CN109536900A - A kind of extensible shrinkage type vacuum coating equipment cathode protection device - Google Patents
A kind of extensible shrinkage type vacuum coating equipment cathode protection device Download PDFInfo
- Publication number
- CN109536900A CN109536900A CN201811565357.9A CN201811565357A CN109536900A CN 109536900 A CN109536900 A CN 109536900A CN 201811565357 A CN201811565357 A CN 201811565357A CN 109536900 A CN109536900 A CN 109536900A
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- Prior art keywords
- baffle
- cavity
- fixed baffle
- fixed
- protection
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of extensible shrinkage type vacuum coating equipment cathode protection devices, belong to vacuum coating equipment manufacturing technical field.Described device includes that described device includes oscillating cylinder, magnetic fluid, protection baffle, rotary shaft and swing-around trajectory；The protection baffle is split blade type baffle, including fixed baffle and butterfly；Fixed baffle includes left fixed baffle and right fixed baffle；Butterfly includes anticlockwise baffle and right rotation baffle；Rotary shaft includes left-handed shaft and dextral shaft；The method that described device utilizes split blade type baffle combination swing-around trajectory; on the one hand the stretching, extension of plated film cavity cathodic protection baffle is realized; protection target material surface completely; on the other hand; the baffle is folded to cavity wall when shrinking; only occupy the intracorporal smaller space of plated film chamber, baffle interference problem when will not occur to work at the same time with neighbouring cathode.
Description
Technical field
The present invention relates to a kind of extensible shrinkage type vacuum coating equipment cathode protection devices, belong to vacuum coating equipment system
Make technical field.
Background technique
With the development of vacuum coating technology, there are the various new membranes such as multicomponent composite coating and multi-layer composite coatings
System, it is therefore desirable to which plated film equipment has multiple groups cathode, and multiple groups cathode can work at the same time, and work at the same time can also for multiple groups cathode
Improve the plated film production efficiency in industrial production.
Mainstream filming equipment used in the production of large scale industry at present, such as Holland's Hauzer filming equipment, gear therein
Plate is designed as open-close type baffle, folding type baffle all kinds of cathodes (including magnetic control sputtering cathode, electric arc yin in the filming equipment
Pole and ion source) larger space is occupied in the case that arrangement space is nervous；And when the work of plated film cathode, folding type baffle is deposited
Interference problem between adjacent target position, in the more target position of equipment, it is difficult to which work while realizing adjacent target position limits
The realization of some complicated pluralism coatings, causes device resource to waste, production efficiency is low.In addition, domestic, there are also plated film equipments to adopt
With the protection baffle of single fan, the problem of this baffle, is that target surface cannot be blocked well, will cause target surface and seriously pollutes.
Summary of the invention
To overcome defect of the existing technology, the purpose of the present invention is to provide a kind of extensible shrinkage type vacuum coatings
On the one hand machine cathode protection device, the method that described device utilizes split blade type baffle combination swing-around trajectory realize plated film cavity
The stretching, extension of cathodic protection baffle, completely protection target material surface, on the other hand, the baffle is folded to cavity wall when shrinking, only
Occupy the intracorporal smaller space of plated film chamber, baffle interference problem when will not occur to work at the same time with neighbouring cathode.
To achieve the purpose of the present invention, following technical scheme is provided.
A kind of extensible shrinkage type vacuum coating equipment cathode protection device, described device include oscillating cylinder, magnetic fluid,
Protect baffle, rotary shaft and swing-around trajectory.
Wherein, the protection baffle is split blade type baffle, including fixed baffle and butterfly.
Fixed baffle includes left fixed baffle and right fixed baffle.
Butterfly includes anticlockwise baffle and right rotation baffle.
Rotary shaft includes left-handed shaft and dextral shaft.
