GB201401892D0 - System and method for measuring properties of a charges particle beam - Google Patents

System and method for measuring properties of a charges particle beam

Info

Publication number
GB201401892D0
GB201401892D0 GB201401892A GB201401892A GB201401892D0 GB 201401892 D0 GB201401892 D0 GB 201401892D0 GB 201401892 A GB201401892 A GB 201401892A GB 201401892 A GB201401892 A GB 201401892A GB 201401892 D0 GB201401892 D0 GB 201401892D0
Authority
GB
United Kingdom
Prior art keywords
particle beam
measuring properties
charges
charges particle
properties
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB201401892A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Welding Institute England
Original Assignee
Welding Institute England
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Welding Institute England filed Critical Welding Institute England
Priority to GB201401892A priority Critical patent/GB201401892D0/en
Publication of GB201401892D0 publication Critical patent/GB201401892D0/en
Priority to PCT/GB2015/050287 priority patent/WO2015118316A1/en
Priority to TW104103679A priority patent/TW201535458A/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
    • H01J2237/24535—Beam current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
    • H01J2237/24542—Beam profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30472—Controlling the beam
    • H01J2237/30483—Scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3104—Welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
GB201401892A 2014-02-04 2014-02-04 System and method for measuring properties of a charges particle beam Ceased GB201401892D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB201401892A GB201401892D0 (en) 2014-02-04 2014-02-04 System and method for measuring properties of a charges particle beam
PCT/GB2015/050287 WO2015118316A1 (en) 2014-02-04 2015-02-03 System and method for measuring properties of a charged particle beam
TW104103679A TW201535458A (en) 2014-02-04 2015-02-04 System and method for measuring properties of a charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB201401892A GB201401892D0 (en) 2014-02-04 2014-02-04 System and method for measuring properties of a charges particle beam

Publications (1)

Publication Number Publication Date
GB201401892D0 true GB201401892D0 (en) 2014-03-19

Family

ID=50344366

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201401892A Ceased GB201401892D0 (en) 2014-02-04 2014-02-04 System and method for measuring properties of a charges particle beam

Country Status (3)

Country Link
GB (1) GB201401892D0 (en)
TW (1) TW201535458A (en)
WO (1) WO2015118316A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112578426A (en) * 2020-11-26 2021-03-30 中国工程物理研究院应用电子学研究所 Adjustable array Faraday cylinder

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105301626B (en) * 2015-08-19 2018-02-09 西北核技术研究所 High-current pulsed electron beam incidence angle Two dimensional Distribution measuring probe, device and method
CN109490943B (en) * 2018-12-25 2020-07-14 合肥中科离子医学技术装备有限公司 Cross multi-wire probe for measuring ion beam current intensity and position
CN111063632B (en) * 2019-10-15 2024-02-06 北京烁科中科信电子装备有限公司 High-density array Faraday cage measuring probe
CN112327346B (en) * 2020-11-02 2024-01-30 北京航空航天大学 Plume plasma neutral particle measuring device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209034A (en) * 1967-04-25 1970-10-14 Welding Inst Improvements relating to electron beam welding
US4829243A (en) * 1988-02-19 1989-05-09 Microelectronics And Computer Technology Corporation Electron beam testing of electronic components
US6872953B1 (en) * 2004-05-20 2005-03-29 Axcelis Technologies, Inc. Two dimensional stationary beam profile and angular mapping

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112578426A (en) * 2020-11-26 2021-03-30 中国工程物理研究院应用电子学研究所 Adjustable array Faraday cylinder

Also Published As

Publication number Publication date
WO2015118316A1 (en) 2015-08-13
TW201535458A (en) 2015-09-16

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)