CN205556763U - Adopt coating film device of scanning formula evaporation source - Google Patents
Adopt coating film device of scanning formula evaporation source Download PDFInfo
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- CN205556763U CN205556763U CN201620287854.7U CN201620287854U CN205556763U CN 205556763 U CN205556763 U CN 205556763U CN 201620287854 U CN201620287854 U CN 201620287854U CN 205556763 U CN205556763 U CN 205556763U
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Abstract
The utility model relates to a film preparation technique, concretely relates to adopt coating film device of scanning formula evaporation source and coating film method, its characterized in that: hold the coating film work rest of substrate in the indoor setting of vacuum coating, scanning formula evaporation source sets up on the vacuum coating room. Crucible in the scanning formula evaporation source can fix a point, regularly, scanning mode motion and carry out the coating materials evaporation, scanning formula evaporation source still be provided with with the relatively independent medicine cavity that adds in vacuum coating room, can make the coating materials the interpolation, preheat and separate with the coating film process of vacuum coating room. The utility model has the advantages that: can realize that the coating film thickness of all substrates satisfies the homogeneity requirement on the work rest, has promoted coating materials utilization ratio and coating film efficiency, has reduced the coating film cost under the condition with the help of the positive board of membrane mangnolia officinalis not, can realize the process that adds the medicine, exhausts and preheat that adds in the medicine cavity and go on in step with exhaust, coating film process in the vacuum coating room, promote production efficiency and membrane layer quality.
Description
Technical field
This utility model relates to film preparing technology, is specifically related to a kind of coating apparatus using scan-type evaporation source.
Background technology
Vacuum coating method is a kind of important method making film product, and the thin film utilizing vacuum coating method to prepare produces
Product have been applied to various fields.Such as, anti-soil film has been applied to the optical articles such as touch screen, eyeglass and camera lens.Wrap at these
In optical articles containing anti-soil film, substrate material is generally first coated with some optical thin films (such as anti-reflection film), is deposited with the most again
Anti-soil film.It is in recent years, along with the development of information technology, highly popular with the end product that smart mobile phone, panel computer are taken as the leading factor,
Touch screen product demand rapidly increases.In order to increase antifouling, the Anti-scratching effect of the multiple photovoltaic based on touch screen,
Multiple optical articles surface is coated with anti-soil film and has become as requisite operation.
Anti-soil film raw material is fluorine containing silane organic compound.No matter the anti-soil film raw material of liquid or solid tablet form,
It is expensive.Anti-soil film plated film can be adopted with the following method: first, is formed in organic solvent by organic anti-soil film material dissolution
Organic solution；Then, this organic solution is injected in the porous adsorption carrier in crucible；Followed by it is deposited with.Another kind of normal
Anti-soil film vacuum coating method be: the carrier being adsorbed with the organic coating materials of anti-soil film is carried out special handling, makes solid medicine
Sheet, as coating raw material, is then deposited with.This kind of method needs to preserve to keep tablet under certain environmental conditions by tablet
Coating effects, compared to the antifouling coating materials of liquid, it is relatively costly.
For the coating apparatus of anti-soil film, the usually front road film layer plating of the vacuum coating equipment of single-chamber room, i.e. anti-soil film
Film and anti-soil film plated film are carried out in same plated film chamber.When vacuum coating, in order to make to be distributed in whole film-coating workpiece frame
On substrate there is preferable film thickness uniformity, generally at the anti-soil film raw material crucible that fills of plated film chamber, to be provided above thickness equal
Even property amending plates.A great deal of coating materials molecule has been blocked in the existence of this amending plates, is allowed to arrive the film plating substrate of work rest,
Cause coating materials to waste, increase coating cost；Correspondingly, also extend the plated film time, reduce plated film efficiency.Owing to liquid is prevented
Dirty film coating materials has low cost, is prone to the features such as automatization, is increasingly employed.Molten containing organic solvent etc. using
Before the liquid anti-soil film coating materials of matchmaker carries out plated film, need to be volatilized by organic solvent by preheating.If preheating procedure is at Vacuum Deposition
Film room is carried out, then needs to take the main body plated film time so that the plated film time is elongated, affects production efficiency；Meanwhile, wave during preheating
The organic solvent sent out is likely to reach film plating substrate, affects coating quality.
