CN201858417U - Gas valve device - Google Patents

Gas valve device Download PDF

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Publication number
CN201858417U
CN201858417U CN2010202645431U CN201020264543U CN201858417U CN 201858417 U CN201858417 U CN 201858417U CN 2010202645431 U CN2010202645431 U CN 2010202645431U CN 201020264543 U CN201020264543 U CN 201020264543U CN 201858417 U CN201858417 U CN 201858417U
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CN
China
Prior art keywords
gas
valve device
solenoid valve
electromagnetic coil
tutorial light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010202645431U
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Chinese (zh)
Inventor
王东海
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Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
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Publication date
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Priority to CN2010202645431U priority Critical patent/CN201858417U/en
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Publication of CN201858417U publication Critical patent/CN201858417U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a gas valve device for controlling connection and disconnection of a semiconductor process gas pipeline, wherein the process gas pipeline is connected with a gas cylinder and gas utilization equipment respectively; the gas valve device comprises an electromagnetic valve and an indicating lamp which is electrically connected with the electromagnetic valve; when an electromagnetic coil of the electromagnetic valve is in a power-up state, the indicating lamp is on, and when the electromagnetic coil is in the power-off state, the indicating lamp is off, so that whether the change of the state of the electromagnetic coil conforms to the action requirement of the semiconductor process gas pipeline can be seen intuitively; and in addition, when the semiconductor process gas pipeline generates faults and needs to be overhauled, the state of the electromagnetic valve can be judged intuitively by being on and off of the indicating lamp. Therefore, the gas valve device is simple and convenient, the working efficiency of solving the problems and eliminating faults is improved, and the economic loss caused by a reason that the maintenance of the electromagnetic valve influences the normal production of an inner chip of a semiconductor processing factory is avoided.

