CN109560024A - 一种晶圆键合装置及其校正方法 - Google Patents
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Abstract
本发明涉及半导体技术领域,尤其涉及一种晶圆键合装置的校正方法,包括:步骤S1,将形变量采集装置设置于朝向预设标识的位置;步骤S2,控制线性运动机构按照一设定的驱动力运行;步骤S3,运行形变量采集装置,以获取形变量采集装置采集的第一晶圆在预设标识处的实时形变量;步骤S4,将形变量采集装置采集的实时形变量与标准经验曲线中对应的标准形变量进行比较,并判断两者差值是否超出一预设阈值;若是,则转向步骤S5;若否,则结束;步骤S5,对晶圆键合装置进行校正;能够对晶圆键合装置提供的驱动力进行精确的校正,避免因驱动力误差过大产生的晶圆键合失败或晶圆损坏等情况。
Description
技术领域
本发明涉及半导体加工设备技术领域,尤其涉及一种晶圆键合装置及其校正方法。
背景技术
在现有的半导体工艺中,采用晶圆键合装置将两片晶圆键合在一起,能够增加晶圆的单位面积内器件的数量,已经成为了本领域内广泛应用的技术手段。
晶圆键合装置键合晶圆的过程,一般是将需要键合的第一晶圆和第二晶圆分别固定,然后在一设定的驱动力下使得第一晶圆和第二晶圆相对对方进行运动,直到该第一晶圆和第二晶圆完成键合。
然而,控制第一晶圆和第二晶圆相对运动的实际驱动力与设定的驱动力往往存在误差,当误差达到一定程度时,如果不及时校正,可能导致晶圆键合失败,严重时甚至会损坏晶圆,造成较大的破坏和损失。
发明内容
针对上述问题,本发明提出了一种晶圆键合装置,其中,包括:
第一固定装置,用于固定待键合的第一晶圆;
第二固定装置,用于固定待键合的第二晶圆;
形变量采集装置,用于采集所述第一晶圆在一预设标识处相较于一初始位置的实时形变量的形变量采集装置;
线性运动机构,用于产生驱动所述第一晶圆向所述第二晶圆运动的驱动力;
其中,所述形变量采集装置设置于一移动轨道上,所述移动轨道的导程延伸至一预设位置,使得所述形变量采集装置移动至所述预设位置时与所述预设标识的位置对应;
所述形变量采集装置中预存有所述形变量采集装置采集的标准形变量关于所述线性运动机构产生的驱动力的标准经验曲线。
上述的晶圆键合装置,其中,所述第一固定装置和第二固定装置均为卡盘。
上述的晶圆键合装置,其中,所述线性运动机构为气动活塞。
一种晶圆键合装置的校正方法,其中,应用如上任一所述的晶圆键合装置;
所述校正方法包括:
步骤S1,将所述形变量采集装置设置于朝向所述预设标识的位置;
步骤S2,控制所述线性运动机构按照一设定的驱动力运行;
步骤S3,运行所述形变量采集装置,以获取所述形变量采集装置采集的所述第一晶圆在所述预设标识处的实时形变量;
步骤S4,将所述形变量采集装置采集的所述实时形变量与所述标准经验曲线中对应的所述标准形变量进行比较,并判断两者差值是否超出一预设阈值;
若是,则转向步骤S5;若否,则结束;
步骤S5,对所述晶圆键合装置进行校正。
上述的校正方法,其中,所述步骤S5具体为:对所述晶圆键合装置的所述线性运动机构进行校正,使得所述线性运动机构产生的驱动力回复为设定的驱动力。
上述的校正方法,其中,所述步骤S5中,具体通过重复步骤S1~S4判断所述线性运动机构产生的驱动力是否已经回复为设定的驱动力。
上述的校正方法,其中,所述预设标识位于所述第一晶圆的中心。
上述的校正方法,其中,所述形变量采集装置包括具有一固定焦距的一图像传感器,且所述图像传感器在采集头的延伸方向上是活动的;
所述步骤S3中,调节所述图像传感器在所述延伸方向上的位置,直至所述图像传感器采集的图像是清晰时,记录下所述图像传感器在所述延伸方向上相较于一初始位置的实时坐标,并将所述实时坐标作为所述实时形变量。
上述的校正方法,其中,所述图像传感器正对所述第一晶圆的下表面。
上述的校正方法,其中,所述预设阈值为所述标准形变量的10%~30%。
有益效果:本发明提出的一种晶圆键合装置及其校正方法,能够对晶圆键合装置提供的驱动力进行精确的校正,避免因驱动力误差过大产生的晶圆键合失败或晶圆损坏等情况。
附图说明
图1为本发明一实施例中晶圆键合装置处于维护状态时的结构示意图;
图2为本发明一实施例中晶圆键合装置处于工作状态时的结构示意图;
图3为本发明一实施例中晶圆键合装置的校正方法的步骤流程图;
图4为本发明一实施例中标准形变量关于驱动力的典型标准经验曲线。
具体实施方式
下面结合附图和实施例对本发明进行进一步说明。
