CN209697630U - A kind of cleaning system of quartz wafer jig - Google Patents
A kind of cleaning system of quartz wafer jig Download PDFInfo
- Publication number
- CN209697630U CN209697630U CN201822052719.6U CN201822052719U CN209697630U CN 209697630 U CN209697630 U CN 209697630U CN 201822052719 U CN201822052719 U CN 201822052719U CN 209697630 U CN209697630 U CN 209697630U
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- quartz wafer
- cleaning system
- power supply
- wafer jig
- air blower
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Abstract
The utility model relates to cleaning device technical fields, more particularly to a kind of cleaning system of quartz wafer jig, basic cleaning system is made up of running gear and control device, it is given using power supply close to switch power supply, when quartz wafer jig, which is put into, to be torn open on material device, signal closure is received close to switch to be powered, it powers to relay and powers to time relay normally open end, contactor normally open end closure is powered, so that solenoid valve and air blower work, the impurity and pollutant torn open in the quartz wafer jig on material device at this time pass through hose, connector, in primary filter and water pipe inspiration air blower, it is powered off after the time relay time, air blower stops working, jig cleaning at this time is finished and can be picked up, it picks up the rear close switch and returns to original state.The technical program the utility model has the advantages that ensure that the electrical property for being torn open quartz wafer in piece and cleaning process by silver-colored jig after by silver, reduce wafer contamination and increase Wafer yield number.
Description
Technical field
The utility model relates to a kind of cleaning device technical field more particularly to a kind of cleaning systems of quartz wafer jig
System.
Background technique
With the development of semiconductor technology, people are higher and higher to some semiconductor materials requirement of electronic technology field,
Therefore when quartz wafer processing, guarantee that the purity requirement of quartz wafer is also more and more important.
In existing production technology, tear that piece cleaning is relatively complicated, and the common mode that retracts is open to the chip jig of miniaturization
It will directly be removed by hand by silver-colored jig upper cover plate, and then will hold being taken out by silver-colored mask plate for chip, this way compares appearance
It is easier that chip is polluted by being fallen off on silver-colored jig upper cover plate by the silver bits after silver, simultaneously as the chip of miniaturization is controlled by silver
The registration and precise requirements of tool are high, be so easy for occurring by after silver-colored process by silver-colored mask plate and upper cover plate and lower cover
Plate is clung, and then generates strip phenomenon, and the error of electrical property reduces Wafer yield quantity when increasing quartz wafer measurement.
Summary of the invention
To the above problem, the utility model proposes a kind of quartz wafer jig cleaning systems, it is intended to guarantee the stone after by silver
English chip jig tears the electrical property of quartz wafer in piece and cleaning process open, reduces wafer contamination and increases Wafer yield number.
Specific technical solution is as follows:
A kind of cleaning system of quartz wafer jig, including:
One running gear, the running gear tear the just effect of material device, a hose, a connector, a solenoid valve, one open including one
Filter, an air blower and a water pipe；
One control device, the control device include a power supply device, close a switch, a relay, a time relay
Device, a contactor and a socket；
The first through hole torn material device open and be connected to the connector by the hose；
Second through-hole of the connector connects the primary filter by the hose；
The solenoid valve is mounted on the third through-hole of the connector；
The contactor is connected with the control terminal of the solenoid valve；
The primary filter is connected to the air inlet of the air blower by the water pipe；
The air outlet of the air blower connects the water pipe；
It is described to be mounted on described tear open on material device close to switch；
The power supply device, close switch, the relay, the time relay are sequentially connected by conducting wire
To the extremely socket；
The socket is connected with the air blower by conducting wire.
Further, described tear open also installs a vacuum meter on material device.
Further, the input terminal of the power supply device connects alternating current, connects described in the output end connection of the power supply device
The power end closely switched.
Further, the power supply device includes the power supply device of 24V.
Further, a groove is arranged in the inside for tearing material device open.
Further, the size of the groove and the size of the quartz wafer jig match.
Further, the pore size of the first through hole of the connector and the diameter of the hose match.
Further, a preset time is arranged in the time relay, so that the solenoid valve and the air blower work
In in the preset time of the time relay.
Further, the preset time of the time relay is 5 to 10 seconds.
