CN109570126A - The monolithic cleaning device of multistage drug recycling - Google Patents
The monolithic cleaning device of multistage drug recycling Download PDFInfo
- Publication number
- CN109570126A CN109570126A CN201811618672.3A CN201811618672A CN109570126A CN 109570126 A CN109570126 A CN 109570126A CN 201811618672 A CN201811618672 A CN 201811618672A CN 109570126 A CN109570126 A CN 109570126A
- Authority
- CN
- China
- Prior art keywords
- recycling
- cavity
- drug
- cleaning device
- multistage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention relates to chemicals reclaimer technical fields in semiconductor crystal wafer cleaning process, disclose a kind of monolithic cleaning device of multistage drug recycling, including rotating mechanism and multistage drug recovering mechanism；The rotating mechanism includes rotary chuck and rotary drive assembly；The multistage drug recovering mechanism respectively includes recycling cavity and goes up and down driving assembly.The monolithic cleaning device of multistage drug recycling of the invention is by being arranged multistage drug recovering mechanism, in monolithic cleaning operation process, when carrying out cleaning wafer using different drugs, drug can be recycled using different drug recovering mechanisms, the classification recycling for realizing each similar drug, facilitates the utilization again to drug.
Description
Technical field
The present invention relates to chemicals reclaimer technical fields in semiconductor crystal wafer cleaning process, more particularly, to one kind
The monolithic cleaning device of multistage drug recycling.
Background technique
There are many type of crystal column surface institute residual contaminants, are broadly divided into particle, metal ion, organic matter and natural oxygen
Compound etc..The presence of these substances can make element different degrees of defect in the fabrication process, or even failure.For this purpose, in integrated electricity
The effective defect concentration and reduction flaw size of reducing becomes very crucial during the Process Production of road, and wafer cleaning step can not
Or it lacks.During actual process, wafer cleaning technique runs through the entire production process of chip, accounts for about the 30% of full step, purpose
Be to remove the dirt particles of various influence electric wiring performances in a upper process, the conductive contaminants of metal or ionic and
There is the inorganic and organic matter etc. of corrosiveness, creates conditions for subsequent processing step.
Cleaning technique is many kinds of, is most widely used as wet cleaning techniques, scavenging mechanism is in cleaning equipment
The pollutant that crystal column surface is removed using chemicals, to guarantee the electrical characteristic and reliability of wafer assembly, according to its characteristic
Physical cleaning and chemical cleaning can be divided into.Physical cleaning is to carry out physics to residue using cleaning agent to wash away or spray, and is come clear
Except surface residue；Chemical cleaning mechanism is to be chemically reacted using cleaning agent with residue, is formed volatile or dissolution
Product reaches removing purpose.
Currently, wet clean equipment mainly has groove-type cleaning machine and single chip washer.With on wafer, pattern image becomes smaller
Deepen, in order to reach cleaning effect, the chemicals that slot type cleaning uses is more and more, so that pollutant may deposit again, resistance
Hinder the validity of cleaning, while generating secondary pollution.Monolithic cleaning avoids this problem, but in some processes, monolithic is clear
The chemicals washed also is underused, and just because of high speed rotation, is detached from wafer, into cavity after be expelled directly out and be difficult to recycle benefit
With causing unnecessary waste；Chemicals after centrifugation is possible to cause two because splashing or steam is low on wafer again
Secondary pollution；In addition to this, meanwhile, how all kinds of chemicals of categorised collection are also a problem to the cavity of cleaning device.
Summary of the invention
The purpose of the present invention is to provide a kind of monolithic cleaning devices of multistage drug recycling, to solve to deposit in the prior art
Monolithic cleaning chemicals be difficult to the technical issues of recycling of classifying.
Based on above-mentioned first purpose, the present invention provides a kind of monolithic cleaning device of multistage drug recycling, the monolithics
Cleaning device includes rotating mechanism and multistage drug recovering mechanism；
The rotating mechanism includes rotary chuck and rotary drive assembly；
The multistage drug recovering mechanism respectively includes recycling cavity and goes up and down driving assembly, and the recycling cavity surround and sets
It sets in the outer circumferential of the rotary chuck, and multiple recycling cavitys successively sheathed setting；Multiple recycling cavitys point
Not can under the action of the lifting driving assembly independent-lifting, with realize recycling cavity working position and inoperative position tune
Section；When the recycling cavity is in working position, the reclaiming chamber body can be connected to the rotary chuck, the recycling cavity
The height of inoperative position is not more than the height of rotary chuck；
When one of reclaiming chamber body running, non-work is in other recycling cavitys of the recycling inside cavities of the work
Make position, the work recycling inside cavities other recycling cavitys being capable of sealed set.