Description

A kind of gas valve device
Technical field
The utility model relates to process gas supply equipment in the semiconductor production, relates in particular to a kind of gas valve device.
Background technique
In production process of semiconductor, need kind surplus a large amount of bottled special (poisonous) high-purity gas 40,, cause toxic gas that human body is produced harm because traditional manually operated valve needs the manual tune valve switch; And solenoid valve does not need manual operation by the switch of automatic electrical control system control valve.Therefore, solenoid valve has obtained using widely in the production process of semiconductor gas supply equipment.
Structure about existing solenoid valve please refer to Fig. 1 to Fig. 2, wherein, Fig. 1 is the front view of existing electromagnetic valve structure, Fig. 2 is the plan view of existing electromagnetic valve structure, extremely shown in Figure 2 as Fig. 1, existing solenoid valve comprises valve seat 1, spool and electromagnetic coil 4, described valve seat 1 is provided with suction port 2, air outlet 3 and through hole, described suction port 2 is connected mutually with described air outlet 3 and described through hole, described spool inserts in the described valve seat 1 by described through hole, cut off described suction port 2 and described air outlet 3, and keep sealing between described spool and the described through hole, prevent that gas from spilling by described through hole, described suction port 2 links to each other with gas cylinder by suction tude joint 8, and described outlet pipe 3 links to each other with gas equipment by steam outlet pipe joint 9; The inside of described electromagnetic coil 4 is provided with iron core 5, and described iron core 5 links to each other with described spool; And existing solenoid valve also comprises electric wire box 6 and supply terminals 7, and described electromagnetic coil 4 links to each other with described supply terminals 7 by electric wire, and described electric wire places in the described electric wire box 6, and described supply terminals 7 links to each other with external power supply.
The principle of existing solenoid valve is:
When described supply terminals 7 is connected power supply, described electromagnetic coil 4 obtains electric current, and generation magnetic force, thereby driving described iron core 5 moves upward, because described iron core 5 links to each other with described spool, thereby described spool also moves up, producing relative position between described like this spool and the electromagnetic valve body 1 moves, thereby described suction port 2 is connected with described air outlet 3, described solenoid valve is opened, and the gas in the gas cylinder flow in the described gas equipment by described suction port 2 and described air outlet 3;
When described supply terminals 7 disconnected with described power supply, described spool descended because of action of gravity, cut off described suction port 2 and described air outlet 3, described closed electromagnetic valve.
Yet existing solenoid valve does not all have the automatic display unit of power-on switch state.When air feed equipment breaks down the needs maintenance, trouble shoot for solenoid valve, whether can only find its circuit connection terminal by looking into circuit diagram or taking relevant cover plate by rule of thumb apart, measuring described electromagnetic coil 4 by universal meter again has the method for voltage existence to check that whether it is in normal state.The on off state of checking the gas solenoid supply valve in this way promptly bothers and loses time, and is easy to influence the ordinary production of chip in the semiconductor plants, causes economic loss.
Therefore, be necessary existing solenoid valve is improved.
The model utility content
The purpose of this utility model is to provide a kind of gas valve device, there is not the automatic display unit of power-on switch state to solve existing solenoid valve, thereby cause the trouble shoot trouble of solenoid valve, lose time, and be easy to influence the ordinary production of chip in the semiconductor plants, cause the problem of economic loss.
For addressing the above problem, the utility model proposes a kind of gas valve device, be used to control the break-make of semiconductor process gases pipeline, wherein, described process gas pipeline connects gas cylinder and gas equipment respectively, this gas valve device comprises solenoid valve and tutorial light, and described tutorial light and described solenoid valve are electrically contacted.
Optionally, described solenoid valve comprises:
Valve seat, described valve seat is provided with suction port, air outlet and through hole, and described suction port and described air outlet and described through hole are connected mutually;
Spool, described spool inserts in the described valve seat by described through hole, cuts off described suction port and described air outlet, and keeps sealing between described spool and the described through hole;
Electromagnetic coil is provided with iron core in the described electromagnetic coil, and described iron core links to each other with described spool, and described electromagnetic coil and described tutorial light are electrically contacted.
Optionally, described solenoid valve also comprises electric wire box and supply terminals, and described electromagnetic coil links to each other with described supply terminals by electric wire, and described electric wire places in the described electric wire box, and described supply terminals links to each other with external power supply.
Optionally, described tutorial light is arranged on the described electric wire box.
Optionally, described solenoid valve also comprises suction tude joint and steam outlet pipe joint, and described suction tude joint connects described suction port and described gas cylinder, and described steam outlet pipe joint connects described air outlet and described gas equipment.
Optionally, described solenoid valve also comprises lampshade, and described lampshade is arranged at the outside of described tutorial light, surrounds described tutorial light.
Optionally, the material of described lampshade is a transparent material.
Compared with prior art, the gas valve device that the utility model provides comprises solenoid valve and tutorial light, described tutorial light and described solenoid valve are electrically contacted, when the electromagnetic coil of described solenoid valve during in "on" position described tutorial light bright, when described electromagnetic coil during not in "on" position tutorial light do not go out; Thereby whether the change of state of the described electromagnetic coil that can visually see is consistent with the action request of semiconductor process gases pipeline; And when the semiconductor process gases pipeline breaks down the needs maintenance, the state of solenoid valve can be very intuitively judged with not working by the bright of described tutorial light, simple and convenient, improved the working efficiency of dealing with problems and eliminating fault, avoided influencing the economic loss that the ordinary production of chip causes in the semiconductor plants because of the solenoid valve maintenance.
Description of drawings
Fig. 1 is the front view of existing electromagnetic valve structure;
Fig. 2 is the plan view of existing electromagnetic valve structure;
The front view of the gas valve device that Fig. 3 provides for the utility model embodiment;
The plan view of the gas valve device that Fig. 4 provides for the utility model embodiment;
The schematic diagram that electromagnetic coil in the gas valve device that Fig. 5 provides for the utility model embodiment and tutorial light electrically connect.
Embodiment
Below in conjunction with the drawings and specific embodiments the gas valve device that the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only be used for conveniently, aid illustration the utility model embodiment's purpose lucidly.