实施例一
在一个较佳的实施例中,提出了可以如图1和图2所示的一种晶圆键合装置,其中,可以包括:
第一固定装置21,用于固定待键合的第一晶圆11,且该第一固定装置21可以固定在一底座(附图中未显示)上;
第二固定装置(附图中未显示),用于固定待键合的第二晶圆(附图中未显示),且该第二固定装置可以固定在一底座上;
形变量采集装置30,用于采集第一晶圆11在一预设标识处相较于一初始位置的实时形变量;
线性运动机构50,用于产生驱动第一晶圆11向第二晶圆运动的驱动力,且该线性运动机构50可以与第一固定装置21连接固定,更为具体地可以固定在第一固定装置21的背面;
其中,形变量采集装置30设置于一移动轨道60上,移动轨道60的导程延伸至一预设位置,使得形变量采集装置30移动至预设位置时与预设标识的位置对应,且该移动轨道60可以固定在一操作平台(附图中未显示)上;
形变量采集装置30中可以预存有形变量采集装置30采集的标准形变量关于线性运动机构产生的驱动力的标准经验曲线。
上述技术方案中,底座和操作平台可以是一体的或相互独立的;晶圆键合装置可以具有一如图2所示的工作状态和如图1所示的一维护状态;在工作状态下,利用晶圆键合装置的线性运动机构50能够驱动第一晶圆11向第二晶圆运动,最终使得第一晶圆11与第二晶圆键合;优选地,第二固定装置是可移动的或可拆卸的,那么在维护状态下,一般需要单独判断线性运动机构50提供的驱动力的准确性,此时可以将第二晶圆以及第二固定装置转移,从而避免第二晶圆以及第二固定装置对维护过程产生影响;晶圆键合装置还可以包括用于固定各个结构的支架;形变量采集装置30的数量可以有多个,如图2所示的形变量采集装置30的数量为4个,采集位置可以是第一晶圆11半径的1/3,或1/2,或2/3处等。
在一个较佳的实施例中,第一固定装置21和第二固定装置可以均为卡盘。
在一个较佳的实施例中,线性运动机构50可以为气动活塞,在这种情况下,气动活塞的气泵产生的气压环境还可以采用气压传感器等装置进行辅助监控。
实施例二
在一个较佳的实施例中,如图3所示,提出了一种晶圆键合装置的校正方法,其中,可以应用于如上任一的晶圆键合装置;
该校正方法可以包括一预设步骤,制备形变量采集装置30采集的标准形变量关于线性运动机构50产生的驱动力的标准经验曲线;
该校正方法还可以包括:
步骤S1,将形变量采集装置30设置于朝向第一晶圆11上预设标识的位置;
步骤S2,控制线性运动机构50按照一设定的驱动力运行;
步骤S3,运行形变量采集装置30,以获取形变量采集装置30采集的第一晶圆11在预设标识处的实时形变量;
步骤S4,将形变量采集装置30采集的实时形变量与标准经验曲线中对应的标准形变量进行比较,并判断两者差值是否超出一预设阈值;
若是,则转向步骤S5;若否,则结束;
步骤S5,对晶圆键合装置进行校正。
上述技术方案中,晶圆键合装置可以具有一工作状态和一维护状态;在工作状态下,利用晶圆键合装置的线性运动机构50能够驱动第一晶圆11向第二晶圆运动,最终使得第一晶圆11与第二晶圆键合;优选地,第二固定装置是可移动的或可拆卸的,那么在维护状态下,一般需要单独判断线性运动机构50提供的驱动力的准确性,此时可以将第二晶圆以及第二固定装置转移,从而避免第二晶圆以及第二固定装置对维护过程产生影响,上述的校正方法可以理解为是应用于该维护状态下。
在一个较佳的实施例中,步骤S5具体为:对晶圆键合装置的线性运动机构50进行校正,使得线性运动机构50产生的驱动力回复为设定的驱动力。
上述技术方案中,举例来说,设定的驱动力为2牛时,通过上述方法进行校正后的线性运动机构50产生的实际的驱动力也应为2牛上下的合理范围之内。
上述实施例中,优选地,步骤S5中,具体可以通过重复步骤S1~S4验证线性运动机构50产生的驱动力是否已经回复为设定的驱动力,直到校正完成。
在一个较佳的实施例中,预设标识位于第一晶圆11的中心。
上述技术方案中,预设标识可以是通过处理器处理得到的虚拟标识,也可以是设置在第一晶圆11上的实物标识,也可以是第一晶圆11中本身存在的某个器件或结构等。
在一个较佳的实施例中,形变量采集装置30可以包括具有一固定焦距的一图像传感器,且图像传感器在采集头的延伸方向上是活动的;
步骤S3中,调节图像传感器在延伸方向上的位置,直至图像传感器采集的图像是清晰时,记录下图像传感器在延伸方向上相较于一初始位置的实时坐标,并将实时坐标作为实时形变量。
