CN109571218A - Grinding agent sprays control structure, work piece cut system and spraying method - Google Patents
Grinding agent sprays control structure, work piece cut system and spraying method Download PDFInfo
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- CN109571218A CN109571218A CN201811570487.1A CN201811570487A CN109571218A CN 109571218 A CN109571218 A CN 109571218A CN 201811570487 A CN201811570487 A CN 201811570487A CN 109571218 A CN109571218 A CN 109571218A
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- workpiece
- nozzle
- grinding agent
- cutting line
- control structure
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Abstract
The present invention provides a kind of grinding agent spray control structure, work piece cut system and spraying method, grinding agent sprays control structure and is applied to work piece cut system, work piece cut system includes: cutting structure, including the cutting line for cutting workpiece and for controlling the mobile control structure of cutting line that cutting line moves horizontally；Workpiece moving structure is vertically fed to the direction close to cutting line for carrying workpiece and controlling workpiece；Nozzle arrangements, including for the nozzle to cutting line spray grinding agent；The grinding agent spray control structure includes: control module, it is connect with nozzle arrangements, it is moved in the horizontal direction for controlling nozzle arrangements, so that the horizontal distance between the outer wall of the cut surface of nozzle and workpiece maintains within a preset range, the outer wall is outer wall of the workpiece close to the nozzle.The grinding agent spraying mechanism of the embodiment of the present invention, is set dynamically nozzle, shortens the transportation range of spray liquid, reduces the loss of grinding agent, promotes the quality and cutting efficiency of section.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, in particular to a kind of grinding agent sprays control structure, work piece cut
System and spraying method.
Background technique
Silicon (Si) is used as the maximum element of global reserves, while because of its good semiconducting behavior, and is widely used in
Field of semiconductor materials.Silicon Wafer is basic material with silicon, is aided with boron (B) or phosphorus (P) dopant is prepared.In general, logical
The monocrystalline silicon crystal bar that CZ method (pulling of crystals autofrettage) grows into well-formed is crossed, by the slice (Slicing) of crystal bar, chamfering
(Edge Grinding), barreling (Lapping), twin grinding (Double side Grinding) etch (Etching), throw
Light (Polishing), the processes such as cleaning (cleaning), to produce surface flatness height, the stable monocrystalline of crystal structure
Silicon wafer.
In the slice process of crystal bar, frequently with internal diameter or outer diameter cutting method, cutting in traditional small size wafer processing
It is relatively inefficient, while popularizing with the silicon wafer that diameter is 300mm, internal diameter cutting method has been unable to meet the silicon of the size
The cutting of piece, thus meet by using wire cutting (Wire Saw) method the cutting of large-sized crystal bar.This wire cutting side
Method is wound on two main shafts back and forth by the uniform steel wire of single line diameter, is aided with grinding agent (Abrasive) and is cut.
In traditional System of HS-WEDM, the method for supplying of grinding agent is to supply at a fixed location mode, arrives grinding agent spray in fixed position
Cutting line side on the net, it is mobile by gauze horizontal direction, drive grinding agent to be moved to cut surface, then due to round crystal bar into
To in the process, and between the nozzle of spray at a distance from change, therefore, when the fixation position of nozzle is arranged, need to consider
Nozzle may collide with crystal bar because of the movement of crystal bar, to evade interference, nozzle distance cut surface is arranged farther out, grinds
Agent is influenced by self gravity, a large amount of to be lost during moving horizontally, and can not be effectively moved to cut surface, be caused grinding agent
Be lost it is larger, while be unfavorable for cut quality-improving.
The permeability for thus how effectively promoting grinding agent efficiently uses the ground effect of grinding agent, promotes cutting quality
Become with cutting efficiency and needs the problem of exploring.
Summary of the invention
In view of this, the present invention provides a kind of grinding agent spray control structure, change spray mode, by static state fixed point spray
It is changed to dynamic realtime spray, to promote permeability of the grinding agent to cut surface, promotes the quality and cutting efficiency of section, is reduced
The loss of grinding agent reduces production cost.
The present invention also provides a kind of work piece cut systems with above-mentioned grinding agent spray control structure.
Furthermore the present invention also provides a kind of grinding agent spraying methods.
