CN109482579A - A kind of cleaning system and cleaning method of quartz wafer jig - Google Patents
A kind of cleaning system and cleaning method of quartz wafer jig Download PDFInfo
- Publication number
- CN109482579A CN109482579A CN201811496722.5A CN201811496722A CN109482579A CN 109482579 A CN109482579 A CN 109482579A CN 201811496722 A CN201811496722 A CN 201811496722A CN 109482579 A CN109482579 A CN 109482579A
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- CN
- China
- Prior art keywords
- quartz wafer
- air blower
- wafer jig
- cleaning system
- relay
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention relates to cleaning device technical fields, more particularly to a kind of cleaning system and cleaning method of quartz wafer jig, basic cleaning system is made up of running gear and control device, it is given using power supply close to switch power supply, when quartz wafer jig, which is put into, to be torn open on material device, signal closure is received close to switch to be powered, it powers to relay and powers to time relay normally open end, contactor normally open end closure is powered, so that solenoid valve and air blower work, the impurity and pollutant torn open in the quartz wafer jig on material device at this time pass through hose, connector, in primary filter and water pipe inspiration air blower, it is powered off after the time relay time, air blower stops working, jig cleaning at this time is finished and can be picked up, it picks up the rear close switch and returns to original state.The technical program the utility model has the advantages that ensure that the electrical property for being torn open quartz wafer in piece and cleaning process by silver-colored jig after by silver, reduce wafer contamination and increase Wafer yield number.
Description
Technical field
The present invention relates to the cleaning systems and cleaning side of cleaning device technical field more particularly to a kind of quartz wafer jig
Method.
Background technique
With the development of semiconductor technology, people are higher and higher to some semiconductor materials requirement of electronic technology field,
Therefore when quartz wafer processing, guarantee that the purity requirement of quartz wafer is also more and more important.
In existing production technology, tear that piece cleaning is relatively complicated, and the common mode that retracts is open to the chip jig of miniaturization
It will directly be removed by hand by silver-colored jig upper cover plate, and then will hold being taken out by silver-colored mask plate for chip, this way compares appearance
It is easier that chip is polluted by being fallen off on silver-colored jig upper cover plate by the silver bits after silver, simultaneously as the chip of miniaturization is controlled by silver
The registration and precise requirements of tool are high, be so easy for occurring by after silver-colored process by silver-colored mask plate and upper cover plate and lower cover
Plate is clung, and then generates strip phenomenon, and the error of electrical property reduces Wafer yield quantity when increasing quartz wafer measurement.
Summary of the invention
In view of the above-mentioned problems, the present invention proposes a kind of quartz wafer jig cleaning system and its cleaning method, it is intended to guarantee
Quartz wafer jig tears the electrical property of quartz wafer in piece and cleaning process open after by silver, reduces wafer contamination and increases Wafer yield
Number.
Specific technical solution is as follows:
A kind of cleaning system of quartz wafer jig, including:
One running gear, the running gear tear the just effect of material device, a hose, a connector, a solenoid valve, one open including one
Filter, an air blower and a water pipe, cleaning process of the running gear to complete the cleaning system；
One control device, the control device include a power supply device, close a switch, a relay, a time relay
Device, a contactor and a socket, operational process of the control device to control the cleaning system；
The first through hole torn material device open and be connected to the connector by the hose；
Second through-hole of the connector connects the primary filter by the hose；
The solenoid valve is mounted on the third through-hole of the connector；
The contactor is connected with the control terminal of the solenoid valve；
The primary filter is connected to the air inlet of the air blower by the water pipe；
The air outlet of the air blower connects the water pipe；
It is described to be mounted on described tear open on material device close to switch；
The power supply device, close switch, the relay, the time relay are sequentially connected by conducting wire
To the extremely socket；
The socket is connected with the air blower by conducting wire.
Further, described tear open also installs a vacuum meter on material device.
Further, the input terminal of the power supply device connects alternating current, connects described in the output end connection of the power supply device
The power end closely switched.
Further, the power supply device includes the power supply device of 24V.
Further, a groove is arranged in the inside for tearing material device open, to place the quartz wafer jig.
Further, the size of the groove and the size of the quartz wafer jig match.
Further, the pore size of the first through hole of the connector and the diameter of the hose match.