Core concept of the present utility model is, a kind of gas valve device is provided, be used to control the break-make of semiconductor process gases pipeline, wherein, described process gas pipeline connects gas cylinder and gas equipment respectively, and this gas valve device comprises solenoid valve and tutorial light, and described tutorial light and described solenoid valve are electrically contacted, when the electromagnetic coil of described solenoid valve during in "on" position described tutorial light bright, when described electromagnetic coil during not in "on" position tutorial light do not go out; Thereby whether the change of state of the described electromagnetic coil that can visually see is consistent with the action request of semiconductor process gases pipeline; And when the semiconductor process gases pipeline breaks down the needs maintenance, the state of solenoid valve can be very intuitively judged with not working by the bright of described tutorial light, simple and convenient, improved the working efficiency of dealing with problems and eliminating fault, avoided influencing the economic loss that the ordinary production of chip causes in the semiconductor plants because of the solenoid valve maintenance.
Please refer to Fig. 3 to Fig. 4, wherein, the front view of the gas valve device that Fig. 3 provides for the utility model embodiment, the plan view of the gas valve device that Fig. 4 provides for the utility model embodiment, extremely shown in Figure 4 by Fig. 3, described gas valve device comprises solenoid valve and tutorial light 900, and described tutorial light 900 is electrically contacted with described solenoid valve.
Further, described solenoid valve comprises:
Valve seat 100, described valve seat 100 is provided with suction port 200, air outlet 300 and through hole, and described suction port 200 is connected mutually with described air outlet 300 and described through hole;
Spool, described spool inserts in the described valve seat 100 by described through hole, cuts off described suction port 200 and described air outlet 300, and keeps sealing between described spool and the described through hole, prevents that gas from spilling by described through hole;
Electromagnetic coil 400 is provided with iron core 500 in the described electromagnetic coil 400, and described iron core 500 links to each other with described spool, and described electromagnetic coil 400 is electrically contacted with described tutorial light 900; Annexation for described electromagnetic coil 400 and described tutorial light 900 please refer to Fig. 5, the schematic diagram that electromagnetic coil in the gas valve device that Fig. 5 provides for the utility model embodiment and tutorial light electrically connect, as shown in Figure 5, described electromagnetic coil 400 is electrically contacted with described tutorial light 900, make when described electromagnetic coil 400 during in "on" position described tutorial light 900 bright, when described electromagnetic coil 400 described tutorial light 900 less than in "on" position the time does not go out; Thereby whether the change of state of the described electromagnetic coil 400 that can visually see is consistent with the action request of semiconductor process gases pipeline; And when the semiconductor process gases pipeline breaks down when needing maintenance, the state of solenoid valve can be very intuitively judged with not working by the bright of described tutorial light 900.
Further, described solenoid valve also comprises electric wire box 600 and supply terminals 700, and described electromagnetic coil 400 links to each other with described supply terminals 700 by electric wire, and described electric wire places in the described electric wire box 600, and described supply terminals 700 links to each other with external power supply.
Further, described tutorial light 900 is arranged on the described electric wire box 600, thereby saves the space, and makes things convenient for line.
Further, described solenoid valve also comprises suction tude joint 800 and steam outlet pipe joint 801, and described suction tude joint 800 connects described suction port 200 and described gas cylinder, and described steam outlet pipe joint 801 connects described air outlet 300 and described gas equipment.
Further, described solenoid valve also comprises lampshade 901, and described lampshade 901 is arranged at the outside of described tutorial light 900, surrounds described tutorial light 900, thereby protects described tutorial light 900, prevents that described tutorial light 900 from damaging because of other object collision.
Further, the material of described lampshade 901 is a transparent material, so that clearly observe the state of described tutorial light 900.
The using method of the gas valve device that the utility model embodiment provides is:
When gas equipment needs using gases, described supply terminals 700 and external power supply are connected, described electromagnetic coil 400 energisings, and generation magnetic force, thereby driving described iron core 500 moves upward, because described iron core 500 links to each other with described spool, thereby described spool also moves up, producing relative position between described like this spool and the described valve seat 100 moves, thereby described suction port 200 is connected with described air outlet 300, described solenoid valve is opened, and the gas in the gas cylinder flow in the described gas equipment by described suction port 200 and described air outlet 300;
When gas equipment does not need using gases, described supply terminals 700 and external power supply are disconnected, described spool descends because of action of gravity, cuts off suction port 200 and described air outlet 300, described closed electromagnetic valve;
Simultaneously, when described electromagnetic coil 400 is in "on" position, described tutorial light 900 is bright, when described electromagnetic coil 400 is in off-position, described tutorial light 900 goes out, thereby can judge the power on/off of described electromagnetic coil 400 according to the state of tutorial light 900, and judge further whether the change of state of described electromagnetic coil 400 is consistent with the action request of semiconductor process gases pipeline;
And when the semiconductor process gases pipeline broke down the needs maintenance, the state of described solenoid valve can be judged by the light on and off of described tutorial light 900 very intuitively, thereby helped failure judgement and elimination.
In sum, the utility model provides a kind of gas valve device, be used to control the break-make of semiconductor process gases pipeline, wherein, described process gas pipeline connects gas cylinder and gas equipment respectively, and this gas valve device comprises solenoid valve and tutorial light, and described tutorial light and described solenoid valve are electrically contacted, when the electromagnetic coil of described solenoid valve during in "on" position described tutorial light bright, when described electromagnetic coil during not in "on" position tutorial light do not go out; Thereby whether the change of state of the described electromagnetic coil that can visually see is consistent with the action request of semiconductor process gases pipeline; And when the semiconductor process gases pipeline breaks down the needs maintenance, the state of solenoid valve can be very intuitively judged with not working by the bright of described tutorial light, simple and convenient, improved the working efficiency of dealing with problems and eliminating fault, avoided influencing the economic loss that the ordinary production of chip causes in the semiconductor plants because of the solenoid valve maintenance.
Obviously, those skilled in the art can carry out various changes and modification to model utility and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims (7)

