CN109545885A - It is a kind of too can battery production system - Google Patents
It is a kind of too can battery production system Download PDFInfo
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- CN109545885A CN109545885A CN201811227620.3A CN201811227620A CN109545885A CN 109545885 A CN109545885 A CN 109545885A CN 201811227620 A CN201811227620 A CN 201811227620A CN 109545885 A CN109545885 A CN 109545885A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000002360 preparation method Methods 0.000 claims abstract description 15
- 239000002002 slurry Substances 0.000 claims abstract description 13
- 238000002161 passivation Methods 0.000 claims abstract description 12
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 10
- 238000004140 cleaning Methods 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims abstract description 7
- 238000007639 printing Methods 0.000 claims abstract description 6
- 238000005245 sintering Methods 0.000 claims abstract description 6
- 239000003708 ampul Substances 0.000 claims description 27
- 239000010453 quartz Substances 0.000 claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 24
- 238000005496 tempering Methods 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- 230000008520 organization Effects 0.000 claims description 7
- 230000006698 induction Effects 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 3
- 230000000153 supplemental effect Effects 0.000 description 36
- 229910052710 silicon Inorganic materials 0.000 description 28
- 239000010703 silicon Substances 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 238000001514 detection method Methods 0.000 description 16
- 239000000428 dust Substances 0.000 description 14
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 239000002994 raw material Substances 0.000 description 10
- 238000003860 storage Methods 0.000 description 9
- 230000000415 inactivating effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 238000012805 post-processing Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- -1 silicon Alkane Chemical class 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides it is a kind of too can battery production system.The technical problems such as the structure that it solves existing production system is too simple, continuously can not uninterruptedly produce, and speed of production is slow.This too can battery production system, including pedestal is provided with cleaning device on pedestal, fluff making device, disperser, etching device, removes PSG device, PECVD device, slurry preparation device, printing equipment, passivation device and sintering equipment.The present invention has the advantages that speed of production is fast.
Description
Technical field
The invention belongs to too can battery technology field, be related to it is a kind of too can battery production system.
Background technique
Too can battery be a kind of optoelectronic semiconductor thin slice using the sunlight direct generation of electricity, as long as it is satisfied certain illumination
The illumination of condition is arrived, and moment output voltage and can generate electric current in the case where there is circuit.Solar cell is imitated by photoelectricity
It answers or photochemical effect is directly converted to luminous energy in the device of electric energy.The solar cell technological process of production are as follows: silicon chip cleaning and texturing
→ diffusion → etching → dephosphorization cleaning → plated film → silk-screen printing → sintering → detection classification.
Through retrieving, as Chinese patent literature disclose a kind of solar silicon cell production system [application number:
201210213828.6；Publication number: CN 103515474A].This solar silicon cell production system, including drying unit
And detection device, drying unit include drying rack, detection device include detection rack, it is characterised in that: drying unit with
Dust cover is set between detection device, and dust cover setting is in drying rack and detection rack.
It is fallen on silicon wafer although production system disclosed in the patent can avoid dust during transportation, the life
The structure of production system is too simple, continuously can not uninterruptedly produce, and speed of production is slow, therefore, design it is a kind of too can battery
Production system is necessary.
Summary of the invention
The purpose of the present invention is there is the above problem in view of the prior art, propose it is a kind of too can battery production system
System, the production system have the characteristics that speed of production is fast.
Object of the invention can be realized by the following technical scheme: it is a kind of too can battery production system, including pedestal,
It is characterized in that, be provided on the pedestal cleaning device, fluff making device, disperser, etching device, go PSG device,
PECVD device, slurry preparation device, printing equipment, passivation device and sintering equipment.
The slurry preparation device includes workbench, and workbench is fixed on the base, and preparation case is fixed on workbench, is matched
Upper box part processed has feed inlet, and solenoid valve one is provided at feed inlet, and preparing lower box part has discharge port, and discharge outlet is provided with
Solenoid valve two is fixed with column on workbench, is provided with lifting seat on column, and lifting seat is located at and prepares right above case, lifting
The driving structure that seat can be such that it moves up and down with one is connected, and lifting seat is connected with connecting rod upper end, and connecting rod lower end, which is extend into, matches
It is connected in case processed with mounting plate, rabbling mechanism is provided on mounting plate, rabbling mechanism includes main agitating shaft, secondary agitating shaft one, pair
Agitating shaft two, driving motor, driving wheel, bracket, gib block, guide block and assistant strip, driving motor is fixed on a mounting board, driving
Straight up, driving wheel is fixed on the output shaft end of driving motor, main agitating shaft, secondary agitating shaft one and pair to the output shaft of motor
Agitating shaft two is vertically arranged on a mounting board respectively, and secondary agitating shaft one and secondary agitating shaft two are symmetrically arranged in main agitating shaft two
Side, main agitating shaft upper end is fixed with master gear, and master gear is meshed with driving wheel, and main agitating shaft lower end is fixed with spiral forward direction
The upper end of blade, secondary agitating shaft one is fixed with from gear one, and is meshed from gear one with master gear, the lower end of secondary agitating shaft one
It is fixed with spiral backward vane one, the upper end of secondary agitating shaft two is fixed with from gear two, and is meshed from gear two with master gear,
The lower end of secondary agitating shaft two is fixed with spiral backward vane two, and bracket is fixed, and guide block is fixed on bracket on a mounting board, guiding
Item is slidably arranged on guide block, and assistant strip is horizontally fixed on gib block, and assistant strip one end is fixed with pushing plate one, and pushing plate
One is arranged vertically, and the assistant strip other end is fixed with pushing plate two, and pushing plate two is arranged vertically, and assistant strip side has tooth
Tooth portion one, the assistant strip other side have teeth portion two, also have half gear one, and half gear, one energy and teeth on secondary agitating shaft one
Portion one is meshed, and also has half gear two on secondary agitating shaft two, and half gear two can be meshed with teeth portion two.