A kind of cleaning method of quartz wafer jig, specifically includes the following steps:
Step S1: the quartz wafer jig being put into and is torn open in material device, so that it is described close to conducting is closed the switch, simultaneously
So that the relay power；
Step S2: it is often powered using the relay to the time relay, so that the solenoid valve and the air blast
Machine work；
Step S3: the air blower obtains air inlet for the impurity of the quartz wafer jig and pollutant by hose, company
Connect in air blower described in device, primary filter and water pipe inspiration, and by the gas outlet of the air blower be discharged the impurity and
Pollutant.
Further, a preset time is arranged in the time relay, so that the solenoid valve and the air blower work
In in the preset time of the time relay.
Further, the preset time of the time relay is 5 to 10 seconds.
Above-mentioned technical proposal the utility model has the advantages that
In quartz wafer manufacturing process, the pollution of chip is effectively reduced, quartz crystal purity is improved, ensure that quartz-crystal
The electrical property of piece increases the quantity of Wafer yield, reduces industrial production cost.
Detailed description of the invention
Attached drawing 1: a kind of cleaning system of quartz wafer jig and the operating procedure schematic diagram of cleaning method；
Attached drawing 2: a kind of cleaning system of quartz wafer jig and the electrical connection schematic diagram of cleaning method；
A kind of attached drawing 3: cleaning method step schematic diagram of quartz wafer jig.
In attached drawing: 11, tearing material device open；12, hose；13, connector；14, solenoid valve；15, primary filter；16, air blast
Machine；17, water pipe；21, power supply device；22, close to switch；23, relay；24, the time relay；25, contactor；26, socket；
131, the first through hole of connector；132, the second through-hole of connector；133, the third through-hole of connector；3, vacuum meter.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art without creative labor it is obtained it is all its
His embodiment, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
1 to attached drawing 3 and specific embodiment, the invention will be further described with reference to the accompanying drawing, but not as of the invention
It limits.
A kind of cleaning system of quartz wafer jig as shown shown in Figure 1 and Figure 2, including:
One running gear, running gear include: tear open material device 11, a hose 12, a connector 13, a solenoid valve 14,
One primary filter 15, an air blower 16 and a water pipe 17, cleaning process of the running gear to complete cleaning system；
One control device, control device include: a power supply device 21, one close to switch 22, a relay 23, the time after
Electric appliance 24, a contactor 25 and a socket 26, operational process of the control device to control running gear；
Tear the first through hole 131 that material device 11 is connected to connector 13 by hose 12 open；
Second through-hole 132 of connector connects primary filter 15 by hose 12；
Solenoid valve 14 is mounted on the third through-hole 133 of connector 13 to be used to control the logical of air and close；
Contactor 25 is connected with the control terminal of solenoid valve 14, to control the on-off of solenoid valve；
Primary filter 15 is connected to the air inlet of air blower 16 by water pipe 17；
The air outlet of air blower 16 connects water pipe 17；
It is mounted on and is torn open on material device 11 close to switch 22, led according to close to the signal that switch 22 receives to control route
It is logical；
Power supply device 21, close to switch 22, relay 23, the time relay 24, be consecutively connected to socket by conducting wire
26；
Socket 26 is connected with air blower 16 by conducting wire.
In above-mentioned technical proposal, powered by power supply device 21 to entire cleaning system, it is preparatory using the time relay 24
The time of setting controls the on-off of entire circuit system, while will be in quartz wafer jig using solenoid valve 14 and air blower 16
Impurity and pollutant are by 17 inspiration air blower 16 of hose 12, primary filter 15 and water pipe, and from 16 air outlet of air blower
Discharge effectively avoids artificial process bring impurity pollution quartz wafer, ensure that the quality of quartz wafer.
As preferred embodiment, tear open on material device 11 through punching installation vacuum meter 3.
In above-mentioned technical proposal, by punching installation vacuum meter 3 for monitoring the suction of air blower 16 on tearing material device 11 open
Power, determines whether air blower 16 needs to maintain using the pressure value and preset pressure value of real-time monitoring, when real-time monitoring
When pressure value is less than preset value, illustrates the work of air blower 16 too long, need to be maintained, convenient for operation better further below.