Based on above-mentioned background technology, seek high and plated film quality better the anti-soil film coating apparatus of plated film efficiency and become day by day to weigh
Want.Such as, can adopt the following technical scheme that and carry out plated film: multiple spot evaporation source is set in coating chamber, and is allowed to steam simultaneously
Send out；By different evaporation sources are arranged different plated film speed, realize in the case of not using film thickness uniformity amending plates,
Meet film thickness uniformity requirement.But, the equipment cost that this coating apparatus needs that there is multiple evaporation source are higher, and adding
Medicine automatization, preheat, the aspect such as evaporation, there is higher space hold cost or control cost.
Summary of the invention
The purpose of this utility model is according to above-mentioned the deficiencies in the prior art, it is provided that a kind of plating using scan-type evaporation source
Film device, this device, by arranging scan-type evaporation source, i.e. drives crucible by crucible moving guiding mechanism, it is achieved to pinpoint,
Regularly, scan mode evaporation, provide the dosing chamber relatively independent with vacuum film coating chamber, it is achieved adding in dosing chamber simultaneously
Medicine, aerofluxus and preheating procedure and the aerofluxus in vacuum film coating chamber, filming process are Tong Bu carried out, and improve production efficiency and film layer matter
Amount.
This utility model purpose realizes being completed by techniques below scheme:
A kind of coating apparatus using scan-type evaporation source, including vacuum film coating chamber, evaporation source, described vacuum coating is indoor
Being provided with film-coating workpiece frame, described film-coating workpiece frame is placed with substrate, described evaporation source is positioned in described vacuum film coating chamber, its
Being characterised by: described evaporation source is scan-type evaporation source, described scan-type evaporation source has crucible, crucible moving guiding mechanism,
Described crucible moving guiding mechanism connects the described crucible of control, to realize the movement in described vacuum coating indoor of the described crucible.
Described crucible moving guiding mechanism includes motor, screw mandrel, screw rod fixing mechanism, and described motor connects the described silk of driving
Bar, described crucible is fixed on described screw mandrel.
Described scan-type evaporation source also has dosing chamber, medicating mechanism, an exhaust gear, the inner chamber of described dosing chamber with
The inner space of described vacuum film coating chamber, the movement under the described screw mandrel of described crucible moving guiding mechanism drives of the described crucible
Interval is positioned at the connected space formed by described dosing chamber and described vacuum film coating chamber.
Connectivity part at described dosing chamber Yu described vacuum film coating chamber is provided with annular sealing surface, sets on described screw mandrel
Putting sealing flange, the bore of described sealing flange is more than the internal diameter of described annular sealing surface.
Described dosing cavity bottom is provided with drain outlet, giving up when described drain outlet is for cleaning described dosing chamber
Liquid is derived；Described dosing chamber is provided with watch window.
A kind of film plating process using scan-type evaporation source of any of the above-described coating apparatus, it is characterised in that: described side
Method comprises the steps of after vacuum film coating chamber carries out plated film preparation, and the crucible of scan-type evaporation source is at crucible mobile guide machine
Structure starts mobile under driving, move mode for mobile-time-out alternately, is not evaporated during mobile phase, during pause stage
By crucible heating control mechanisms, the coating materials in described crucible is evaporated, in time of described pause stage it is required that described
The time of coating materials evaporation meets: in the case of not by thickness amending plates, within a plated film cycle, film-coating workpiece frame is put
The coating film thickness of all substrates put meets uniformity requirement.
The shift motion of described crucible is, removes from the dosing chamber of described scan-type evaporation source, to enter described vacuum
Position during coating chamber is starting point, moves to the center of described vacuum film coating chamber, presses original route and return after arriving setting position, as
This is reciprocal, until plated film terminates.
The utility model has the advantages that: 1) may be implemented in not by thickness amending plates in the case of, all bases on work rest
The coating film thickness of sheet meets uniformity requirement, improves coating materials utilization rate and plated film efficiency, reduces coating cost.2) can
Realize the dosing in dosing chamber, aerofluxus and preheating procedure and the aerofluxus in vacuum film coating chamber, filming process Tong Bu to carry out, promote
Production efficiency and film quality.