The working principle of slurry preparation device is as follows: all kinds of raw materials being put into and are prepared in case, control driving motor drives
Driving wheel rotation, driving wheel drive master gear rotation, and master gear drives main agitating shaft rotation, and main agitating shaft drives spiral forward direction leaf
Piece rotation, meanwhile, master gear drives from gear one and rotates from gear two, drives secondary agitating shaft one to rotate from gear one, pair is stirred
It mixes axis one and drives spiral backward vane one, drive secondary agitating shaft two to rotate from gear two, secondary agitating shaft two drives the reversed leaf of spiral
Piece two, the raw material that spiral forward direction blade, spiral backward vane one and two pairs of spiral backward vane are prepared in case are stirred；With this
Meanwhile half gear one be meshed with teeth portion one, be moved to the left assistant strip, after being moved to left end, half gear two and teeth
Portion two is meshed, and assistant strip is made to move right, and assistant strip can be made to move left and right, and assistant strip makes pushing plate one and pushing plate two or so
Mobile, the raw material prepared in case is pushed to repeatedly and prepares in the middle part of case by pushing plate one and pushing plate two, can also pass through driving structure
Lifting seat is driven to move up and down, lifting seat drives mounting plate to move up and down by connecting rod, so as to quickly will entirely prepare case
Raw material everywhere stirs evenly, and prepares quick.
The driving structure includes cylinder, guide rail and sliding block, and guide rail is fixed on column vertically, and sliding block is arranged in guide rail
On, cylinder is fixed on column, and straight up, the piston rod end of cylinder is connected the piston rod of cylinder with sliding block, and lifting seat is logical
Connection frame is crossed to be connected with sliding block.
When needing moves up and down lifting seat, the piston rod for controlling cylinder is moved up and down, and the piston rod of cylinder, which drives, to be slided
Block is moved up and down along guide rail, and sliding block drives lifting seat to move up and down, so as to move up and down lifting seat.
The section of the pushing plate one and pushing plate two is arc-shaped.
The preparation case side is also provided with observation panel, and transparent access panel is provided at observation panel.
Using the above structure, the exception prepared in case can be watched by access panel.
The access panel is poly (methyl methacrylate) plate.
Also there is instruction component, instruction component includes indicating arm and pointer, and indicating arm is fixed on vertical vertically on the column
On column, there is graduation mark on indicating arm, pointer is fixed on sliding block, and pointer is towards indicating arm.
Using the above structure, by pointer as sliding block moves up and down, pointer is towards indicating arm, so as to conveniently know peace
Height and position locating for loading board, instruction are intuitive.
Also there are several crushing cutters one, and the section of crushing cutter one is triangle on the pushing plate one, on pushing plate two
Also there are several crushing cutters two, and the section of crushing cutter two is triangle.
Using the above structure, it by the effect of crushing cutter one and crushing cutter two, is moved in pushing plate one and pushing plate two or so
When dynamic, raw material can be crushed.
Also there is supplementary structure, supplementary structure includes supplemental cartridge one, supplemental cartridge two, linkage rope one, connection on the mounting plate
Running rope two, directive wheel one and directive wheel two, directive wheel one and directive wheel two are separately fixed on mounting plate, and supplemental cartridge one is set in
On secondary agitating shaft one, the upper end of supplemental cartridge one is connected by spring one with mounting plate, if the side of supplemental cartridge one offers siccative
One end of Kong Yi, linkage rope one are connected with supplemental cartridge one, and the other end of linkage rope one bypasses directive wheel one and assistant strip one end phase
Even, supplemental cartridge two is set on secondary agitating shaft two, and the upper end of supplemental cartridge two is connected by spring two with mounting plate, supplemental cartridge two
If side offers siccative hole two, one end of linkage rope two is connected with supplemental cartridge two, and the other end of linkage rope two bypasses directive wheel
Two are connected with two end of assistant strip.
Using the above structure, when assistant strip is moved to the left, under the action of linkage rope one and linkage rope two and cooperate spring
One and spring two, move down supplemental cartridge one, supplemental cartridge two moves up, and supplemental cartridge one can carry out spiral backward vane one
Water conservancy diversion is assisted, and when assistant strip moves right, under the action of linkage rope one and linkage rope two and cooperates spring one and spring two,
Move up supplemental cartridge one, supplemental cartridge two moves down, and supplemental cartridge two can carry out auxiliary water conservancy diversion to spiral backward vane two, auxiliary
Help effect good.
The supplementary structure further includes guide post one, guide post two, lead ring one and lead ring two, and lead ring one and lead ring two are fixed respectively
On a mounting board, the upper end of guide post one is slidably arranged in lead ring one, and the lower end of guide post one is connected with supplemental cartridge one, guide post two
Upper end is slidably arranged in lead ring two, and the lower end of guide post two is connected with supplemental cartridge two.
It using the above structure, can be to supplemental cartridge one and auxiliary by the effect of guide post one, guide post two, lead ring one and lead ring two
It helps cylinder two to move up and down to be oriented to.
The PECVD device includes base, and base is fixed on the base, and cabinet is fixed on base, is provided in cabinet
Inside has the double-deck quartz ampoule of plating membrane cavity, and induction coil is fixed in the double-deck quartz ampoule, has on double-deck quartz ampoule one end and takes
Mouth is put, the cover board that pick-and-place mouth can be closed is provided on the double-deck quartz ampoule, cover board is connected with air inlet pipe one end, and air inlet pipe is another
One end is connected with mixed organization of supplying gas, and solenoid valve three, the double-deck quartz ampoule other end and exhaust pipe one end phase are provided in air inlet pipe
Connection, the exhaust pipe other end are connected with vacuum mechanism, and solenoid valve four is provided on exhaust pipe, and mixed organization of supplying gas includes rotation
Axis, helix tube two, skirt one of supplying gas, supplies gas skirt two and the tempering tank with cavity, tempering tank pass through support leg at helix tube one
It is horizontally fixed on base, rotation axis, which horizontally rotates, to be arranged in tempering tank, and rotation axis end can drive the dynamic of its rotation with one
Power structure one is connected, and helix tube one and helix tube two coil on the rotating shaft respectively, and helix tube one is positive coiling, helix tube two
Around one end of, helix tube one be closed end for inverted plate, the middle part of helix tube one has several stomatas one, helix tube one it is another
It holds and is connected with the one end for skirt one of supplying gas, the other end for skirt one of supplying gas passes through tempering tank side and is connected with extraneous gas source one,
One end of helix tube two is closed end, and the middle part of helix tube two has several stomatas two, and the other end of helix tube two and supplying gas draws
One end of pipe two is connected, and the other end for skirt two of supplying gas passes through the tempering tank other side and is connected with extraneous gas source two, in tempering tank
Portion also has gas outlet, and gas outlet is connected with the air inlet pipe other end.
