CN109482557B - Mask plate cleaning device and cleaning method thereof - Google Patents
Mask plate cleaning device and cleaning method thereof Download PDFInfo
- Publication number
- CN109482557B CN109482557B CN201811590865.2A CN201811590865A CN109482557B CN 109482557 B CN109482557 B CN 109482557B CN 201811590865 A CN201811590865 A CN 201811590865A CN 109482557 B CN109482557 B CN 109482557B
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- China
- Prior art keywords
- mask
- fixing rod
- frame
- fixing
- guide frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000007921 spray Substances 0.000 claims abstract description 40
- 238000011010 flushing procedure Methods 0.000 claims abstract description 36
- 238000005507 spraying Methods 0.000 claims description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 238000007664 blowing Methods 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 238000005201 scrubbing Methods 0.000 claims description 6
- 239000004744 fabric Substances 0.000 claims description 5
- 238000009736 wetting Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
- B08B1/143—Wipes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
The application discloses a mask plate cleaning device and a cleaning method thereof, wherein the device comprises a base station fixing frame, a mask plate fixing frame, a spray flushing mechanism and a mask plate fixing frame rotary driving mechanism; the mask plate fixing frame is used for clamping the mask plate, is rectangular and has width and length which can be adaptively adjusted according to the size of the mask plate; the spray flushing mechanism comprises a first spray flushing mechanism and a second spray flushing mechanism, and the first spray flushing mechanism and the second spray flushing mechanism can be selectively opened to spray the mask; the mask fixing frame rotary driving mechanism can drive the mask fixing frame to rotate around the horizontal central axis of the mask fixing frame at a set speed, and the mask simple cleaning device can be operated by a single person, so that the mask fixing frame is prevented from being in artificial direct contact, and secondary pollution of the mask is avoided.
Description
Technical Field
The application particularly relates to a mask plate cleaning device and a mask plate cleaning method.
Background
With the rapid development of the modern 3C electronic industry, the processing technology of micro-nano structures in the back panel texture, flat panel display and integrated circuit board of mobile phones is more critical, and mask exposure is one of them. The mask plate used in mask exposure is usually formed by plating a chromium layer on quartz glass and making a desired pattern by an exposure etching process. After the mask is stained, an exposure experiment cannot be performed, otherwise, the stained marks on the mask can be transferred to the photoetching plate without reservation. Therefore, cleaning of the dirty mask is of great importance.
Disclosure of Invention
In order to solve the problem of mask cleaning, the application relates to a mask cleaning device and a mask cleaning method, which can conveniently and effectively clean a mask.
In order to solve the technical problems, the aim of the application is realized as follows:
a mask plate cleaning device comprises a base station fixing frame, a mask plate fixing frame, a spray flushing mechanism and a mask plate fixing frame rotary driving mechanism;
the mask fixing frame is used for clamping the mask, is rectangular and has width and length which can be adaptively adjusted according to the size of the mask;
the spraying and flushing mechanism comprises a first spraying and flushing mechanism and a second spraying and flushing mechanism, and the first spraying and flushing mechanism and the second spraying and flushing mechanism can be selectively opened to spray the mask;