Accompanying drawing explanation
Fig. 1 is the structural representation I of the coating apparatus using scan-type evaporation source in this utility model；
When Fig. 2 is the coating apparatus using scan-type evaporation source in this utility model, scan-type evaporation source steams at pause stage
The determination method schematic diagram of the time of sending out；
Fig. 3 is structural representation II (the scan-type evaporation of the coating apparatus using scan-type evaporation source in this utility model
Source is in dosing chamber)；
Fig. 4 is structural representation III (the scan-type evaporation of the coating apparatus using scan-type evaporation source in this utility model
Source is in vacuum film coating chamber)；
Fig. 5 is the coating process flow chart in this utility model described in embodiment two.
Detailed description of the invention
This utility model feature and other correlated characteristic are described in further detail by embodiment below in conjunction with accompanying drawing,
So that the understanding of technical staff of the same trade:
As Figure 1-5, in figure, labelling 1-22,41-43 are respectively as follows: vacuum film coating chamber 1, film-coating workpiece frame 2, film-coating workpiece
Frame slew gear 3, substrate 4, crucible 5, motor 6, ball screw 7, ball screw fixed mechanism 8, flange 9, crucible mounting flange
10, stool 11, feed screw nut 12, ceramic heating flake and thermocouple 13, fixing evaporation source 14, fixing evaporation source amending plates
15, dosing chamber 16, medicating mechanism 17, medicating mechanism flange 18, exhaust gear 19, drain outlet 20, annular sealing surface 21, close
Envelope flange 22, inner ring substrate 41, centre circle substrate 42, outer ring substrate 43.
Embodiment one: the coating apparatus using scan-type evaporation source in the present embodiment, as it is shown in figure 1, include: Vacuum Deposition
Film room 1, scan-type evaporation source.Being provided with film-coating workpiece frame 2 in vacuum film coating chamber 1, film-coating workpiece frame 2 can return at film-coating workpiece frame
Being rotated by of rotation mechanism 3, film-coating workpiece frame 2 is placed with substrate 4.Scan-type evaporation source is fixed on vacuum by flange 9
On the sidewall of coating chamber 1, scan-type evaporation source includes crucible 5, crucible moving guiding mechanism, crucible heating control mechanisms.Crucible
Moving guiding mechanism includes motor 6, ball screw 7, ball screw fixed mechanism 8.Ball screw 7 is away from vacuum film coating chamber 1
Heart one end connects motor 6, connects ball screw fixed mechanism 8 near one end, vacuum film coating chamber 1 center.Crucible moving guiding mechanism
Connect and control crucible 5, to realize the crucible 5 movement in vacuum film coating chamber 1.Crucible heating control mechanisms be ceramic heating flake and
Thermocouple 13 and control part thereof, ceramic heating flake and thermocouple 13 can be the form integrated, and pottery therein adds
Backing is used for heating crucible 5, and thermocouple is used for measuring crucible temperature, and this temperature signal will be controlled accordingly parts utilization and control
The duty of ceramic heating flake thus crucible 5 temperature is adjusted in real time.Crucible 5 and ceramic heating flake and thermocouple 13
It is positioned on stool 11, and is fixed on the feed screw nut 12 of ball screw 7, by motor 6 by crucible mounting flange 10
Drive in vacuum film coating chamber 1, press specific mode reciprocating motion.Complete in a plated film flow process to realize multiple film layer, also
Fixing evaporation source 14 and fixing evaporation source amending plates 15 thereof can be set in vacuum film coating chamber 1.
The film plating process using scan-type evaporation source in the present embodiment at least comprises the following steps:
After vacuum film coating chamber 1 carries out plated film preparation, crucible 5 starts mobile under motor 6 drives, and move mode is for moving
Dynamic-to suspend alternately, it is not evaporated during mobile phase, pause stage makes crucible by ceramic heating flake and thermocouple 13
Coating materials evaporation in 5, the evaporation time at pause stage meets: in the case of not by thickness amending plates, at a plated film
In cycle, the coating film thickness of all substrates 4 that film-coating workpiece frame 2 is placed meets uniformity requirement.