In order to solve the above technical problems, the invention adopts the following technical scheme:
The grinding agent of embodiment sprays control structure according to a first aspect of the present invention, is applied to work piece cut system, described
Work piece cut system includes:
Cut structure, the cutting line moved horizontally including the cutting line for cutting workpiece and for controlling the cutting line
Mobile control structure；
Workpiece moving structure, for carry workpiece and control the workpiece vertically to close to the cutting line direction into
It gives；
Nozzle arrangements, including for the nozzle to cutting line spray grinding agent；
The grinding agent sprays control structure
Control module is connect with the nozzle arrangements, is moved in the horizontal direction for controlling the nozzle arrangements, so that
The horizontal distance obtained between the outer wall of the cut surface of the nozzle and the workpiece maintains within a preset range, and the outer wall is institute
Workpiece is stated close to the outer wall of the nozzle.
Preferably, the workpiece is crystal bar, and the cross section of the crystal bar is circle.
Preferably, the control module includes:
Servo motor is connected with the nozzle arrangements, for providing the power moved horizontally to the nozzle arrangements；
Controller is connected with the servo motor, for controlling the velocity of rotation of the servo motor, to control the spray
The movement speed of mouth structure in the horizontal direction so that between the outer wall of the cut surface of the nozzle and the workpiece it is horizontal away from
Within a preset range from maintenance.
Preferably, the controller is also used to connect with the workpiece moving structure, for obtaining the feeding of the workpiece
Speed calculates the movement speed of the nozzle arrangements in the horizontal direction according to the feed speed of the workpiece.
Preferably, the horizontal distance of the outer wall of the cut surface of the nozzle and the workpiece is 20mm-40mm.
Preferably, the horizontal distance of the outer wall of the cut surface of the nozzle and the workpiece is 30mm.
Preferably, the vertical range of the nozzle and the cutting line is 10mm-40mm.
The work piece cut system of embodiment according to a second aspect of the present invention, comprising:
Cut structure, the cutting line moved horizontally including the cutting line for cutting workpiece and for controlling the cutting line
Mobile control structure；
Workpiece moving structure, for carry workpiece and control the workpiece vertically to close to the cutting line direction into
It gives；
Nozzle arrangements, including for the nozzle to cutting line spray grinding agent；And
Grinding agent described in above-described embodiment sprays control structure.
Preferably, the nozzle arrangements are two groups, and nozzle arrangements described in two groups are separately positioned on the two sides of the workpiece, often
Nozzle arrangements described in one group are equipped at least one described nozzle.
The grinding agent spraying method of embodiment according to a third aspect of the present invention, applied to grinding agent described in above-described embodiment
Spray control structure, which comprises
It controls the nozzle arrangements to move in the horizontal direction, so that the cut surface of the nozzle and the workpiece is outer
Horizontal distance between wall maintains within a preset range, and the outer wall is outer wall of the workpiece close to the nozzle.
Preferably, the feed speed of the workpiece is obtained, and according to the feed speed of the workpiece, calculates the nozzle knot
The movement speed of structure in the horizontal direction.
Above-mentioned technical proposal of the invention one of at least has the advantages that:
Grinding agent according to an embodiment of the present invention sprays control structure, by the way that controller, controller and nozzle arrangements are arranged
Be connected, and control nozzle arrangements and move in the horizontal direction so that the outer wall of the cut surface of the nozzle and the workpiece it
Between horizontal distance maintain within a preset range, and then can effectively avoid nozzle and crystal bar from colliding, and control by dynamic
The spray mode of nozzle can make the inside for spraying the cut surface that agent distance as short as possible is delivered to workpiece, less grinding
The loss of agent, reduces the loss of grinding agent, and effectively promotes permeability of the grinding agent to cut surface, promoted section quality and
Cutting efficiency.
Detailed description of the invention
Fig. 1 is the first cut state schematic diagram of the work piece cut system of the embodiment of the present invention；
Fig. 2 is the second cut state schematic diagram of the work piece cut system of the embodiment of the present invention；
Fig. 3 is the third cut state schematic diagram of the work piece cut system of the embodiment of the present invention；
Fig. 4 is the structural schematic diagram of traditional diced system of the embodiment of the present invention.
Appended drawing reference:
Cut structure 10；Line roller 11；Cutting line 12；
Crystal bar 20；
Workpiece moving structure 30；Work plate 31；Resin glue 32；
Nozzle arrangements 40；Nozzle 41；
The nozzle 41 ' of traditional structure.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained, shall fall within the protection scope of the present invention.