Using the above structure, ammonia is transported in helix tube one by supplying gas skirt one, by skirt two of supplying gas by silicon
Alkane is transported in helix tube two, drives rotation axis rotation by dynamic structure one, rotation axis drives helix tube one and helix tube two
Rotation, the silane Quick uniform mixing that the ammonia and stomata two for exporting stomata one export, mixes sufficient gas from gas outlet
It being input in air inlet pipe, air inlet pipe is defeated interior to the double-deck quartz ampoule by mixed gas delivery, thus can guarantee the consistency of plated film, plating
Film is reliable；It can make to reach vacuum state in the double-deck quartz ampoule by vacuum mechanism.
Check valve is additionally provided on the exhaust pipe.
The dynamic structure one includes stepper motor one, driving wheel one and driven wheel one, and stepper motor one passes through mounting rod
It is fixed in tempering tank, the output shaft of stepper motor one is horizontally disposed, and driving wheel one is fixed on the output shaft end of stepper motor one
Portion, driven wheel one is fixed on rotation axis end, and driven wheel one is meshed with driving wheel one.
When needing rotates rotation axis, the output shaft rotation of control stepper motor one, the output shaft band of stepper motor one
Dynamic driving wheel one rotates, and driving wheel one drives driven wheel one to rotate, and driven wheel one drives rotation axis rotation, so as to make rotation axis
Rotation.
The vacuum mechanism includes vacuum pump, vacuum buffer tank, connecting tube, water tank, water inlet pipe, return pipe, heat-exchange tube
And circulating pump, connecting tube one end are connected with the exhaust pipe other end, the connecting tube other end is connected with vacuum pump, and connecting tube is another
It is additionally provided with solenoid valve five on end, is connected by auxiliary tube with vacuum buffer tank in the middle part of connecting tube, is additionally provided on auxiliary tube
Solenoid valve six, heat-exchange tube are arranged in vacuum buffer tank, and heat-exchange tube one end is connected by water inlet pipe with water tank lower part, heat
The exchange pipe other end is connected by return pipe with water tank upper, and circulating pump is arranged on water inlet pipe.
Using the above structure, it closes solenoid valve four and opens solenoid valve five and solenoid valve six, it is slow to vacuum by vacuum pump
It deposits tank to be evacuated, makes to reach vacuum state in vacuum buffer tank；And when needing to vacuumize the double-deck quartz ampoule, close electricity
Magnet valve five simultaneously opens solenoid valve four and solenoid valve six, the gas due to being vacuum state in vacuum buffer tank, in the double-deck quartz ampoule
It enters in vacuum buffer tank, in vacuum buffer tank after gassy, closes solenoid valve six and open solenoid valve four and solenoid valve
Five, by vacuum pump to continuing to vacuumize in the double-deck quartz ampoule, vacuum pump can be reduced and high-temperature gas in the double-deck quartz ampoule is direct
The time of contact, thus can guarantee the normal work of vacuum pump, and the high-temperature gas in vacuum buffer tank can pass through heat-exchange tube
It carries out heat exchange to be allowed to cool, good operating stability.
Several aluminum fin-stocks are also arranged on the heat-exchange tube.
Using the above structure, the contact area of gas in heat-exchange tube and vacuum buffer tank can be increased by aluminum fin-stock.
Air gauge is also connected on the vacuum buffer tank.
Using the above structure, the air pressure size in vacuum buffer tank, intuitive display can be conveniently checked by air gauge.
The passivation device includes rack, and rack is fixed on the base, and is fixed with inactivating case in rack, on inactivating case
Multiple overhead doors are provided with, overhead door will be separated into multiple process cavities, have in rack for conveying silicon wafer basket in inactivating case
Pipeline, and pipeline runs through each process cavity, pipeline includes two rows of roller bearings for carrying simultaneously horizontal feed silicon wafer basket, technique
Chamber includes that the pretreatment chamber set gradually along pipeline conveying direction, processing chamber one, processing chamber two and post-processing chamber, feature exist
In being additionally provided with feed mechanism in the rack, feed mechanism includes pedestal, storing stand, shaft, feeding paddle, alarm bell, controller
With the detection plate being square, pedestal is fixed on the rack, and storing stand is arranged on the base, is had on storing stand for storing silicon wafer
Several storage protrusions of basket, the moving structure that storing stand can also drive it to move back and forth with one are connected, and shaft is vertically arranged in machine
On frame, and shaft is located at pedestal and pipeline between the two, and the dynamic structure two that shaft lower end can drive it to rotate with one is connected,
Shaft upper end is connected with mounting bar, push-rod electric machine one is fixed on mounting bar, straight down, push rod is electric for the push rod of push-rod electric machine one
The push rod end of machine one is connected with elevator, and push-rod electric machine two is fixed on elevator, and the push rod of push-rod electric machine two is horizontally disposed,
The push rod end of push-rod electric machine two is connected with feeding paddle, and detection plate is connected by joining beam with mounting plate, and detection plate is located at feeding
Below paddle, fixed there are four travel switch in detection plate, alarm bell and controller are each attached on pedestal, and alarm bell and travel switch are logical
Route is crossed to be connected with controller.
The principle of passivation device is as follows: when needing the silicon wafer basket for being placed with battery being input to inactivating case, by silicon wafer
Basket is stored at the storage protrusion of storing stand, control push-rod electric machine one drive elevator move down, elevator make feeding paddle to
Lower movement, control push-rod electric machine two drive feeding paddle to forward extend out, and make to control push-rod electric machine one at feeding paddle insertion storage protrusion
Elevator is driven to move up, feeding paddle takes out the silicon wafer basket on storing stand, and control push-rod electric machine two drives feeding paddle backward
It retracts, control push-rod electric machine one moves up and down feeding paddle, and the silicon wafer basket bottom on feeding paddle is in contact with travel switch, stroke
Signal is passed to controller by switch, and controller can control alarm bell work, can determine whether out whether the silicon wafer basket on feeding paddle is put just,
Shaft rotation is driven by dynamic structure two, shaft drives mounting bar rotation, feeding paddle is made to be located at pipeline side, controls push rod
Motor two drives feeding paddle to forward extend out, and is located at feeding paddle above pipeline, and control push-rod electric machine one drives elevator downward
Mobile, elevator moves down feeding paddle, and silicon wafer basket is put on the conveyor line, replaces artificial loading, and feeding is convenient.
The feed mechanism further includes dust catcher and the sweep-up pipe that is in U-shape, and sweep-up pipe is fixed on detection plate end, sweep-up pipe
Both ends be air inlet, and air inlet is vertically upward, and the middle part of sweep-up pipe is gas outlet, and gas outlet passes through connecting tube and dust catcher
It is connected, dust catcher is fixed on the rack.