Oscillating cylinder is fixed on the top and bottom outside vacuum chamber cavity, each oscillating cylinder respectively with protrude into the cavity
Rotation axis connection, oscillating cylinder controls left-handed shaft, another oscillating cylinder controls dextral shaft, in each swing gas
Rotary shaft is equipped with a magnetic fluid between cylinder and the cavity, and oscillating cylinder connects magnetic fluid, magnetic fluid and the cavity method
Orchid, which is tightly connected, to be protruded into rotation axis connection in the cavity, and by pneumatic lifting for rotary power, magnetic fluid plays oscillating cylinder
It is connected the effect of outer rotary shaft in vacuum chamber；Protection baffle is located at the inside cavity, left fixed baffle therein and right fixation
Baffle is separately mounted at left and right sides of the target on the cavity backboard, passes through the fixed peace of swing-around trajectory pin on the fixed baffle
Equipped with the parallel swing-around trajectory of multiple tracks, fixed respectively with left-handed shaft and dextral shaft at the top of anticlockwise baffle and right rotation baffle
Connection, rotary shaft drive butterfly to be rotated by the center of circle of oscillating cylinder, and anticlockwise baffle and right rotation baffle side are logical
It crosses swing-around trajectory to be flexibly connected with left fixed baffle and right fixed baffle respectively, when full extension shelters from target completely, shrinks
When full retraction on the outside of fixed baffle, and it is Chong Die with fixed baffle.
A kind of application of extensible shrinkage type vacuum coating equipment cathode protection device of the present invention is as follows:
Described device is suitable for using planar rectangular magnetic control sputtering cathode, planar rectangular arc cathode and rectangular anode layer
The vacuum coating equipment of ion source, wherein the cathode is mounted on vacuum chamber cavity wall, target is located at cathode plane, the chamber
Intracorporeal site is set；Two rotary shafts are separately mounted to the two sides of target on cathode in described device, are located at the inside cavity,
It is stretched when rotation from the two sides of target, the target until blocking cathode surface completely, and the device is only connected on the cavity
The interface top and bottom for installing cathode, are not in contact with cathode and target；
When needing to block cathode target position, left and right rotary shaft is driven by oscillating cylinder while being rotated, left and right fixed gear
Plate is motionless, and left and right butterfly rotates simultaneously, successively opens from two lateral edge swing-around trajectory of fixed baffle, until anticlockwise baffle
It is fully extended with right rotation baffle, until sheltering from the target surface of target, realizes the protection to cathode targets；It works in cathode target
When, left and right butterfly is successively closed along swing-around trajectory, until being contracted in the fixed baffle two positioned at cathode target two sides completely
Side；It is small that the protection baffle of described device occupies cavity space, and does not influence work while neighbouring cathode, avoids adjacent target
The interference problem of baffle when position works at the same time.
Beneficial effect
The present invention provides a kind of extensible shrinkage type vacuum coating equipment cathode protection device, the extensible receipts of described device
Contracting, on the one hand solves traditional open-close type baffle and occupies larger space, neighbouring cathode baffle, which opens simultaneously to interfere, to be caused
It cannot multiple cathodes the problem of working at the same time, having seriously affected filming equipment production efficiency；On the other hand can adequately protect target again
Face reduces target surface caused by the work of other cathodes and pollutes；Be it is a kind of can make full use of vacuum coating equipment space resources, mention
The device of high efficiency.
Detailed description of the invention
Fig. 1 is a kind of stereochemical structure of extensible shrinkage type vacuum coating equipment cathode protection device described in embodiment 1
Schematic diagram.
Fig. 2 is that a kind of swivel plate of extensible shrinkage type vacuum coating equipment cathode protection device described in embodiment 1 closes
Inside cavity top view when conjunction.
Fig. 3 is a kind of butterfly of extensible shrinkage type vacuum coating equipment cathodic protection baffle described in embodiment 1
Inside cavity top view when expansion.
Wherein, 1-oscillating cylinder, 2-magnetic fluids, 3-left-handed shafts, 4-dextral shafts, 5-left fixed baffles, 6-
Right fixed baffle, 7-anticlockwise baffles, 8-right rotation baffles, 9-swing-around trajectories, 10-targets, 11-cavitys, 12-rotations
Track pin
Specific embodiment
The present invention is described in detail in the following with reference to the drawings and specific embodiments, but not as the restriction to the invention patent.