the mask fixing frame rotary driving mechanism can drive the mask fixing frame to rotate around the horizontal central axis of the mask fixing frame at a set speed.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the mask fixing frame is formed by encircling a first mask fixing rod, a first fixing rod guide frame, a second mask fixing rod, a second fixing rod guide frame, a third mask fixing rod and a third fixing rod guide frame after being sequentially connected, and fixing clamping grooves are formed in the inner sides of the first mask fixing rod, the second mask fixing rod and the third mask fixing rod, and edges of the mask are received in the fixing clamping grooves.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the mask fixing device comprises a first fixing rod guide frame, a second fixing rod guide frame and a third fixing rod guide frame, and is characterized by further comprising a locking mechanism, wherein the first fixing rod guide frame, the second fixing rod guide frame and the third fixing rod guide frame are provided with guide grooves, the first mask fixing rod, the second mask fixing rod and the third mask fixing rod can slide in the guide grooves in the first fixing rod guide frame, the second fixing rod guide frame and the third fixing rod guide frame at the connecting ends of the first mask fixing rod, the second mask fixing rod and the third mask fixing rod respectively, and the locking mechanism can selectively limit the sliding of the first fixing rod guide frame, the second fixing rod guide frame and the third fixing rod guide frame.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the locking mechanism comprises a plurality of locking screws, the first fixing rod guide frame, the second fixing rod guide frame and the third fixing rod guide frame are respectively provided with threaded holes on the side walls which are close to the two end parts and vertical to the axis of the first fixing rod guide frame, the locking screws are in threaded connection with the threaded holes, and the first mask fixing rod, the second mask fixing rod and the third mask fixing rod can be tightly propped in the guide grooves by tightening the locking screws.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the first mask fixing rod and the third mask fixing rod are right-angle-shaped and adjacent, and the second mask fixing rod is strip-shaped and positioned on the opposite sides of the first mask fixing rod and the third mask fixing rod.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the first spraying and flushing mechanism and the second spraying and flushing mechanism both comprise at least one spraying pipe extending along the length direction of the mask fixing frame and a plurality of nozzles fixed on the spraying pipe, and the nozzles face the mask fixing frame.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the mask fixing frame is provided with a first working state and a second working state, the first working state is a static state in which an included angle of 30-40 degrees is formed between the mask fixing frame and a horizontal plane, the second working state is that the mask fixing frame is driven by a mask fixing frame rotating driving mechanism to rotate at a set rotating speed, and the mask fixing frame can be switched between the two working states.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the first spraying and flushing mechanism and the second spraying and flushing mechanism are selectively opened when the mask fixing frame is in a first working state or a second working state.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the mask plate fixing device comprises a mask plate fixing frame, and is characterized by further comprising an air blowing device, wherein the air blowing device comprises an air blowing pipe and a plurality of air outlet nozzles uniformly distributed on the air blowing pipe, and the air outlet nozzles face the mask plate fixing frame.
The above-mentioned scheme is based on and is a preferable scheme of the above-mentioned scheme: the cleaning method based on the mask cleaning device is characterized by comprising the following steps of: comprises the following steps
S1: placing the mask plate at a preset position to enable the first surface to face cleaning staff;
s2: scrubbing the first surface of the mask after wetting alcohol by adopting dust-free cloth;
s3: rotating the mask plate to switch the second surface to the preset position in the step S1;
s4: scrubbing the second surface of the mask after wetting alcohol by adopting dust-free cloth;
s5: controlling the mask plate to rotate along the central axis of the mask plate at a set rotating speed, and simultaneously flushing the first surface and the second surface by deionized water;
s6: and (5) drying the mask plate processed in the step (S5) through air flow.
Compared with the prior art, the application has the following outstanding and beneficial technical effects: the simple mask plate cleaning device can be completed by single operation, and the secondary pollution of the mask plate is avoided due to the fact that the artificial direct contact is avoided.