Control structure is sprayed in conjunction with the grinding agent that attached drawing specifically describes embodiment according to a first aspect of the present invention first below.
As shown in Figure 1 to Figure 3, grinding agent according to an embodiment of the present invention sprays control structure, is applied to work piece cut
System, work piece cut system include cutting structure 10, workpiece mobile mechanism 30 and nozzle arrangements 40.
Wherein, cutting structure 10 includes cutting line 12 for cutting workpiece and moves horizontally for controlling cutting line 12
Cutting line 12 moves control structure, and workpiece mobile mechanism 30 is used to carry workpiece and controls workpiece vertically to close to cutting line 12
Direction feeding, nozzle arrangements 40 include the nozzle 41 for spraying grinding agent to cutting line 12, and grinding agent sprays control structure packet
Control module is included, control module is connect with nozzle arrangements 40, it is moved in the horizontal direction for controlling nozzle arrangements 40, so that
Horizontal distance between the outer wall of the cut surface of nozzle 41 and workpiece maintains within a preset range, and outer wall is workpiece close to nozzle 41
Outer wall.
That is, as shown in Figure 1, cutting structure 10 is moved horizontally by control structure control cutting line 12, for example, will
Two line rollers 11 are symmetrical arranged, and wire casing are provided on two line rollers 11, cutting line 12 can wind the line in two line rollers 11
In slot, control structure passes through the reversion and rotating forward of control line roller 11, cutting line 12 can be made to move back and forth in the horizontal direction, work
Part mobile mechanism may include driving mechanism and the attachment device for connecting workpiece, and attachment device may include and driving mechanism phase
Work plate 31 even and the resin glue 32 being arranged on work plate 31, workpiece can be bonded in work plate 31 by resin glue 32
On, it is moved by the driving work plate 31 of driving mechanism and workpiece is driven to shift to cutting line, i.e. Fig. 1 perpendicular to the track of cutting line
In it is gradually mobile to cutting line 12 until workpiece is completely cut through from top to bottom.
During work piece cut, nozzle arrangements 40, the nozzle 41 of nozzle arrangements 40 are provided with above cutting line 12
Neighbouring cutting line 12 and spray cutting liquid by cutting workpiece setting, and to cutting line 12, by control module control nozzle 41 with
The distance of the outer wall of workpiece, for example, control module is additionally provided with driving mechanism, is driven with ensuring that nozzle 41 does not collide with workpiece
Motivation structure is connected with nozzle arrangements 40, and driving mechanism provides the power that moves horizontally to nozzle 41, so workpiece gradually downward
In mobile process, nozzle 41 can draw back or march forward the water between the outer wall to guarantee the cut surface of nozzle 41 and workpiece
Flat distance maintains within a preset range, both nozzle 41 can be made as close as the central point in work piece cut face, and not with work
Part collides, and reduces grinding agent in the moving distance of spray point to cut surface center, makes grinding agent when relatively short
Between infiltrate into the center in work piece cut face, reduce grinding agent it is mobile because of long range when, largely flowed as caused by gravity
It loses, reduces the loss of grinding agent, improve the permeability that grinding agent is moved to cut surface.Wherein, the cut surface in the present invention
Refer to position of the cutting line where go by the section of cutting workpiece.
Grinding agent according to an embodiment of the present invention sprays control structure as a result, can effectively control nozzle 41 and workpiece
Cut surface outer wall between horizontal distance, reduced as far as possible in the case where ensuring that nozzle 41 is not touched with workpiece
Agent is sprayed from spray point to the moving distance at cut surface center, reduces the loss of grinding agent, and effectively promotes grinding agent to cutting
The permeability of face promotes the quality and cutting efficiency of section.
Preferably, workpiece is crystal bar 20, and the cross section of crystal bar 20 is circle.That is, circular crystal bar 20 is being cut
During a point of length of the cutting line 12 on cut surface by be gradually increased to the diameter length of crystal bar 20, then
It is progressively smaller until that crystal bar 20 is completely cut through, the movement speed of crystal bar 20 is controllable in the motion process, and crystal bar 20
The length variation of movement speed and cutting line 12 on cut surface be it is directly proportional, therefore, the mobile speed of crystal bar 20 can be passed through
The movement speed of degree control nozzle 41, to guarantee that nozzle 41 maintains in controlled range at a distance from 20 outer wall of crystal bar.Certainly originally
Crystal bar 20 is also possible to ellipse in the other embodiments of invention, is not intended as limiting herein.
