CN109520621A - Three-dimensional space light-source system and relevant optical measuring device - Google Patents
Three-dimensional space light-source system and relevant optical measuring device Download PDFInfo
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- CN109520621A CN109520621A CN201710847966.2A CN201710847966A CN109520621A CN 109520621 A CN109520621 A CN 109520621A CN 201710847966 A CN201710847966 A CN 201710847966A CN 109520621 A CN109520621 A CN 109520621A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 175
- 230000002093 peripheral effect Effects 0.000 claims abstract description 72
- 238000005259 measurement Methods 0.000 claims abstract description 29
- 230000007935 neutral effect Effects 0.000 claims description 12
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- 230000004888 barrier function Effects 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 4
- 238000011897 real-time detection Methods 0.000 claims description 2
- 229910052724 xenon Inorganic materials 0.000 description 16
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 16
- 238000010586 diagram Methods 0.000 description 12
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- 238000010168 coupling process Methods 0.000 description 4
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- 238000012423 maintenance Methods 0.000 description 4
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000572 ellipsometry Methods 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/447—Polarisation spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
Abstract
Various embodiments of the present invention are related to a kind of three-dimensional space light-source system and its corresponding optical measuring device, and wherein three-dimensional space light-source system includes: light source；And multiple optical paths independent of each other, it is configured to be independently coupled to the light source；Wherein, the multiple optical path further comprises intermediate optical path and multiple peripheral optical paths, and the multiple periphery optical path is configured around the intermediate optical path and is arranged and can be exported as secondary source.Multichannel light source requirements needed for three-dimensional space light-source system of the invention only needs a light source that can meet ellipsometric measurement equipment as a result, and structure is simple, adjustment is convenient, easy to maintain.
Description
Technical field
Embodiment of the present invention relate to optical field, relate more specifically to a kind of three-dimensional space light-source system and its phase
The optical measuring device of pass.
Background technique
Ellipsometric measurement equipment is a kind of powerful multifunctional optical measuring device, can be used for measuring body surface or table
The thickness of film on face, optical constant (reflectivity r, refractive index n, extinction coefficient k), polarization characteristic, surface micro-structure, particle,
Defect and roughness etc..Because its have the characteristics that highly sensitive sense and have it is lossless, non-contact so that ellipsometric devices are half
The fields such as conductor chip manufacture, optical coating and material analysis are all widely used.
Ellipsometric measurement equipment is typically necessary at least three Lu Guangyuan, is respectively: for measuring sample surfaces parameter
The light source (hereinafter referred to as SE light source) of spectroscopic ellipsometry (Spectral Ellipsometry, SE) system；For spectral reflectance
The light source (hereinafter referred to as SR light source) of formula (Spectral Reflectometry, SR) system；(Auto is focused automatically for sample
Focus, AF) system light source (hereinafter referred to as AF light source)；And for sample image identification (Pattern Recognition,
PR) the light source (hereinafter referred to as PR light source) etc. of system.Currently, generally having two to three independent light sources to meet elliptical polarization and survey
Four Lu Guangyuan needed for measuring equipment.This not only increases the cost of equipment, and makes light-source structure complicated, inconvenience maintenance, especially
It is that reflecting mirror aging frequency used is high, needs to be replaced frequently.
Therefore, a kind of novel three-dimensional space light source system for ellipsometric measurement equipment is proposed based on problem above
System.
Summary of the invention
In view of above, one of the objects of the present invention is to provide a kind of novel three-dimensional space light-source systems and its relevant
Optical measuring device, wherein the three-dimensional space light-source system can at least overcome or alleviate the technology in the presence of the prior art to ask
Topic.
According to the first aspect of the invention, a kind of three-dimensional space light-source system is provided comprising: light source；And each other
Independent multiple optical paths are configured to be independently coupled to the light source；Wherein, during the multiple optical path further comprises
Between optical path and multiple peripheral optical paths, the multiple periphery optical path is configured around the intermediate optical path and is arranged and conduct
Secondary source is exported.