Drawings
FIG. 1 is a perspective view of the overall structure of the present application;
FIG. 2 is a front elevational view of the overall structure of the present application;
FIG. 3 is a left side elevational view of the overall structure of the present application;
FIG. 4 is a top view of the overall structure of the present application;
FIG. 5 is a schematic view of the structure of the first reticle fixing stem and the third reticle fixing stem;
FIG. 6 is a schematic view of another angle structure of the first reticle fixation bar and the third reticle fixation bar;
FIG. 7 is a schematic view of a second reticle fixation bar;
fig. 8 is a schematic diagram of a second mask fixing rod fixing slot structure.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions in the embodiments will be clearly and completely described with reference to the drawings in the embodiments,
a mask plate cleaning device comprises a base station fixing frame 10, a mask plate fixing frame 20, a spray flushing mechanism 30 and a mask plate fixing frame rotary driving mechanism 40;
the mask fixing frame 20 is used for clamping a mask, is rectangular and has a width and a length which can be adaptively adjusted according to the size of the mask;
specifically, in this embodiment, the mask fixing frame 20 is formed by sequentially connecting a first mask fixing rod 21, a first fixing rod guide frame 22, a second mask fixing rod 23, a second fixing rod guide frame 24, a third mask fixing rod 25 and a third fixing rod guide frame 26, and then the first mask fixing rod 21, the second mask fixing rod 23 and the third mask fixing rod 25 are all provided with fixing slots, the edges of the mask are received in the fixing slots 212/232, specifically, the thickness of the mask is generally about 3mm, and then the width of the fixing slots 212/232 should not be less than 3mm.
The device further comprises a locking mechanism 50, wherein the first fixing rod guide frame 22, the second fixing rod guide frame 24 and the third fixing rod guide frame 26 are provided with guide grooves, the first mask fixing rod 21, the second mask fixing rod 23 and the third mask fixing rod 25 can slide in the guide grooves in the first fixing rod guide frame 22, the second fixing rod guide frame 24 and the third fixing rod guide frame 26 at the connecting ends respectively, so that the width and the length directions of the mask fixing frame 20 can be adjusted, the mask can be clamped and fixed conveniently, the adjustable range of the mask fixing frame is 20-35cm in the embodiment, and the device is suitable for conventional masks with the width and the length of 7 inches and 9 inches; the locking mechanism 50 selectively limits the sliding movement of the first, second, and third rod guide 22, 24, 26.
The locking mechanism 50 comprises a plurality of locking screws 51, the first fixing rod guide frame 22, the second fixing rod guide frame 24 and the third fixing rod guide frame 26 are respectively provided with threaded holes on the side walls which are close to the two end parts and vertical to the axis of the fixing rod guide frame, the locking screws 51 are in threaded connection with the threaded holes, and the first mask fixing rod 21, the second mask fixing rod 23 and the third mask fixing rod 25 can be tightly propped in the guide grooves 221/241 by screwing the locking screws 51.
The first mask fixing rod 21 and the third mask fixing rod 25 are right-angle-shaped and adjacent, the second mask fixing rod 23 is strip-shaped and located on the opposite sides of the first mask fixing rod 21 and the third mask fixing rod 25, three-point supports are formed on the mask, and the three-point supports comprise two corners and one side edge of the opposite sides of the mask.
Specifically, when each locking screw 51 is unscrewed, the first mask fixing rod 21, the second mask fixing rod 23 and the third mask fixing rod 25 can be respectively pushed in or pulled out inwards along the guide grooves on the first fixing rod guide frame 22, the second fixing rod guide frame 24 and the third fixing rod guide frame 26, so that the width and the length of the mask fixing frame 20 can be adjusted to be matched with the mask, the mask is clamped in the fixing clamping groove, at the moment, the locking screw 51 is screwed, the movement of the first mask fixing rod 21, the second mask fixing rod 23 and the third mask fixing rod 25 is limited, the two right angles and the side edges of the opposite sides of the mask are firmly clamped and cannot shake, the clamping and fixing of the mask are completed, the structure is simple, the clamping is convenient, the use is reliable, and the equipment investment cost is low.
The spray rinsing mechanism 30 comprises a first spray rinsing mechanism 31 and a second spray rinsing mechanism 32, and the first spray rinsing mechanism 31 and the second spray rinsing mechanism 32 can be selectively opened to spray the mask; in this embodiment, the first spray rinsing mechanism 31 and the second spray rinsing mechanism 32 each include at least one spray pipe extending along the length direction of the mask fixing frame 20 and a plurality of nozzles fixed on the spray pipe, and the nozzles face the mask fixing frame 20.