Further, multiple recycling cavitys are respectively arranged with liquid outlet, and the liquid outlet is connected with recovery tube
Component, the recycling tube assembly are connected with drug purification mechanism.
Further, the liquid outlet is arranged on the bottom wall of the recycling cavity, the wall surface of the recycling cavity
It is obliquely installed to the liquid outlet.
Further, the float of detection liquid level is provided in the reclaiming chamber body.
Further, the cleaning device further includes the chamber support rod of chamber and the support chamber；
The rotating mechanism and the recycling cavity are arranged in the chamber.
Further, the cleaning device includes two-stage drug recovering mechanism, respectively the first drug recovering mechanism and
Two drug recovering mechanisms, the first drug recovering mechanism are set in the outside of the second drug recovering mechanism；
The first drug recovering mechanism includes the first cavity and the first lifting driving assembly, the second drug recycling machine
Structure includes the second cavity and the second lifting driving assembly.
Further, it is provided with pick-and-place material mouth on the side wall of the chamber, lifting folding is provided in the pick-and-place material mouth
Door, the lifting switching door are connected with folding door drive assembly；
First cavity is connect with the lifting switching door, and the lifting switching door and the folding door drive assembly form institute
State the first lifting driving assembly.
Further, when second cavity is in inoperative position, the top of second cavity and the rotary chuck
Circumferential edge be tightly connected by cavity seal assembly；
The cavity seal assembly is also connected with the sealing upper fixing element extended downwardly, the sealing upper fixing element it is outer
Side is connected with cavity gasket, the inner wall upper end sealed connection of the cavity gasket and second cavity.
Further, the second lifting driving assembly includes the drive rod of driver and the driver drives, institute
It states and is provided with driving protection component on drive rod；After the drive rod passes through the bottom wall of first cavity, pass through driving protection
Component is connect with second cavity；
And the bottom wall of the driving protection component and first cavity is slidably and sealingly connected with.
Further, second cavity inclines far from the side wall upper part of the rotary chuck side towards the rotary chuck
Tiltedly setting.
Compared with prior art, the invention has the benefit that
The monolithic cleaning device of multistage drug recycling provided by the invention, the monolithic cleaning device include rotating mechanism with
And multistage drug recovering mechanism.The monolithic cleaning device of multistage drug recycling of the invention, which passes through, is arranged multistage drug recovering mechanism,
In monolithic cleaning operation process, when carrying out cleaning wafer using different drugs, different drug recovering mechanisms pair can be used
Drug is recycled, and is realized the classification recycling of each similar drug, is facilitated the utilization again to drug.
The present invention provides the second cavity and tilts far from the side wall upper part of the rotary chuck side towards the rotary chuck
Setting, that is, using die design is received；The liquid outlet is arranged on the bottom wall of the recycling cavity, the recycling cavity
Bottom wall be obliquely installed towards the liquid outlet namely bottom correspond to liquid outlet setting water conservancy diversion slope.It can be understood that
Closing in type be related to and with bottom water conservancy diversion slope, can not only prevent drug ejecta pollution wafer, moreover it is possible to quickly collect chemical drugs
Product.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the main view schematic cross-sectional view of the monolithic cleaning device of multistage of embodiment of the present invention drug recycling；
Fig. 2 is the diagrammatic side-view cross-sectional schematic diagram of Fig. 1；
Fig. 3 is that the drug of the first drug recovering mechanism flows to schematic diagram；
Fig. 4 is that the drug of the second drug recovering mechanism flows to；
Fig. 5 is driving protection component profile；
Fig. 6 is recycling tube assembly profile；
Fig. 7 is the second cavity lower seal enlarged drawing.
Icon: 1- chamber；The first cavity of 2-；The second cavity of 3-；4- rotary chuck；5- goes up and down switching door；6- second is gone up and down
Driving assembly；7- driving protection component；8- cavity seal assembly；9- recycles tube assembly；10- bottom plate；11- float；12- top cover；
13- chamber support rod；14- observation window；15- air draft flange；16- swing arm connector sleeve；17- drive rod protective case；18- is driven water conservancy diversion
Protective case；19- transmission seal pad；20- water conservancy diversion support plate；21- cavity support plate；22- recycles inner tube；23- recycles gasket；
24- recycles protection pipe；25- recycles outer tube；26- seals upper fixing element；27- cavity gasket.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that such as occur term " center ", "upper", "lower", "left", "right",
"vertical", "horizontal", "inner", "outside" etc., the orientation or positional relationship of instruction are that orientation based on the figure or position are closed
System, is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
Specific orientation is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, such as there is art
Language " first ", " second ", " third " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " peace such as occur
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
Embodiment one
Referring to the monolithic cleaning device for shown in Fig. 1 to Fig. 7, present embodiments providing a kind of multistage drug recycling, including chamber
Room support rod 13, chamber 1, rotating mechanism and multistage drug recovering mechanism.