Can select with the following method in the determination of the evaporation time of pause stage for above-mentioned crucible 5: as in figure 2 it is shown, pre-
If crucible 5 suspends at breakpoint A1, A2, A3, the time of staying is respectively t1, t2, t3, and the substrate 4 on film-coating workpiece frame 2 is by interior
Cycle basis sheet 41, centre circle substrate 42, the mode of outer ring substrate 43 are arranged.When crucible 5 is at A1, for film-coating workpiece frame 2
On centre circle substrate 42 on 1 B at coating film thickness can according to calculate coating film thickness Knudsen cosine law count
Calculate.Knudsen cosine law can be to be expressed as form:
Specific to the situation of the present embodiment, in above-mentioned formula, D is the coating film thickness at 1 B on centre circle substrate 42, θ
For the surface normal AA ' at the evaporating point A on crucible 5 and crucible 5 with the folder of the line between certain some B on centre circle substrate 42
Angle, Φ is that on centre circle substrate 42, certain selects the surface normal BB ' at B and crucible 5 with the line between certain some B on centre circle substrate 42
Angle；R is the evaporating point A on crucible 5 and distance between certain on centre circle substrate 42 point B, and C is proportionality constant.For one
The individual coating apparatus determined, above-mentioned each amount all can be known.N represents the evaporation characteristic of evaporation source, and in the present embodiment, n can take
2。
The inner ring substrate 41 of film-coating workpiece frame 2, centre circle substrate 42, outer ring substrate 43 take a little respectively, be designated as B1, B2,
B3；By Knudsen cosine law, calculate (time of staying is t1=t2=t3=t) when crucible 5 suspends at A1, A2, A3 respectively
Coating film thickness, with D(A1B1) represent the coating film thickness formed at B1 when crucible 5 is at A1, the like.Preset crucible 5
Plated film constant rate in whole coating process.When crucible 5 has respectively carried out once suspending rank at breakpoint A1, A2, A3 tri-
After the evaporation of section and evaporation time are the plated film of t respectively, lay respectively at inner ring substrate 41, centre circle substrate 42, outer ring substrate 43
On B1, B2, B3 tri-at respective plated film gross thickness be:
D(B1)=D(A1B1)+D(A2B1)+D(A3B1)
D(B2)=D(A1B2)+D(A2B2)+D(A3B2)
D(B3)=D(A1B3)+D(A2B3)+D(A3B3)
If D(B1), D(B2), D(B3) between gap be unsatisfactory for the requirement of plated film uniformity, then pass through Conventional mathematical
Relativity between evaporation time t1, t2, t3 of pause stage is adjusted by computing, until in theory, D(B1), D
(B2), D(B3) between gap meet certain requirements；Within such as 1%, this requirement can be in conjunction with the control accuracy of actual instrumentation
And met by mathematical operation.Thereafter, crucible 5 time of staying at breakpoint A1, A2, A3 obtained with final Theoretical Calculation
T10, t20, t30 carry out actual plated film as crucible 5 at the initial value of the evaporation time of each dwell point.After plated film completes, survey
Respective plated film gross thickness at B1, B2, B3 tri-on amount inner ring substrate 41, centre circle substrate 42, outer ring substrate 43；According to actual measurement
Proportionate relationship between D ' (B1), D ' (B2), D ' (B3), during to the evaporation of crucible 5 pause stage at breakpoint A1, A2, A3
Between theoretical value t10, t20, t30 be adjusted, adjustment process can repeatedly complete, until obtaining one group of t1, t2, t3 so that D '
(B1), the gap between D ' (B2), D ' (B3) has met the requirement of plated film uniformity.
The present embodiment in the specific implementation, for movement-park mode as shown in Figure 2, has a following plated film flow process:
Preparation before plated film: determine that crucible 5 is three in the determination method of pause stage evaporation time according to aforementioned crucible 5
Evaporation time t1, t2, t3 of place's breakpoint A1, A2, A3 pause stage.
1 as it is shown in figure 1, be positioned over film-coating workpiece frame 2 by substrate 4, and anti-soil film coating materials is put into crucible 5, closes Vacuum Deposition
The cavity door of film room 1, starts vacuum.
2, treat that the vacuum of vacuum film coating chamber 1 arrives 5*10-3Pa, start motor 6, crucible 5 motor 6 drive under along ball
Screw mandrel 7 moves.For situation as shown in Figure 2, crucible 5, near vacuum film coating chamber 1 medial wall place, moves to A3 at first
Place's (as shown in Figure 2), and stop at this and evaporation, evaporation time is t3；Thereafter, continue to move at A2, and at this stop and
Evaporation, evaporation time is t2；Finally, moving at A1, and stop at this and evaporation, evaporation time is t1.Thereafter, crucible 5 is pressed
Original route returns to starting point, and so forth, until plated film completes.
Embodiment two: the coating apparatus using scan-type evaporation source in the present embodiment, as it is shown on figure 3, include: Vacuum Deposition
Film room 1, scan-type evaporation source.