Using the above structure, control push-rod electric machine two drive feeding paddle forward extend out, the silicon wafer basket on feeding paddle gradually from
Pass through at sweep-up pipe, open dust catcher, is removed the dust of silicon wafer basket bottom by sweep-up pipe, dedusting is quick.
The moving structure includes guide rod, guide sleeve, servo motor, gear and rack gear, and guide rod is horizontally fixed on pedestal, is led
It is set on guide rod, rack gear is horizontally fixed on pedestal, and rack gear is parallel to each other with guide rod, and servo motor is fixed on guide sleeve
On, straight down, gear is fixed on the output shaft end of servo motor to the output shaft of servo motor, and wheel and rack is mutually nibbled
It closes, storing stand is fixed on guide sleeve.
When needing moves back and forth storing stand, control servo motor band moving gear is rotated, and gear is gradually mutually nibbled with rack gear
It closes, moves back and forth guide sleeve along guide rod, guide sleeve drives storing stand to move back and forth, so as to move back and forth storing stand.
The guide rod both ends also have limited block.
The dynamic structure two includes stepper motor two, driving wheel two and driven wheel two, and stepper motor two is fixed on rack
On, straight up, driving wheel two is fixed on the output shaft end of stepper motor two to the output shaft of stepper motor two, and driven wheel two is solid
It is scheduled on shaft lower end, and driving wheel two is meshed with driven wheel two.
When needing rotates shaft, control stepper motor two drives driving wheel two to rotate, and driving wheel two drives driven wheel
Two rotations, driven wheel two drives shaft rotation, so as to rotate shaft.
Also with the anti-slip part of several protrusions on the feeding paddle.
Compared with prior art, this too can the production system of battery have the advantages that this: by cleaning device, fluff making device,
Disperser, etching device go PSG device, PECVD device, slurry preparation device, printing equipment, passivation device and burning
Tie device, it can be achieved that too can battery quick production, speed of production is fast.
Detailed description of the invention
Fig. 1 is the planar structure schematic diagram of slurry preparation device.
Fig. 2 is the schematic perspective view of rabbling mechanism in slurry preparation device.
Fig. 3 is the schematic perspective view that part is removed in slurry preparation device.
Fig. 4 is the schematic perspective view of supplementary structure in slurry preparation device.
Fig. 5 is the planar structure schematic diagram of PECVD device.
Fig. 6 is the planar structure schematic diagram of mixed organization of supplying gas in PECVD device.
Fig. 7 is the schematic perspective view of passivation device.
Fig. 8 is the schematic perspective view that part is removed in passivation device.
Fig. 9 is the planar structure schematic diagram that part is removed in passivation device.
In figure, 1, workbench；2, case is prepared；2a, feed inlet；2b, discharge port；3, solenoid valve two；4, access panel；5, electromagnetism
Valve one；6, connecting rod；7, lifting seat；8, connection frame；9, sliding block；10, guide rail；11, indicating arm；12, pointer；13, cylinder；14,
Column；15, pushing plate two；15a, crushing cutter two；16, assistant strip；16a, teeth portion one；16b, teeth portion two；17, gib block；
18, driving wheel；19, master gear；20, half gear one；21, bracket；22, from gear one；23, guide block；24, from gear two；25, it pushes away
Send plate one；25a, crushing cutter one；26, half gear two；27, mounting plate；28, secondary agitating shaft two；29, spiral backward vane two；30,
Main agitating shaft；31, spiral forward direction blade；32, driving motor；33, secondary agitating shaft one；34, spiral backward vane one；35, it assists
Cylinder one；36, spring one；37, directive wheel one；38, linkage rope one；39, lead ring one；40, guide post one；41, lead ring two；42, guide post
Two；43, linkage rope two；44, supplemental cartridge two；45, spring two；51, base；52, cabinet；53, the double-deck quartz ampoule；54, cover board；
55, air inlet pipe；56, solenoid valve three；57, solenoid valve four；58, air gauge；59, vacuum buffer tank；60, exhaust pipe；61, solenoid valve
Six；62, auxiliary tube；63, connecting tube；64, solenoid valve five；65, vacuum pump；66, heat-exchange tube；67, water inlet pipe；68, circulating pump；
69, water tank；70, return pipe；71, aluminum fin-stock；72, tempering tank；73, stepper motor one；74, driving wheel one；75, helix tube one；
76, helix tube two；77, rotation axis；78, it supplies gas skirt one；79, driven wheel one；80, it supplies gas skirt two；81, rack；82, actively
Wheel two；83, stepper motor two；84, pedestal；85, controller；86, alarm bell；87, storing stand；87a, storage protrusion；88, it detects
Plate；89, feeding paddle；90, push-rod electric machine one；91, elevator；92, push-rod electric machine two；93, mounting bar；94, shaft；95, driven
Wheel two；96, joining beam；97, travel switch；98, dust catcher；99, connecting tube；100, sweep-up pipe；101, gear；102, rack gear；
103, servo motor；104, guide sleeve；105, guide rod；106, limited block.
Specific embodiment
Following is a specific embodiment of the present invention in conjunction with the accompanying drawings, technical scheme of the present invention will be further described,
However, the present invention is not limited to these examples.
As shown in figs. 1-9, too can battery production system, including pedestal is provided with cleaning device, making herbs into wool dress on pedestal
Set, disperser, etching device, go PSG device, PECVD device, slurry preparation device, printing equipment, passivation device and
Sintering equipment；In the present embodiment, cleaning device, fluff making device, disperser, etching device, remove PSG device, printing equipment
What is be all made of with sintering equipment is existing structure.