Particularly, three-dimensional space light-source system according to the present invention can be adapted for ellipsometric measurement equipment.For example,
It may include an intermediate optical path and four peripheral optical paths, one of intermediate light in the light-source system of ellipsometric measurement equipment
Road can be used as the intensity monitor optical path of light source itself, the situation of change of real time reaction light source intensity, correctly to monitor light source
Real-time status；Four peripheral optical paths couple specific optical subsystem and can be used as SE light source, the SR of ellipsometric measurement equipment
Light source, AF light source and PR light source.Alternatively, SE light source, AF light source and PR light can be used separately as there are three peripheral optical path
Source.Or SE light source, AF light source etc. can be used separately as there are two peripheral optical path according to the actual situation.It is surveyed in elliptical polarization
In the case that amount equipment only needs to use two-way light source, above-mentioned three-dimensional space light-source system can for example be set to two measurements simultaneously
It is standby to use.
According to some embodiments of the present invention, intermediate optical path, which can be configured as, receives light sent from the light source, and
The light intensity of light source described in real-time detection changes, to judge the real-time status of light source.
According to some embodiments of the present invention, intermediate optical path may include the colour wheel and light intensity detector being sequentially arranged；Its
Middle colour wheel can be configured as including neutral-density filter and long logical or short pass filter.For example, can be according to light intensity
Size and detector dynamic range select the neutral-density filter of ND2, ND4 or ND8 etc..
Preferably, the light intensity detector can use 4 quadrant detector
According to some embodiments of the present invention, at least one peripheral optical path of the multiple peripheral optical path includes the first periphery
Optical path, the described first peripheral optical path includes the first colour wheel being sequentially arranged, spherical reflector, plane mirror and the second colour wheel.
According to some embodiments of the present invention, the peripheral optical path of at least one of multiple peripheral optical paths includes the second peripheral light
Road, the described second peripheral optical path includes the first colour wheel being sequentially arranged, the first parabolic mirror, the second colour wheel, third colour wheel
With the second parabolic mirror.
According to some embodiments of the present invention, at least one peripheral optical path of multiple peripheral optical paths includes third periphery light
Road, third periphery optical path include the first colour wheel, ellipsoidal mirror and the second colour wheel being sequentially arranged.
According to some embodiments of the present invention, at least one peripheral optical path of multiple peripheral optical paths may include fourth peripheral
Optical path, the fourth peripheral optical path include the first colour wheel and optical fiber being sequentially arranged.
According to some embodiments of the present invention, the first colour wheel of the first peripheral optical path, the second peripheral optical path the first colour wheel
Standard-sized sheet light is configured to include with the first colour wheel in the second colour wheel, the first colour wheel of third periphery optical path or fourth peripheral optical path
Door screen, light barrier, long pass filter and neutral-density filter.
According to some embodiments of the present invention, the second colour wheel in the first peripheral optical path, the third in the second peripheral optical path
The second colour wheel in colour wheel or third periphery optical path can be configured as including standard-sized sheet diaphragm, neutral-density filter, Yi Jichang
Logical or short pass filter.
According to some embodiments of the present invention, the multiple peripheral optical path may include from for spectroscopic ellipsometry system
(SE) optical path of light source, for spectral reflectance formula system (SR) light source optical path, be used for sample autofocus system (AF)
The optical path of light source and the group that constitutes of the optical path of the light source for sample image identifying system (PR) in multiple peripheral light for selecting
Road.
According to some embodiments of the present invention, the converging light in the peripheral optical path of at least one of the multiple peripheral optical path
The meridian plane of beam can be in same plane with the light beam meridian plane being emitted from the light source or have angle.
According to some embodiments of the present invention, the light source can be broad spectrum light source, for example xenon source or laser pump
The wideband light source at Pu.Particularly, which, which can be, maintains to light the xenon in light by electrion using negative discharge mode
Gas and the luminous xenon source of the plasma discharge that generates；Plasma discharge is either maintained by the way of laser pump (ing)
Luminous xenon source；It or is the wideband light source of laser pump (ing).
According to the second aspect of the invention, a kind of optical measuring device is provided, may include any one of mentioned-above
Three-dimensional space light-source system.
According to some embodiments of the present invention, the optical measuring device can be ellipsometric measurement equipment.