The chamber 1 being wherein mounted on chamber support rod 13 is the operation foundation structure of monolithic cleaning device, that is, rotation
Mechanism and multistage drug recovering mechanism are arranged in chamber 1.
Rotating mechanism is used to support wafer and realizes the rotation of wafer.Specifically, rotating mechanism include rotary chuck 4 and
Rotary drive assembly.Wherein, rotary chuck 4 is used to support wafer, and rotary drive assembly can be motor and cooperate with motor
Driving member, the output shaft of motor drives 4 high-speed rotation of rotary chuck by driving member, to realize the rotation of wafer.
Multistage drug recovering mechanism recycles for realizing the independence of different drugs.Specifically, multistage drug recovering mechanism
Recycling cavity is respectively included, driving assembly and driving protection component 7 are gone up and down, recycling cavity is circumferentially positioned at the week of rotary chuck 4
Outward, and multiple recycling cavitys successively sheathed setting；Multiple recycling cavitys are able under the action of going up and down driving assembly
Independent-lifting, to realize recycling cavity in the adjusting of working position and inoperative position；In general, the recycling cavity of inside is arranged in
Lifting driving assembly need to recycle cavity with the corresponding lifting driving assembly after the wall surface of the recycling cavity in outside
Wall surface connection, so driving protection component 7 is arranged on the output rod of lifting driving assembly, to protect the defeated of lifting driving assembly
The part that rod is located in the reclaiming chamber in outside is not corroded, and realizes output rod when moving up and down, and output rod is passed through with it
Outside recycling cavity sealing.When recycling cavity is in working position, reclaiming chamber body can be connected to rotary chuck 4, each to return
The height for receiving the inoperative position of cavity is not more than the height of rotary chuck 4；When one of reclaiming chamber body running, in the work
Other recycling cavitys of recycling inside cavities are in inoperative position, in other recycling cavitys of the recycling inside cavities of the work
It being capable of sealed set.
It is needing to illustrate but, the working position for recycling cavity refers to that recycling cavity is used for shape when collecting corresponding drug
State, thus recycling cavity need to be connected to rotary chuck 4 in working position namely rotary chuck 4 on drug in centrifugal force
Recycling cavity is able to enter under effect, the corresponding working position for recycling cavity should be above its inoperative position.Recycle the non-of cavity
Working position refers to that recycling cavity is not used in state when collecting drug, recycles the height of the inoperative position of cavity no more than rotation
The height of chuck 4, in order to prevent recycling cavity height at inoperative position to be greater than the height of rotary chuck 4, and influence
Drug on rotary chuck 4 flows into the recycling cavity on working position.
Inside as referred to herein refers to that, close to the side of rotary chuck 4, outside refers to one far from rotary chuck 4
Side.Since multiple recycling cavitys want categorised collection difference drug, so medical fluid should not flow into a reclaiming chamber body running
In other reclaiming chamber bodies, when due to work, recycling cavity is in higher working position, and the centrifugation drug that wafer rotation generates can quilt
The side wall of recycling cavity in work is blocked, so drug may not flow into the recycling cavity of the external side of working condition reclaiming chamber
It is interior, but working condition recycles the recycling cavity of inside cavities in the coverage area of drug, so necessarily being in for inside is close
Envelope state.
It is recycled out of reclaiming chamber body in order to facilitate drug, multiple recycling cavitys are respectively arranged with liquid discharge
Mouthful, liquid outlet can be divided into two kinds.One is the liquid outlets being arranged on outermost recycling cavity, can directly adopt
It is connected to recovery tube with the bottom surface of cavity.Another kind is the liquid discharge that the recycling cavity of outermost recycling inside cavities is arranged in
Mouthful, which needs to realize seals with the recycling cavity in outside, so the liquid of the recycling inside cavities of inside is arranged in
Outlet needs to connect recovery tube component 9, and tube assembly 9 is recycled in the wall surface connection of the corresponding recycling cavity of recycling tube assembly 9
Including recycling inner tube 22, recycling gasket 23, recycling protection pipe 24 and recycling outer tube 25, wherein recycling inner tube 22 upper end with
Recycle cavity low wall surface liquid outlet connection, recycling outer tube 25 be set in recycling inner tube 22 outside, recycling outer tube 25 with
Recycling protection pipe 24 is arranged between recycling inner tube 22, the lower end of recycling inner tube 22 is arranged in recycling protection pipe 24, and recycles and protect
It is slidably and sealingly connected between pillar 24 and recycling outer tube 25 by recycling gasket 23.
