CN109553306A - A kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) - Google Patents

A kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) Download PDF

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Publication number
CN109553306A
CN109553306A CN201811476001.8A CN201811476001A CN109553306A CN 109553306 A CN109553306 A CN 109553306A CN 201811476001 A CN201811476001 A CN 201811476001A CN 109553306 A CN109553306 A CN 109553306A
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CN
China
Prior art keywords
fixed
fixedly connected
plate
cover
gear
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Granted
Application number
CN201811476001.8A
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Chinese (zh)
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CN109553306B (en
Inventor
刘建
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Hunan Xingsanli Optoelectronic Technology Co ltd
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Shenzhen City Star Sanli Photoelectric Technology Co Ltd
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Priority to CN201811476001.8A priority Critical patent/CN109553306B/en
Publication of CN109553306A publication Critical patent/CN109553306A/en
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Publication of CN109553306B publication Critical patent/CN109553306B/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/151Deposition methods from the vapour phase by vacuum evaporation

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant), including device housings, base plate, upper cover plate, connects hinge, observe glass, door knob, exhaust port, hermatic door, air hole protective cover, limiting device, heating device, gear loop device, mobile coating apparatus, this glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant), the equipment inner gearing of design turns product around Coating Materials can also rotation, it is convenient for the uniformity of product film plating layer in this way, coating effects are faster, protective cover can limit Coating Materials evaporation range, the molecule of surrounding is brought together, promote the molecular concentration near product, accelerate coating speed, and device housings wall polluting can be prevented, device housings cleaning trouble, and protective cover be can be with disassembled simply , cleaning is convenient, saves human and material resources, and guarantee product quality, the production efficiency of equipment gets a promotion.

Description

A kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant)
Technical field
The present invention relates to technical field of vacuum plating, specially a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film Processing unit (plant).
Background technique
Vacuum evaporation is referred to as deposited, refers under vacuum conditions, using certain heating evaporation mode structural evaporation coating film material (or coating materials) and be allowed to gasify, particle flies to substrate surface to agglomerate the process of film forming, vapor deposition be using relatively early, purposes compared with Extensive gas phase deposition technology, with film build method, simple, film purity and compactness height, membrane structure and unique properties etc. are excellent Point.
Existing mobile phone glass cover board in process, needs to carry out surface coating, and existing plated film mode mainly has Vacuum evaporation, cathodic sputtering plating, chemical vapor deposition and ion plating etc., but the glass cover-plate of existing mobile phone electronic equipment is logical It is often used vacuum evaporation, but existing vacuum evaporation equipment, in use, evaporation effect is poor, evaporation time is long, plates membrane material Material waste needs often to clear up and clean inside existing vacuum evaporation equipment than more serious, just can guarantee product in this way Quality, but film plating layer easy to form on device housings inner wall, cleaning is cumbersome, expends a large amount of labours, the production of equipment Efficiency reduces, for this purpose, it is proposed that a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant).
Summary of the invention
The purpose of the present invention is to provide a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant)s, with solution Certainly the problems mentioned above in the background art.
To achieve the above object, the invention provides the following technical scheme: a kind of glass touch screen cover board Vacuum Deposition AR, AF light Learn film processing unit (plant), including device housings, base plate, upper cover plate, connects hinge, observation glass, door knob, exhaust port, sealing Door, air hole protective cover, limiting device, heating device, gear loop device, mobile coating apparatus, connect cover, terminal pad, gear Device and support device, the device housings side are equipped with hermatic door, the hermatic door and device housings and are turned by connects hinge Dynamic connection, the hermatic door side are equipped with observation glass, and the observation glass is fixedly connected with hermatic door, the hermatic door side Equipped with door knob, the door knob is fixedly connected with hermatic door, and upper cover plate, the upper cover plate top are fixed at the top of the device housings Equipped with exhaust port, the exhaust port is fixedly connected with upper cover plate, and air hole, the upper cover plate are equipped with inside the upper cover plate With exhaust port by being connected to inside air hole, the device housings bottom is equipped with base plate, the base plate and device housings It is fixedly connected, connect cover is fixed at the top of the base plate, terminal pad, the terminal pad top are fixed at the top of the connect cover Be fixed with protective cover, there are three the protective cover is set, the protective cover side is equipped with support device, the support device with connect Disk is fixedly connected, and the protective cover both ends are fixedly connected with support device respectively, and the terminal pad top side is fixed with heating Device, the connect cover inside are equipped with gear loop device, and the gear loop device is fixedly connected with base plate, the gear Geared system is equipped with inside loop device, the geared system is engaged with gear ring, limiting device is equipped at the top of the geared system, The limiting device is fixedly connected with geared system, and mobile coating apparatus, the mobile plated film are equipped at the top of the geared system Device is fixedly connected with geared system.