Embodiment 1
A kind of extensible shrinkage type vacuum coating equipment cathode protection device, as shown in Figures 1 to 3, described device include pendulum
It takes offence cylinder 1, magnetic fluid 2, protection baffle, rotary shaft and swing-around trajectory 9.
Wherein, the protection baffle is split blade type baffle, including fixed baffle and butterfly.
Fixed baffle includes left fixed baffle 5 and right fixed baffle 6.
Butterfly includes anticlockwise baffle 7 and right rotation baffle 8.
Rotary shaft includes left-handed shaft 3 and dextral shaft 4.
Oscillating cylinder 1 is fixed on the top and bottom outside vacuum chamber cavity 11, each oscillating cylinder 1 respectively with protrude into it is described
The rotation axis connection of cavity 11, an oscillating cylinder 1 control left-handed shaft 3, another oscillating cylinder 1 controls dextral shaft 4,
Rotary shaft is equipped with a magnetic fluid 2 between each oscillating cylinder 1 and the cavity 11, and oscillating cylinder 1 connects magnetic fluid 2, magnetic
Fluid 2 is connect with 11 flange seal of cavity to be protruded into the cavity 11 and rotates axis connection, and oscillating cylinder 1 passes through pneumatic lifting
For rotary power, magnetic fluid 2 plays the role of being connected outer rotary shaft in vacuum chamber；Protection baffle is located inside the cavity 11,
Left fixed baffle 5 and right fixed baffle 6 therein are separately mounted to 10 left and right sides of target on 11 backboard of cavity, described
The parallel swing-around trajectory 9 of multiple tracks, anticlockwise baffle 7 and right rotation gear are fixedly installed with by swing-around trajectory pin 12 on fixed baffle
8 top of plate is fixedly connected with left-handed shaft 3 and dextral shaft 4 respectively, and rotary shaft drive butterfly is the center of circle with oscillating cylinder 1
It is rotated, anticlockwise baffle 7 and 8 side of right rotation baffle are kept off with left fixed baffle 5 and right fixation respectively by swing-around trajectory 9
Plate 6 is flexibly connected, and when full extension shelters from target 10 completely, when contraction on the outside of full retraction to fixed baffle, and with fixation
Baffle overlapping.
A kind of application of extensible shrinkage type vacuum coating equipment cathode protection device described in the present embodiment is as follows:
Described device is suitable for using planar rectangular magnetic control sputtering cathode, planar rectangular arc cathode and rectangular anode layer
The vacuum coating equipment of ion source, wherein the cathode is mounted on 11 side wall of vacuum chamber cavity, target 10 is located at cathode plane, institute
State 11 interior location of cavity；Two rotary shafts are separately mounted to the two sides of target 10 on cathode in described device, are located at the chamber
It inside body 11, is stretched when rotated from the two sides of target 10, the target 10 until blocking cathode surface completely, and described device is only
The interface top and bottom for installing cathode on the cavity 11 are connected to, are not in contact with cathode and target 10；
When needing to block cathode target position, left and right rotary shaft 4 is driven by oscillating cylinder 1 while being rotated, left and right fixation
Baffle 6 is motionless, and left and right butterfly 8 rotates simultaneously, successively opens from two lateral edge swing-around trajectory 9 of fixed baffle, until anticlockwise
Baffle 7 and right rotation baffle 8 are fully extended, until sheltering from the target surface of target 10, realize the protection to cathode targets 10；?
When cathode target works, left and right butterfly 8 is successively closed along swing-around trajectory 9, until being contracted in completely positioned at cathode target two sides
Fixed baffle two sides；It is small that the protection baffle of described device occupies 11 space of cavity, and does not influence work while neighbouring cathode,
Avoid the interference problem of baffle when adjacent target position works at the same time.