Above-mentioned technical proposal the utility model has the advantages that
In quartz wafer manufacturing process, the pollution of chip is effectively reduced, quartz crystal purity is improved, ensure that quartz-crystal
The electrical property of piece increases the quantity of Wafer yield, reduces industrial production cost.
Detailed description of the invention
A kind of attached drawing 1: schematic diagram of the cleaning system of quartz wafer jig；
A kind of attached drawing 2: electric diagram of the cleaning system of quartz wafer jig.
In attached drawing: 11, tearing material device open；12, hose；13, connector；14, solenoid valve；15, primary filter；16, air blast
Machine；17, water pipe；21, power supply device；22, close to switch；23, relay；24, the time relay；25, contactor；26, socket；
131, the first through hole of connector；132, the second through-hole of connector；133, the third through-hole of connector；3, vacuum meter.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are in the premise for not making creative work
Under every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
With reference to the accompanying drawing 1 and attached drawing 2 and specific embodiment the utility model is described in further detail, but not as this reality
With novel restriction.
A kind of cleaning system of quartz wafer jig as shown shown in Figure 1 and Figure 2, including:
One running gear, running gear include: tear open material device 11, a hose 12, a connector 13, a solenoid valve 14,
One primary filter 15, an air blower 16 and a water pipe 17, cleaning process of the running gear to complete cleaning system；
One control device, control device include: a power supply device 21, one close to switch 22, a relay 23, the time after
Electric appliance 24, a contactor 25 and a socket 26, operational process of the control device to control running gear；
Tear the first through hole 131 that material device 11 is connected to connector 13 by hose 12 open；
Second through-hole 132 of connector connects primary filter 15 by hose 12；
Solenoid valve 14 is mounted on the third through-hole 133 of connector 13 to be used to control the logical of air and close；
Contactor 25 is connected with the control terminal of solenoid valve 14, to control the on-off of solenoid valve；
Primary filter 15 is connected to the air inlet of air blower 16 by water pipe 17；
The air outlet of air blower 16 connects water pipe 17；
It is mounted on and is torn open on material device 11 close to switch 22, led according to close to the signal that switch 22 receives to control route
It is logical；
Power supply device 21, close to switch 22, relay 23, the time relay 24, be consecutively connected to socket by conducting wire
26；
Socket 26 is connected with air blower 16 by conducting wire.
Above-mentioned quartz wafer cleaning program is to be powered by 24V power supply device 21 to close to switch 22, when quartz wafer is controlled
Tool is put into when tearing open on material device 11, is received signal closure close to switch 22 and is powered, powers to 24V relay 23, then to 220V
24 normally open end of time relay power supply, wherein the time relay 24, which can be set, sets 5-10s, and then 25 normally open end of contactor is closed
It closes and is powered, so that solenoid valve 14 and air blower 16 work, 16 air inlet air-breathing of air blower tears the quartz-crystal on material device 11 open at this time
Impurity and pollutant in piece jig is by waiting then in hose 12, connector 13, first effect 15 and 17 inspiration air blower 16 of water pipe
Between power off after 24 time of relay, air blower 16 stops working, and jig cleaning at this time is finished and can be picked up, and approaches after picking up
Switch 22 returns to original state；Artificial process bring impurity pollution quartz wafer is effectively avoided, ensure that quartz wafer
Quality.
As preferred embodiment, tear open on material device 11 through punching installation vacuum meter 3.
In above-mentioned technical proposal, by punching installation vacuum meter 3 for monitoring the suction of air blower 16 on tearing material device 11 open
Power, determines whether air blower 16 needs to maintain using the pressure value and preset pressure value of real-time monitoring, when real-time monitoring
When pressure value is less than preset value, illustrates the work of air blower 16 too long, need to be maintained, convenient for operation better further below.
As preferred embodiment, the input terminal of power supply device 21 connects alternating current, and the output end of power supply device 21 connects
The power end of nearly switch 22 is given close to switch power supply, and power supply device 21 includes the power supply device of 24V.
In above-mentioned technical proposal, power supply device 21 selects the power supply device of 24V, by alternating current 220V electricity to convert voltage
Pressure is converted to 24V voltage, to provide power supply to the operational process of control device.
As preferred embodiment, a groove is arranged in the inside for tearing material device 11 open, to place quartz wafer jig, groove
Size and the size of quartz wafer jig match.
