise and delivery temperature, and any cutting plane barycenter of rotor is positioned at several
What center, it is easy to accomplish dynamic balancing, noise is small, also has certain counterbalance effect to the stress of rotor.
The Chinese patent of 103267015 A of Publication No. CN discloses cooling dry screw vacuum pump in a kind of heat pipe.
, by rotor design into hollow structure, inside is cooling chamber, and convenient for being cooled down to screw rod, heat is taken away, is changed simultaneously for it
Vent position, mixed solid and liquid discharge, improve reliability and the work of screw pump when can gas medium be pumped
Service life.
The United States Patent (USP) of Publication No. US7214036B2 discloses a kind of screw-type vacuum pump, by screw design into three sections
Helical tooth, the intermediate region of every two sections of helical tooths are disposed with bypass and check-valves, and gas can effectively be kept away via such access
Exempt from the generation of overcompression phenomenon, therefore the axial force that gas is given obtains larger weakening.But for screw rod outer drive gears
The axial out-of-balance force of generation does not propose solution.
The United States Patent (USP) of Publication No. US6382930B1, discloses a kind of composite fabricated rotor screw vacuum pump, suction side with
Exhaust side manufactures respectively, and suction side can use common metal such as aluminium, and exhaust side uses high performance material such as stainless steel, and
And entire root axis is hollow, is connected with circulating cooling liquid, power is provided by cooling pump.This design method is meeting requirement
Under the conditions of, material and processing cost are reduced, is cooled down by inside, has been taken away excessive heat, reduced the thermal deformation of rotor.
But since rotor is coupled by two parts rotor, reduce the reliability of equipment；Axis generally hollow shaft, this needs
The material of axis reaches very high requirement.
The United States Patent (USP) of Publication No. US6371744B1 discloses a kind of screw vacuum pump, wherein screw rotor and the pump housing
Material is nickeliferous spheroidal graphite cast-iron, enhances the corrosion resistance and the capacity of heat transmission of rotor, the essence of size when ensure that engagement
Parasexuality.But the poor mechanical properties of this material, when spiro rod length is long.For example during more than five times of its diameter, axis easily goes out
It now bends, causes matching problem.
By being investigated above-mentioned existing typical screw pump it is recognized that while it all carries out screw pump critical component screw rod
The axial force of the screw rod that improved enhances the stability of screw pump operating, still, is further balancing whole pump operating
When the axial force that generates there are certain limitations.
The content of the invention
The present invention provides a kind of outer balance type screw vacuum pump, it is therefore intended that improves the axially loaded balance of screw vacuum pump
It while problem, realizes that screw vacuum pump discharge zero is lost, arranges that gear and transition axis connecting mode, structure are tight using bilateral
It gathers, stable drive.
Technical scheme is as follows：
A kind of outer balance type screw vacuum pump, including motor, the pump housing, gear-box two, speed increasing gear train, synchronous gear wheel set,
Power rotor and driven rotor, the pump housing are equipped with gear-box one, and the motor and gear-box two are separately positioned on the pump housing
Both ends；The power rotor and driven rotor are arranged in the pump housing；The speed increasing gear train and the installation of synchronous gear wheel set
At the both ends of the power rotor and driven rotor；The speed increasing gear train is arranged in gear-box one, the synchronous gear wheel set
It is arranged in gear-box two.
The outer balance type screw vacuum pump, wherein the speed increasing gear train includes speedup gear wheel and the small tooth of speedup
Wheel, speedup gear wheel are engaged with speedup pinion gear, equipped with spring bearing, speedup canine tooth on an external part of the driven rotor
Wheel is installed together with the spring bearing；Transition axis is installed, the motor passes through shaft coupling and the mistake on speedup gear wheel
Cross axis connection together.
The outer balance type screw vacuum pump, wherein the synchromesh gear is secondary to include synchromesh gear one and synchromesh gear
Two, synchromesh gear one is engaged with synchromesh gear two, and synchromesh gear one is mounted on the power rotor, and synchromesh gear two is mounted on
On the driven rotor.
The outer balance type screw vacuum pump, preferred embodiment be, the power rotor and driven rotor and the pump
Angular contact ball bearing is equipped between body, using mechanical shaft seal.
The outer balance type screw vacuum pump, preferred embodiment are that speedup gear wheel is joined with spring bearing by expansion set
It connects.
The outer balance type screw vacuum pump, preferred embodiment are that the speed increasing gear train and synchronous gear wheel set are oblique
Gear.
The outer balance type screw vacuum pump, preferred embodiment are the power rotor and driven rotor equal length.
The outer balance type screw vacuum pump, preferred embodiment are that the power rotor and driven rotor are uniform pitch
Or varying pitch.