By means of above-mentioned three-dimensional space light-source system of the invention, overall compact light-source structure layout may be implemented, from
And save space.Particularly, above-mentioned three-dimensional space light-source system is suitable for ellipsometric measurement equipment, plurality of periphery light
Road couples specific optical subsystem can provide light source, the light of spectrum ellipsometric measurement system for ellipsometric measurement equipment
Compose reflective system source, the light source of autofocus system and light source of image identification system etc..Therefore, the three-dimensional of the disclosure
Multichannel light source requirements needed for space light-source system only needs a light source that can meet ellipsometric measurement equipment, and structure letter
List, adjustment are convenient, easy to maintain, successfully solve the multiple light courcess system of current ellipsometric measurement equipment, and light-source structure is multiple
Miscellaneous, difficult in maintenance, especially reflecting mirror aging frequency used is high, the problems such as needing to be replaced frequently.
Detailed description of the invention
In the accompanying drawings, similar/identical appended drawing reference is typically opening through different views and refers to similar/identical part.It is attached
Figure is not necessarily to scale, but usually emphasizes the diagram to the principle of the present invention.In the accompanying drawings:
Fig. 1 is the schematic diagram of three-dimensional space light-source system according to an embodiment of the invention；
Fig. 2 is the space with different number optical paths of three-dimensional space light-source system according to an embodiment of the invention
Layout；
Fig. 3 is the structural schematic diagram of the intermediate optical path of three-dimensional space light-source system according to an embodiment of the invention；
Fig. 4 is the first embodiment of the peripheral optical path of three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram；
Fig. 5 is the second embodiment of the peripheral optical path of three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram；
The third embodiment of the peripheral optical path of Fig. 6 three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram；And
4th embodiment of the peripheral optical path of Fig. 7 three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram.
Specific embodiment
Each embodiment of the invention is described in detail below with reference to attached drawing.One or more examples of embodiment
As shown by attached drawing.The elaboration of embodiment through the invention is provided, and is not intended as limitation of the present invention.For example,
Feature shown or described by a part as one embodiment may be used to generate another in another embodiment
Further embodiment.The present invention is intended to include these and other modifications and variations for belonging to scope and spirit of the present invention.
It should be noted that, in this document, term " first ", " second " are used for description purposes only, and should not be understood as referring to
Show or imply relative importance or implicitly indicates the quantity of indicated technical characteristic.It is limited to " first ", " second " as a result,
Feature can explicitly or implicitly include at least one of the features.In description herein, the meaning of " plurality " is at least
It two, such as two, three etc., is limited unless otherwise clearly specific.
As previously mentioned, existing ellipsometric measurement equipment is typically necessary at least three Lu Guangyuan, it is respectively: for measuring
Light source (the hereinafter referred to as SE light of spectroscopic ellipsometry (Spectral Ellipsometry, SE) system of sample surfaces parameter
Source)；Light source (hereinafter referred to as SR light source) for spectral reflectance formula (Spectral Reflectometry, SR) system；For
Sample focuses the light source (hereinafter referred to as AF light source) of (Auto Focus, AF) system automatically；And it is identified for sample image
The light source (hereinafter referred to as PR light source) etc. of (Pattern Recognition, PR) system.However, existing ellipsometric measurement
Source layout or structure in equipment are simultaneously unreasonable, so as to cause the increased costs of equipment, and make light source structure is complicated,
Inconvenience maintenance.Particularly, since the light path layout in existing light-source system is unreasonable, used reflecting mirror aging frequency is also resulted in
Rate is high, needs to be replaced frequently.
For this purpose, this paper presents a kind of novel three-dimensional space light-source systems for being applicable to ellipsometric measurement equipment.
It should be noted that although the embodiments described below is described referring to the light-source system of ellipsometric measurement equipment, this
It is not intended to limit.On the contrary, three-dimensional space light-source system of the invention can be adapted in addition to ellipsometric measurement equipment
Possibility need other light-source systems appropriate of multiple light sources.
It describes according to an embodiment of the invention to be applicable to ellipsometric measurement equipment in conjunction with Fig. 1 first below
Three-dimensional space light-source system.
As shown in Figure 1, three-dimensional space light-source system of the invention mainly includes light source 10 and multiple light independent of each other
Road 20,30,40,50 and 60, wherein this multiple optical path independent of each other is separately coupled to light source 10, thus receive from
The light that light source 10 issues.Each embodiment according to the present invention, it is defeated from above-mentioned multiple optical paths independent of each other 20,30,40,50 and 60
Light out can be used as secondary source use.