In above-mentioned technical proposal, tears the groove of material device 11 open, controlled to place quartz wafer jig, and according to quartz wafer
The size of tool adjusts the size of groove, further can be adapted for the quartz wafer jig of Different Rule size, using model
It encloses extensively.
As preferred embodiment, the diameter of the pore size and hose 12 of the first through hole 131 of connector 13 matches.
In above-mentioned technical proposal, by wrapping raw material band on connector 13, then with internal diameter similar with connector aperture
12 sets of hose on the connectors, finally fixed, can also be fixed with the article of other materials with copper wire anchor ear.
As preferred embodiment, preset time is arranged in the time relay 24, so as to solenoid valve 14 and state 16 work of air blower
Make in the preset time of the time relay, the preset time of the time relay 24 is 5 to 10 seconds, is controlled by electric automatization
The cleaning process time is greatly shortened, industrial output is improved.
The foregoing is merely the utility model preferred embodiment, be not intended to limit the embodiments of the present invention and
Protection scope should can appreciate that all in the utility model specification and diagram to those skilled in the art
Hold made equivalent replacement and obviously change obtained scheme, the protection model of the utility model should all be included in
In enclosing.
Claims (9)
1. a kind of cleaning system of quartz wafer jig characterized by comprising
One running gear, the running gear tear material device, a hose, a connector, a solenoid valve, a primarily efficient filter open including one
Device, an air blower and a water pipe；
One control device, the control device include, a power supply device, one close to switch, a relay, a time relay,
One contactor and a socket；
The first through hole torn material device open and be connected to the connector by the hose；
Second through-hole of the connector connects the primary filter by the hose；
The solenoid valve is mounted on the third through-hole of the connector；
The contactor is connected with the control terminal of the solenoid valve；
The primary filter is connected to the air inlet of the air blower by the water pipe；
The air outlet of the air blower connects the water pipe；
It is described to be mounted on described tear open on material device close to switch；
The power supply device, it is described close to switch, the relay, the time relay, by conducting wire be consecutively connected to
The socket；
The socket is connected with the air blower by conducting wire.
2. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that described tear open is pacified on material device
Fill a vacuum meter.
3. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the power supply device it is defeated
Enter end connection alternating current；
The output end of the power supply device connects the power end close to switch.
4. a kind of quartz wafer jig cleaning system according to claim 3, which is characterized in that the power supply device includes
The power supply device of 24V.
5. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that described to tear the interior of material device open
A groove is arranged in portion.
6. a kind of quartz wafer jig cleaning system according to claim 5, which is characterized in that the size of the groove with
The size of quartz wafer jig matches.
7. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the first of the connector
The pore size of through-hole and the diameter of the hose match.
8. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the time relay is set
A preset time is set, so that the solenoid valve and the air blower work in the preset time of the time relay.
9. a kind of quartz wafer jig cleaning system according to claim 1, which is characterized in that the time relay
Preset time is 5 to 10 seconds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822052719.6U CN209697630U (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system of quartz wafer jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822052719.6U CN209697630U (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system of quartz wafer jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209697630U true CN209697630U (en) | 2019-11-29 |
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ID=68637340
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822052719.6U Active CN209697630U (en) | 2018-12-07 | 2018-12-07 | A kind of cleaning system of quartz wafer jig |
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| Country | Link |
|---|---|
| CN (1) | CN209697630U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109482579A (en) * | 2018-12-07 | 2019-03-19 | 杭州鸿星电子有限公司 | A kind of cleaning system and cleaning method of quartz wafer jig |
-
2018
- 2018-12-07 CN CN201822052719.6U patent/CN209697630U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109482579A (en) * | 2018-12-07 | 2019-03-19 | 杭州鸿星电子有限公司 | A kind of cleaning system and cleaning method of quartz wafer jig |
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Address after: No. 2880, Moganshan Road, Liangzhu street, Yuhang District, Hangzhou, Zhejiang 310000 Patentee after: Hongxing Technology (Group) Co.,Ltd. Address before: No. 2880, Moganshan Road, Liangzhu street, Yuhang District, Hangzhou, Zhejiang 310000 Patentee before: HANGZHOU HOSONIC ELECTRONICS Co.,Ltd. |