CN109531308A - A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece - Google Patents
A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece Download PDFInfo
- Publication number
- CN109531308A CN109531308A CN201811393358.XA CN201811393358A CN109531308A CN 109531308 A CN109531308 A CN 109531308A CN 201811393358 A CN201811393358 A CN 201811393358A CN 109531308 A CN109531308 A CN 109531308A
- Authority
- CN
- China
- Prior art keywords
- gallium antimonide
- motor
- antimonide monocrystalline
- monocrystalline piece
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
Abstract
A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece.The present invention includes pedestal, and the upper end is provided with support frame, and the upper end of support frame is provided with top beam, and the bottom of top beam is provided with first straight line guide rail, and saddle is equipped on first straight line guide rail, and saddle left end is provided with gallium antimonide monocrystalline piece surface grinding machine structure；Saddle right end is connect with lateral propulsive mechanism, and realization moves left and right；It is provided with second straight line guide rail on the left of support frame, lifting seat is installed on second straight line guide rail, lifting seat connect with elevating mechanism and achives up and down, and the second motor, the output axis connection vacuum chuck of the second motor are provided on lifting seat；The left upper end of pedestal is provided with pedestal, and the upper end of pedestal is provided with position adjustable plate, and position adjustable plate upper end is provided with side workpiece polishing mechanism.The present invention can quickly clamp the gallium antimonide monocrystalline piece of 2-5mm thickness and quickly be polished gallium antimonide monocrystalline piece upper surface and side, and grinding effect is good, high-efficient, solve the defects such as traditional-handwork polishing is uneven, and grinding efficiency is low.
Description
Technical field
The present invention relates to a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece.
Background technique
Gallium antimonide is a kind of group Ⅲ-Ⅴ compound semiconductor material, can not show a candle to other semiconductor materials (such as to its research
GaAs, InP etc.) like that deeply.But this material was more and more intriguing in recent years, this is mainly Fibre Optical Communication Technology
Development, caused by the potential demand to new device.In optical communications in order to reduce the loss in transmission, always adopt as far as possible
With the light of longer wavelength, the light of 0.8 mum wavelength is used earliest, uses the light of 1.55 mum wavelengths now.Next-generation optical fiber according to estimates
Communication will be using the light of more long wavelength.Research shows that certain non-silicon material optical fiber transmission damage when wavelength is the range of (2~4) μm
It consumes smaller.In all III-V race's materials, gallium antimonide causes more attentions as substrate material because it can with it is each
Ternary, the lattice constant of quaternary solid solution alloy of kind of III-V race's material match, the ranges of these material spectrums (0.8~
μm 4.0) between, conform exactly to require.In addition, more long wave can also be manufactured using the inter-band absorption of gallium antimonide sill superlattices
The detector of long (8~14) μ m.
Gallium antimonide monocrystalline piece surface flatness is increasingly particular about in existing instrument, and gallium antimonide monocrystalline piece surface is beaten
Mill mostly uses greatly manual grinding, and manual grinding has polishing unevenly, the defects such as grinding efficiency is low.
Summary of the invention
The purpose of the present invention is in view of the above problems, providing a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece, structure is simple,
High degree of automation can quickly clamp the gallium antimonide monocrystalline piece of 2-5mm thickness and to gallium antimonide monocrystalline piece upper and lower surface
And side is quickly polished, and grinding effect is good, and it is high-efficient, solve traditional-handwork polishing unevenness, grinding efficiency is low equal scarce
It falls into.
In order to achieve the above object, the technical solution adopted by the present invention is that: it includes pedestal, and the upper end is provided with support frame,
The upper end of support frame is provided with top beam, and the bottom of top beam is provided with first straight line guide rail, is equipped with saddle on first straight line guide rail,
The left end of saddle is provided with gallium antimonide monocrystalline piece surface grinding machine structure；The right end of saddle is connect with lateral propulsive mechanism, is realized left
It moves right；Gallium antimonide monocrystalline piece surface grinding machine structure includes first motor, the first rotating shaft being connected with first motor output shaft, sets
Set the first polishing pad in first rotating shaft end；It is provided with second straight line guide rail on the left of support frame, pacifies on second straight line guide rail
Equipped with lifting seat, lifting seat connect with elevating mechanism and achives up and down, and the second motor is provided on lifting seat, the second motor
Axis connection vacuum chuck is exported, gallium antimonide monocrystalline piece is mounted on vacuum chuck, and the first polishing pad is arranged in gallium antimonide monocrystalline piece
Surface；The left upper end of pedestal is provided with pedestal, and the upper end of pedestal is provided with position adjustable plate, and position adjustable plate passes through bolt
It is fixed on pedestal, the upper end of position adjustable plate is provided with side workpiece polishing mechanism；Side workpiece polishing mechanism includes the 5th motor, with the
The second connected shaft of five motor output shafts, the second polishing pad that the second shaft end is arranged in, the second polishing pad are arranged in antimony
Change the side of algan single crystal piece.