According to one embodiment of present invention, control module includes servo motor (not shown) and controller (not shown),
Servo motor is connected with nozzle arrangements 40, for providing the power moved horizontally, controller and servo motor to nozzle arrangements 40
It is connected, for controlling the velocity of rotation of the servo motor, to control the movement speed of nozzle arrangements 40 in the horizontal direction, with
So that the horizontal distance between the outer wall of the cut surface of nozzle 41 and workpiece maintains within a preset range.
That is, servo motor driving nozzle arrangements 40 move in the horizontal direction for being parallel to cutting line 12, control
Device is connected with servo motor, controls servo motor by controller and provides mobile power to nozzle arrangements 40, and controls servo
The movement speed of motor, so that the horizontal distance between the outer wall of the cut surface of nozzle 41 and workpiece maintains preset range
It is interior, avoid nozzle 41 from colliding with workpiece.
Preferably, controller is also used to connect with workpiece mobile mechanism 30, for obtaining the feed speed of workpiece, according to work
The feed speed of part calculates the movement speed of nozzle arrangements 40 in the horizontal direction.
That is, controller obtains the feed speed of workpiece, and cut according to the shape of crystal bar 20 and cutting line 12
Length variation on face calculates the feed speed of workpiece, and then calculates the mobile speed of nozzle arrangements 40 in the horizontal direction
Degree.
Optionally, the horizontal distance of the outer wall of the cut surface of nozzle 41 and workpiece is 20mm-40mm, it is preferable that nozzle 41
Horizontal distance with the outer wall of the cut surface of workpiece is 30mm.The distance can both guarantee that the outer wall of nozzle 41 and workpiece kept one
Fixed fluctuation distance can effectively avoid nozzle 41 from colliding with workpiece, and can make nozzle 41 as far as possible close to work
The outer wall of part, and then distance of the cutting liquid from spray point to the center of cut surface can be shortened as far as possible.
Further, the vertical range of nozzle 41 and cutting line 12 is 10mm-40mm.The distance is it is possible to prevente effectively from nozzle
41 collide in the process of running with cutting line 12, and make nozzle 41 close to cutting line 12 as far as possible, with control cutting liquid from
Distance on nozzle 41 to cutting line 12 is in reasonable range.
Below by taking cross section is circular 20 structure of crystal bar as an example, feed speed and the nozzle 41 for calculating crystal bar 20 are mobile
Speed.
As shown in Figure 1, set crystal bar 20 feeds down speed as x, feeding distance a, the feeding time is t, in cutting face
Point is set to C, and the intersection point of cut surface and the outer wall of crystal bar 20, the i.e. start position of cut surface are B, when cutting beginning moment, cuts
The midpoint C of face is overlapped in horizontal point of contact A with starting point B location, and setting the distance between starting point B and point C is b, setting servo electricity
It is v that machine, which drives the movement speed of nozzle 41, and 20 radius R of crystal bar can then obtain following relationship:
The feeding distance of crystal bar 20: a=x*t；
The spacing of starting point B and midpoint C:
To which servo motor drives the movement speed of nozzle 41
Wherein, the radius R of crystal bar 20 is datum, and the feed speed of crystal bar 20 is for user when processing beginning according to need
The parameter set, it follows that servo motor drives the movement speed of nozzle 41 and crystal bar 20 to feed the time (when cutting
Between) being positively correlated property, user can according to require by controller input clipping time, and then obtain servo motor drive nozzle
41 movement speed.
By the cut state variation diagram of Fig. 1 to Fig. 3 it is found that A point of the midpoint C of cut surface from is to the midpoint of cut surface
C is overlapped with the center of circle O of 20 section of crystal bar, and during this period, the length of b is gradually increased, at this point, servo motor driving nozzle 41 is opposite
The midpoint C of cut surface is retreated, so that nozzle 41 avoids crystal bar 20, is avoided colliding, is continued to move down with crystal bar 20, b's
Length is gradually reduced, and servo motor drives nozzle 41 mobile to midpoint C at this time, so that nozzle 41 is close to the center of cut surface, from
And it can guarantee nozzle 41 and the periphery wall of crystal bar 20 and remain in default range.