According to demand, liquid outlet can connect drug purification mechanism by recovery tube or recycling tube assembly.Specifically,
Liquid outlet is arranged on the bottom wall of recycling cavity, and the bottom wall for recycling cavity is obliquely installed towards the liquid outlet, for example, liquid
The middle part of recycling cavity is arranged in body outlet, and the bottom for recycling cavity can be two sides towards the inclined structure in middle part.Drug is net
Changing mechanism can be made of multi-stage filtration systems (such as, but not limited to: impurity depositing system, contaminant filter system), can go
Except the impurity in drug, to realize the recycling of drug.
Also settable detection liquid level in the reclaiming chamber body of the monolithic cleaning device of the present embodiment multistage drug recycling
Float 11 will call the police, so as to timely with being easy to understand the liquid level of the intracorporal drug of reclaiming chamber when float is higher than a certain value
Drug is discharged.
The monolithic cleaning device of multistage drug of embodiment of the present invention recycling is by being arranged multistage drug recovering mechanism, due to clear
Washing different drugs in wafer process is that lower and wafer acts in different times, it is possible to when according to the effect of different drugs
Between, different chemicals is collected using corresponding drug recovering mechanism respectively, for example, wafer is first carried out clearly with the first drug
It washes, the first drug is recycled using the first drug recovering mechanism at this time；After the completion of first drug cleaning action, need the second drug into
Row cleaning, recycles the second drug using the second drug recovering mechanism at this time, and so on.The recycling of multistage drug of the embodiment of the present invention
Monolithic cleaning device carry out cleaning wafer technique when, can be recycled respectively according to the type of drug, realize all kinds of medicines
The classification of product is recycled, and the utilization again to drug is facilitated；Corresponding recycling drug is single component chemicals, is passed through at this time
After drug purification mechanism removes corresponding impurity, drug, that is, recoverable is recycled, avoids the waste of drug, and reduce production
Cost.
As shown in Figs 1-4, the monolithic cleaning device of multistage of embodiment of the present invention drug recycling specifically may include two-stage drug
Recovering mechanism.For the convenience of description, the two-stage drug recovering mechanism is respectively defined as the first drug recovering mechanism and the second drug
Recovering mechanism, wherein the outside for being set in the second drug recovering mechanism is arranged in the first drug recovering mechanism；First drug returns
Receiving mechanism includes the first cavity 2 and the first lifting driving assembly, and the second drug recovering mechanism is gone up and down including the second cavity 3, second
Driving assembly 6, driving protection component 7 and recycling tube assembly 9.
Correspondingly, as shown in Figs 1-4, the first cavity 2 is placed in chamber 1, and the second cavity 3 is placed in the first cavity 2,
Rotary chuck 4 is placed in the second cavity 3.The inoperative position of second cavity 3 and rotary chuck 4 be substantially concordant namely the second chamber
When body 3 is in inoperative position, the upper edge of the second cavity 3 can be tightly connected with the circumferential edge of rotary chuck 4, and specific second
Cavity 3 can be tightly connected by cavity seal assembly 8 and rotary chuck 4.Wherein, cavity seal assembly 8 can be mutual cooperation
Groove and protrusion be tongue-and-groove sealing structure, for example, the edge of rotary chuck 4 is provided with protrusion, be provided on the second cavity 3
Groove downwards, protrusion, which is inserted upwardly into groove, realizes sealed connection.As shown in fig. 7, cavity seal assembly 8 be also connected with it is close
Fixing piece 26 is sealed up, sealing upper fixing element 26 is tightly connected by the inner wall of cavity gasket 27 and the second cavity 3.First cavity
2, the above-mentioned overall structure such as second cavity 3 is finally supported by chamber support rod 13 and is fixed, and is located on bottom plate 10.
The liquid outlet of first cavity 2 directly passes through general recovery tube and realizes.The liquid outlet of second cavity and recycling
Tube assembly 9 connects, specifically, recycling protection pipe 24 is mounted on the top of the wall surface of the first cavity, recycling gasket 23 is installed
It in recycling protection pipe 24, and recycles inner tube 22 and recycles outer tube 25 and be connected on cavity bottom surface, move up and down in the second cavity 3
When, the sealing of recycling tube assembly 9 and the second cavity 3 not only may be implemented in recycling tube assembly 9, can also avoid recycling tube assembly 9
The liquid line for being equivalent to subsequent external connection moves up and down.It should be noted that simplifying structure for the component, recycling is protected
Pipe 24 changes similar casing into recycling outer tube 25, forms simple internal and external casing structure, also within the scope of the present invention.