Slurry preparation device includes workbench 1, and workbench 1 is fixed on the base, and is fixed on workbench 1 and prepares case 2,
In the present embodiment, it is fixed with by bolted connection on workbench 1 and prepares case 2；Preparing 2 top of case has feed inlet 2a,
Solenoid valve 1 is provided at feed inlet 2a, preparing 2 lower part of case has discharge port 2b, it is provided with solenoid valve 23 at discharge port 2b,
It is fixed with column 14 on workbench 1, in the present embodiment, is fixed with column 14 on workbench 1 by welding；Column 14
On be provided with lifting seat 7, and lifting seat 7 is located at and prepares right above case 2, lifting seat 7 and one it can be made to move up and down driving knot
Structure is connected, and lifting seat 7 is connected with 6 upper end of connecting rod, and 6 lower end of connecting rod, which extend into prepare, to be connected in case 2 with mounting plate 27, installs
Rabbling mechanism is provided on plate 27, rabbling mechanism includes main agitating shaft 30, secondary agitating shaft 1, secondary agitating shaft 2 28, driving electricity
Machine 32, driving wheel 18, bracket 21, gib block 17, guide block 23 and assistant strip 16, driving motor 32 are fixed on mounting plate 27, are driven
Straight up, driving wheel 18 is fixed on the output shaft end of driving motor 32 to the output shaft of dynamic motor 32, and main agitating shaft 30, pair are stirred
It mixes axis 1 and secondary agitating shaft 2 28 is vertically arranged in respectively on mounting plate 27, and secondary agitating shaft 1 and secondary 2 28 pairs of agitating shaft
Title is arranged in main 30 two sides of agitating shaft, and main 30 upper end of agitating shaft is fixed with master gear 19, and master gear 19 is nibbled with 18 phase of driving wheel
It closes, main 30 lower end of agitating shaft is fixed with spiral forward direction blade 31, and the upper end of secondary agitating shaft 1 is fixed with from gear 1, and from
Gear 1 is meshed with master gear 19, and the lower end of secondary agitating shaft 1 is fixed with spiral backward vane 1, secondary agitating shaft two
28 upper end is fixed with from gear 2 24, and is meshed from gear 2 24 with master gear 19, and the lower end of secondary agitating shaft 2 28 is fixed
There is spiral backward vane 2 29, bracket 21 is fixed on mounting plate 27, and guide block 23 is fixed on the stent 21, and the sliding of gib block 17 is set
It sets on guide block 23, assistant strip 16 is horizontally fixed on gib block 17, and 16 one end of assistant strip is fixed with pushing plate 1, and pushes
Plate 1 is arranged vertically, and 16 other end of assistant strip is fixed with pushing plate 2 15, and pushing plate 2 15 is arranged vertically, assistant strip
16 sides have one 16a of teeth portion, and 16 other side of assistant strip has two 16b of teeth portion, also has half tooth on secondary agitating shaft 1
Taking turns one 20, and half gear 1 can be meshed with one 16a of teeth portion, also have half gear 2 26, and half on secondary agitating shaft 2 28
Gear 2 26 can be meshed with two 16b of teeth portion.
Driving structure includes cylinder 13, guide rail 10 and sliding block 9, and guide rail 10 is fixed on vertically on column 14, and the setting of sliding block 9 exists
On guide rail 10, cylinder 13 is fixed on column 14, and in the present embodiment, cylinder 13 is fixed on column by bolted connection
On 14；Straight up, the piston rod end of cylinder 13 is connected the piston rod of cylinder 13 with sliding block 9, and lifting seat 7 passes through connection frame 8
It is connected with sliding block 9.
The section of pushing plate 1 and pushing plate 2 15 is arc-shaped.
It prepares 2 side of case and is also provided with observation panel, transparent access panel 4 is provided at observation panel；Using the structure, pass through
Access panel 4 can watch the exception prepared in case 2；Access panel 4 is poly (methyl methacrylate) plate.
Also there is instruction component, instruction component includes indicating arm 11 and pointer 12, and indicating arm 11 is fixed vertically on column 14
On column 14, there is graduation mark on indicating arm 11, pointer 12 is fixed on sliding block 9, and pointer 12 is towards indicating arm 11；Using
The structure, by pointer 12 as sliding block 9 moves up and down, pointer 12 is towards indicating arm 11, so as to conveniently know mounting plate 27
Locating height and position, instruction are intuitive.
Also there are several one 25a of crushing cutter, in the present embodiment, the quantity of one 25a of crushing cutter is five on pushing plate 1
Ten；And the section of one 25a of crushing cutter is triangle, also has several two 15a of crushing cutter on pushing plate 2 15, in the present embodiment
In, the quantity of two 15a of crushing cutter is 50；And the section of two 15a of crushing cutter is triangle；Using the structure, by broken
The effect of two 15a of one 25a of knife and crushing cutter can carry out brokenly raw material when pushing plate 1 and pushing plate 2 15 move left and right
It is broken.
Also there is supplementary structure, supplementary structure includes supplemental cartridge 1, supplemental cartridge 2 44, linkage rope one on mounting plate 27
38, linkage rope 2 43, directive wheel 1 and directive wheel two, directive wheel 1 and directive wheel two are separately fixed on mounting plate 27,
Supplemental cartridge 1 is set on secondary agitating shaft 1, and the upper end of supplemental cartridge 1 is connected by spring 1 with mounting plate 27, auxiliary
If the side of cylinder 1 is helped to offer siccative hole one, in the present embodiment, the quantity in material hole one is 20；Linkage rope 1
One end is connected with supplemental cartridge 1, and the other end of linkage rope 1 is connected around directive wheel 1 with 16 one end of assistant strip, assists
Cylinder 2 44 is set on secondary agitating shaft 2 28, and the upper end of supplemental cartridge 2 44 is connected by spring 2 45 with mounting plate 27, supplemental cartridge
If 2 44 side offers siccative hole two, in the present embodiment, the quantity in material hole two is 20；One end of linkage rope 2 43
It is connected with supplemental cartridge 2 44, the other end of linkage rope 2 43 is connected around directive wheel two with 16 2 end of assistant strip.
Supplementary structure further includes guide post 1, guide post 2 42, lead ring 1 and lead ring 2 41, lead ring 1 and lead ring 2 41
It is separately fixed on mounting plate 27, the upper end of guide post 1 is slidably arranged in lead ring 1, the lower end of guide post 1 and auxiliary
Cylinder 1 is connected, and the upper end of guide post 2 42 is slidably arranged in lead ring 2 41, and the lower end of guide post 2 42 is connected with supplemental cartridge 2 44；
It, can be to supplemental cartridge 1 and auxiliary by the effect of guide post 1, guide post 2 42, lead ring 1 and lead ring 2 41 using the structure
It helps cylinder 2 44 to move up and down to be oriented to.