Preferably, the gear loop device is made of support cover and inner gear ring, is fixed with support at the top of the base plate Cover, support cover top are equipped with inner gear ring, and the inner gear ring is fixedly connected with support cover, the inner gear ring and gear Device engagement.
Preferably, the geared system is by driving motor, driving gear, fixed disk, connecting column, driven gear and shaft structure At the base plate top is fixed with driving motor, and the driving motor output end is fixed with driving gear, the driving gear Top is equipped with connecting column, and the connecting column is fixedly connected with driving gear, and fixed disk, the connection are equipped on the outside of the connecting column Column runs through fixed disk, and is fixedly connected with fixed disk, is fixed with mobile coating apparatus, the driving gear at the top of the connecting column Outside is equipped with driven gear, there are four the driven gear is set, engages on the inside of the driven gear with driving gear, described driven It being engaged on the outside of gear with inner gear ring, is fixed with shaft at the top of the driven gear, the shaft is fixedly connected with driven gear, It is fixedly connected at the top of the shaft with limiting device.
Preferably, the heating device is made of fixed column and electron source, and fixed column is equipped at the top of the terminal pad, described Fixed column is fixedly connected with terminal pad, and electron source is equipped at the top of the fixed column, and the electron source is fixedly connected with fixed column.
Preferably, the support device is made of limiting bracket, support frame, link block and curved cover plate, the terminal pad Top is fixed with support frame, and support frame as described above one end is equipped with link block, and the link block is fixedly connected with support frame, the connection Block side is equipped with curved cover plate, and the curved cover plate side is fixedly connected with link block, the curved cover plate other side and protection Cover is fixedly connected, and the protective cover other end is equipped with limiting bracket, and the limiting bracket is slidably connected with protective cover, the limit Bracket is fixedly connected with terminal pad.
Preferably, the limiting device is made of positioning plate, gag lever post, card slot, bayonet lock and lever, solid at the top of the shaft Surely there is positioning plate, be equipped with locating rod at the top of the positioning plate, the locating rod is fixedly connected with locating rod, described locating rod one end Equipped with lever, the lever and locating rod are rotatablely connected, and the locating rod other end is equipped with bayonet lock, and the bayonet lock and locating rod are solid Fixed connection, described lever one end are equipped with card slot, and the bayonet lock is flexibly connected with card slot.
Preferably, the mobile coating apparatus by sliding rail, L shaped plate, baffle, fixed block, pushing motor, screw rod, limited block, Crucible and rotor plate are constituted, and the connection top end is fixed with rotor plate, are equipped with crucible at the top of the rotor plate, the crucible and Rotor plate is slidably connected, and the crucible side is fixed with L shaped plate, and the L shaped plate side is equipped with sliding rail, the L shaped plate and sliding rail It is slidably connected, the sliding rail is fixedly connected with rotor plate, and the L shaped plate other side is equipped with baffle, and the baffle and rotor plate are solid Fixed connection, the rotor plate top are fixed with fixed block, and described fixed block one end is fixed with pushing motor, and the pushing motor is defeated Outlet is fixed with screw rod, and described screw rod one end is equipped with limited block, and the screw rod and limited block are rotatablely connected, the screw rod and L shape Plate is threadedly coupled.
Preferably, the shaft bottom is equipped with stop collar, and the stop collar is fixedly connected with base plate.
Preferably, anti-skid chequer is carved in the door knob outer surface.
Compared with prior art, the beneficial effects of the present invention are:
1, the equipment inner gearing that designs of the present invention not only make at work product around Coating Materials turn can also rotation, in this way Convenient for the uniformity of product film plating layer, faster, protective cover can limit Coating Materials evaporation range to coating effects, by point of surrounding Son is brought together, and promotes the molecular concentration near product, accelerates coating speed, and device housings inner wall can be prevented dirty Dye, device housings cleaning trouble, and protective cover can be with disassembled simply, it is convenient to clear up, and saves human and material resources, and guarantee to produce The production efficiency of quality, equipment gets a promotion.