As shown in figure 5, driving protection component 7 includes drive rod protective case 17, transmission water conservancy diversion protective case 18, transmission seal pad
19, water conservancy diversion support plate 20 and cavity support plate 21, drive rod protective case 17 are mounted in the base wall panel of chamber 1, and transmission water conservancy diversion is protected
Sheath 18 is connect by water conservancy diversion support plate 20 and cavity support plate 21 with the second cavity 3, and transmission seal pad 19 is mounted on drive rod
On protective case 17, when which can guarantee cavity lifting, driving assembly is not corroded, moreover it is possible to cavity discharge be avoided to let out
Dew；Structure is simplified for it, drive rod protective case 17, transmission water conservancy diversion protective case 18 are changed into similar pipe, constituted simply up and down
Cannula structure, also within the scope of the present invention.
It is understood that when the first cavity of the embodiment of the present invention 2 is in recycling state: since the second cavity 3 is in non-work
It is formed and is sealed with the edge of rotary chuck 4 when making position, so drug may not flow into the second cavity 3；It is at the first cavity 2 at this time
In the working condition of recycling drug.(flow direction of arrow expression drug) as shown in Figure 3, the second cavity 3 is in closed state,
Drug enters the first cavity 2 under the influence of centrifugal force, is finally recycled or is excluded by the first cavity 2.
When the second cavity of the embodiment of the present invention 3 enters recycling state: the second cavity 3 can be in the second lifting driving assembly 6
Working position is risen under driving, when being in working position, the second position of the cavity 3 towards rotary chuck 4 can connect with rotary chuck 4
It is logical, that is, the drug on rotary chuck 4 can flow to the second cavity 3 under the influence of centrifugal force, simultaneously as the second cavity 3
Sidewall Height far from 4 side of rotary chuck increases, and can be blocked in drug in the second cavity 3 without entering the first cavity 2.
At this point, as shown in Figure 4 (flow direction of arrow expression drug), drug flows to the second cavity 3 under the influence of centrifugal force, finally
By the recycling of recycling tube assembly 9 or discharge of the second cavity 3.
As shown in Figure 1, pick-and-place material should be arranged in the chamber 1 of the monolithic cleaning device of multistage drug of embodiment of the present invention recycling
Mouthful, wafer to be cleaned is placed on rotary chuck 4 with facilitating.Specifically, setting picks and places material mouth on the side wall of chamber 1,
And the corresponding lifting switching door 5 of installation on picking and placing material mouth.Lifting switching door 5 can be realized by the driving of folding door drive assembly
Lifting, wherein folding door drive assembly can be the form of motor cooperation ball-screw, be also possible to the defeated of cylinder or hydraulic cylinder
Rod directly drives the form of lifting switching door 5.
The top of the chamber 1 of the monolithic cleaning device of multistage drug of embodiment of the present invention recycling, also is understood as cavity
Top cover 12 can be inclined to set.It is understood that the form of the inclined design of top cover 12 of chamber, after steam condensation
Gather on top cover, the side wall of chamber 1 can be flowed to along inclined top cover 12, and then be discharged from the bottom of chamber 1, to avoid top cover
Condensed fluid on 12 is low on the wafer of cleaning, causes wafer contamination.
In order to reduce device volume, the form that lifting switching door 5 jointly controls is can be used in the first cavity 2.That is, the first chamber
Body 2 is connect with the lifting switching door 5, and the lifting switching door 5 forms the first lifting with the folding door drive assembly and drives
Component.
It is understood that the working condition of two-stage drug recovering mechanism becomes when only with two-stage drug recovering mechanism
Changing need to only be realized by the lifting of the second drug recovering mechanism, at this point, the lifting of the first cavity 2 is used for the purpose of facilitating wafer
It picks and places, so, the first cavity 2 can drive together with lifting switching door 5, at this point, lifting switching door 5 moves down to pick and place material mouth
Opening state, namely when needing to go to put material, lifting switching door 5 can be moved down, to open pick-and-place material mouth, at this point, the
One cavity 2 moves down together, facilitates the pick-and-place of wafer to be cleaned；After the completion of wafer picks and places, lifting switching door 5 is moved up
It closes and picks and places material mouth, to realize the sealing of chamber 1, at this point, the first cavity 2 also rises to corresponding working position.
As shown in Fig. 2, the second lifting driving assembly 6 includes the drive rod of driver and the driver drives, it is described
Drive rod is connect after passing through the bottom wall of first cavity 2 with second cavity 3, and drive rod should can be with first chamber
The bottom wall of body 2 is slidably and sealingly connected with, to realize the lifting of drive rod and the sealing of the first cavity 2.