The working principle of slurry preparation device is as follows: all kinds of raw materials being put into and are prepared in case 2,32 band of driving motor is controlled
Dynamic driving wheel 18 rotates, and driving wheel 18 drives master gear 19 to rotate, and master gear 19 drives main agitating shaft 30 to rotate, main agitating shaft 30
Spiral forward direction blade 31 is driven to rotate, meanwhile, master gear 19 drives from gear 1 and rotates from gear 2 24, from gear 1
Secondary agitating shaft 1 is driven to rotate, secondary agitating shaft 1 drives spiral backward vane 1, drives secondary agitating shaft from gear 2 24
2 28 rotations, secondary agitating shaft 2 28 drive spiral backward vane 2 29, spiral forward direction blade 31, spiral backward vane 1 and spiral shell
2 29 pairs of backward vane raw materials prepared in case 2 of rotation are stirred；At the same time, half gear 1 is nibbled with one 16a phase of teeth portion
It closes, is moved to the left assistant strip 16, after being moved to left end, half gear 2 26 is meshed with two 16b of teeth portion, makes assistant strip 16
It moves right, assistant strip 16 can be made to move left and right, assistant strip 16 moves left and right pushing plate 1 and pushing plate 2 15, pushing plate
1 and pushing plate 2 15 raw material prepared in case 2 is pushed to repeatedly and prepares the middle part of case 2；When assistant strip 16 is moved to the left,
Under the action of linkage rope 1 and linkage rope 2 43 and cooperate spring 1 and spring 2 45, move down supplemental cartridge 1,
Supplemental cartridge 2 44 moves up, and supplemental cartridge 1 can carry out auxiliary water conservancy diversion to spiral backward vane 1, and assistant strip 16 is to the right
When mobile, under the action of linkage rope 1 and linkage rope 2 43 and cooperate spring 1 and spring 2 45, make supplemental cartridge 1
It moves up, supplemental cartridge 2 44 moves down, and supplemental cartridge 2 44 can carry out auxiliary water conservancy diversion to spiral backward vane 2 29；Also controllable
Cylinder 13 processed is moved up and down with movable slider 9 along guide rail 10, and sliding block 9 drives lifting seat 7 to move up and down, and lifting seat 7 passes through connection
Bar 6 drives mounting plate 27 to move up and down, so as to quickly stir evenly the entire raw material of case 2 everywhere of preparing.
PECVD device includes base 51, and base 51 is fixed on the base, and cabinet 52 is fixed on base 51, in this implementation
In example, cabinet 52 is fixed on base 51 by bolted connection；Internal pair with plating membrane cavity is provided in cabinet 52
Layer quartz ampoule 53, is fixed with induction coil in the double-deck quartz ampoule 53, in the present embodiment, induction coil is using existing skill
Art；Have on double-deck 53 one end of quartz ampoule and pick and place mouth, the cover board 54 that pick-and-place mouth can be closed is provided on the double-deck quartz ampoule 53,
Cover board 54 is connected with 55 one end of air inlet pipe, and 55 other end of air inlet pipe is connected with mixed organization of supplying gas, and is provided in air inlet pipe 55
Solenoid valve 3 56, double-deck 53 other end of quartz ampoule are connected with 60 one end of exhaust pipe, 60 other end of exhaust pipe and vacuum mechanism phase
Even, it is provided with solenoid valve 4 57 on exhaust pipe 60, is additionally provided with check valve on exhaust pipe 60；Mixed organization of supplying gas includes rotation axis
77, helix tube 1, helix tube 2 76, skirt 1 of supplying gas, supply gas skirt 2 80 and the tempering tank 72 with cavity, tempering tank
72 are horizontally fixed on base 51 by support leg, and rotation axis 77, which horizontally rotates, to be arranged in tempering tank 72,77 end of rotation axis
The dynamic structure one that it can be driven to rotate with one is connected, and helix tube 1 and helix tube 2 76 are coiled in respectively in rotation axis 77,
Helix tube 1 is positive coiling, and helix tube 2 76 is inverted plate around one end of helix tube 1 is closed end, helix tube 1
Middle part there are several stomatas one, in the present embodiment, the quantity of stomata one is 20；It the other end of helix tube 1 and send
One end of gas skirt 1 is connected, and the other end for skirt 1 of supplying gas passes through 72 side of tempering tank and is connected with extraneous gas source one,
In the present embodiment, extraneous gas source one is the prior art, is capable of providing ammonia；One end of helix tube 2 76 is closed end, spiral
The middle part of pipe 2 76 has several stomatas two, in the present embodiment,；The other end of helix tube 2 76 and supply gas the one of skirt 2 80
End is connected, and the other end for skirt 2 80 of supplying gas passes through 72 other side of tempering tank and is connected with extraneous gas source two, in the present embodiment,
Extraneous gas source two is the prior art, is capable of providing silane；72 middle part of tempering tank also has gas outlet, and gas outlet and air inlet pipe 55 are another
One end is connected；Using the structure, ammonia is transported in helix tube 1 by supplying gas skirt 1, passes through skirt two of supplying gas
80 are transported to silane in helix tube 2 76, and control stepper motor 1 drives driving wheel 1 to rotate, and driving wheel 1 drives
Driven wheel 1 rotates, and driven wheel 1 drives rotation axis 77 to rotate, and rotation axis 77 drives helix tube 1 and helix tube 2 76
Rotation, the silane Quick uniform mixing that the ammonia and stomata two for exporting stomata one export, mixes sufficient gas from gas outlet
It is input in air inlet pipe 55, air inlet pipe 55 is defeated interior to the double-deck quartz ampoule 53 by mixed gas delivery.
Dynamic structure one includes stepper motor 1, driving wheel 1 and driven wheel 1, and stepper motor 1 passes through peace
Dress bar is fixed in tempering tank 72, and the output shaft of stepper motor 1 is horizontally disposed, and driving wheel 1 is fixed on stepper motor one
73 output shaft end, driven wheel 1 is fixed on 77 end of rotation axis, and driven wheel 1 is meshed with driving wheel 1.