Further, elevating mechanism includes ball screw and third motor, the output shaft company of ball screw and third motor
It connects, the nut of ball screw is fixedly connected with lifting seat.
Further, lateral propulsive mechanism includes the first rack gear that the right end of saddle is arranged in, and the first rack gear passes through support
It is intermeshed after through-hole on frame with the gear on the 4th motor output shaft, the 4th motor is mounted on the fixed frame on the right side of top beam
On.
Further, protective cover is provided on the outside of gallium antimonide monocrystalline piece surface grinding machine structure.
Beneficial effects of the present invention: the present invention provides a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece, and structure is simple, from
Dynamicization degree is high, the gallium antimonide monocrystalline piece of 2-5mm thickness can quickly be clamped and to gallium antimonide monocrystalline piece upper and lower surface with
And side is quickly polished, and grinding effect is good, and it is high-efficient, solve the defects such as traditional-handwork polishing is uneven, and grinding efficiency is low.
The present invention can polish to gallium antimonide monocrystalline piece upper surface, after the completion of the polishing of upper surface, by gallium antimonide list
Chip is removed on vacuum chuck, and bottom surface is reinstalled on vacuum chuck upward, is polished again, to realize antimony
The polishing of algan single crystal piece upper and lower surface.
Third motor of the present invention rotation drives ball screw rotation, makes lifting seat oscilaltion, in lifting seat uphill process
While, first motor drives the first polishing pad high speed rotation, and gallium antimonide monocrystalline piece realizes gallium antimonide monocrystalline in uphill process
Piece upper surface is quickly polished, and production efficiency is improved.
Transverse direction propulsive mechanism of the present invention can drive gallium antimonide monocrystalline piece surface grinding machine structure to be moved left and right, thus real
Existing gallium antimonide monocrystalline piece upper surface is polished comprehensively, improves grinding effect.
The present invention passes through the left-right position of adjusting position adjustable plate, so as to realize that the polishing of gallium antimonide monocrystalline piece side is cut
The adjusting for the amount of cutting.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Label character described in figure indicates are as follows: the 1, second motor；2, vacuum chuck；3, gallium antimonide monocrystalline piece；4, first dozen
Mill；5, first rotating shaft；6, protective cover；7, first motor；8, first straight line guide rail；9, top beam；10, saddle；11, the first tooth
Item；12, through-hole；13, the 4th motor；14, fixed frame；15, ball screw；16, lifting seat；17, support frame；18, second straight line
Guide rail；19, third motor；20, gear；21, pedestal；22, pedestal；23, position adjustable plate；29, the second polishing pad；30, second
Shaft；31, the 5th motor.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing to the present invention into
Row detailed description, the description of this part be only it is exemplary and explanatory, should not have any limitation to protection scope of the present invention
Effect.
As shown in Figure 1, specific structure of the invention are as follows: it includes pedestal 21, and the upper end is provided with support frame 17, support frame
17 upper end is provided with top beam 9, and the bottom of top beam 9 is provided with first straight line guide rail 8, is equipped with saddle on first straight line guide rail 8
10, the left end of saddle 10 is provided with gallium antimonide monocrystalline piece surface grinding machine structure；The right end of saddle 10 is connect with lateral propulsive mechanism,
Realization moves left and right；Gallium antimonide monocrystalline piece surface grinding machine structure include first motor 7, be connected with 7 output shaft of first motor
One shaft 5, the first polishing pad 4 that 5 end of first rotating shaft is set；The left side of support frame 17 is provided with second straight line guide rail 18,
Lifting seat 16 is installed, lifting seat 16 is connect with elevating mechanism to be achived up and down, on lifting seat 16 on second straight line guide rail 18
It is provided with the second motor 1, the output axis connection vacuum chuck 2 of the second motor 1, gallium antimonide monocrystalline piece 3 is mounted on vacuum chuck 2
On, the surface of gallium antimonide monocrystalline piece 3 is arranged in the first polishing pad 4；The left upper end of pedestal 21 is provided with pedestal 22, pedestal 22
Upper end is provided with position adjustable plate 23, and position adjustable plate 23 is bolted on pedestal 22, the upper end of position adjustable plate 23
It is provided with side workpiece polishing mechanism；Side workpiece polishing mechanism include the 5th motor 31, be connected with 31 output shaft of the 5th motor second turn
The side of gallium antimonide monocrystalline piece 3 is arranged in axis 30, the second polishing pad 29 that 30 end of the second shaft is arranged in, the second polishing pad 29
Face.