Preferably, the first spray rinsing mechanism 31 comprises a plurality of spray pipes, each spray pipe is connected to a water separator 311, deionized water sent by a water pump is distributed into each spray pipe of the first spray rinsing mechanism, and the water separator 311 enables the plurality of spray pipes to be fixed on the base fixing frame 10, so that spray rinsing effect and coverage are improved.
The shower pipe of the second shower flushing mechanism 32 is communicated with the joint 322 through a communicating vessel 321, and the communicating vessel 321 enables the shower pipe to be fixed on the base fixing frame 10.
The mask holder rotation driving mechanism 40 can drive the mask holder 20 to rotate around the horizontal central axis at a set speed.
Specifically, in this embodiment, the mask fixing frame rotation driving mechanism 40 includes a rocking handle 41, a speed increaser 42 and a rotating shaft 43, and the rotating shaft 43 is fixedly connected with the second mask fixing rod 23; the rotary rocking handle 41 outputs to the rotary shaft 43 after the conversion of the rotation speed ratio through the speed increaser 42, and drives the mask fixing frame 20 to rotate around the rotary shaft through the rotary shaft 43, and the axis of the rotary shaft 43 is coincident with the axis of the mask fixing frame 20.
Further, the mask fixing frame 20 has a first working state and a second working state, wherein the first working state is a static state in which an included angle θ is formed between the mask fixing frame and a horizontal plane, and θ is preferably 30-40 °; the second working state is that the mask fixing frame rotary driving mechanism 40 drives the mask fixing frame rotary driving mechanism to rotate at a set rotating speed, and the mask fixing frame 20 can be switched between the two working states.
The first spray rinsing mechanism 31 and the second spray rinsing mechanism 32 are selectively opened when the reticle holder 20 is in the first working state or the second working state.
Specifically, when the mask plate fixing frame 20 is in the first working state, the mask plate is cleaned by using the dust-free cloth immersed with alcohol, and the second spraying and flushing mechanism 32 is started at the same time when the mask plate is wiped, the second spraying and flushing mechanism 32 can spray the alcohol, so that the alcohol flushing during scrubbing is realized, and preferably, the horizontal surface of the mask plate fixing frame is inclined at 30-45 degrees during scrubbing, so that water flow is facilitated and dirt cannot be remained;
when the mask plate fixing frame 20 is in the first working state, the mask plate fixing frame rotary driving mechanism 40 drives the mask plate fixing frame 20 to rotate at the rotation speed of 25-35r/min, and meanwhile, the first spraying and flushing mechanism 31 is started to spray deionized water to flush the mask plate, so that two sides of the mask plate can be ensured to be contacted with water flow at the same time, and flushing is more thorough;
finally with the nitrogen gas weather can, for the nitrogen gas operation of drying of being convenient for, still include blowing mechanism 33, blowing mechanism contains the gas blow pipe and equipartition is a plurality of air outlet nozzles on the gas blow pipe, with gas blow pipe and nitrogen pressure air supply intercommunication when needs nitrogen gas weather, the air outlet nozzle orientation mask plate mount 20 can carry out even distribution with nitrogen gas like this to make the mask plate by even weather.
It should be noted that, the first spraying and flushing mechanism 31 and the second spraying and flushing mechanism 32 are respectively communicated with two water pumps, the inlets of the water pumps are respectively communicated with the container filled with alcohol and deionized water, the outlets of the water pumps are respectively communicated with the joint 312 and the joint 3211 of the first spraying and flushing mechanism 31 and the second spraying and flushing mechanism 32, and the alcohol or the deionized water can be sprayed out from the second spraying and flushing mechanism 32 and the first spraying and flushing mechanism 31 by starting the corresponding water pumps.
The above embodiments are only preferred embodiments of the present application, and are not intended to limit the scope of the present application in this way, therefore: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.