2, the present invention makes crucible be in rotation and mobile two states, heats convenient for electron source to Coating Materials uniform Property, Coating Materials can be greatlyd save, joined stop collar in the bottom of geared system, stop collar can stablize driven gear Rotation, the anti-skid chequer increasing friction force on the door knob surface in the outside of hermatic door.
Detailed description of the invention
Fig. 1 is overall structure of the present invention;
Fig. 2 is present invention dismantling Local map;
Fig. 3 is present invention dismantling Local map;
Fig. 4 is present invention dismantling Local map;
Fig. 5 is present invention dismantling Local map;
Fig. 6 is present invention dismantling Local map;
Fig. 7 is the mobile coating apparatus enlarged drawing of the present invention;
Fig. 8 is limiting device enlarged drawing of the present invention.
In figure: 1- device housings;2- base plate;3- upper cover plate;4- connects hinge;5- observes glass;6- door knob;7- exhaust Interface;8- hermatic door;9- air hole;10- protective cover;11- limiting device;12- heating device;13- gear loop device;14- is moved Dynamic coating apparatus;15- limiting bracket;16- connect cover;17- support frame;18- link block;19- curved cover plate;20- terminal pad; 21- fixed column;22- electron source;23- support cover;24- inner gear ring;25- stop collar;26- driving motor;27- driving gear; 28- fixed disk;29- connecting column;30- driven gear;31- shaft;32- positioning plate;33- sliding rail;34-L shape plate;35- baffle; 36- fixed block;37- pushing motor;38- screw rod;39- limited block;40- crucible;41- gag lever post;42- card slot;43- bayonet lock;44- Lever;45- geared system;46- support device;47- rotor plate.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Fig. 1-8 is please referred to, the present invention provides a kind of technical solution: a kind of glass touch screen cover board Vacuum Deposition AR, AF optics Film processing unit (plant), including device housings 1, base plate 2, upper cover plate 3, connects hinge 4, observation glass 5, door knob 6, exhaust port 7, Hermatic door 8, limiting device 11, heating device 12, gear loop device 13, mobile coating apparatus 14, connects 9 protective cover 10 of air hole Cover 16, terminal pad 20, geared system 45 and support device 46 are connect, 1 side of device housings is equipped with hermatic door 8, the sealing Door 8 is rotatablely connected with device housings 1 by connects hinge 4, and 8 side of hermatic door is equipped with observation glass 5, the observation glass 5 are fixedly connected with hermatic door 8, and 8 side of hermatic door is equipped with door knob 6, and the door knob 6 is fixedly connected with hermatic door 8, described to set It is fixed with upper cover plate 3 at the top of standby shell 1, exhaust port 7, the exhaust port 7 and upper cover plate 3 are equipped at the top of the upper cover plate 3 It is fixedly connected, air hole 9 is equipped with inside the upper cover plate 3, the upper cover plate 3 is with exhaust port 7 by connecting inside air hole 9 Logical, 1 bottom of device housings is equipped with base plate 2, and the base plate 2 is fixedly connected with device housings 1, and the base plate 2 pushes up Portion is fixed with connect cover 16, and terminal pad 20 is fixed at the top of the connect cover 16, is fixed with protective cover at the top of the terminal pad 20 10, there are three the protective cover 10 is set, 10 side of protective cover is equipped with support device 46, the support device 46 and terminal pad 20 are fixedly connected, and 10 both ends of protective cover are fixedly connected with support device 46 respectively, and 20 top side of terminal pad is fixed There is heating device 12, gear loop device 13, the gear loop device 13 and the fixed company of base plate 2 are equipped with inside the connect cover 16 It connects, geared system 45 is equipped with inside the gear loop device 13, the geared system 45 is engaged with gear ring, the gear Limiting device 11 is equipped at the top of device 45, the limiting device 11 is fixedly connected with geared system 45, and the geared system 45 pushes up Portion is equipped with mobile coating apparatus 14, and the mobile coating apparatus 14 is fixedly connected with geared system 45.
The gear loop device 13 is made of support cover 23 and inner gear ring 24, is fixed with support at the top of the base plate 2 Cover 23,23 top of support cover are equipped with inner gear ring 24, and the inner gear ring 24 is fixedly connected with support cover 23, the internal tooth Wheel rim 24 is engaged with geared system 45.