Being provided with film-coating workpiece frame 2 in vacuum film coating chamber 1, film-coating workpiece frame 2 can driving at film-coating workpiece frame slew gear 3
Dynamic lower rotation, film-coating workpiece frame 2 is placed with substrate 4.
Scan-type evaporation source is fixed on the sidewall of vacuum film coating chamber 1 by flange 9, scan-type evaporation source include crucible 5,
Crucible moving guiding mechanism, crucible heating control mechanisms, dosing chamber 16, medicating mechanism 17, exhaust gear 19, drain outlet
20。
Wherein, crucible moving guiding mechanism includes motor 6, ball screw 7, ball screw fixed mechanism 8.Crucible 5 passes through
Crucible mounting flange 10 is fixed on the feed screw nut 12 of ball screw 7, it is possible to along ball screw 7 under the driving of motor 6
Motion.Ball screw 7 connects motor 6 away from one end, vacuum film coating chamber 1 center, connects near the one end at vacuum film coating chamber 1 center
Ball screw fixed mechanism 8.
Crucible heating control mechanisms is ceramic heating flake and thermocouple 13 and control part, ceramic heating flake and thermocouple
13 is the form integrated, and ceramic heating flake therein is used for heating crucible 5, and thermocouple is used for measuring crucible 5 temperature, this
Temperature signal utilizes the temperature to crucible 5 to adjust in real time by being controlled accordingly parts.Crucible 5 and ceramic heating flake and heat
Galvanic couple 13 is positioned on stool 11, and the movement under motor 6 drives.
Dosing chamber 16 is fixed on vacuum film coating chamber 1 by flange 9, and the inner chamber of dosing chamber 16 can be with vacuum film coating chamber
The inner space of 1.The crucible 5 moving section under motor 6 drives is positioned at the company formed by dosing chamber 16 and vacuum film coating chamber 1
In logical space.
Dosing chamber 16 is provided with annular sealing surface 21 with the connectivity part of vacuum film coating chamber 1, arranges close on ball screw 7
Envelope flange 22, sealing flange 22 is arranged at crucible 5 near side, described vacuum film coating chamber 1 center, and is synchronized with the movement with crucible 5,
The bore of sealing flange 22 is more than the internal diameter of annular sealing surface 21；When sealing flange 22 is driven arrival annular sealing surface by motor 6
Time at 21, sealing flange 22 constitutes a sealing surface together with annular sealing surface 21 so that at dosing chamber 16 and vacuum film coating chamber 1
State in opposing spaced apart Yu sealing.
Medicating mechanism 17 is fixed on dosing chamber 16 by medicating mechanism flange 18, and medicating mechanism 17 fills for automatic liquid-feeding
Put.Exhaust gear 19 includes mechanical pump and molecular pump.
Being provided with drain outlet 20 bottom dosing chamber 16, the drain outlet 20 waste liquid in time cleaning dosing chamber 16 is led
Go out.
Dosing chamber 16 can also arrange watch window, for the internal state of monitoring dosing chamber 16 in real time.Dosing chamber
Can also be used for opening dosing chamber 16 by arranging chamber door, carry out chamber in-house operation on room 16.
Complete in a plated film flow process to realize multiple film layer, it is also possible to fixing steaming is set in vacuum film coating chamber 1
Rise 14 and fixing evaporation source amending plates 15.
The film plating process using scan-type evaporation source in the present embodiment at least comprises the following steps:
After vacuum film coating chamber 1 carries out plated film preparation, crucible 5 starts mobile under motor 6 drives, and move mode is for moving
Dynamic-to suspend alternately, it is not evaporated during mobile phase, pause stage makes crucible by ceramic heating flake and thermocouple 13
Coating materials evaporation in 5, the evaporation time at pause stage meets: in the case of not by thickness amending plates, at a plated film
In cycle, the coating film thickness of all substrates 4 that film-coating workpiece frame 2 is placed meets uniformity requirement.
After vacuum film coating chamber 1 carries out plated film preparation, the crucible 5 shift motion under motor 6 drives is to steam from scan-type
The dosing chamber 16 risen removes, and with position when entering vacuum film coating chamber 1 as starting point, moves to 1 center of vacuum film coating chamber,
Press original route after arriving setting position to return, and so forth, until plated film terminates.