上述技术方案中,该图像传感器可以连接一处理器,从而通过处理器完成对图像传感器采集的图像进行处理,并得到处理结果,即处理得到的实时形变量;图3所示的是形变量采集装置30采集的标准形变量关于线性运动机构50产生的驱动力的一条标准经验曲线,F0、F1分别表示两个特定的驱动力,Z0、Z1表示分别对应F0和F1的两个标准形变量;本实施例中,在设定的驱动力F下,图像传感器在延伸方向上相较于一初始位置的实时坐标,应在标准经验曲线中对应的坐标Z上下的合理范围内,若不是则需要进行校正。
上述实施例中,优选地,图像传感器正对第一晶圆的下表面。
在一个较佳的实施例中,预设阈值可以为标准形变量的10%~30%,举例来说,可以是标准形变量的12%,或15%,或18%,或22%,或25%,或28%等。
在一个较佳的实施例中,采用气动活塞作为线性运动机构50,在这种情况下,气动活塞中负责进行气压驱动的前端设备或结构可以通过气压传感器进行检测,而气动活塞进行活塞运动的环境则可以通过本发明中的技术方案实现;此时,步骤S5中对晶圆键合装置进行校正具体可以是对气动活塞进行校正,例如对气动活塞的活塞头进行更换等。
综上所述,本发明提出的一种晶圆键合装置及其校正方法,能够对晶圆键合装置提供的驱动力进行精确的校正,尤其是对用于产生驱动力的机械结构进行监控和校正,是常用的传感器的监控方式不能替代的,从而避免因驱动力误差过大产生的晶圆键合失败或晶圆损坏等情况。
通过说明和附图,给出了具体实施方式的特定结构的典型实施例,基于本发明精神,还可作其他的转换。尽管上述发明提出了现有的较佳实施例,然而,这些内容并不作为局限。
对于本领域的技术人员而言,阅读上述说明后,各种变化和修正无疑将显而易见。因此,所附的权利要求书应看作是涵盖本发明的真实意图和范围的全部变化和修正。在权利要求书范围内任何和所有等价的范围与内容,都应认为仍属本发明的意图和范围内。
Claims (10)
1.一种晶圆键合装置,其特征在于,包括:
第一固定装置,用于固定待键合的第一晶圆;
第二固定装置,用于固定待键合的第二晶圆;
形变量采集装置,用于采集所述第一晶圆在一预设标识处相较于一初始位置的实时形变量的形变量采集装置;
线性运动机构,用于产生驱动所述第一晶圆向所述第二晶圆运动的驱动力;
其中,所述形变量采集装置设置于一移动轨道上,所述移动轨道的导程延伸至一预设位置,使得所述形变量采集装置移动至所述预设位置时与所述预设标识的位置对应;
所述形变量采集装置中预存有所述形变量采集装置采集的标准形变量关于所述线性运动机构产生的驱动力的标准经验曲线。
2.根据权利要求1所述的晶圆键合装置,其特征在于,所述第一固定装置和第二固定装置均为卡盘。
3.根据权利要求1所述的晶圆键合装置,其特征在于,所述线性运动机构为气动活塞。
4.一种晶圆键合装置的校正方法,其特征在于,应用如权利要求1~3任一所述的晶圆键合装置;
所述校正方法包括:
步骤S1,将所述形变量采集装置设置于朝向所述预设标识的位置;
步骤S2,控制所述线性运动机构按照一设定的驱动力运行;
步骤S3,运行所述形变量采集装置,以获取所述形变量采集装置采集的所述第一晶圆在所述预设标识处的实时形变量;
步骤S4,将所述形变量采集装置采集的所述实时形变量与所述标准经验曲线中对应的所述标准形变量进行比较,并判断两者差值是否超出一预设阈值;
若是,则转向步骤S5;若否,则结束;
步骤S5,对所述晶圆键合装置进行校正。
5.根据权利要求4所述的校正方法,其特征在于,所述步骤S5具体为:对所述晶圆键合装置的所述线性运动机构进行校正,使得所述线性运动机构产生的驱动力回复为设定的驱动力。
6.根据权利要求5所述的校正方法,其特征在于,所述步骤S5中,具体通过重复步骤S1~S4判断所述线性运动机构产生的驱动力是否已经回复为设定的驱动力。
7.根据权利要求4所述的校正方法,其特征在于,所述预设标识位于所述第一晶圆的中心。
8.根据权利要求4所述的校正方法,其特征在于,所述形变量采集装置包括具有一固定焦距的一图像传感器,且所述图像传感器在采集头的延伸方向上是活动的;
所述步骤S3中,调节所述图像传感器在所述延伸方向上的位置,直至所述图像传感器采集的图像是清晰时,记录下所述图像传感器在所述延伸方向上相较于一初始位置的实时坐标,并将所述实时坐标作为所述实时形变量。
9.根据权利要求8所述的校正方法,其特征在于,所述图像传感器正对所述第一晶圆的下表面。
10.根据权利要求4所述的校正方法,其特征在于,所述预设阈值为所述标准形变量的10%~30%。
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