The driver of second lifting driving assembly 6 can be motor, is also possible to cylinder etc., is mounted on the bottom of chamber 1
On plate 10.
Preferably, as shown in Fig. 1,3 or 4, the second cavity 3 of the monolithic cleaning device of the present embodiment multistage drug recycling is remote
Side wall upper part from 4 side of rotary chuck is obliquely installed towards the rotary chuck 4.It is understood that the second cavity 3
Close to rotary chuck 4, if drug hits the lateral wall of the second cavity 3 under the influence of centrifugal force using straight tube form, it is easy
It is splashed and is dropped on wafer by lateral wall rebound, cause wafer secondary pollution, and the second cavity 3 is using the inclined similar receipts in upper end
The shape of the mouth as one speaks, drug contact inclination rebound downwards, drug splashing can be prevented low onto wafer, effectively secondary pollution be avoided to ask
Topic.
The monolithic cleaning device of the present embodiment multistage drug recycling also sets up a sight on the lifting opposition side plate of switching door 5
Window 14 is examined, camera can also be provided in chamber 1 according to demand, contributes to observation 1 internal operating condition of chamber.
The monolithic cleaning device of the present embodiment multistage drug recycling is equipped with air draft flange 15 on 1 side plate of chamber, for connecting
Run in wind apparatus, for removing process steam in cavity.
Meanwhile the chamber 1 of the monolithic cleaning device of the present embodiment multistage drug recycling is additionally provided with multiple swing arm connector sleeves 16,
For assembling swing arm, a variety of cleaning processes are realized.
In conclusion the monolithic cleaning device of the present embodiment multistage drug recycling, it can be by two-stage chemicals recovering mechanism
It constitutes, is each responsible for collecting different chemical liquid medicines, wherein the second drug recovering mechanism is preferred for the single drug of ingredient
Recycling.First cavity is driven by lifting switching door, can be moved up and down, and cavity of the first cavity and chamber 1 etc. forms first
Drug recovering mechanism.Second cavity can be moved up and down by the second lifting driving assembly driving, the second cavity and the second lifting
Recycling tube assembly of driving assembly, driving protection component, cavity seal assembly and the second cavity etc. forms secondary chemical drug and receives
Collecting system.
The monolithic cleaning device of the present embodiment multistage drug recycling of the present invention has the beneficial effect that:
1, the monolithic cleaning device of the present embodiment multistage drug recycling of the present invention can be equipped with two-stage or multi-grade chemical drug returns
Mechanism is received, different chemicals can be collected respectively, different chemicals are handled convenient for fab.It is single when existing in technique
One Components Chemical drug, can be by the second drug recovering mechanism high efficiente callback, and it is net to pass through single component chemicals drug
Change mechanism and remove corresponding impurity recycling utilization, reduces production cost.
2, the monolithic cleaning device of the present embodiment multistage drug recycling of the present invention is used close to the recycling cavity of rotary chuck
Die design is received, drug splashing can be prevented low onto wafer, effectively avoid secondary pollution problem, meanwhile, recycle cavity bottom
Portion is designed using two-way slope, can be to quickly collecting and chemicals is discharged.
3, each recycling cavity of the monolithic cleaning device of the present embodiment multistage drug of the present invention recycling individually controls, can be with
Guarantee that multistage drug recovering mechanism is used alone, does not interfere with each other, to complete the collection of different chemicals.
4, the monolithic cleaning device of the present embodiment multistage drug recycling of the present invention, which is equipped with driving protection component, to complete
Sealing function is played while elevating movement, protect drive rod not by chemicals corrode and prevent chemicals drop onto cylinder or
On motor.
5, the top cover of the chamber of the monolithic cleaning device of the present embodiment multistage drug recycling of the present invention uses inclined design, prevents
Only steam condensate is dropped on the wafer of cleaning.
6. the driving protection component 7 of the monolithic cleaning device of multistage drug of embodiment of the present invention recycling can be good at protecting
When recycling cavity up and down motion, lifting driving assembly is not corroded, and cavity discharge will not be revealed；Tube assembly is recycled using similar
Structure, the difference is that recycling inner tube is connected on the second cavity, liquid discharge outlet not only can be protected in recycling protection pipe
Demonstrate,prove the up and down motion of cavity, moreover it is possible to guarantee to reveal when cavity discharge, it is thus also avoided that liquid discharge outlet connector moves up and down.