The geared system 45 is by driving motor 26, driving gear 27, fixed disk 28, connecting column 29,30 and of driven gear Shaft 31 is constituted, and is fixed with driving motor 26 at the top of the base plate 2,26 output end of driving motor is fixed with driving gear 27, connecting column 29 is equipped at the top of the driving gear 27, the connecting column 29 is fixedly connected with driving gear 27, the connecting column 29 outsides are equipped with fixed disk 28, and the connecting column 29 runs through fixed disk 28, and is fixedly connected with fixed disk 28, the connecting column 29 Top is fixed with mobile coating apparatus 14, is equipped with driven gear 30 on the outside of the driving gear 27, the driven gear 30 is equipped with Four, 30 inside of driven gear is engaged with driving gear 27, and 30 outside of driven gear is engaged with inner gear ring 24, institute State and be fixed with shaft 31 at the top of driven gear 30, the shaft 31 is fixedly connected with driven gear 30,31 top of the shaft with Limiting device 11 is fixedly connected.
The heating device 12 is made of fixed column 21 and electron source 22, and fixed column 21 is equipped at the top of the terminal pad 20, The fixed column 21 is fixedly connected with terminal pad 20, is equipped with electron source 22 at the top of the fixed column 21, the electron source 22 with it is solid Fixed column 21 is fixedly connected.
The support device 46 is made of limiting bracket 15, support frame 17, link block 18 and curved cover plate 19, the connection Support frame 17 is fixed at the top of disk 20,17 one end of support frame as described above is equipped with link block 18, and the link block 18 and support frame 17 are solid Fixed connection, 18 side of link block are equipped with curved cover plate 19, and 19 side of curved cover plate is fixedly connected with link block 18, institute It states 19 other side of curved cover plate to be fixedly connected with protective cover 10,10 other end of protective cover is equipped with limiting bracket 15, the limit Position bracket 15 is slidably connected with protective cover 10, and the limiting bracket 15 is fixedly connected with terminal pad 20.
The limiting device 11 is made of positioning plate 32, gag lever post 41, card slot 42, bayonet lock 43 and lever 44, the shaft 31 tops are fixed with positioning plate 32, are equipped with locating rod at the top of the positioning plate 32, the locating rod is fixedly connected with locating rod, institute Locating rod one end is stated equipped with lever 44, the lever 44 is rotatablely connected with locating rod, and the locating rod other end is equipped with bayonet lock 43, The bayonet lock 43 is fixedly connected with locating rod, and described 44 one end of lever is equipped with card slot 42, and the bayonet lock 43 connects with 42 activity of card slot It connects.
The mobile coating apparatus 14 by sliding rail 33, L shaped plate 34, baffle 35, fixed block 36, pushing motor 37, screw rod 38, Limited block 39, crucible 40 and rotor plate 47 are constituted, and 29 top of connecting column is fixed with rotor plate 47,47 top of rotor plate Equipped with crucible 40, the crucible 40 is slidably connected with rotor plate 47, and 40 side of crucible is fixed with L shaped plate 34, the L shaped plate 34 sides are equipped with sliding rail 33, and the L shaped plate 34 is slidably connected with sliding rail 33, and the sliding rail 33 is fixedly connected with rotor plate 47, institute 34 other side of L shaped plate is stated equipped with baffle 35, the baffle 35 is fixedly connected with rotor plate 47, is fixed at the top of the rotor plate 47 Fixed block 36, described 36 one end of fixed block are fixed with pushing motor 37, and 37 output end of pushing motor is fixed with screw rod 38, institute 38 one end of screw rod is stated equipped with limited block 39, the screw rod 38 is rotatablely connected with limited block 39, the screw rod 38 and 34 screw thread of L shaped plate Connection.
31 bottom of shaft is equipped with stop collar 25, and the stop collar 25 is fixedly connected with base plate 2.
It is carved with anti-skid chequer in 6 outer surface of door knob.