Claims (4)
1. A mask plate cleaning device is characterized in that: comprises a base station fixing frame (10), a mask plate fixing frame (20), a spray flushing mechanism (30) and a mask plate fixing frame rotary driving mechanism (40);
the mask fixing frame (20) is used for clamping a mask, is rectangular and has a width and a length which can be adaptively adjusted according to the size of the mask;
the spray rinsing mechanism (30) comprises a first spray rinsing mechanism (31) and a second spray rinsing mechanism (32), and the first spray rinsing mechanism (31) and the second spray rinsing mechanism (32) can be selectively opened to spray the mask;
the mask fixing frame rotary driving mechanism (40) can drive the mask fixing frame (20) to rotate around the horizontal central axis of the mask fixing frame at a set speed;
the mask fixing frame (20) is formed by encircling a first mask fixing rod (21), a first fixing rod guide frame (22), a second mask fixing rod (23), a second fixing rod guide frame (24), a third mask fixing rod (25) and a third fixing rod guide frame (26) after being sequentially connected, the inner sides of the first mask fixing rod (21), the second mask fixing rod (23) and the third mask fixing rod (25) are respectively provided with a fixing clamping groove, and the edges of the mask are received in the fixing clamping grooves;
the device comprises a first fixing rod guide frame (22), a second fixing rod guide frame (24) and a third fixing rod guide frame (26), and is characterized by further comprising a locking mechanism (50), wherein guide grooves are formed in the first fixing rod guide frame (22), the second fixing rod guide frame (24) and the third fixing rod guide frame (26), the first mask fixing rod (21), the second mask fixing rod (23) and the third mask fixing rod (25) can slide in the guide grooves in the first fixing rod guide frame (22), the second fixing rod guide frame (24) and the third fixing rod guide frame (26) at the connecting ends of the first fixing rod guide frame, the second fixing rod guide frame (24) and the third fixing rod guide frame (26) respectively, and the locking mechanism (50) can selectively limit the sliding of the first fixing rod guide frame (22), the second fixing rod guide frame (24) and the third fixing rod guide frame (26);
the locking mechanism (50) comprises a plurality of locking screws (51), the first fixing rod guide frame (22), the second fixing rod guide frame (24) and the third fixing rod guide frame (26) are respectively provided with threaded holes on the side walls which are close to the two ends and vertical to the axis of the fixing rod guide frame, the locking screws (51) are in threaded connection with the threaded holes, and the first mask fixing rod (21), the second mask fixing rod (23) and the third mask fixing rod (25) can be tightly propped in the guide grooves by screwing the locking screws (51);
the mask fixing frame (20) is provided with a first working state and a second working state, the first working state is a static state in which an included angle of 30-40 degrees is formed between the mask fixing frame and a horizontal plane, the second working state is that a mask fixing frame rotary driving mechanism (40) drives the mask fixing frame rotary driving mechanism to rotate at a set rotating speed, and the mask fixing frame (20) can be switched between the two working states;
the first spray flushing mechanism (31) and the second spray flushing mechanism (32) are selectively opened when the mask fixing frame (20) is in a first working state or a second working state;
the mask plate fixing device is characterized by further comprising an air blowing device (33), wherein the air blowing device (33) comprises an air blowing pipe (331) and a plurality of air outlet nozzles (332) uniformly distributed on the air blowing pipe, and the air outlet nozzles (332) face the mask plate fixing frame (20).
2. The reticle cleaning device according to claim 1, wherein: the first mask fixing rod (21) and the third mask fixing rod (25) are right-angle-shaped and are adjacent, and the second mask fixing rod (23) is strip-shaped and is positioned on the opposite sides of the first mask fixing rod (21) and the third mask fixing rod (25).
3. The reticle cleaning device according to claim 1, wherein: the first spraying and flushing mechanism (31) and the second spraying and flushing mechanism (32) comprise at least one spraying pipe extending along the length direction of the mask fixing frame (20) and a plurality of nozzles fixed on the spraying pipe, and the nozzles face the mask fixing frame (20).