Claims (1)
1. a kind of extensible shrinkage type vacuum coating equipment cathode protection device, it is characterised in that: described device includes swinging gas
Cylinder (1), magnetic fluid (2), protection baffle, rotary shaft and swing-around trajectory (9)；
The protection baffle is split blade type baffle, including fixed baffle and butterfly；
Fixed baffle includes left fixed baffle (5) and right fixed baffle (6)；
Butterfly includes anticlockwise baffle (7) and right rotation baffle (8)；
Rotary shaft includes left-handed shaft (3) and dextral shaft (4)；
Oscillating cylinder (1) is fixed on the top and bottom of vacuum chamber cavity (11) outside, each oscillating cylinder (1) respectively with protrude into institute
The rotation axis connection of cavity (11) is stated, an oscillating cylinder (1) controls left-handed shaft (3), and the control of another oscillating cylinder (1) is right
Rotary shaft (4) is equipped with a magnetic fluid (2) in the rotary shaft between each oscillating cylinder (1) and the cavity (11), swings
Cylinder (1) connects magnetic fluid (2), magnetic fluid (2) connect with the cavity (11) flange seal protrude into the cavity (11) it is interior and
Rotate axis connection；Protection baffle is located at the cavity (11) inside, and left fixed baffle (5) and right fixed baffle (6) are installed respectively
At left and right sides of target (10) on the cavity (11) backboard, pass through swing-around trajectory pin (12) fixed peace on the fixed baffle
Equipped with the parallel swing-around trajectory of multiple tracks (9), at the top of anticlockwise baffle (7) and right rotation baffle (8) respectively with left-handed shaft (3) and
Dextral shaft (4) is fixedly connected, and rotary shaft drives butterfly to be rotated with oscillating cylinder (1) for the center of circle, anticlockwise baffle
(7) connected respectively with left fixed baffle (5) and right fixed baffle (6) activity with right rotation baffle (8) side by swing-around trajectory (9)
Connect, when full extension, shelters from target (10) completely, when contraction on the outside of full retraction to fixed baffle, and with fixed baffle weight
It is folded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811565357.9A CN109536900B (en) | 2018-12-20 | 2018-12-20 | Cathode protection device for extensible and retractable vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811565357.9A CN109536900B (en) | 2018-12-20 | 2018-12-20 | Cathode protection device for extensible and retractable vacuum coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109536900A true CN109536900A (en) | 2019-03-29 |
| CN109536900B CN109536900B (en) | 2021-02-05 |
Family
ID=65856086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811565357.9A Active CN109536900B (en) | 2018-12-20 | 2018-12-20 | Cathode protection device for extensible and retractable vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109536900B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112144025A (en) * | 2019-06-26 | 2020-12-29 | 东泰高科装备科技有限公司 | Shielding device |
| CN112899626A (en) * | 2019-11-19 | 2021-06-04 | 杭州朗旭新材料科技有限公司 | Planar magnetron sputtering cathode target surface protection shielding device |
| CN113046688A (en) * | 2020-12-02 | 2021-06-29 | 湖北平安电工股份有限公司 | Surface treatment method for mica part hot-molding die |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11293456A (en) * | 1998-04-07 | 1999-10-26 | Murata Mfg Co Ltd | Sputtering device |
| CN103635604A (en) * | 2011-06-30 | 2014-03-12 | 佳能安内华股份有限公司 | Film-forming device |
| CN103821386A (en) * | 2014-01-23 | 2014-05-28 | 平湖市欧文洁具有限公司 | Shower room with storage rack |
| CN204138756U (en) * | 2014-08-14 | 2015-02-04 | 宜昌后皇真空科技有限公司 | A kind of ion source baffle plate |