The outer balance type screw vacuum pump, preferred embodiment, which is that the pump housing is integrated, to be cast.
The outer balance type screw vacuum pump, preferred embodiment are that the gear-box two is equipped with rear cover.
Beneficial effects of the present invention are：Speed increasing gear and transmission gear are arranged in screw rotor both sides, speedup by the present invention
Gear wheel and meshing rotors are located at same axis, effectively reduce the appearance and size of the entire pump housing, balance gear drive with
The axial force generated during rotor engagement pumping.Gear and transition axis connecting mode are arranged using bilateral, there is compact-sized, transmission
The advantages of steady.The present invention jumped out by design screw rod improve axial force predicament, do not influence screw pump pumping performance and
On the premise of screw rod difficulty of processing, the balanced measure of axial force is guided to outside pump chamber, has been started with from transmission, reasonable Arrangement transmission
Secondary position selects transmission species, has achieved the purpose that balancing axial thrust to greatest extent, made operating more steady.
Description of the drawings
Fig. 1 is outer balance type screw vacuum pump structure schematic diagram；
Fig. 2 is transition axis, speedup gear wheel couples schematic diagram；
Fig. 3 a are existing screw vacuum pump axially loaded schematic diagram；
Fig. 3 b are outer balance type screw vacuum pump axially loaded schematic diagram.
Specific embodiment
As shown in Figure 1, 2, a kind of outer balance type screw vacuum pump, including motor 1, the pump housing 7, gear-box 28, speed increasing gear
Pair, synchronous gear wheel set, power rotor 12 and driven rotor 6, the pump housing 7 are equipped with gear-box one, the motor 1 and gear-box two
8 are separately positioned on the both ends of the pump housing 7；The power rotor 12 and driven rotor 6 are arranged in the pump housing 7；The increasing
Fast gear pair and synchronous gear wheel set are mounted on the both ends of the power rotor 12 and driven rotor 6；The speed increasing gear train is set
In gear-box one, the synchronous gear wheel set is arranged in gear-box 28；Wherein described speed increasing gear train includes speedup gear wheel
4 and speedup pinion gear 14, speedup gear wheel 4 engaged with speedup pinion gear 14, be equipped on an external part of the driven rotor 6
Spring bearing 5, speedup gear wheel 4 are installed together with the spring bearing 5；Transition axis 3 is installed on speedup gear wheel 4, it is described
Motor 1 is linked together by shaft coupling 2 and the transition axis 3；Wherein described synchromesh gear is secondary to include synchromesh gear 1
With synchromesh gear 2 16, synchromesh gear 1 is engaged with synchromesh gear 2 16, and synchromesh gear 1 is mounted on the power rotor
On 12, synchromesh gear 2 16 is mounted on the driven rotor 6；The power rotor 12 and driven rotor 6 and the pump housing 7 it
Between be equipped with angular contact ball bearing 9, using mechanical shaft seal 13；Speedup gear wheel 4 is coupled with spring bearing 5 by expansion set 15；It is described
Speed increasing gear train is angular gear with synchronous gear wheel set；The power rotor 12 and 6 equal length of driven rotor；The active turns
Son 12 and driven rotor 6 are uniform pitch；The pump housing 7, which is integrated, to be cast, and takes horizontal, is lowered the center of gravity, and it is flat to increase operating
Stability；The gear-box 28 is equipped with rear cover 10.The power of motor 1 is nibbled by speedup gear wheel (4) and speedup pinion gear (14)
It closes, power rotor (12) is made to obtain torque, so as to through driving gear pair driven rotor (6) be driven to rotate, realize power rotor
(12) it is evacuated with the engagement of driven rotor (6).
As shown in Figure 3a, when only in single-sided arrangement transmission gear, power rotor (12) it is whole it is axial make a concerted effort be：T1=
F1-Fgas/2；
Driven rotor (6) entirety axially makes a concerted effort to be：T2=-F '1-Fgas/2；
As shown in Figure 3b, when bilateral arranges speed increasing gear and transmission gear, power rotor (12) entirety axially makes a concerted effort to be：
T1=-F '1-Fgas/2+F′2；
Driven rotor (6) entirety axially loaded be：T2=F1-Fgas/2-F′2；
By comparing, under Fig. 3 b arrangements, the axially loaded balance of screw rod is more preferable.