As unrestricted example, light source 10 can be the light source of sending wide spectrum.Particularly, light source 10 can be laser
Pump wideband light source or xenon source, for example maintain to be lighted the xenon in light by electrion using negative discharge mode and
The luminous xenon source of the plasma discharge of generation, or maintain plasma discharge to shine by the way of laser pump (ing)
Xenon source.
The layout of the optical path in three-dimensional space light-source system in order to optimize various embodiments of the present invention, of the invention is multiple
Optical path 20,30,40,50 and 60 independent of each other may include 30,40,50 and of an intermediate optical path 20 and multiple peripheral optical paths
60。
It should be appreciated that multiple 20,30,40,50 and of optical path independent of each other for being coupled to light source 10 proposed by the invention
60 be only to illustrate.In other embodiments, the peripheral optical path independent of each other of more or less numbers can is coupled to light
Source 10.
The example of layout as the optical path in three-dimensional space light-source system, Fig. 2 diagrammatically illustrate according to the present invention
The space layout figure with different number of peripheral optical path of the three-dimensional space light-source system of one embodiment.Fig. 2 a shows root
According to the space layout figure with an intermediate optical path and four peripheral optical paths of one embodiment of the present of invention；Fig. 2 b shows root
According to the space layout figure with an intermediate optical path and three peripheral optical paths of one embodiment of the present of invention；And Fig. 2 c is shown
The space layout figure with an intermediate optical path and two peripheral optical paths according to an embodiment of the invention.
It can be seen that multiple peripheral optical paths from Fig. 2 a to Fig. 2 c to be arranged to around an intermediate light path arrangement.According to this
Each embodiment of invention, which is arranged as the intensity monitor optical path of light source itself, to react light source in real time
The situation of change of light intensity, or the real-time status of correct monitoring light source.
For example, intermediate optical path can be used for detecting to be issued from light source in the case where being applied to ellipsometric measurement equipment
Light light intensity variation；Multiple periphery optical paths can be the optical path from the light source for spectroscopic ellipsometry system (SE), be used for
The optical path of the light source of spectral reflectance formula system (SR), for sample autofocus system (AF) light source optical path and be used for sample
Multiple peripheral optical paths selected in the group that the optical path of the light source of image identification system (PR) is constituted.
Multiple peripheral optical paths are that each peripheral optical path can have around the advantage that an intermediate optical path is arranged
More optical path extending spaces so that the layout of entire light-source system is more compact, while reducing each independent of one another
The interference of optical path.
The intermediate optical path 20 of three-dimensional space light-source system of the invention and multiple is discussed in detail below in conjunction with Fig. 3 to Fig. 7
The possible layout form of peripheral optical path 30,40,50 and 60.Also need explanation, following intermediate optical path 20 and it is multiple outside
The also only structural signal of optical path 30,40,50 and 60 is enclosed, and is not intended as any restrictions.
Fig. 3 is the structural schematic diagram of the intermediate optical path of three-dimensional space light-source system according to an embodiment of the invention.
As shown in figure 3, the intermediate optical path 20 is coupled to the light source of such as xenon source 101, and first including being sequentially arranged
Colour wheel 201 and light intensity detector 202, wherein the xenon source 101 as light source can issue wide spectrum, high-intensitive light, the
Color wheel 201 directly can receive light from the light source of such as xenon source 101, and light is then incident on light intensity detector 202
On target surface.It can be according to the embodiment of light intensity detector and the difference of dynamic range, suitably to choose the first colour wheel 201
In optical filter type.
As an example, for example light intensity detector 202 is 4 quadrant detector, then neutral-density filter can be suitably chosen
(ND2, ND4 or ND8), so that the light intensity value that light source issues is within the dynamic range of 4 quadrant detector.
Each embodiment according to the present invention, multiple periphery optical paths are independent of one another, and each in multiple peripheral optical path
A periphery optical path can be realized with a variety of possible embodiments.Particularly, at least one peripheral optical path can be used as from ellipse
The optical path of at least one light source selected in the SE light source of measuring device, SR light source, AF light source and/or PR light source.It will pass through below
Fig. 4 to Fig. 7 introduces the possibility form of implementation of the peripheral optical path of any of multiple peripheral optical paths.