At the dosing chamber 16 of scan-type evaporation source, the connectivity part of vacuum film coating chamber 1 is provided with annular sealing surface 21,
Arranging sealing flange 22 on screw mandrel 7, sealing flange 22 is arranged at crucible 5 near side, vacuum film coating chamber 1 center, and with crucible 5
Synchronizing moving, the bore of sealing flange 22 is more than the internal diameter of annular sealing surface 21；When sealing flange 22 is driven arrival ring by motor 6
Time at shape sealing surface 21, sealing flange 22 constitutes a sealing surface together with annular sealing surface 21 so that dosing chamber 16 and vacuum
Coating chamber 1 is in segmented state.
For crucible 5 in the determination method of the evaporation time of pause stage, see embodiment one.
The present embodiment in the specific implementation, as it is shown in figure 5, have following workflow:
Preparation before plated film: determine in the determination method of pause stage evaporation time about crucible 5 according to embodiment one
Crucible 5 is evaporation time t1, t2, t3 of breakpoint A1, A2, A3 pause stage at three.
State before filming equipment evacuation meets: vacuum film coating chamber and dosing chamber are in segmented state.
Step 1: as it is shown on figure 3, substrate 4 is positioned on film-coating workpiece frame 2；By anti-soil film coating materials by medicating mechanism 17
Add in the crucible 5 in dosing chamber 16.Now, sealing flange 22 drives at motor 6 and arrives at annular sealing surface 21, Sealing Method
Orchid 22 and annular sealing surface 21 constitute sealing surface so that dosing chamber 16 and vacuum film coating chamber 1 are in segmented state.
Step 2: close the cavity door of vacuum film coating chamber 1, starts the vacuum of vacuum film coating chamber 1.Meanwhile, exhauster
Structure 19 starts dosing chamber 16 evacuation, and when certain vacuum to be achieved is spent, heating control mechanisms passes through ceramic heating flake and heat
Anti-soil film coating materials in crucible 5 is preheated by galvanic couple 13.Can also according to the pumpdown time of practical vacuum coating chamber 1, add
The pumpdown time of medicine chamber 16 and the starting point selecting this step preheating time of anti-soil film coating materials.
Step 3: treat that the vacuum of vacuum film coating chamber 1 arrives 5*10-3Pa, starts motor 6, and crucible 5 is edge under motor 6 drives
Ball screw 7 moves from dosing chamber 16 to the center position of vacuum film coating chamber 1, and sealing flange 22 and annular sealing surface 21 are no longer
Constitute sealing surface, between dosing chamber 16 and vacuum film coating chamber 1, form connected space.Crucible 5 motor 6 drive under along ball wire
It is internal, as shown in Figure 4 that bar 7 enters vacuum film coating chamber 1 from dosing chamber 16.
Step 4: vacuum film coating chamber 1 starts to be deposited with process.In the present embodiment, the crucible 5 sports in vacuum film coating chamber 1
Formula is identical with the situation in embodiment one.Seeing Fig. 2, crucible 5 moves at A3 at first, and stops at this and evaporation, during evaporation
Between be t3；Thereafter, continuing to move at A2, and stop at this and evaporation, evaporation time is t2；Finally, move at A1, and
This stops and evaporation, and evaporation time is t1.Thereafter, crucible 5 returns to starting point by original route, and so forth, until plated film is complete
Become.As shown in Figure 4, coating apparatus schematic diagram during correspondence position at A1 is moved to for crucible 5.
Step 5: after plated film completes, crucible 5 motor 6 drive under along ball screw 7 from vacuum film coating chamber 1 to dosing chamber
The direction motion of 16, so that sealing flange 22 and annular sealing surface 21 are constituted at sealing surface, dosing chamber 16 and vacuum film coating chamber 1
In parting seal state.
Step 6: after vacuum film coating chamber 1 vacuum breaker, substrate takes out.Dosing chamber 16 vacuum breaker, does plated film next time and prepares.
Complete in a plated film flow process to realize multiple film layer, it is also possible at vacuum film coating chamber 1, fixing evaporation is set
Source 14 and fixing evaporation source amending plates 15 thereof.If also needing to be deposited with other front road film layers, the most above-mentioned reality before anti-soil film plated film
The step 1 executing the dosing chamber in example two can start in front road film layer is carried out, to save the overall plated film time.
Although design and the embodiment of this utility model purpose is elaborated by above-described embodiment referring to the drawings,
But those skilled in the art will realize that under the precondition limiting scope without departing from claim, still may be used
Utility model is made various modifications and variations, such as: the type of drive of crucible 5, the dosing method of medicating mechanism 17, etc.,
Therefore repeat the most one by one at this.