Preferably, elevating mechanism includes ball screw 15 and third motor 19, and ball screw 15 is defeated with third motor 19
The nut of axis connection out, ball screw 15 is fixedly connected with lifting seat 16.
Preferably, lateral propulsive mechanism includes the first rack gear 11 that the right end of saddle 10 is arranged in, and the first rack gear 11 passes through
It is intermeshed after through-hole 12 on support frame 17 with the gear 20 on 13 output shaft of the 4th motor, the 4th motor 13 is mounted on top beam
On the fixed frame 14 on 9 right sides.
Preferably, protective cover 6 is provided on the outside of gallium antimonide monocrystalline piece surface grinding machine structure.
Compared with prior art, the present invention the advantage with following aspect:
Structure is simple, high degree of automation, can quickly be clamped and the gallium antimonide monocrystalline piece of 2-5mm thickness to antimony
Algan single crystal piece upper and lower surface and side are quickly polished, and grinding effect is good, high-efficient, solve traditional-handwork polishing not
, the defects such as grinding efficiency is low.
The present invention can polish to gallium antimonide monocrystalline piece upper surface, after the completion of the polishing of upper surface, by gallium antimonide list
Chip is removed on vacuum chuck, and bottom surface is reinstalled on vacuum chuck upward, is polished again, to realize antimony
The polishing of algan single crystal piece upper and lower surface.
Third motor of the present invention rotation drives ball screw rotation, makes lifting seat oscilaltion, in lifting seat uphill process
While, first motor drives the first polishing pad high speed rotation, and gallium antimonide monocrystalline piece realizes gallium antimonide monocrystalline in uphill process
Piece upper surface is quickly polished, and production efficiency is improved.
Transverse direction propulsive mechanism of the present invention can drive gallium antimonide monocrystalline piece surface grinding machine structure to be moved left and right, thus real
Existing gallium antimonide monocrystalline piece upper surface is polished comprehensively, improves grinding effect.
The present invention passes through the left-right position of adjusting position adjustable plate, so as to realize that the polishing of gallium antimonide monocrystalline piece side is cut
The adjusting for the amount of cutting.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or equipment for including a series of elements not only includes those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or equipment institute it is intrinsic
Element.
Used herein a specific example illustrates the principle and implementation of the invention, the explanation of above example
It is merely used to help understand method and its core concept of the invention.The above is only a preferred embodiment of the present invention, it answers
When pointing out due to the finiteness of literal expression, and objectively there is unlimited specific structure, for the common skill of the art
For art personnel, without departing from the principle of the present invention, several improvement, retouching or variation can also be made, can also incited somebody to action
Above-mentioned technical characteristic is combined in the right way；These improve retouching, variation or combination, or the not improved structure by invention
Think and technical solution directly applies to other occasions, is regarded as protection scope of the present invention.
Claims (4)
1. a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece, which is characterized in that it includes pedestal (21), and the upper end is provided with support
Frame (17), the upper end of support frame (17) are provided with top beam (9), and the bottom of top beam (9) is provided with first straight line guide rail (8), and first
It is equipped in linear guide (8) saddle (10), the left end of saddle (10) is provided with gallium antimonide monocrystalline piece surface grinding machine structure；Saddle
(10) right end is connect with lateral propulsive mechanism, and realization moves left and right；Gallium antimonide monocrystalline piece surface grinding machine structure includes the first electricity
Machine (7), the first rotating shaft (5) being connected with first motor (7) output shaft, setting first rotating shaft (5) end the first polishing pad
(4)；It is provided on the left of support frame (17) second straight line guide rail (18), second straight line guide rail is equipped with lifting seat on (18)
(16), lifting seat (16) is connect with elevating mechanism achives up and down, and is provided on lifting seat (16) the second motor (1), second
The output axis connection vacuum chuck (2) of motor (1), gallium antimonide monocrystalline piece (3) are mounted on vacuum chuck (2), the first polishing pad
(4) it is arranged in the surface of gallium antimonide monocrystalline piece (3)；The left upper end of pedestal (21) is provided with pedestal (22), pedestal (22) it is upper
End is provided with position adjustable plate (23), and position adjustable plate (23) is bolted on pedestal (22), position adjustable plate (23)
Upper end be provided with side workpiece polishing mechanism；Side workpiece polishing mechanism include the 5th motor (31), with the 5th motor (31) output shaft phase
In second polishing pad (29) of the second shaft (30) end, the second polishing pad (29), which is arranged, to exist for the second shaft (30) even, setting
The side of gallium antimonide monocrystalline piece (3).