Claims (9)
1. a kind of outer balance type screw vacuum pump, which is characterized in that including the motor, pump housing, gear-box two, speed increasing gear train, same
Gear pair, power rotor and driven rotor are walked, the pump housing is equipped with gear-box one, and the motor and gear-box two are separately positioned on
The both ends of the pump housing；The power rotor and driven rotor are arranged in the pump housing；The speed increasing gear train and synchronous gear
Wheel set is mounted on the both ends of the power rotor and driven rotor；The speed increasing gear train is arranged in gear-box one, described same
Step gear pair is arranged in gear-box two；The speed increasing gear train includes speedup gear wheel and speedup pinion gear, speedup gear wheel
It is engaged with speedup pinion gear, equipped with spring bearing, speedup gear wheel and the support on an external part of the driven rotor
Bearing is installed together；Transition axis is installed, the motor is connected to one by shaft coupling and the transition axis on speedup gear wheel
It rises.
2. outer balance type screw vacuum pump according to claim 1, which is characterized in that the synchronous gear wheel set includes synchronous
Gear one and synchromesh gear two, synchromesh gear one are engaged with synchromesh gear two, and synchromesh gear one is mounted on the power rotor,
Synchromesh gear two is mounted on the driven rotor.
3. outer balance type screw vacuum pump according to claim 1, which is characterized in that the power rotor and driven rotor
Angular contact ball bearing is equipped between the pump housing, using mechanical shaft seal.
4. outer balance type screw vacuum pump according to claim 1, which is characterized in that speedup gear wheel leads to spring bearing
Cross expansion set connection.
5. outer balance type screw vacuum pump according to claim 1, which is characterized in that the speed increasing gear train and synchronous gear
Wheel set is angular gear.
6. outer balance type screw vacuum pump according to claim 1, which is characterized in that the power rotor and driven rotor
Equal length.
7. outer balance type screw vacuum pump according to claim 1, which is characterized in that the power rotor and driven rotor
For uniform pitch or varying pitch.
8. outer balance type screw vacuum pump according to claim 1, which is characterized in that the pump housing be integrated casting and
Into.
9. outer balance type screw vacuum pump according to claim 1, which is characterized in that the gear-box two is equipped with rear cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091367.2A CN106678041B (en) | 2017-02-21 | 2017-02-21 | A kind of outer balance type screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710091367.2A CN106678041B (en) | 2017-02-21 | 2017-02-21 | A kind of outer balance type screw vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106678041A CN106678041A (en) | 2017-05-17 |
| CN106678041B true CN106678041B (en) | 2018-05-25 |
Family
ID=58861647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710091367.2A Active CN106678041B (en) | 2017-02-21 | 2017-02-21 | A kind of outer balance type screw vacuum pump |
Country Status (1)
| Country | Link |
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| CN (1) | CN106678041B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018210922A1 (en) * | 2018-07-03 | 2020-01-09 | Leybold Gmbh | Dual or multi-shaft vacuum pump |
| CN117052662A (en) * | 2023-08-17 | 2023-11-14 | 威鹏晟(山东)机械有限公司 | External balance type screw vacuum pump |
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| US3388854A (en) * | 1966-06-23 | 1968-06-18 | Atlas Copco Ab | Thrust balancing in rotary machines |
| US4927333A (en) * | 1988-01-22 | 1990-05-22 | Toyota Jidosha Kabushiki Kaisha | Fluid pump |
| CN100543308C (en) * | 1998-09-17 | 2009-09-23 | 株式会社日立制作所 | Oilless lubricating screw type compressor |
| CN201344126Y (en) * | 2008-11-21 | 2009-11-11 | 山东伯仲真空设备有限公司 | Oil-less dry type screw vacuum pump |
| CN102011728A (en) * | 2009-09-09 | 2011-04-13 | 哈尔滨建成集团有限公司 | Gather and delivery pump set for thick oil containing sand |
| CN102635553A (en) * | 2011-02-08 | 2012-08-15 | 株式会社神户制钢所 | Water injection type screw compressor |
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2017
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| US4927333A (en) * | 1988-01-22 | 1990-05-22 | Toyota Jidosha Kabushiki Kaisha | Fluid pump |
| CN100543308C (en) * | 1998-09-17 | 2009-09-23 | 株式会社日立制作所 | Oilless lubricating screw type compressor |
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| CN102011728A (en) * | 2009-09-09 | 2011-04-13 | 哈尔滨建成集团有限公司 | Gather and delivery pump set for thick oil containing sand |
| CN102635553A (en) * | 2011-02-08 | 2012-08-15 | 株式会社神户制钢所 | Water injection type screw compressor |
| CN203297102U (en) * | 2013-05-29 | 2013-11-20 | 河北玉星生物工程有限公司 | Fuel tank exhaust device of screw air compressor |
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| CN106678041A (en) | 2017-05-17 |
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Application publication date: 20170517 Assignee: JIANGYIN ELMVACUUM EQUIPMENT CO., LTD. Assignor: Northeastern University Contract record no.: 2018210000012 Denomination of invention: External balance type screw vacuum pump License type: Common License Record date: 20180504 |