4. A cleaning method based on the mask cleaning device of any one of claims 1 to 3, characterized in that: comprises the following steps
S1: placing the mask plate at a preset position to enable the first surface to face cleaning staff;
s2: scrubbing the first surface of the mask after wetting alcohol by adopting dust-free cloth;
s3: rotating the mask plate to switch the second surface to the preset position in the step S1;
s4: scrubbing the second surface of the mask after wetting alcohol by adopting dust-free cloth;
s5: controlling the mask plate to rotate along the central axis of the mask plate at a set rotating speed, and simultaneously flushing the first surface and the second surface by deionized water;
s6: and (5) drying the mask plate processed in the step (S5) through air flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811590865.2A CN109482557B (en) | 2018-12-25 | 2018-12-25 | Mask plate cleaning device and cleaning method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811590865.2A CN109482557B (en) | 2018-12-25 | 2018-12-25 | Mask plate cleaning device and cleaning method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109482557A CN109482557A (en) | 2019-03-19 |
| CN109482557B true CN109482557B (en) | 2023-10-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811590865.2A Active CN109482557B (en) | 2018-12-25 | 2018-12-25 | Mask plate cleaning device and cleaning method thereof |
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| Country | Link |
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| CN (1) | CN109482557B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112495850A (en) * | 2020-09-22 | 2021-03-16 | 长春希达电子技术有限公司 | LED display product thin film residual glue removing method based on surface film pasting technology |
| CN112871831A (en) * | 2020-12-31 | 2021-06-01 | 常州高光半导体材料有限公司 | Mask dust and oil removing equipment |
| CN112764310B (en) * | 2020-12-31 | 2024-03-26 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
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|---|---|---|---|---|
| US4453386A (en) * | 1982-05-21 | 1984-06-12 | Wilkins Ronald W | High capacity mat cleaning machine |
| DE10100895A1 (en) * | 2001-01-11 | 2002-07-25 | Siempelkamp Gmbh & Co Kg G | Chipboard and fiberboard pressing air impurity exhaust fits impact plates parallel or angled to sprays so line-fed fluid sprays out along plate to moisten impurities for exhaustive anti-caking removal. |
| CN100998981A (en) * | 2006-12-31 | 2007-07-18 | 瓦房店轴承集团有限责任公司 | Method and device of removing phosphorization layer |
| CN102148131A (en) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | Method and device for cleaning wafer |
| CN204209590U (en) * | 2014-11-14 | 2015-03-18 | 深圳市路维光电股份有限公司 | For the fixture of mask plate visual examination |
| CN107399613A (en) * | 2017-08-03 | 2017-11-28 | 武汉华星光电技术有限公司 | A kind of mask plate handling device |
-
2018
- 2018-12-25 CN CN201811590865.2A patent/CN109482557B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4453386A (en) * | 1982-05-21 | 1984-06-12 | Wilkins Ronald W | High capacity mat cleaning machine |
| DE10100895A1 (en) * | 2001-01-11 | 2002-07-25 | Siempelkamp Gmbh & Co Kg G | Chipboard and fiberboard pressing air impurity exhaust fits impact plates parallel or angled to sprays so line-fed fluid sprays out along plate to moisten impurities for exhaustive anti-caking removal. |
| CN100998981A (en) * | 2006-12-31 | 2007-07-18 | 瓦房店轴承集团有限责任公司 | Method and device of removing phosphorization layer |
| CN102148131A (en) * | 2010-02-09 | 2011-08-10 | 联华电子股份有限公司 | Method and device for cleaning wafer |
| CN204209590U (en) * | 2014-11-14 | 2015-03-18 | 深圳市路维光电股份有限公司 | For the fixture of mask plate visual examination |
| CN107399613A (en) * | 2017-08-03 | 2017-11-28 | 武汉华星光电技术有限公司 | A kind of mask plate handling device |
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| Publication number | Publication date |
|---|---|
| CN109482557A (en) | 2019-03-19 |
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