2. a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece according to claim 1, which is characterized in that elevating mechanism includes
Ball screw (15) and third motor (19), the output axis connection of ball screw (15) and third motor (19), ball screw
(15) nut is fixedly connected with lifting seat (16).
3. a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece according to claim 1, which is characterized in that lateral propulsive mechanism
Including the first rack gear (11) in the right end of saddle (10) is arranged, the first rack gear (11) passes through the through-hole (12) on support frame (17)
It is intermeshed afterwards with the gear (20) on the 4th motor (13) output shaft, the 4th motor (13) is mounted on consolidating on the right side of top beam (9)
Determine on frame (14).
4. a kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece according to claim 1, which is characterized in that gallium antimonide monocrystalline piece
Protective cover (6) are provided on the outside of surface grinding machine structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811393358.XA CN109531308A (en) | 2018-11-21 | 2018-11-21 | A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811393358.XA CN109531308A (en) | 2018-11-21 | 2018-11-21 | A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109531308A true CN109531308A (en) | 2019-03-29 |
Family
ID=65848974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811393358.XA Pending CN109531308A (en) | 2018-11-21 | 2018-11-21 | A kind of comprehensive grinding apparatus of gallium antimonide monocrystalline piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109531308A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111805414A (en) * | 2020-07-27 | 2020-10-23 | 群福电子科技(上海)有限公司 | Grinding equipment |
| CN112692720A (en) * | 2020-12-09 | 2021-04-23 | 苏州斯尔特微电子有限公司 | Motion control device of wafer grinding machine |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016013615A (en) * | 2010-03-25 | 2016-01-28 | 株式会社東京精密 | Device and method for finish grinding |
| CN206605324U (en) * | 2017-03-23 | 2017-11-03 | 宜昌南玻显示器件有限公司 | AG glass polishing devices |
| CN207087543U (en) * | 2017-05-15 | 2018-03-13 | 江山市恒宏门业有限公司 | A kind of timber manufacture sanding apparatus |
| CN107838771A (en) * | 2017-12-01 | 2018-03-27 | 成都益睿信科技有限公司 | A kind of optical glass edging device applied widely |
| CN108406534A (en) * | 2018-02-01 | 2018-08-17 | 成都纽凯尔斯家具有限公司 | A kind of comprehensive furniture board burnishing device |
| CN207788537U (en) * | 2017-12-27 | 2018-08-31 | 全椒县同鑫模具配套有限公司 | A kind of non-ferrous metals processing grinding device |
| CN108723927A (en) * | 2018-06-21 | 2018-11-02 | 福建省三林生态科技有限公司 | A kind of glass processing edging grooving apparatus |
-
2018
- 2018-11-21 CN CN201811393358.XA patent/CN109531308A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016013615A (en) * | 2010-03-25 | 2016-01-28 | 株式会社東京精密 | Device and method for finish grinding |
| CN206605324U (en) * | 2017-03-23 | 2017-11-03 | 宜昌南玻显示器件有限公司 | AG glass polishing devices |
| CN207087543U (en) * | 2017-05-15 | 2018-03-13 | 江山市恒宏门业有限公司 | A kind of timber manufacture sanding apparatus |
| CN107838771A (en) * | 2017-12-01 | 2018-03-27 | 成都益睿信科技有限公司 | A kind of optical glass edging device applied widely |
| CN207788537U (en) * | 2017-12-27 | 2018-08-31 | 全椒县同鑫模具配套有限公司 | A kind of non-ferrous metals processing grinding device |
| CN108406534A (en) * | 2018-02-01 | 2018-08-17 | 成都纽凯尔斯家具有限公司 | A kind of comprehensive furniture board burnishing device |
| CN108723927A (en) * | 2018-06-21 | 2018-11-02 | 福建省三林生态科技有限公司 | A kind of glass processing edging grooving apparatus |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111805414A (en) * | 2020-07-27 | 2020-10-23 | 群福电子科技(上海)有限公司 | Grinding equipment |
| CN112692720A (en) * | 2020-12-09 | 2021-04-23 | 苏州斯尔特微电子有限公司 | Motion control device of wafer grinding machine |
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Application publication date: 20190329 |
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