A comparative example of the invention, as shown in figure 4, the nozzle 41 ' of traditional structure is fixed at the upper of cutting line 12
Side, and in order to avoid nozzle 41 ' and cutting line 12 collide, the place with crystal bar 20 relatively far away from is arranged in nozzle 41 ',
The surface of line roller 11 as shown in Figure 4, that is to say, that after nozzle 41 sprays cutting liquid, either in the beginning of the cutting of crystal bar 20
End or end, spray liquid need the mobile distance for being greater than 20 diameter of crystal bar that could transport to the center of cut surface always,
Compared with the embodiment of the present invention, the transportation range of spray liquid greatly increases, thus cutting liquid loss is relatively more, even
Cutting liquid cannot effectively be transported to the center of cut surface, to influence cut quality.
Implement grinding agent according to the present invention as a result, and spray control structure, the spray mode of nozzle 41, energy are controlled by dynamic
Enough make the center for spraying the cut surface that agent is delivered to crystal bar 20 with shortest distance, the less loss of grinding agent is reduced and ground
The loss of grinding agent, and permeability of the grinding agent to cut surface is effectively promoted, promote the quality and cutting efficiency of section.
The work piece cut system of embodiment according to a second aspect of the present invention, including cutting structure 10, workpiece mobile mechanism 30,
Grinding agent in nozzle arrangements 40 and above-described embodiment sprays control structure.
Specifically, cutting structure 10 includes cutting line 12 for cutting workpiece and moves horizontally for controlling cutting line 12
The mobile control structure of cutting line 12, workpiece mobile mechanism 30 is for carrying workpiece and controlling workpiece vertically to close to cutting line 12
Direction feeding, nozzle arrangements 40 include for cutting line 12 spray grinding agent nozzle 41 and grinding agent spray control knot
Structure.
Wherein, grinding agent of the invention spray control structure has been described in detail in the above-described embodiments, herein no longer
It repeats.
Preferably, nozzle arrangements 40 are two groups, and two groups of nozzle arrangements 40 are separately positioned on the two sides of workpiece, each group of nozzle
Structure 40 is equipped at least one nozzle 41.
That is, nozzle 41 can be set into two when cutting structure 10 equipped with more cutting lines 12 disposed in parallel
Group, two groups of nozzles 41 are separately positioned on the two sides of workpiece, and each group can be set one or more nozzles, each with cutting to guarantee
Secant 12 can spray cutting liquid, it is ensured that cut quality.
Since grinding agent according to the above embodiment of the present invention spray control structure has above-mentioned technique effect, root
Also there is corresponding technical effect according to the work piece cut system of the embodiment of the present invention, i.e., control the spray side of nozzle 41 by dynamic
Formula, can make the inside for spraying the cut surface that agent is delivered to workpiece with shortest distance, and the less loss of grinding agent reduces
The loss of grinding agent, and permeability of the grinding agent to cut surface is effectively promoted, promote the quality and cutting efficiency of section.
The other structures of work piece cut system according to an embodiment of the present invention and operation are to those skilled in the art
All it is to be understood that and easy to accomplish, therefore is not described in detail.
The grinding agent spraying method of third inventive embodiments according to the present invention, the grinding agent applied to such as above-described embodiment spray
Control structure is drenched, method includes:
Control nozzle arrangements 40 move in the horizontal direction, so that between the outer wall of the cut surface of nozzle 41 and workpiece
Horizontal distance maintains within a preset range, and outer wall is outer wall of the workpiece close to nozzle 41.
It is moved in the horizontal direction that is, nozzle arrangements 40 can be controlled by control module, so that nozzle 41
Horizontal distance between the outer wall of the cut surface of workpiece maintains within a preset range, and outer wall is workpiece close to the outer of nozzle 41
Wall.
Preferably, the feed speed of the available workpiece of control module, and according to the feed speed of workpiece, calculate nozzle knot
The movement speed of structure 40 in the horizontal direction.
Due to having covered the speed of spraying method and nozzle 41 in the description of above-mentioned grinding agent spray control structure
Calculation formula, the explanation of specific visible above-described embodiment.
Control method of the invention, it is ensured that the outer wall of nozzle 41 and workpiece is kept within a preset range, as far as possible
Reducing the distance that spray agent is moved to the center of cut surface, the less loss of grinding agent reduces the loss of grinding agent, and
Permeability of the grinding agent to cut surface is effectively promoted, the quality and cutting efficiency of section are promoted.