As preferred embodiment, the input terminal of power supply device 21 connects alternating current, and the output end of power supply device 21 connects
The power end of nearly switch 22 is given close to switch power supply, and power supply device 21 includes the power supply device of 24V.
In above-mentioned technical proposal, power supply device 21 selects the power supply device of 24V, by alternating current 220V electricity to convert voltage
Pressure is converted to 24V voltage, to provide power supply to the operational process of control device.
As preferred embodiment, a groove is arranged in the inside for tearing material device 11 open, to place quartz wafer jig, groove
Size and the size of quartz wafer jig match.
In above-mentioned technical proposal, tears the groove of material device 11 open, controlled to place quartz wafer jig, and according to quartz wafer
The size of tool adjusts the size of groove, further can be adapted for the quartz wafer jig of Different Rule size, using model
It encloses extensively.
As preferred embodiment, the diameter of the pore size and hose 12 of the first through hole 131 of connector 13 matches.
In above-mentioned technical proposal, by wrapping raw material band on connector 13, then with internal diameter similar with connector aperture
12 sets of hose on the connectors, finally fixed, can also be fixed with the article of other materials with copper wire anchor ear.
A kind of cleaning method of quartz wafer jig, specifically includes the following steps:
Step S1: quartz wafer jig being put into and is torn open in material device 11, so as to make simultaneously close to the closure conducting of switch 22
Relay 23 is powered；
Step S2: being powered using relay 23 to the time relay 24, so that solenoid valve 14 and air blower 16 work；
Step S3: the impurity of quartz wafer jig and pollutant are passed through hose 12, connector by the air inlet of air blower 16
13, in 17 inspiration air blower 16 of primary filter 15 and water pipe, and impurity and pollutant are discharged by the gas outlet of air blower 16.
As shown in Fig. 3, above-mentioned quartz wafer cleaning program is to be powered by 24V power supply device 21 to close to switch 22,
When quartz wafer jig, which is put into, to be torn open on material device 11, signal closure is received close to switch 22 and is powered, is supplied to 24V relay 23
Then electricity is powered, wherein the time relay 24, which can be set, sets 5-10s, then contacts to 24 normally open end of the 220V time relay
25 normally open end of device closure is powered, so that solenoid valve 14 and air blower 16 work, 16 air inlet air-breathing of air blower tears material device open at this time
The impurity in quartz wafer jig on 11 is with pollutant by hose 12, connector 13, just effect 15 and 17 inspiration air blast of water pipe
It in machine 16, is powered off after 24 time of the time relay, air blower 16 stops working, and jig cleaning at this time is finished and can be taken
It rises, returns to original state close to switch 22 after picking up.
Further, the industrial production time is reduced, guarantees quartz wafer purity, improves commercial production levels and yield.
As preferred embodiment, preset time is arranged in the time relay 24, so as to solenoid valve 14 and state 16 work of air blower
Make in preset time, the preset time of the time relay 24 is 5 to 10 seconds, greatly shortens cleaning by electric automatization control
Process time improves industrial output.
The foregoing is merely preferred embodiments of the present invention, are not intended to limit embodiments of the present invention and protection model
It encloses, to those skilled in the art, should can appreciate that all with made by description of the invention and diagramatic content
Equivalent replacement and obviously change obtained scheme, should all be included within the scope of the present invention.
Claims (10)
1. a kind of cleaning system of quartz wafer jig characterized by comprising
One running gear, the running gear tear material device, a hose, a connector, a solenoid valve, a primarily efficient filter open including one
Device, an air blower and a water pipe, cleaning process of the running gear to complete the cleaning system；
One control device, the control device include, a power supply device, one close to switch, a relay, a time relay,
One contactor and a socket, operational process of the control device to control the cleaning system；
The first through hole torn material device open and be connected to the connector by the hose；
Second through-hole of the connector connects the primary filter by the hose；
The solenoid valve is mounted on the third through-hole of the connector；
The contactor is connected with the control terminal of the solenoid valve；
The primary filter is connected to the air inlet of the air blower by the water pipe；
The air outlet of the air blower connects the water pipe；
It is described to be mounted on described tear open on material device close to switch；
The power supply device, it is described close to switch, the relay, the time relay, by conducting wire be consecutively connected to
The socket；
The socket is connected with the air blower by conducting wire.
2. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that described tear open is pacified on material device
Fill a vacuum meter.
3. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the power supply device it is defeated
Enter end connection alternating current；The output end of the power supply device connects the power end close to switch.
4. a kind of quartz wafer jig cleaning system according to claim 3, which is characterized in that the power supply device includes
The power supply device of 24V.
5. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that described to tear the interior of material device open
A groove is arranged in portion, to place the quartz wafer jig.
6. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the size of the groove with
The size of the quartz wafer jig matches.
7. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the first of the connector
The pore size of through-hole and the diameter of the hose match.
8. a kind of cleaning method of quartz wafer jig, for cleaning system described in the claims 1-7 any one,
It is characterized in that, comprising the following steps:
Step S1: the quartz wafer jig being put into and is torn open in material device, so that it is described close to conducting is closed the switch, make simultaneously
The relay power；
Step S2: it is often powered using the relay to the time relay, so that the solenoid valve and the air blower work
Make；
Step S3: the air blower obtain air inlet by the impurity of the quartz wafer jig and pollutant by hose, connector,
In air blower described in primary filter and water pipe inspiration, and the impurity and pollution are discharged by the gas outlet of the air blower
Object.
9. a kind of quartz wafer jig cleaning method according to claim 8, which is characterized in that the time relay is set
A preset time is set, so that the solenoid valve and the air blower work in the preset time of the time relay.
10. a kind of quartz wafer jig cleaning method according to claim 9, which is characterized in that the time relay
Preset time be 5 to 10 seconds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811496722.5A CN109482579A (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system and cleaning method of quartz wafer jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811496722.5A CN109482579A (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system and cleaning method of quartz wafer jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109482579A true CN109482579A (en) | 2019-03-19 |
Family
ID=65698353
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811496722.5A Pending CN109482579A (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system and cleaning method of quartz wafer jig |
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| CN (1) | CN109482579A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113394132A (en) * | 2021-04-29 | 2021-09-14 | 北京北方华创微电子装备有限公司 | Wafer cleaning equipment and control method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030102015A1 (en) * | 1998-01-09 | 2003-06-05 | Halbmaier David L. | Wafer container washing apparatus |
| TWI246148B (en) * | 2004-09-07 | 2005-12-21 | Powerchip Semiconductor Corp | Cleaning fixture for wafer stage of semiconductor tool |
| CN201906534U (en) * | 2010-11-16 | 2011-07-27 | 扬州晶新微电子有限公司 | Vacuum dedusting system for chemical vapor deposition technology |
| CN207787201U (en) * | 2017-12-15 | 2018-08-31 | 深圳市银浩自动化设备有限公司 | Carrier cleaning device |
| CN209697630U (en) * | 2018-12-07 | 2019-11-29 | 杭州鸿星电子有限公司 | A kind of cleaning system of quartz wafer jig |
-
2018
- 2018-12-07 CN CN201811496722.5A patent/CN109482579A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030102015A1 (en) * | 1998-01-09 | 2003-06-05 | Halbmaier David L. | Wafer container washing apparatus |
| TWI246148B (en) * | 2004-09-07 | 2005-12-21 | Powerchip Semiconductor Corp | Cleaning fixture for wafer stage of semiconductor tool |
| CN201906534U (en) * | 2010-11-16 | 2011-07-27 | 扬州晶新微电子有限公司 | Vacuum dedusting system for chemical vapor deposition technology |
| CN207787201U (en) * | 2017-12-15 | 2018-08-31 | 深圳市银浩自动化设备有限公司 | Carrier cleaning device |
| CN209697630U (en) * | 2018-12-07 | 2019-11-29 | 杭州鸿星电子有限公司 | A kind of cleaning system of quartz wafer jig |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113394132A (en) * | 2021-04-29 | 2021-09-14 | 北京北方华创微电子装备有限公司 | Wafer cleaning equipment and control method thereof |
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| CB02 | Change of applicant information |
Address after: 311113 No. 2880 Moganshan Road, Liangzhu street, Yuhang District, Hangzhou City, Zhejiang Province Applicant after: Hongxing Technology (Group) Co.,Ltd. Address before: No. 2880, Moganshan Road, Liangzhu street, Yuhang District, Hangzhou, Zhejiang 310000 Applicant before: HANGZHOU HOSONIC ELECTRONICS Co.,Ltd. |
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