Vacuum mechanism include vacuum pump 65, vacuum buffer tank 59, connecting tube 63, water tank 69, water inlet pipe 67, return pipe 70,
Heat-exchange tube 66 and circulating pump 68,63 one end of connecting tube are connected with 60 other end of exhaust pipe, 63 other end of connecting tube and vacuum
Pump 65 is connected, and solenoid valve 5 64 is additionally provided on 63 other end of connecting tube, passes through auxiliary tube 62 and vacuum in the middle part of connecting tube 63
Buffer tank 59 is connected, and solenoid valve 6 61 is additionally provided on auxiliary tube 62, and heat-exchange tube 66 is arranged in vacuum buffer tank 59, heat
Exchange 66 one end of pipe is connected by water inlet pipe 67 with 69 lower part of water tank, and 66 other end of heat-exchange tube passes through return pipe 70 and water tank
69 tops are connected, and circulating pump 68 is arranged on water inlet pipe 67；Using the structure, closes solenoid valve 4 57 and open solenoid valve five
64 and solenoid valve 6 61, vacuum buffer tank 59 is evacuated by vacuum pump 65, makes to reach vacuum shape in vacuum buffer tank 59
State；And when needing to vacuumize the double-deck quartz ampoule 53, it closes solenoid valve 5 64 and opens solenoid valve 4 57 and solenoid valve six
61, due to being vacuum state in vacuum buffer tank 59, the gas in the double-deck quartz ampoule 53 is entered in vacuum buffer tank 59, vacuum
In buffer tank 59 after gassy, closes solenoid valve 6 61 and open solenoid valve 4 57 and solenoid valve 5 64, pass through vacuum pump 65
To continuing to vacuumize in the double-deck quartz ampoule 53, can reduce that vacuum pump 65 and high-temperature gas in the double-deck quartz ampoule 53 directly contact when
Between, thus can guarantee vacuum pump 65 normal work, and the high-temperature gas in vacuum buffer tank 59 can by heat-exchange tube 66 into
The exchange of row heat is allowed to cool, good operating stability.
Several aluminum fin-stocks 71 are also arranged on heat-exchange tube 66；In the present embodiment, the quantity of aluminum fin-stock 71 is ten；It adopts
With the structure, the contact area of gas in heat-exchange tube 66 and vacuum buffer tank 59 can be increased by aluminum fin-stock 71.
Air gauge 58 is also connected on vacuum buffer tank 59；Using the structure, vacuum can conveniently be checked by air gauge 58
Air pressure size in buffer tank 59, intuitive display.
Passivation device includes rack 81, and rack 81 is fixed on the base, and inactivating case, inactivating case are fixed in rack 81
On be provided with multiple overhead doors, overhead door will be separated into multiple process cavities in inactivating case, have in rack 81 for conveying silicon wafer
The pipeline of basket, and pipeline runs through each process cavity, pipeline includes two rows of roller bearings for carrying simultaneously horizontal feed silicon wafer basket,
Process cavity includes the pretreatment chamber set gradually along pipeline conveying direction, processing chamber one, processing chamber two and post-processing chamber, at this
In embodiment, what pretreatment chamber, processing chamber one, processing chamber two, post-processing chamber and pipeline were all made of is the patent No.
Existing structure in 201520992271X；Feed mechanism is additionally provided in rack 81, feed mechanism includes pedestal 84, storing stand
87, shaft 94, feeding paddle 89, alarm bell 86, controller 85 and the detection plate 88 being square, pedestal 84 are fixed in rack 81, storage
Expect that platform 87 is arranged on pedestal 84, there are several storage protrusion 87a for storing silicon wafer basket, in the present embodiment on storing stand 87
In, the quantity of storage protrusion 87a is seven；The moving structure that storing stand 87 can also drive it to move back and forth with one is connected, shaft
94 are vertically arranged in rack 81, and shaft 94 is located at pedestal 84 and pipeline between the two, and 94 lower end of shaft and one can drive
Its dynamic structure two rotated is connected, and 94 upper end of shaft is connected with mounting bar 93, and push-rod electric machine 1 is fixed on mounting bar 93,
Straight down, the push rod end of push-rod electric machine 1 is connected the push rod of push-rod electric machine 1 with elevator 91, solid on elevator 91
Surely there is push-rod electric machine 2 92, the push rod of push-rod electric machine 2 92 is horizontally disposed, the push rod end of push-rod electric machine 2 92 and feeding paddle 89
It is connected, detection plate 88 is connected by joining beam 96 with mounting plate, and detection plate 88 is located at 89 lower section of feeding paddle, fixes in detection plate 88
There are four travel switches 97, and in the present embodiment, four travel switches 97 can be in contact with four angles of silicon wafer basket bottom respectively；
Alarm bell 86 and controller 85 are each attached on pedestal 84, and alarm bell 86 and travel switch 97 are connected with controller 85 by route；
In the present embodiment, controller 85 can control the journey of alarm bell and travel switch using the single-chip microcontroller that can be bought in the market
Sequence be it is existing, program does not need to update.
Feed mechanism further includes dust catcher 98 and the sweep-up pipe 100 that is in U-shape, and sweep-up pipe 100 is fixed on 88 end of detection plate,
The both ends of sweep-up pipe 100 are air inlet, and air inlet is vertically upward, and the middle part of sweep-up pipe 100 is gas outlet, and gas outlet passes through connection
Adapter tube 99 is connected with dust catcher 98, and dust catcher 98 is fixed in rack 81；Using the structure, controls push-rod electric machine 2 92 and drive
Feeding paddle 89 forward extends out, and the silicon wafer basket on feeding paddle 89 gradually passes through from sweep-up pipe 100, opens dust catcher 98, passes through suction
Dirt pipe 100 removes the dust of silicon wafer basket bottom, and dedusting is quick.
Moving structure includes guide rod 105, guide sleeve 104, servo motor 103, gear 101 and rack gear 102, and guide rod 105 is horizontal
Be fixed on pedestal 84, guide sleeve 104 be arranged on guide rod 105, rack gear 102 is horizontally fixed on pedestal 84, and rack gear 102 with lead
Bar 105 is parallel to each other, and servo motor 103 is fixed on guide sleeve 104, and in the present embodiment, servo motor 103 is bolted
Mode be fixed on guide sleeve 104；Straight down, gear 101 is fixed on servo motor 103 to the output shaft of servo motor 103
Output shaft end, and gear 101 is meshed with rack gear 102, storing stand 87 is fixed on guide sleeve 104；105 both ends of guide rod also have
Limited block 106.
Dynamic structure two includes stepper motor 2 83, driving wheel 2 82 and driven wheel 2 95, and stepper motor 2 83 is fixed on
In rack 81, in the present embodiment, stepper motor 2 83 is fixed on by bolted connection in rack 81；Stepper motor two
Straight up, driving wheel 2 82 is fixed on the output shaft end of stepper motor 2 83 to 83 output shaft, and driven wheel 2 95 is fixed on
94 lower end of shaft, and driving wheel 2 82 is meshed with driven wheel 2 95.
Also with the anti-slip part of several protrusions on feeding paddle 89.