Fig. 4 is the first embodiment party of the peripheral optical path in three-dimensional space light-source system according to an embodiment of the invention
The structural schematic diagram of formula.As shown in figure 4, the diverging light being emitted by such as xenon source 101 is via the first colour wheel 701, and via
Spherical reflector 702 assemble, then by plane mirror 703 transfer optical path after, convergent beam by 704 post-concentration of the second colour wheel in
Light source takes at luminous point 705.
Specifically, the first colour wheel 701 can be first passed around by the diverging light that such as xenon source 101 is emitted and is incident on spherical surface
Reflecting mirror 702, wherein the first colour wheel 701 can be equipped with standard-sized sheet diaphragm, light barrier, 500nm long pass filter, multiple neutral densities
Optical filter (ND2, ND4 and/or ND8) etc., wherein can according to the actual situation and/or application requirement selects the cloth of suitable colour wheel
It sets and/or function.
For example, when light-source system is in idle condition, the first colour wheel 701 can be switched to light barrier position, thus anti-
Only light source issue light long-time illumination path in subsequent optical element (such as reflecting mirror etc.) and cause aging, and then influence
The service life of optical element；For example, when light-source system for example for measuring the samples such as photoresist when, the first colour wheel 701 can switch
To 500nm long pass filter and then prevent to be lower than influence of the 500nm to photoresist in light source；For example, working as the light intensity of light-source system
It is too strong and when SE, AF or PR optical path optical detector energy being caused to be saturated, the first colour wheel 701 can be switched to neutral density appropriate
The position of optical filter (ND2, ND4 or ND8)；For example, light-source system correct measurement under normal conditions, the first colour wheel 701 can
To be in standard-sized sheet stop position.
It particularly, can be with 702 method wire clamp of spherical reflector after the first colour wheel 701 from the optical axis of 10 emergent light of light source
Angle is 6 ° of incidences, and the light beam dissipated after spherical reflector 702 is focused to convergent beam, and convergent beam passes through space plane mirror
703, by optical path turnover to desired direction.Particularly, the son of the convergent beam meridian plane in the light-source system and light source outgoing
Noon face can also be mutually perpendicular to or have angle in same plane, this depends on the three-dimensional space layout of light-source system.
Then, the light beam after transferring via space plane mirror 703 can be imaged in by the second colour wheel 704 takes luminous point 705
Place, wherein the second colour wheel 704 can be equipped with standard-sized sheet diaphragm, multiple neutral-density filters (such as ND2, ND4 and ND8) etc.,
Wherein the effect of the second colour wheel 704 and the first colour wheel 701 can be identical.Two sets of colour wheels why are filled, are because sometimes for two
A colour wheel cooperating together, for example need the first colour wheel 701 to be switched to 500nm long pass filter when measurement photoresist sample,
And at this time if the light intensity that detector receives still is saturated, it is necessary to which the second colour wheel 704 is switched to corresponding neutral close
Optical filter position cooperation ellipsometric measurement equipment is spent to work normally.Convergent beam images in after the second colour wheel 704 and takes light
At point 705.Take at luminous point 705 it is subsequent can with direct-coupling optical fiber or Space Coupling to subsequent light path part (for example, with
The subsequent light path part in optical path in SE light source, AR light source, AF light source or PR light source).
Fig. 5 is the second embodiment of the peripheral optical path of three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram；
As shown in figure 5, the diverging light being emitted by such as xenon source 101 is via the first colour wheel 801, and via the first parabolic
Light beam becomes directional light after face reflecting mirror 802, anti-using the second paraboloid after the second colour wheel 803 and third colour wheel 804
Mirror 805 is penetrated, collimated light beam is converged at 1: 806.Likewise it is possible to suitable with application requirement selection according to the actual situation
Colour wheel arrangement and/or function.
As unrestricted example, for example, converge at the light straight space a little at 806 be coupled to subsequent SE light source,
In the case where the optical path of AR light source, AF light source or PR light source, in order to reduce influence of the optical aberration to measuring system, the first colour wheel
801 can be identical with aforementioned first colour wheel 701, and can when light-source system is in measurement in fully open position and
Light-blocking position is in when light-source system is in idle, that is, so that the first colour wheel 801 only has two states；Meanwhile second colour wheel
803 can also be identical with the first colour wheel 701, but is only used for realizing the other parts function of aforementioned first colour wheel 701；Third
Colour wheel 804 can be identical with aforementioned second colour wheel 704, and function identical with aforementioned second colour wheel 704 may be implemented.Again
For example, the first colour wheel 803 can not then be needed, at this point, in the case where converging at a little light direct-coupling optical fiber at 806
Color wheel 801 and 804 role of third colour wheel are distinguished identical with the first colour wheel 701 above-mentioned and the second colour wheel 704.
Second paraboloidal mirror 805 can converge to collimated light beam a little at 806, and spatial position can be according to convergent beam
Direction determine.Similarly, convergent beam meridian plane and from light source 10 be emitted light beam meridian plane can in same plane, or
It can be mutually perpendicular to or have angle, this depends on the three-dimensional space layout of light-source system.
Fig. 6 is the third embodiment of the peripheral optical path of three-dimensional space light-source system according to an embodiment of the invention
Structural schematic diagram.
As shown in fig. 6, the diverging light being emitted by such as xenon source 101 is via the first colour wheel 901, and anti-via ellipsoid
Become convergent beam after penetrating mirror 902, is finally converged at 1: 904 by the second colour wheel 903.Likewise it is possible to according to reality
Situation and application requirement select the arrangement and/or function of suitable first colour wheel 901 and the second colour wheel 903.
As unrestricted example, the first colour wheel 901 and the second colour wheel 903 can respectively with aforementioned first colour wheel 701 and
The type of second colour wheel 704 and effect are identical.It the spatial position of ellipsoidal mirror 902 can be according to the side of convergent beam
To determination.Similarly, convergent beam meridian plane can be in same plane with the light beam meridian plane that is emitted from light source, can also be with
It is mutually perpendicular to or has angle, this depends on the three-dimensional space layout of light-source system.
Fig. 7 is the 4th embodiment of three-dimensional space light-source system according to an embodiment of the invention periphery optical path
Structural schematic diagram.
As shown in fig. 7, the diverging light being emitted by such as xenon source 101 is via the first colour wheel 1001, direct-coupling is in light
The endface of fibre 1002.Likewise it is possible to according to the actual situation and using the arrangement for needing to select suitable first colour wheel 1001
And/or function
As unrestricted example, the first colour wheel 1001 can be with the type and the complete phase of effect of aforementioned first colour wheel 701
Together.In addition, in some embodiments, in order to guarantee the requirement of ellipsometry device wide spectrum, it is desirable that the transmitance of ultraviolet light
High optical fiber.
It should be understood that the form that is appropriately carried out of each peripheral optical path can be according to reality in above-mentioned multiple peripheral optical paths
The application on border selects, and the peripheral optical path of first to fourth embodiment including but not limited to described above.
Three-dimensional space light source provided by through the invention including single source, multiple peripheral optical paths and in-between optical path
Overall compact source layout may be implemented in system, to save space.Particularly, three-dimensional space provided by the present invention
Between light-source system can be adapted for the ellipsometric measurement equipment for needing multiple light sources.Only need a light source that can meet as a result,
Multichannel light source requirements needed for ellipsometric measurement equipment, and structure is simple, adjustment is convenient, easy to maintain, successfully solves mesh
Preceding ellipsometric measurement equipment multiple light courcess system, and light-source structure is complicated, difficult in maintenance, especially reflecting mirror aging frequency used
It is high, the problems such as needing to be replaced frequently.
Although the present invention is illustrated and described in detail in attached drawing and foregoing description, these are illustrated and described should be by
It is considered illustrative or exemplary rather than restrictive；The present invention is not limited to the disclosed embodiments.Art technology
Personnel are understood that and practice in practicing claimed invention, through research attached drawing, open and appended claims
Other variants of the disclosed embodiments.
In the claims, other elements are not precluded in word " comprising ", and indefinite article "a" or "an" is not arranged
Except multiple.Discrete component or other units can satisfy the function of the multiple projects illustrated in the claims.Only in mutually not phase
Same embodiment is recited in mutually different dependent the only true of certain features, is not meant to that these cannot be used to advantage
The combination of feature.In the case where not departing from spirit and scope, the protection scope of the application is covered in each implementation
Example or any possible combination of each feature being recited in mutually different dependent.
Any reference marker in the claims is understood not to limit the scope of the invention.
Claims (15)
1. a kind of three-dimensional space light-source system characterized by comprising
Light source (10)；And
Multiple optical paths (20,30,40,50,60) independent of each other, are configured to be independently coupled to the light source；
Wherein, the multiple optical path further comprises intermediate optical path (20) and multiple peripheral optical paths (30,40,50,60), described more
A periphery optical path is configured around the intermediate optical path (20) and is arranged and can be exported as secondary source.
2. three-dimensional space light-source system according to claim 1, wherein the intermediate optical path (20) be configured as receiving from
The light that the light source (10) issues, and the light intensity variation of light source described in real-time detection.
3. three-dimensional space light-source system according to claim 2, wherein the intermediate optical path includes the colour wheel being sequentially arranged
(201) and light intensity detector (202).
4. three-dimensional space light-source system according to claim 2, wherein the colour wheel (201) be configured to include it is neutral close
Spend optical filter and long logical or short pass filter.
5. three-dimensional space light-source system according to claim 1, wherein the multiple periphery optical path (30,40,50,60)
At least one peripheral optical path includes the first peripheral optical path, the described first peripheral optical path include the first colour wheel (701) being sequentially arranged,
Spherical reflector (702), plane mirror (703) and the second colour wheel (704).
6. three-dimensional space light-source system according to claim 1, wherein in the multiple periphery optical path (30,40,50,60)
At least one peripheral optical path include the second peripheral optical path, the described second peripheral optical path includes the first colour wheel being sequentially arranged
(801), the first parabolic mirror (802), the second colour wheel (803), third colour wheel (804) and the second parabolic mirror
(805)。
7. three-dimensional space light-source system according to claim 1, wherein the multiple periphery optical path (30,40,50,60)
At least one peripheral optical path includes third periphery optical path, third periphery optical path include the first colour wheel (901) being sequentially arranged,
Ellipsoidal mirror (902) and the second colour wheel (903).
8. three-dimensional space light-source system according to claim 1, wherein the multiple periphery optical path (30,40,50,60)
At least one peripheral optical path includes fourth peripheral optical path, and the fourth peripheral optical path includes the first colour wheel (1001) being sequentially arranged
With optical fiber (1002).
9. the three-dimensional space light-source system according to any one of claim 5-8, wherein in the described first peripheral optical path
The first colour wheel (801) and the second colour wheel (803), third periphery light in first colour wheel (701), the second peripheral optical path
The first colour wheel (1001) in the first colour wheel (901) or the fourth peripheral optical path in road be configured to include standard-sized sheet diaphragm,
Light barrier, long pass filter and neutral-density filter.
10. the three-dimensional space light-source system according to any one of claim 5-7, wherein in the described first peripheral optical path
Second colour wheel (704), the third colour wheel (804) in the second peripheral optical path or the second colour wheel in the optical path of the third periphery
(903) standard-sized sheet diaphragm, neutral-density filter and long logical or short pass filter are configured to include.
11. three-dimensional space light-source system according to claim 1, wherein the multiple periphery optical path includes from for spectrum
The optical path of the light source of elliptical polarization measuring system (SE), for spectral reflectance formula system (SR) light source optical path, for sample it is automatic
It is selected in the group that the optical path of the light source of focusing system (AF) and the optical path of the light source for sample image identifying system (PR) are constituted
Multiple peripheral optical paths.
12. the three-dimensional space light-source system according to any one of claim 5-7, wherein in the multiple periphery optical path
The meridian plane of convergent beam at least one peripheral optical path and the light beam meridian plane being emitted from the light source (10) are in same
Plane has angle.
13. three-dimensional space light-source system described in any one of -8 and 11 according to claim 1, wherein the light source is wide spectrum
Light source.
14. a kind of optical measuring device, which is characterized in that including three-dimensional space light according to claim 1 to 13
Source system.
15. optical measuring device according to claim 14, wherein the optical measuring device is ellipsometric measurement equipment.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710847966.2A CN109520621A (en) | 2017-09-19 | 2017-09-19 | Three-dimensional space light-source system and relevant optical measuring device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710847966.2A CN109520621A (en) | 2017-09-19 | 2017-09-19 | Three-dimensional space light-source system and relevant optical measuring device |
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| CN201710847966.2A Pending CN109520621A (en) | 2017-09-19 | 2017-09-19 | Three-dimensional space light-source system and relevant optical measuring device |
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| US20030184864A1 (en) * | 1997-10-28 | 2003-10-02 | 3M Innovative Properties Company | Polarizing beam splitter |
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