Working principle: the door knob 6 of 1 side of device housings, the anti-skid chequer increasing friction force on 6 surface of door knob, 6 band of door knob are pulled Dynamic sealing door 8 rotates, and hermatic door 8 rotates under the action of connects hinge 4, and after opening, the product for needing plated film is put into limit In device 11, the lever 44 of limiting device 11 is pulled up out of bayonet lock 43, lever 44 is rotated 180 degree, product is pushed into In gag lever post 41, lever 44 is reversely rotated 180 degree, the card slot 42 of lever 44 is caught in outside bayonet lock 43, it then will sealing Door 8 is closed, starting device, and the gas vent at 1 top of device housings is detached the air inside device by external vacuum equipment, and four High-velocity electrons are injected the plated film in crucible 40 by stability of a gas vent convenient for pumping, the starting of heating device 12, electron source 22 Material, Coating Materials evaporation, geared system 45 starts simultaneously at this time, and driving motor 26 rotates, and driving motor 26 drives driving tooth 27 rotation of wheel, driving gear 27 drive driven gear 30 to rotate, work of the driven gear 30 in inner gear ring 24 and driving gear 27 Under, not only about 27 turns of driving gear, the uniformity of product film plating layer is convenient in also rotation in this way, and coating effects faster, are being plated Pushing motor 37 starts film simultaneously, and pushing motor 37 drives screw rod 38 to rotate, and screw rod 38 drives L-type plate mobile, and L shaped plate 34 drives Crucible 40 moves, and crucible 40 is made to be in rotation and moving condition, convenient for the uniformity that electron source 22 heats material, saves plated film Material, the protective cover 10 of 40 surrounding of crucible can limit Coating Materials evaporation range, the molecule of surrounding are brought together, is promoted Molecular concentration near product accelerates coating speed, and can prevent 1 wall polluting of device housings, and device housings 1 clear up fiber crops It is tired, and protective cover 10 can be with disassembled simply, it is convenient to clear up, and operator can specifically observation plating be membranaceous by observation glass 5 State.
Driving motor 26 and the preferred Y100L-2-3 model of pushing motor 37 in this programme, motor operation circuit are conventional electricity Machine positive and negative rotation controls program.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding And modification, the scope of the present invention is defined by the appended.

Claims (9)

1. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant), including device housings (1), base plate (2), Upper cover plate (3), connects hinge (4), observation glass (5), door knob (6), exhaust port (7), hermatic door (8), air hole (9) protection Cover (10), limiting device (11), heating device (12), gear loop device (13), mobile coating apparatus (14), connect cover (16), Terminal pad (20), geared system (45) and support device (46), it is characterised in that: device housings (1) side is equipped with sealing Door (8), the hermatic door (8) and device housings (1) are rotatablely connected by connects hinge (4), and hermatic door (8) side is equipped with It observes glass (5), the observation glass (5) is fixedly connected with hermatic door (8), and hermatic door (8) side is equipped with door knob (6), The door knob (6) is fixedly connected with hermatic door (8), is fixed with upper cover plate (3), the upper cover plate at the top of the device housings (1) (3) top is equipped with exhaust port (7), and the exhaust port (7) is fixedly connected with upper cover plate (3), sets inside the upper cover plate (3) Have air hole (9), the upper cover plate (3) is connected to exhaust port (7) by the way that air hole (9) are internal, device housings (1) bottom Portion is equipped with base plate (2), and the base plate (2) is fixedly connected with device housings (1), the company of being fixed at the top of the base plate (2) It connects cover (16), is fixed with terminal pad (20) at the top of the connect cover (16), be fixed with protective cover at the top of the terminal pad (20) (10), there are three the protective cover (10) sets, protective cover (10) side is equipped with support device (46), the support device (46) it is fixedly connected with terminal pad (20), protective cover (10) both ends are fixedly connected with support device (46) respectively, the company It connects disk (20) top side to be fixed with heating device (12), is equipped with gear loop device (13) inside the connect cover (16), it is described Gear loop device (13) is fixedly connected with base plate (2), is equipped with geared system (45) inside the gear loop device (13), The geared system (45) is engaged with gear ring, is equipped with limiting device (11) at the top of the geared system (45), the limit dress It sets (11) to be fixedly connected with geared system (45), mobile coating apparatus (14), the shifting is equipped at the top of the geared system (45) Dynamic coating apparatus (14) are fixedly connected with geared system (45).
2. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the gear loop device (13) is made of support cover (23) and inner gear ring (24), is fixed with branch at the top of the base plate (2) Support cover (23), support cover (23) top are equipped with inner gear ring (24), and the inner gear ring (24) and support cover (23) are fixed Connection, the inner gear ring (24) are engaged with geared system (45).
3. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the geared system (45) is by driving motor (26), driving gear (27), fixed disk (28), connecting column (29), driven gear (30) it constitutes, is fixed with driving motor (26) at the top of the base plate (2), driving motor (26) output end with shaft (31) It is fixed with driving gear (27), connecting column (29), the connecting column (29) and driving tooth is equipped at the top of the driving gear (27) Wheel (27) is fixedly connected, and is equipped with fixed disk (28) on the outside of the connecting column (29), and the connecting column (29) runs through fixed disk (28), And be fixedly connected with fixed disk (28), mobile coating apparatus (14), the driving gear are fixed at the top of the connecting column (29) (27) outside is equipped with driven gear (30), there are four the driven gear (30) sets, on the inside of the driven gear (30) and actively Gear (27) engagement, driven gear (30) outside is engaged with inner gear ring (24), fixed at the top of the driven gear (30) Have shaft (31), the shaft (31) is fixedly connected with driven gear (30), shaft (31) top and limiting device (11) It is fixedly connected.
4. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the heating device (12) is made of fixed column (21) and electron source (22), and fixed column is equipped at the top of the terminal pad (20) (21), the fixed column (21) is fixedly connected with terminal pad (20), is equipped with electron source (22) at the top of the fixed column (21), described Electron source (22) is fixedly connected with fixed column (21).
5. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the support device (46) is made of limiting bracket (15), support frame (17), link block (18) and curved cover plate (19), institute It states and is fixed with support frame (17) at the top of terminal pad (20), support frame as described above (17) one end is equipped with link block (18), the link block (18) it is fixedly connected with support frame (17), link block (18) side is equipped with curved cover plate (19), the curved cover plate (19) Side is fixedly connected with link block (18), and curved cover plate (19) other side is fixedly connected with protective cover (10), the protection It covers (10) other end and is equipped with limiting bracket (15), the limiting bracket (15) is slidably connected with protective cover (10), the limit branch Frame (15) is fixedly connected with terminal pad (20).
6. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the limiting device (11) is made of positioning plate (32), gag lever post (41), card slot (42), bayonet lock (43) and lever (44), institute It states and is fixed with positioning plate (32) at the top of shaft (31), locating rod, the locating rod and positioning are equipped at the top of the positioning plate (32) Bar is fixedly connected, and described locating rod one end is equipped with lever (44), and the lever (44) and locating rod are rotatablely connected, the locating rod The other end is equipped with bayonet lock (43), and the bayonet lock (43) is fixedly connected with locating rod, and described lever (44) one end is equipped with card slot (42), The bayonet lock (43) is flexibly connected with card slot (42).
7. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: the mobile coating apparatus (14) by sliding rail (33), L shaped plate (34), baffle (35), fixed block (36), pushing motor (37), Screw rod (38), limited block (39), crucible (40) and rotor plate (47) are constituted, and connecting column (29) top is fixed with rotor plate (47), crucible (40) are equipped at the top of the rotor plate (47), the crucible (40) is slidably connected with rotor plate (47), the crucible (40) side is fixed with L shaped plate (34), and L shaped plate (34) side is equipped with sliding rail (33), the L shaped plate (34) and sliding rail (33) It is slidably connected, the sliding rail (33) is fixedly connected with rotor plate (47), and L shaped plate (34) other side is equipped with baffle (35), institute It states baffle (35) to be fixedly connected with rotor plate (47), is fixed with fixed block (36), the fixed block at the top of the rotor plate (47) (36) one end is fixed with pushing motor (37), and pushing motor (37) output end is fixed with screw rod (38), the screw rod (38) One end is equipped with limited block (39), and the screw rod (38) and limited block (39) are rotatablely connected, the screw rod (38) and L shaped plate (34) spiral shell Line connection.
8. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: shaft (31) bottom is equipped with stop collar (25), and the stop collar (25) is fixedly connected with base plate (2).
9. a kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) according to claim 1, feature exist In: it is carved with anti-skid chequer in door knob (6) outer surface.
CN201811476001.8A 2018-12-04 2018-12-04 Glass touch screen cover plate vacuum plating AR, AF optical film processingequipment Active CN109553306B (en)

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CN201811476001.8A CN109553306B (en) 2018-12-04 2018-12-04 Glass touch screen cover plate vacuum plating AR, AF optical film processingequipment

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CN110750172A (en) * 2019-10-08 2020-02-04 深圳市星三力光电科技有限公司 Production method and jig capable of improving yield of OGS glass touch screen
WO2023000970A1 (en) * 2021-07-22 2023-01-26 北京北方华创微电子装备有限公司 Reaction chamber and semiconductor processing apparatus

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