It should be noted that the present invention is when using more stages drug recovering mechanism, it can be in the second cavity close to rotation
The side of disk is set gradually.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of monolithic cleaning device of multistage drug recycling, which is characterized in that the monolithic cleaning device includes rotating mechanism
And multistage drug recovering mechanism；
The rotating mechanism includes rotary chuck and rotary drive assembly；
The multistage drug recovering mechanism respectively includes recycling cavity and goes up and down driving assembly, and the recycling cavity is circumferentially positioned at
The outer circumferential of the rotary chuck, and multiple recycling cavitys successively sheathed setting；Multiple recycling cavitys distinguish energy
Enough independent-liftings under the action of the lifting driving assembly, to realize recycling cavity in the adjusting of working position and inoperative position；
When the recycling cavity is in working position, the reclaiming chamber body can be connected to the rotary chuck, described to recycle the non-of cavity
The height of working position is not more than the height of rotary chuck；
When one of reclaiming chamber body running, inoperative is in other recycling cavitys of the recycling inside cavities of the work
Position, the work recycling inside cavities other recycle cavitys being capable of sealed set.
2. the monolithic cleaning device of multistage drug recycling according to claim 1, which is characterized in that multiple reclaiming chambers
Body is respectively arranged with liquid outlet, and the liquid outlet is connected with recycling tube assembly, and it is net that the recycling tube assembly is connected with drug
Change mechanism.
3. the monolithic cleaning device of multistage drug recycling according to claim 2, which is characterized in that the liquid outlet is set
It sets on the bottom wall of the recycling cavity, the bottom wall of the recycling cavity is obliquely installed towards the liquid outlet.
4. the monolithic cleaning device of multistage drug recycling according to claim 1-3, which is characterized in that described time
Receive the float that detection liquid level is provided in cavity.
5. the monolithic cleaning device of multistage drug recycling according to claim 1, which is characterized in that the cleaning device is also
Chamber support rod including chamber and the support chamber；
The rotating mechanism and the recycling cavity are arranged in the chamber.
6. the monolithic cleaning device of multistage drug recycling according to claim 5, which is characterized in that the cleaning device packet
Include two-stage drug recovering mechanism, respectively the first drug recovering mechanism and the second drug recovering mechanism, the first drug recycling
Mechanism is set in the outside of the second drug recovering mechanism；
The first drug recovering mechanism includes the first cavity and the first lifting driving assembly, the second drug recovering mechanism packet
Include the second cavity and the second lifting driving assembly.
7. the monolithic cleaning device of multistage drug recycling according to claim 6, which is characterized in that the side wall of the chamber
On be provided with pick-and-place material mouth, be provided with lifting switching door in the pick-and-place material mouth, the lifting switching door is connected with switching door drive
Dynamic component；
First cavity is connect with the lifting switching door, and the lifting switching door and the folding door drive assembly are as described the
One lifting driving assembly.
8. the monolithic cleaning device of multistage drug recycling according to claim 6, which is characterized in that at second cavity
When inoperative position, the top of second cavity and the circumferential edge of the rotary chuck are connected by the sealing of cavity seal assembly
It connects；
The cavity seal assembly is also connected with the sealing upper fixing element extended downwardly, connects on the outside of the sealing upper fixing element
It is connected to cavity gasket, the inner wall upper end sealed connection of the cavity gasket and second cavity.
9. the monolithic cleaning device of multistage drug recycling according to claim 6 or 8, which is characterized in that described second liter
Drop driving assembly includes the drive rod of driver and the driver drives, is provided with driving protection group on the drive rod
Part；After the drive rod passes through the bottom wall of first cavity, it is connect by driving protection component with second cavity；
And the bottom wall of the driving protection component and first cavity is slidably and sealingly connected with.