The principle of passivation device is as follows: when needing the silicon wafer basket for being placed with battery being input to inactivating case, by silicon wafer
Basket is stored at the storage protrusion 87a of storing stand 87, control servo motor 103 with moving gear 101 rotate, gear 101 gradually with
Rack gear 102 is meshed, and moves back and forth guide sleeve 104 along guide rod 105, and guide sleeve 104 drives storing stand 87 to move back and forth；Control pushes away
Bar motor 1 drives elevator 91 to move down, and elevator 91 moves down feeding paddle 89, controls 2 92 band of push-rod electric machine
Dynamic feeding paddle 89 forward extends out, and makes the place the insertion storage protrusion 87a of feeding paddle 89, control push-rod electric machine 1 drive elevator 91 to
Upper movement, feeding paddle 89 take out the silicon wafer basket on storing stand 87, and control push-rod electric machine 2 92 drives feeding paddle 89 to retract backward,
Control push-rod electric machine 1 moves up and down feeding paddle 89, and the silicon wafer basket bottom on feeding paddle 89 is in contact with travel switch 97,
Signal is passed to controller 85 by travel switch 97, and controller 85 can control alarm bell 86 to work, can determine whether out on feeding paddle 89
Whether silicon wafer basket is put just, and control stepper motor 2 83 drives driving wheel 2 82 to rotate, and driving wheel 2 82 drives 2 95 turns of driven wheel
Dynamic, driven wheel 2 95 drives shaft 94 to rotate, and shaft 94 drives mounting bar 93 to rotate, and feeding paddle 89 is made to be located at pipeline side,
Control push-rod electric machine 2 92 drives feeding paddle 89 to forward extend out, and is located at feeding paddle 89 above pipeline, controls push-rod electric machine one
90 drive elevators 91 move down, and elevator 91 moves down feeding paddle 89, and silicon wafer basket is put on the conveyor line, people is replaced
Work feeding, feeding are convenient.
Claims (7)
1. it is a kind of too can battery production system, including pedestal, which is characterized in that cleaning device, system are provided on the pedestal
Suede device, etching device, removes PSG device, PECVD device, slurry preparation device, printing equipment, Passivation Treatment dress at disperser
It sets and sintering equipment.
2. it is according to claim 1 too can battery production system, which is characterized in that the PECVD device includes base,
Base is fixed on the base, and cabinet is fixed on base, and the internal double-deck quartz ampoule with plating membrane cavity is provided in cabinet, double-deck
It is fixed with induction coil in quartz ampoule, has on double-deck quartz ampoule one end and picks and places mouth, be provided with and can will pick and place on the double-deck quartz ampoule
The cover board that mouth closes, cover board are connected with air inlet pipe one end, and the air inlet pipe other end is connected with mixed organization of supplying gas, in air inlet pipe
It is provided with solenoid valve three, the double-deck quartz ampoule other end is connected with exhaust pipe one end, and the exhaust pipe other end is connected with vacuum mechanism,
Solenoid valve four is provided on exhaust pipe, mixed organization of supplying gas includes rotation axis, helix tube one, helix tube two, skirt one of supplying gas, send
Gas skirt two and tempering tank with cavity, tempering tank are horizontally fixed on base by support leg, and rotation axis, which horizontally rotates, to be set
It sets in tempering tank, the dynamic structure one that rotation axis end can drive it to rotate with one is connected, and helix tube one and helix tube two divide
It does not coil on the rotating shaft, helix tube one is positive coiling, and helix tube two is inverted plate around one end of helix tube one is closing
The middle part at end, helix tube one has several stomatas one, and the other end of helix tube one is connected with the one end for skirt one of supplying gas, supplies gas
The other end of skirt one passes through tempering tank side and is connected with extraneous gas source one, and one end of helix tube two is closed end, helix tube two
Middle part there are several stomatas two, the other end of helix tube two is connected with the one end for skirt two of supplying gas, the another of skirt two of supplying gas
One end passes through the tempering tank other side and is connected with extraneous gas source two, also has gas outlet in the middle part of tempering tank, gas outlet and air inlet pipe are another
One end is connected.
3. it is according to claim 2 too can battery production system, which is characterized in that be additionally provided with list on the exhaust pipe
To valve.
4. it is according to claim 2 too can battery production system, which is characterized in that the dynamic structure one include stepping
Motor one, driving wheel one and driven wheel one, stepper motor one are fixed in tempering tank by mounting rod, the output of stepper motor one
Axis is horizontally disposed, and driving wheel one is fixed on the output shaft end of stepper motor one, and driven wheel one is fixed on rotation axis end, and from
Driving wheel one is meshed with driving wheel one.
5. it is according to claim 2 too can battery production system, which is characterized in that the vacuum mechanism includes vacuum
Pump, vacuum buffer tank, connecting tube, water tank, water inlet pipe, return pipe, heat-exchange tube and circulating pump, connecting tube one end and exhaust pipe are another
One end is connected, and the connecting tube other end is connected with vacuum pump, is additionally provided with solenoid valve five on the connecting tube other end, in connecting tube
Portion is connected by auxiliary tube with vacuum buffer tank, and solenoid valve six is additionally provided on auxiliary tube, and heat-exchange tube setting is slow in vacuum
It deposits in tank, heat-exchange tube one end is connected by water inlet pipe with water tank lower part, and the heat-exchange tube other end passes through return pipe and water tank
Top is connected, and circulating pump is arranged on water inlet pipe.
6. it is according to claim 2 too can battery production system, which is characterized in that be also arranged on the heat-exchange tube
Several aluminum fin-stocks.
7. it is according to claim 5 too can battery production system, which is characterized in that be also connected on the vacuum buffer tank
There is air gauge.
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| CN201811227620.3A CN109545885A (en) | 2018-10-22 | 2018-10-22 | It is a kind of too can battery production system |
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| CN201811227620.3A CN109545885A (en) | 2018-10-22 | 2018-10-22 | It is a kind of too can battery production system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111472050A (en) * | 2020-04-10 | 2020-07-31 | 陈鸣明 | Special etching equipment for quartz wafer production and use method thereof |
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| CN108126543A (en) * | 2017-11-28 | 2018-06-08 | 河南高盛企业管理咨询有限公司 | A kind of frequency conversion alternating expression gas mixer |
| CN108159987A (en) * | 2018-02-05 | 2018-06-15 | 南京卡佛科学仪器有限公司 | A kind of triple channel dynamic gas mixing arrangement of double blending tanks |
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| CN111472050B (en) * | 2020-04-10 | 2021-08-03 | 陈鸣明 | Special etching equipment for quartz wafer production and use method thereof |
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