1. gas valve device is used to control the break-make of semiconductor process gases pipeline, wherein, described process gas pipeline connects gas cylinder and gas equipment respectively, it is characterized in that this gas valve device comprises solenoid valve and tutorial light, described tutorial light and described solenoid valve are electrically contacted.
2. gas valve device as claimed in claim 1 is characterized in that, described solenoid valve comprises:
Valve seat, described valve seat is provided with suction port, air outlet and through hole, and described suction port and described air outlet and described through hole are connected mutually;
Spool, described spool inserts in the described valve seat by described through hole, cuts off described suction port and described air outlet, and keeps sealing between described spool and the described through hole;
Electromagnetic coil is provided with iron core in the described electromagnetic coil, and described iron core links to each other with described spool, and described electromagnetic coil and described tutorial light are electrically contacted.
3. gas valve device as claimed in claim 2, it is characterized in that described solenoid valve also comprises electric wire box and supply terminals, described electromagnetic coil links to each other with described supply terminals by electric wire, described electric wire places in the described electric wire box, and described supply terminals links to each other with external power supply.
4. gas valve device as claimed in claim 3 is characterized in that, described tutorial light is arranged on the described electric wire box.
5. gas valve device as claimed in claim 2, it is characterized in that, described solenoid valve also comprises suction tude joint and steam outlet pipe joint, and described suction tude joint connects described suction port and described gas cylinder, and described steam outlet pipe joint connects described air outlet and described gas equipment.
6. gas valve device as claimed in claim 1 is characterized in that described solenoid valve also comprises lampshade, and described lampshade is arranged at the outside of described tutorial light, surrounds described tutorial light.
7. gas valve device as claimed in claim 6 is characterized in that, the material of described lampshade is a transparent material.
CN2010202645431U 2010-07-20 2010-07-20 Gas valve device Expired - Fee Related CN201858417U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010202645431U CN201858417U (en) 2010-07-20 2010-07-20 Gas valve device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010202645431U CN201858417U (en) 2010-07-20 2010-07-20 Gas valve device

Publications (1)

Publication Number Publication Date
CN201858417U true CN201858417U (en) 2011-06-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010202645431U Expired - Fee Related CN201858417U (en) 2010-07-20 2010-07-20 Gas valve device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102878323A (en) * 2012-09-07 2013-01-16 宁波市佳音机电科技有限公司 Solenoid valve with adjustable flow
CN107504018A (en) * 2016-06-14 2017-12-22 波凯特有限及两合公司 Valve module

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102878323A (en) * 2012-09-07 2013-01-16 宁波市佳音机电科技有限公司 Solenoid valve with adjustable flow
CN102878323B (en) * 2012-09-07 2015-07-01 宁波市佳音机电科技有限公司 Solenoid valve with adjustable flow
CN107504018A (en) * 2016-06-14 2017-12-22 波凯特有限及两合公司 Valve module
CN107504018B (en) * 2016-06-14 2021-01-05 波凯特有限及两合公司 Valve assembly

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C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130313

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TR01 Transfer of patent right

Effective date of registration: 20130313

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110608

Termination date: 20180720

CF01 Termination of patent right due to non-payment of annual fee