10. the monolithic cleaning device of multistage drug recycling according to claim 6 or 8, which is characterized in that second chamber
Body is obliquely installed far from the side wall upper part of the rotary chuck side towards the rotary chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811618672.3A CN109570126B (en) | 2018-12-27 | 2018-12-27 | Single-piece cleaning device for multistage medicine recovery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811618672.3A CN109570126B (en) | 2018-12-27 | 2018-12-27 | Single-piece cleaning device for multistage medicine recovery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109570126A true CN109570126A (en) | 2019-04-05 |
| CN109570126B CN109570126B (en) | 2021-06-22 |
Family
ID=65933234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811618672.3A Active CN109570126B (en) | 2018-12-27 | 2018-12-27 | Single-piece cleaning device for multistage medicine recovery |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109570126B (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11168078A (en) * | 1997-12-04 | 1999-06-22 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment |
| JP2003045772A (en) * | 2001-07-27 | 2003-02-14 | Shibaura Mechatronics Corp | Spin treatment apparatus |
| CN1452522A (en) * | 2000-07-07 | 2003-10-29 | 诚实公司 | Wafer container washing apparatus |
| US20040050491A1 (en) * | 2002-09-13 | 2004-03-18 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| CN1672245A (en) * | 2002-06-21 | 2005-09-21 | 禧沛股份有限公司 | Substrate processing device and substrate processing method |
| JP3826719B2 (en) * | 2001-03-30 | 2006-09-27 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
| CN101106071A (en) * | 2006-07-12 | 2008-01-16 | 细美事有限公司 | Apparatus and method for treating substrate |
| CN102315089A (en) * | 2010-07-01 | 2012-01-11 | 株式会社迪思科 | Rotary cleaning device |
| CN102989705A (en) * | 2012-11-28 | 2013-03-27 | 北京七星华创电子股份有限公司 | Cleaning device capable of preventing liquid from splashing and cleaning system with same |
| CN104538332A (en) * | 2014-12-12 | 2015-04-22 | 深圳市华星光电技术有限公司 | Chamber structure for wet process machine |
| CN107579018A (en) * | 2016-05-27 | 2018-01-12 | 细美事有限公司 | Substrate board treatment and substrate processing method using same |
-
2018
- 2018-12-27 CN CN201811618672.3A patent/CN109570126B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11168078A (en) * | 1997-12-04 | 1999-06-22 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment |
| CN1452522A (en) * | 2000-07-07 | 2003-10-29 | 诚实公司 | Wafer container washing apparatus |
| JP3826719B2 (en) * | 2001-03-30 | 2006-09-27 | 東京エレクトロン株式会社 | Substrate processing apparatus and substrate processing method |
| JP2003045772A (en) * | 2001-07-27 | 2003-02-14 | Shibaura Mechatronics Corp | Spin treatment apparatus |
| JP4727080B2 (en) * | 2001-07-27 | 2011-07-20 | 芝浦メカトロニクス株式会社 | Spin processing equipment |
| CN1672245A (en) * | 2002-06-21 | 2005-09-21 | 禧沛股份有限公司 | Substrate processing device and substrate processing method |
| US20040050491A1 (en) * | 2002-09-13 | 2004-03-18 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| CN101106071A (en) * | 2006-07-12 | 2008-01-16 | 细美事有限公司 | Apparatus and method for treating substrate |
| CN102315089A (en) * | 2010-07-01 | 2012-01-11 | 株式会社迪思科 | Rotary cleaning device |
| CN102989705A (en) * | 2012-11-28 | 2013-03-27 | 北京七星华创电子股份有限公司 | Cleaning device capable of preventing liquid from splashing and cleaning system with same |
| CN104538332A (en) * | 2014-12-12 | 2015-04-22 | 深圳市华星光电技术有限公司 | Chamber structure for wet process machine |
| CN107579018A (en) * | 2016-05-27 | 2018-01-12 | 细美事有限公司 | Substrate board treatment and substrate processing method using same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109570126B (en) | 2021-06-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN216629753U (en) | Ambroxol hydrochloride active carbon filter equipment | |
| CN109570126A (en) | The monolithic cleaning device of multistage drug recycling | |
| CN214862123U (en) | Special wet dust collector for slag disintegrating pool | |
| CN208308621U (en) | A kind of novel sump oil purification device | |
| CN214319627U (en) | Two-section type wet dust collector | |
| CN209188219U (en) | A kind of sewage water filtration valve | |
| CN211621870U (en) | Sewage pipeline | |
| CN110548336B (en) | Industrial sewage treatment equipment capable of separating and compressing sludge | |
| CN209669165U (en) | A kind of waste recovery knockout drum | |
| JP3963605B2 (en) | Rotary substrate processing equipment | |
| CN220070902U (en) | Waste liquid circulating filter | |
| CN212141606U (en) | Sewage treatment recycle device | |
| CN211688955U (en) | Filter equipment is refine to fish oil | |
| CN214286869U (en) | Rare noble metal is smelted and is used waste water recovery processing apparatus | |
| CN109011996A (en) | Whirlwind water wash static dedusting and purifying device | |
| CN217594271U (en) | Fly ash heavy metal removing device | |
| CN115869694B (en) | Filth separator for medical treatment flushing equipment | |
| CN210079073U (en) | Dust recovery device of silica gel production | |
| CN211198813U (en) | Purification device for water for preparing eye drops | |
| CN219663039U (en) | Evaporation filter device | |
| CN211215646U (en) | Detachable basket filter | |
| CN217746375U (en) | Dust clearing device is used in production of hard granule fertilizer | |
| CN210163687U (en) | Ultrasonic tetrachloroethylene dry cleaning machine | |
| CN216418602U (en) | Sewage quality detection device | |
| CN219023602U (en) | Vacuum recovery device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |