CN109490943B - Cross multi-wire probe for measuring ion beam current intensity and position - Google Patents

Cross multi-wire probe for measuring ion beam current intensity and position Download PDF

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Publication number
CN109490943B
CN109490943B CN201811591980.1A CN201811591980A CN109490943B CN 109490943 B CN109490943 B CN 109490943B CN 201811591980 A CN201811591980 A CN 201811591980A CN 109490943 B CN109490943 B CN 109490943B
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gold
target
plated tungsten
tungsten wire
aluminum nitride
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CN109490943A (en
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丁开忠
姚凯
吴昱城
宋云涛
陈永华
李君君
连欢
胡乐星
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Hefei Cas Ion Medical and Technical Devices Co Ltd
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Hefei Cas Ion Medical and Technical Devices Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914Measurement of spatial distribution of radiation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The invention discloses a cross multi-filament probe for measuring ion beam current intensity and position, which comprises a transmission seat and an aluminum nitride ceramic supporting plate, wherein the aluminum nitride ceramic supporting plate is arranged on the upper part of an auxiliary supporting frame, one end of the auxiliary supporting frame is fixedly connected to the upper part of the transmission seat through a pin, the middle end in the aluminum nitride ceramic supporting plate is provided with a second gold-plated tungsten filament target, one end in the aluminum nitride ceramic supporting plate is provided with a first gold-plated tungsten filament target, the other end in the aluminum nitride ceramic supporting plate is provided with a third gold-plated tungsten filament target, and the tops of the first gold-plated tungsten filament target, the second gold-plated tungsten filament target and the third tungsten-plated filament target are sequentially and respectively connected with a first signal line, a second signal line and a third. The probe has the characteristics of simple structure, convenience in processing, strong reliability and low cost, and can be used for respectively measuring beam current intensity, beam position and beam profile information. Reliable beam current information can be provided for scientific research personnel and analysis personnel.

Description

Cross multi-wire probe for measuring ion beam current intensity and position
Technical Field
The invention relates to a measuring probe, in particular to a cross multi-wire probe for measuring the beam current intensity and the position of an ion beam, and belongs to the field of beam current measurement application.
Background
A cyclotron is a device that uses a magnetic field and an electric field to cause charged particles to make a cyclotron motion, and repeatedly accelerates the charged particles in the motion by a high-frequency electric field. More and more medical proton accelerator and heavy ion accelerator devices are now being manufactured. In order to complete debugging, maintenance and overhaul of the accelerator, a probe capable of obtaining beam position, current intensity and profile information of the accelerator is needed.
Disclosure of Invention
The invention aims to provide a cross multi-wire probe for measuring the beam current intensity and the beam position of an ion beam, which has the characteristics of simple structure, convenient processing, strong reliability and low cost and can respectively measure the beam current intensity, the beam position and the beam profile information. Reliable beam current information can be provided for scientific research personnel and analysis personnel.
The purpose of the invention can be realized by the following technical scheme:
the utility model provides a cross multifilament probe for ion beam current intensity and position measurement, includes driving seat and aluminium nitride ceramic backup pad, aluminium nitride ceramic backup pad is installed on the upper portion of auxiliary stay frame, auxiliary stay frame one end is through pin fixed connection on the upper portion of driving seat, the inside middle-end of aluminium nitride ceramic backup pad is installed the second and is gilded tungsten filament target, and first gilded tungsten filament target is installed to inside one end, and the third gilded tungsten filament target is installed to the inside other end, the upper and lower both ends of aluminium nitride ceramic backup pad are all run through to the both ends of first gilded tungsten filament target, second gilded tungsten filament target and third gilded tungsten filament target, the top of first gilded tungsten filament target, second gilded tungsten filament target and third gilded tungsten filament target is connected with first signal line, second signal line and third signal line respectively in proper order.
Preferably, the second gold-plated tungsten wire target is longitudinally arranged in the middle of the inside of the aluminum nitride ceramic support plate, the tops of the first gold-plated tungsten wire target and the third gold-plated tungsten wire target both extend towards the top end in the inside of the aluminum nitride ceramic support plate, the first gold-plated tungsten wire target and the third gold-plated tungsten wire target are arranged in a crossed manner in the inside of the aluminum nitride ceramic support plate, and the first gold-plated tungsten wire target, the second gold-plated tungsten wire target and the third gold-plated tungsten wire target are crossed in a "+" type spatial heterofacial structure in the inside of the aluminum nitride ceramic support plate.
Preferably, the included angle between the first gold-plated tungsten wire target and the second gold-plated tungsten wire target and the included angle between the third gold-plated tungsten wire target and the second gold-plated tungsten wire target are both α, and the angle of α is 15 to 75 degrees.
Preferably, the aluminum nitride ceramic support plate is arranged in a U shape, through holes are formed at the joints of the upper end and the lower end of the aluminum nitride ceramic support plate and the first gold-plated tungsten wire target, the second gold-plated tungsten wire target and the third gold-plated tungsten wire target, and the first gold-plated tungsten wire target, the second gold-plated tungsten wire target and the third gold-plated tungsten wire target are fixedly connected with the aluminum nitride ceramic support plate through the through holes.
Preferably, the outer layers of the first signal wire, the second signal wire and the third signal wire are sleeved with polyimide wrapped shielding twisted pairs.
Preferably, a polyimide cushion layer is arranged at the joint of the aluminum nitride ceramic support plate and the auxiliary support frame, and the auxiliary support frame is made of an aluminum alloy material.
Preferably, the method for using the cross multi-filament probe comprises the following specific steps:
the method comprises the following steps: the transmission seat drives the auxiliary support frame to rotate, electrons are emitted through the first gold-plated tungsten wire target, the second gold-plated tungsten wire target and the third gold-plated tungsten wire target during movement, beam signals are obtained, and meanwhile, the relative signal strength of the first signal line, the second signal line and the third signal line in the movement process is detected;
step two: and measuring the beam position and the two-dimensional section according to the detected signal intensity, and keeping an included angle between the first gold-plated tungsten wire target and the second gold-plated tungsten wire target and an included angle between the third gold-plated tungsten wire target and the second gold-plated tungsten wire target between 15 and 75 degrees in use.
The invention has the beneficial effects that:
1. the probe has the characteristics of simple structure, convenience in processing, strong reliability and low cost, and can be used for respectively measuring beam current intensity, beam position and beam profile information. Reliable beam current information can be provided for scientific research personnel and analysis personnel.
2. By adopting the aluminum nitride ceramic support plate, the aluminum nitride ceramic support plate has good insulating property and thermal conductivity in work, has good strength and ensures reliable connection of the gold-plated tungsten wire target. And the shielding twisted-pair wire wrapped by polyimide is connected to the outside of the signal wire, so that the polyimide has little air release amount in extremely high vacuum during work, can be used in vacuum, and can reduce the influence of interference on beam current. The gold-plated tungsten filament target has high secondary electron emission efficiency, can obtain stronger beam current intensity signals, and is more accurate in detection. The ceramic, gold-plated tungsten wire and aluminum alloy auxiliary support frame is made of non-magnetic materials and can be used in a strong magnetic field environment.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
Fig. 1 is a schematic view of the overall structure of the present invention.
FIG. 2 is a schematic view of an installation structure of an aluminum nitride ceramic support plate according to the present invention.
In the figure: 1. a transmission seat; 2. a pin; 3. an auxiliary support frame; 4. an aluminum nitride ceramic support plate; 5. a first gold-plated tungsten filament target; 6. a second gold-plated tungsten wire target; 7. a third gold-plated tungsten wire target; 8. a first signal line; 9. a second signal line; 10. and a third signal line.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, a cross multi-filament probe for measuring ion beam current intensity and position includes a transmission seat 1 and an aluminum nitride ceramic support plate 4, the aluminum nitride ceramic support plate 4 is installed on the upper portion of an auxiliary support frame 3, one end of the auxiliary support frame 3 is fixedly connected to the upper portion of the transmission seat 1 through a pin 2, a second gold-plated tungsten filament target 6 is installed at the middle end inside the aluminum nitride ceramic support plate 4, a first gold-plated tungsten filament target 5 is installed at one end inside the aluminum nitride ceramic support plate 4, a third gold-plated tungsten filament target 7 is installed at the other end inside the aluminum nitride ceramic support plate, two ends of the first gold-plated tungsten filament target 5, the second gold-plated tungsten filament target 6 and the third gold-plated tungsten filament target 7 are respectively connected to the upper end and the lower end of the aluminum nitride ceramic support plate 4, and tops of the first gold-plated tungsten filament target 5, the second gold-plated tungsten filament target 6 and the third gold-plated, A second signal line 9 and a third signal line 10.
As a technical optimization scheme of the present invention, the second gold-plated tungsten filament target 6 is longitudinally arranged at the middle end inside the aluminum nitride ceramic support plate 4, the tops of the first gold-plated tungsten filament target 5 and the third gold-plated tungsten filament target 7 both extend to the top end inside the aluminum nitride ceramic support plate 4, the first gold-plated tungsten filament target 5 and the third gold-plated tungsten filament target 7 are crosswise arranged inside the aluminum nitride ceramic support plate 4, and the first gold-plated tungsten filament target 5, the second gold-plated tungsten filament target 6 and the third gold-plated tungsten filament target 7 are crosswise arranged inside the aluminum nitride ceramic support plate 4 to form a "+" shaped spatial non-planar structure, so that radial and vertical position measurement of a beam current can be respectively realized, and measurement of a beam current intensity and analysis of beam current profile information can also be realized.
As a technical optimization scheme of the invention, the included angle between the first gold-plated tungsten wire target 5 and the second gold-plated tungsten wire target 6 and the included angle between the third gold-plated tungsten wire target 7 and the second gold-plated tungsten wire target 6 are both α, the angle α is between 15 and 75 degrees, when the included angle is too large, the vertical range of the measured beam is limited and the structural size is increased, when the angle is too small, the distance between the beam from the third gold-plated tungsten wire target 7 to the second gold-plated tungsten wire target 6 or the distance between the first gold-plated tungsten wire target 5 and the second gold-plated tungsten wire target 6 is too short, and when the vertical position of the beam is converted, the error is too large, and the position information of the beam in the vertical direction can be converted by combining the α size and the distance between the beam from the third gold-plated tungsten wire target 7 to the second gold-plated tungsten wire target 6 or the distance between the first gold-plated tungsten wire target 5 and the second gold-.
As a technical optimization scheme of the invention, the aluminum nitride ceramic support plate 4 is arranged in a U shape, through holes are arranged at the joints of the upper end and the lower end of the aluminum nitride ceramic support plate 4 and the first gold-plated tungsten filament target 5, the second gold-plated tungsten filament target 6 and the third gold-plated tungsten filament target 7, and the first gold-plated tungsten filament target 5, the second gold-plated tungsten filament target 6 and the third gold-plated tungsten filament target 7 are fixedly connected with the aluminum nitride ceramic support plate 4 by penetrating through the through holes, so that the aluminum nitride ceramic support plate 4 can be conveniently and fixedly connected with the gold-plated tungsten filament target, and good insulating property and heat conducting property can be ensured at the same time.
As a technical optimization scheme of the present invention, the shielding twisted pairs wrapped with polyimide are sleeved on the outer layers of the first signal line 8, the second signal line 9 and the third signal line 10, so as to reduce the influence of interference on beam current, and the polyimide has a very small outgassing amount in a very high vacuum, and can be used in a vacuum.
As a technical optimization scheme of the invention, a polyimide cushion layer is arranged at the joint of the aluminum nitride ceramic support plate 4 and the auxiliary support frame 3, the auxiliary support frame 3 is made of an aluminum alloy material, the polyimide cushion layer can play an insulating role in work, and the aluminum alloy material can be used in a strong magnetic environment.
As a technical optimization scheme of the invention, the use method of the cross multi-filament probe comprises the following specific steps:
the method comprises the following steps: the transmission seat 1 drives the auxiliary support frame 3 to rotate, electrons are emitted through the first gold-plated tungsten wire target 5, the second gold-plated tungsten wire target 6 and the third gold-plated tungsten wire target 7 during movement, beam signals are obtained, and meanwhile, the relative signal strength of the first signal line 8, the second signal line 9 and the third signal line 10 during movement is detected;
step two: and measuring the beam position and the two-dimensional section according to the detected signal intensity, wherein the included angle between the first gold-plated tungsten wire target 5 and the second gold-plated tungsten wire target 6 and the included angle between the third gold-plated tungsten wire target 7 and the second gold-plated tungsten wire target 6 are kept between 15 and 75 degrees in use.
When the device is used, the transmission seat 1 drives the auxiliary support frame 3 to rotate, electrons are emitted through the gold-plated tungsten filament target during movement to obtain a beam signal, and meanwhile, the relative signal strength of the three signal lines during the movement process is detected and compared, so that the beam position and the two-dimensional profile can be measured. Therefore, the signal acquisition unit at the rear end of the probe needs to ensure low noise interference and high measurement accuracy, and the motion control unit thereof also needs to have high positioning accuracy. The aluminum nitride ceramic support plate 4 is adopted, so that the aluminum nitride ceramic support plate has good insulating property and thermal conductivity in work, has good strength, and ensures reliable connection of a gold-plated tungsten wire target. And the shielding twisted-pair wire wrapped by polyimide is connected to the outside of the signal wire, so that the polyimide has little air release amount in extremely high vacuum during work, can be used in vacuum, and can reduce the influence of interference on beam current. The gold-plated tungsten filament target has high secondary electron emission efficiency, can obtain stronger beam current intensity signals, and is more accurate in detection. The ceramic, gold-plated tungsten wire and aluminum alloy auxiliary support frame 3 is made of a non-magnetic material and can be used in a high-intensity magnetic field environment.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims (4)

1. The cross multi-wire probe for measuring the ion beam current intensity and the position is characterized by comprising a transmission seat (1) and an aluminum nitride ceramic supporting plate (4), wherein the aluminum nitride ceramic supporting plate (4) is arranged on the upper portion of an auxiliary supporting frame (3), one end of the auxiliary supporting frame (3) is fixedly connected to the upper portion of the transmission seat (1) through a pin (2), a second gold-plated tungsten wire target (6) is arranged at the middle end inside the aluminum nitride ceramic supporting plate (4), a first gold-plated tungsten wire target (5) is arranged at one end inside the aluminum nitride ceramic supporting plate, a third gold-plated tungsten wire target (7) is arranged at the other end inside the aluminum nitride ceramic supporting plate, the two ends of the first gold-plated tungsten wire target (5), the second gold-plated tungsten wire target (6) and the third gold-plated tungsten wire target (7) are all connected with the upper end and the lower end of the aluminum nitride ceramic supporting plate (4) in a penetrating manner, the tops of the second gold-plated tungsten wire target (6) and the third gold-plated tungsten wire target (7) are sequentially connected with a first signal wire (8), a second signal wire (9) and a third signal wire (10) respectively;
the second gold-plated tungsten wire target (6) is longitudinally arranged at the middle end in the aluminum nitride ceramic support plate (4), the tops of the first gold-plated tungsten wire target (5) and the third gold-plated tungsten wire target (7) extend towards the top end in the aluminum nitride ceramic support plate (4), the first gold-plated tungsten wire target (5) and the third gold-plated tungsten wire target (7) are arranged in the aluminum nitride ceramic support plate (4) in a crossed manner, and the first gold-plated tungsten wire target (5), the second gold-plated tungsten wire target (6) and the third gold-plated tungsten wire target (7) are crossed in the aluminum nitride ceramic support plate (4) to form a '+' shaped space different-surface structure;
the included angle between the first gold-plated tungsten wire target (5) and the second gold-plated tungsten wire target (6) and the included angle between the third gold-plated tungsten wire target (7) and the second gold-plated tungsten wire target (6) are both α, and the angle of α is 15-75 degrees;
the use method of the cross multi-filament probe comprises the following specific steps:
the method comprises the following steps: the transmission seat (1) drives the auxiliary support frame (3) to rotate, electrons are emitted through the first gold-plated tungsten filament target (5), the second gold-plated tungsten filament target (6) and the third gold-plated tungsten filament target (7) during movement, beam signals are obtained, and meanwhile, the relative signal strength of the first signal line (8), the second signal line (9) and the third signal line (10) during movement is detected;
step two: and measuring the beam position and the two-dimensional section according to the detected signal intensity, wherein an included angle between the first gold-plated tungsten wire target (5) and the second gold-plated tungsten wire target (6) and an included angle between the third gold-plated tungsten wire target (7) and the second gold-plated tungsten wire target (6) are kept between 15 and 75 degrees in use.
2. The crossing multi-filament probe for measuring the beam current intensity and the position of the ion beam according to claim 1, wherein the aluminum nitride ceramic support plate (4) is arranged in a "U" shape, the joints of the upper and lower ends of the aluminum nitride ceramic support plate (4) and the first gold-plated tungsten filament target (5), the second gold-plated tungsten filament target (6) and the third gold-plated tungsten filament target (7) are provided with through holes, and the first gold-plated tungsten filament target (5), the second gold-plated tungsten filament target (6) and the third gold-plated tungsten filament target (7) are fixedly connected with the aluminum nitride ceramic support plate (4) through the through holes.
3. The crossing multi-filament probe for measuring the ion beam current intensity and the position according to claim 1 is characterized in that the outer layers of the first signal line (8), the second signal line (9) and the third signal line (10) are sleeved with polyimide wrapped shielding twisted pairs.
4. The crossing multi-wire probe for measuring the ion beam current intensity and the position according to claim 1 is characterized in that a polyimide cushion layer is arranged at the joint of the aluminum nitride ceramic support plate (4) and the auxiliary support frame (3), and the auxiliary support frame (3) is made of an aluminum alloy material.
CN201811591980.1A 2018-12-25 2018-12-25 Cross multi-wire probe for measuring ion beam current intensity and position Active CN109490943B (en)

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CN112698378A (en) * 2020-12-15 2021-04-23 中国科学院合肥物质科学研究院 Method for measuring section of high-current high-time resolution ion beam
CN113484899B (en) * 2021-06-29 2022-06-28 中国科学院近代物理研究所 Wire target and device for detecting toe-in halo and section of target

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JPS635293A (en) * 1986-06-25 1988-01-11 Japan Steel Works Ltd:The Beam shape measuring apparatus
JPS63274892A (en) * 1987-05-07 1988-11-11 Mitsubishi Electric Corp Wire grid monitor for charged particle device
WO2005006017A1 (en) * 2003-07-02 2005-01-20 European Organisation For Nuclear Research - Cern Multifunctional detector for measuring characteristics of the beam of particles or radiation
GB201401892D0 (en) * 2014-02-04 2014-03-19 Welding Inst System and method for measuring properties of a charges particle beam
CN107329166B (en) * 2017-08-22 2018-03-30 合肥中科离子医学技术装备有限公司 One kind is used for superconducting cyclotron draw-out area beam current measurement detection target head
CN108445526B (en) * 2018-02-28 2019-05-03 西北核技术研究所 The silk battle array structure and measuring device of high-resolution silk formation beam cross section measuring device

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