Unless otherwise defined, technical term or scientific term used in the present invention are should be in fields of the present invention
The ordinary meaning that personage with general technical ability is understood.The similar word of "one" or " one " etc. used in the present invention is not yet
It indicates quantity limitation, but indicates that there are at least one.The similar word such as " connection " or " connected " is not limited to physics
Or mechanical connection, but may include electrical connection, it is either direct or indirectly."upper", "lower",
"left", "right" etc. is only used for indicating relative positional relationship, and after the absolute position for being described object changes, then the relative position is closed
System also correspondingly changes.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (11)
1. a kind of grinding agent sprays control structure, which is characterized in that be applied to work piece cut system, the work piece cut system packet
It includes:
Structure is cut, the cutting line movement moved horizontally including the cutting line for cutting workpiece and for controlling the cutting line
Control structure；
Workpiece moving structure is vertically fed to the direction close to the cutting line for carrying workpiece and controlling the workpiece；
Nozzle arrangements, including for the nozzle to cutting line spray grinding agent；
The grinding agent sprays control structure
Control module is connect with the nozzle arrangements, is moved in the horizontal direction for controlling the nozzle arrangements, so that institute
It states the horizontal distance between the outer wall of the cut surface of nozzle and the workpiece to maintain within a preset range, the outer wall is the work
Outer wall of the part close to the nozzle.
2. grinding agent according to claim 1 sprays control structure, which is characterized in that the workpiece is crystal bar, the crystalline substance
The cross section of stick is circle.
3. grinding agent according to claim 1 sprays control structure, which is characterized in that the control module includes:
Servo motor is connected with the nozzle arrangements, for providing the power moved horizontally to the nozzle arrangements；
Controller is connected with the servo motor, for controlling the velocity of rotation of the servo motor, to control the nozzle knot
The movement speed of structure in the horizontal direction, so that the horizontal distance between the outer wall of the cut surface of the nozzle and the workpiece is tieed up
It holds within a preset range.
4. grinding agent according to claim 3 sprays control structure, which is characterized in that the controller is also used to and institute
The connection of workpiece moving structure is stated, for obtaining the feed speed of the workpiece, according to the feed speed of the workpiece, described in calculating
The movement speed of nozzle arrangements in the horizontal direction.
5. grinding agent according to claim 1 sprays control structure, which is characterized in that the nozzle is cut with the workpiece
The horizontal distance of the outer wall of face is 20mm-40mm.
6. grinding agent according to claim 4 sprays control structure, which is characterized in that the nozzle is cut with the workpiece
The horizontal distance of the outer wall of face is 30mm.
7. grinding agent according to claim 1 sprays control structure, which is characterized in that the nozzle and the cutting line
Vertical range is 10mm-40mm.
8. a kind of work piece cut system characterized by comprising
Structure is cut, the cutting line movement moved horizontally including the cutting line for cutting workpiece and for controlling the cutting line
Control structure；
Workpiece moving structure is vertically fed to the direction close to the cutting line for carrying workpiece and controlling the workpiece；
Nozzle arrangements, including for the nozzle to cutting line spray grinding agent；And
Grinding agent as claimed in any one of claims 1 to 6 sprays control structure.
9. work piece cut system according to claim 8, which is characterized in that the nozzle arrangements are two groups, described in two groups
Nozzle arrangements are separately positioned on the two sides of the workpiece, and nozzle arrangements described in each group are equipped at least one described nozzle.
10. a kind of grinding agent spraying method, which is characterized in that be applied to grinding agent as claimed in any one of claims 1 to 6 and spray
Drench control structure, which comprises
The nozzle arrangements are controlled to move in the horizontal direction so that the outer wall of the cut surface of the nozzle and the workpiece it
Between horizontal distance maintain within a preset range, the outer wall be the workpiece close to the nozzle outer wall.
11. grinding agent spraying method according to claim 10, which is characterized in that the feed speed of the workpiece is obtained,
And according to the feed speed of the workpiece, the movement speed of the nozzle arrangements in the horizontal direction is calculated.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110733139A (en) * | 2019-10-14 | 2020-01-31 | 西安奕斯伟硅片技术有限公司 | crystal bar cutting device and method |
| CN112060378A (en) * | 2020-07-30 | 2020-12-11 | 长治高测新材料科技有限公司 | Wire cutting process for large-diameter silicon slice diamond for IC |
| CN114571617A (en) * | 2022-03-24 | 2022-06-03 | 广东高景太阳能科技有限公司 | Mortar injection control method and control system in silicon wafer cutting |
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