| CN205286185U (en) * | 2016-01-16 | 2016-06-08 | 中山市莎丽卫浴设备有限公司 | Three -dimensional shower room that sprays |
| CN205314623U (en) * | 2016-01-16 | 2016-06-15 | 中山市莎丽卫浴设备有限公司 | Can smoke at three -dimensional shower room that sprays that evaporates |
| CN105695944A (en) * | 2016-04-27 | 2016-06-22 | 芜湖真空科技有限公司 | Sputter coating mechanism |
| CN106148905A (en) * | 2016-08-25 | 2016-11-23 | 北京丹鹏表面技术研究中心 | A kind of intelligent source baffle system and the method preparing hard coat thereof |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN206359607U (en) * | 2016-12-06 | 2017-07-28 | 常州夏博士节能新材料有限公司 | Multifunctional magnetic control sputtering film plating equipment |
| CN107723672A (en) * | 2017-11-10 | 2018-02-23 | 苏州求是真空电子有限公司 | A kind of columnar target butterfly with thickness debugging functions |
| CN107805786A (en) * | 2017-12-07 | 2018-03-16 | 北京泰科诺科技有限公司 | Multi sphere ion vacuum coating machine |
| CN108165947A (en) * | 2018-03-19 | 2018-06-15 | 哈尔滨工业大学 | For repairing the self-priming magnetic control sputtering system of planar depositions film layer and sputtering method |
| CN108294671A (en) * | 2017-12-29 | 2018-07-20 | 浙江金柏利卫浴有限公司 | An a kind of arc shower house of frameing shift entirely |
| CN208038538U (en) * | 2018-01-23 | 2018-11-02 | 株式会社Selcos | A kind of sputter equipment |
-
2018
- 2018-12-20 CN CN201811565357.9A patent/CN109536900B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11293456A (en) * | 1998-04-07 | 1999-10-26 | Murata Mfg Co Ltd | Sputtering device |
| CN103635604A (en) * | 2011-06-30 | 2014-03-12 | 佳能安内华股份有限公司 | Film-forming device |
| CN103821386A (en) * | 2014-01-23 | 2014-05-28 | 平湖市欧文洁具有限公司 | Shower room with storage rack |
| CN204138756U (en) * | 2014-08-14 | 2015-02-04 | 宜昌后皇真空科技有限公司 | A kind of ion source baffle plate |
| CN205286185U (en) * | 2016-01-16 | 2016-06-08 | 中山市莎丽卫浴设备有限公司 | Three -dimensional shower room that sprays |
| CN205314623U (en) * | 2016-01-16 | 2016-06-15 | 中山市莎丽卫浴设备有限公司 | Can smoke at three -dimensional shower room that sprays that evaporates |
| CN105695944A (en) * | 2016-04-27 | 2016-06-22 | 芜湖真空科技有限公司 | Sputter coating mechanism |
| CN106148905A (en) * | 2016-08-25 | 2016-11-23 | 北京丹鹏表面技术研究中心 | A kind of intelligent source baffle system and the method preparing hard coat thereof |
| CN106435498A (en) * | 2016-09-26 | 2017-02-22 | 中国电子科技集团公司第四十八研究所 | Magnetron sputtering target baffle plate mechanism |
| CN206359607U (en) * | 2016-12-06 | 2017-07-28 | 常州夏博士节能新材料有限公司 | Multifunctional magnetic control sputtering film plating equipment |
| CN107723672A (en) * | 2017-11-10 | 2018-02-23 | 苏州求是真空电子有限公司 | A kind of columnar target butterfly with thickness debugging functions |
| CN107805786A (en) * | 2017-12-07 | 2018-03-16 | 北京泰科诺科技有限公司 | Multi sphere ion vacuum coating machine |
| CN108294671A (en) * | 2017-12-29 | 2018-07-20 | 浙江金柏利卫浴有限公司 | An a kind of arc shower house of frameing shift entirely |
| CN208038538U (en) * | 2018-01-23 | 2018-11-02 | 株式会社Selcos | A kind of sputter equipment |
| CN108165947A (en) * | 2018-03-19 | 2018-06-15 | 哈尔滨工业大学 | For repairing the self-priming magnetic control sputtering system of planar depositions film layer and sputtering method |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112144025A (en) * | 2019-06-26 | 2020-12-29 | 东泰高科装备科技有限公司 | Shielding device |
| CN112899626A (en) * | 2019-11-19 | 2021-06-04 | 杭州朗旭新材料科技有限公司 | Planar magnetron sputtering cathode target surface protection shielding device |
| CN113046688A (en) * | 2020-12-02 | 2021-06-29 | 湖北平安电工股份有限公司 | Surface treatment method for mica part hot-molding die |
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| Publication number | Publication date |
|---|---|
| CN109536900B (en) | 2021-02-05 |
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