Claims (5)
1. using a coating apparatus for scan-type evaporation source, including vacuum film coating chamber, evaporation source, described vacuum coating indoor set
Being equipped with film-coating workpiece frame, described film-coating workpiece frame is placed with substrate, described evaporation source is positioned in described vacuum film coating chamber, and it is special
Levying and be: described evaporation source is scan-type evaporation source, described scan-type evaporation source has crucible, crucible moving guiding mechanism, institute
State crucible moving guiding mechanism and connect the described crucible of control, to realize the movement in described vacuum coating indoor of the described crucible.
A kind of coating apparatus using scan-type evaporation source the most according to claim 1, it is characterised in that: described crucible moves
Action-oriented mechanism includes motor, screw mandrel, screw rod fixing mechanism, and described motor connects the described screw mandrel of driving, and described crucible is fixed on
Described screw mandrel.
A kind of coating apparatus using scan-type evaporation source the most according to claim 1, it is characterised in that: described scan-type
Evaporation source also has dosing chamber, medicating mechanism, exhaust gear, and the inner chamber of described dosing chamber is interior with described vacuum film coating chamber
Chamber connects, and described crucible moving section under the described screw mandrel of described crucible moving guiding mechanism drives is positioned at by described dosing
In the connected space that chamber and described vacuum film coating chamber are formed.
A kind of coating apparatus using scan-type evaporation source the most according to claim 3, it is characterised in that: in described dosing
Chamber is provided with annular sealing surface with the connectivity part of described vacuum film coating chamber, arranges sealing flange on described screw mandrel, described close
The bore of envelope flange is more than the internal diameter of described annular sealing surface.
A kind of coating apparatus using scan-type evaporation source the most according to claim 3, it is characterised in that: described dosing chamber
Being provided with drain outlet bottom room, waste liquid when described drain outlet is for cleaning described dosing chamber is derived；Described dosing chamber
Room is provided with watch window.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620287854.7U CN205556763U (en) | 2016-04-08 | 2016-04-08 | Adopt coating film device of scanning formula evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620287854.7U CN205556763U (en) | 2016-04-08 | 2016-04-08 | Adopt coating film device of scanning formula evaporation source |
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| CN205556763U true CN205556763U (en) | 2016-09-07 |
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| CN201620287854.7U Withdrawn - After Issue CN205556763U (en) | 2016-04-08 | 2016-04-08 | Adopt coating film device of scanning formula evaporation source |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105695938A (en) * | 2016-04-08 | 2016-06-22 | 光驰科技(上海)有限公司 | Coating device adopting scanning type evaporation source and coating method of coating device |
| CN109553306A (en) * | 2018-12-04 | 2019-04-02 | 深圳市星三力光电科技有限公司 | A kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) |
| CN111676454A (en) * | 2020-08-04 | 2020-09-18 | 光驰科技(上海)有限公司 | Evaporation source configuration structure capable of saving space in vacuum coating chamber and design method thereof |
-
2016
- 2016-04-08 CN CN201620287854.7U patent/CN205556763U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105695938A (en) * | 2016-04-08 | 2016-06-22 | 光驰科技(上海)有限公司 | Coating device adopting scanning type evaporation source and coating method of coating device |
| CN105695938B (en) * | 2016-04-08 | 2018-06-12 | 光驰科技(上海)有限公司 | Using the coating apparatus and its film plating process of scan-type evaporation source |
| CN109553306A (en) * | 2018-12-04 | 2019-04-02 | 深圳市星三力光电科技有限公司 | A kind of glass touch screen cover board Vacuum Deposition AR, AF optical film processing unit (plant) |
| CN109553306B (en) * | 2018-12-04 | 2021-09-14 | 深圳市星三力光电科技有限公司 | Glass touch screen cover plate vacuum plating AR, AF optical film processingequipment |
| CN111676454A (en) * | 2020-08-04 | 2020-09-18 | 光驰科技(上海)有限公司 | Evaporation source configuration structure capable of saving space in vacuum coating chamber and design method thereof |
| CN111676454B (en) * | 2020-08-04 | 2023-09-05 | 光驰科技(上海)有限公司 | Evaporation source configuration structure capable of saving indoor space of vacuum coating and design method thereof |
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