CN109476535B - 中性色减反射玻璃基板及其制造方法 - Google Patents
中性色减反射玻璃基板及其制造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 98
- 239000011521 glass Substances 0.000 title claims abstract description 97
- 230000007935 neutral effect Effects 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title abstract description 21
- 238000004519 manufacturing process Methods 0.000 title abstract description 7
- 150000002500 ions Chemical class 0.000 claims abstract description 68
- 239000000203 mixture Substances 0.000 claims abstract description 24
- 230000001133 acceleration Effects 0.000 claims abstract description 13
- 238000002310 reflectometry Methods 0.000 claims description 21
- 238000002513 implantation Methods 0.000 claims description 6
- 102100029469 WD repeat and HMG-box DNA-binding protein 1 Human genes 0.000 claims description 5
- 101710097421 WD repeat and HMG-box DNA-binding protein 1 Proteins 0.000 claims description 5
- 239000005354 aluminosilicate glass Substances 0.000 claims description 3
- 239000005361 soda-lime glass Substances 0.000 claims description 3
- 239000005388 borosilicate glass Substances 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract description 21
- 238000010884 ion-beam technique Methods 0.000 abstract description 12
- 239000010410 layer Substances 0.000 description 21
- 230000003667 anti-reflective effect Effects 0.000 description 13
- 239000007789 gas Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000005329 float glass Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002346 layers by function Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000000475 sunscreen effect Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000006750 UV protection Effects 0.000 description 1
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000037072 sun protection Effects 0.000 description 1
- 239000000516 sunscreening agent Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
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- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
- B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
- B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
- B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
- B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
- B32B17/10128—Treatment of at least one glass sheet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60J—WINDOWS, WINDSCREENS, NON-FIXED ROOFS, DOORS, OR SIMILAR DEVICES FOR VEHICLES; REMOVABLE EXTERNAL PROTECTIVE COVERINGS SPECIALLY ADAPTED FOR VEHICLES
- B60J1/00—Windows; Windscreens; Accessories therefor
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- C—CHEMISTRY; METALLURGY
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
-
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/078—Glass compositions containing silica with 40% to 90% silica, by weight containing an oxide of a divalent metal, e.g. an oxide of zinc
-
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
-
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/097—Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum
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- C03C4/00—Compositions for glass with special properties
- C03C4/02—Compositions for glass with special properties for coloured glass
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
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- B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
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Abstract
本发明涉及一种用于通过离子注入制造中性色减反射玻璃基板的方法,所述方法包括电离化N2源气体以便形成N的单电荷和多电荷离子的混合物,通过用包括在20kV与25kV之间的加速电压A加速并且将离子剂量设定为包括在6×1016个离子/cm2与‑5.00×1015×A/kV+2.00×1017个离子/cm2之间的值来形成N的单电荷和多电荷离子束。本发明进一步涉及中性色减反射玻璃基板,所述玻璃基板包括根据此方法通过用单电荷和多电荷离子的混合物进行离子注入而处理的区域。
Description
本发明涉及一种中性色减反射玻璃基板及其制造方法。本发明还涉及中性色减反射玻璃基板的用途,特别是作为嵌装玻璃。
大部分减反射玻璃基板是通过在玻璃表面沉积涂层获得的。光反射率的减少是通过具有的折射率低于所述玻璃基板的折射率或具有折射率梯度的单层获得的。高性能减反射玻璃基板是通过多个层的堆叠体获得的,所述多个层的堆叠体利用干扰效应以便在整个可见范围内获得光反射率的显著减少。施用于基板两侧的此种高性能减反射层堆叠体能够将典型的玻璃基板的光反射率从约8%减少到4%或甚至更少。然而,它们需要具有高的组成和层厚度控制的多个层沉积步骤,使其成为困难且因此昂贵的工艺。此外,单一中性色减反射层以及特别是通常通过物理气相沉积来沉积的多个层堆叠体比玻璃本身对机械和/或化学侵蚀更加敏感。单层减反射层经常呈现非中性的反射颜色,并且中性色多层减反射涂层需要甚至更大量的层,使得所得层堆叠体甚至更敏感。
FR1300336中披露了另一种减反射玻璃基板。在此,通过将10原子%的浓度的稀有气体的重离子注入玻璃基板的表面中直至100nm或200nm的深度来获得减反射效应。然而,稀有气体相对昂贵,并且在玻璃基板中达到如此高浓度的注入稀有气体离子的需要增加了对玻璃网络造成重大损害的风险。此外,这些玻璃基板在反射中不是中性的。
因此,本领域对提供一种制造中性色减反射玻璃基板的简单廉价的方法存在需求。
根据本发明的多个方面之一,本发明的主题是提供一种用于生产中性色减反射玻璃基板的方法。
根据本发明的多个方面中的另一方面,本发明的主题是提供一种中性色减反射玻璃基板。
本发明涉及一种用于生产中性色减反射玻璃基板的方法,所述方法包括以下操作:
·提供N2源气体,
·电离化N2源气体以便形成N的单电荷离子与多电荷离子的混合物,
·用加速电压加速N的单电荷离子与多电荷离子的混合物,以便形成N的单电荷离子和多电荷离子束,其中,加速电压A包括在20kV与25kV之间并且剂量D包括在6×1016个离子/cm2与-5.00×1015×A/kV+2.00×1017个离子/cm2之间,
·提供玻璃基板,
·在N的单电荷和多电荷离子束的轨迹中定位所述玻璃基板。
诸位发明人已经出乎意料地发现,本发明的方法提供了包含N的单电荷和多电荷离子的混合物的离子束,所述混合物用相同的特定加速电压加速并且以此特定的剂量施用于玻璃基板,导致减少的反射率。有利地,所得的玻璃基板的反射率从约8%降低到至多6.5%、优选至多6%、更优选至多5.5%。最出乎意料地,达到了此低水平的反射率,然而注入的N的浓度在整个注入深度中低于2原子%,并且此外,通过反射率中的颜色坐标a*和b*表示的反射颜色是中性的,即–1≤a*≤1且–1≤b*≤1,或甚至是非常中性的,即–0.3≤a*≤0.3且–0.3≤b*≤0.3。
根据本发明,将N2源气体电离化,以便形成N的单电荷离子与多电荷离子的混合物。加速的单电荷离子和多电荷离子束可以包含各种量的不同N离子。优选地,加速的单电荷和多电荷离子束包含N+、N2+以及N3+。
对应离子的示例电流示出在以下表1中(以毫安测量)。
表1
根据本发明,关键离子注入参数是离子加速电压和离子剂量。
选择玻璃基板在单电荷和多电荷离子束的轨迹中的定位,使得获得每表面积一定量的离子或离子剂量。离子剂量、或剂量以每平方厘米的离子数来表示。为了本发明的目的,离子剂量是单电荷离子和多电荷离子的总剂量。离子束优选地提供连续的单电荷和多电荷离子流。离子剂量是通过控制基板暴露于离子束的时间来控制的。根据本发明,多电荷离子是带有超过一个正电荷的离子。单电荷离子是带有单一正电荷的离子。
在本发明的一个实施例中,定位包括将玻璃基板和离子注入束相对于彼此进行移动,以便渐进地处理玻璃基板的某一表面积。优选地,它们以包括在0.1mm/s与1000mm/s之间的速度相对于彼此移动。玻璃相对于离子注入束的移动速度是以适当的方式选择的,以控制样品在所述束中的停留时间,所述停留时间影响正被处理的区域的离子剂量。
本发明的方法可易于按比例放大以便处理超过1m2的大基板,例如通过用本发明的离子束连续扫描基板表面,或例如通过形成多个离子源的阵列,这些离子源在单程或多程中在移动基板的整个宽度内处理所述移动基板。
本发明人已经发现,提供包含用相同的加速电压加速的单电荷和多电荷离子的混合物的离子束的离子源由于它们可以提供比单电荷离子更低剂量的多电荷离子而特别有用。看起来中性色减反射玻璃基板可以用在此种束中提供的单电荷离子(具有较高的剂量和较低的注入能量)和多电荷离子(具有较低的剂量和较高的注入能量)的混合物来获得。注入能量(以电子伏(eV)表示)是通过将单电荷离子或多电荷离子的电荷乘以加速电压计算的。
在本发明的优选实施例中,位于正被处理的区域下面的正被处理的玻璃基板的区域的温度小于或等于所述玻璃基板的玻璃化转变温度。此温度例如受所述束的离子电流、被处理的区域在所述束中的停留时间以及所述基板的任何冷却手段的影响。
在本发明的一个实施例中,同时或连续地使用若干离子注入束来处理所述玻璃基板。
在本发明的一个实施例中,通过经由离子注入束进行的单一处理获得了玻璃基板的每表面单位面积的离子总剂量。
在本发明的另一个实施例中,通过经由一个或多个离子注入束进行的若干连续处理获得了玻璃基板的每表面单位面积的离子总剂量。
在优选的实施例中,玻璃基板用根据本发明的方法在其两个面上进行处理,以便最大化低反射率效应。
本发明的方法优选地在真空室中以包括在10-2mbar与10-7mbar之间的压力、更优选以包括在10-5mbar与10-6mbar之间的压力进行。
用于进行本发明的方法的示例离子源是来自Quertech Ingénierie S.A.的Hardion+RCE离子源。
反射率是使用光源D65和2°观察者角度在用本发明的离子注入法处理的基板的一侧上测量的。反射颜色是在使用10°观察者角度的光源D65下使用CIELAB颜色坐标a*和b*表示的,并且是在用本发明的方法处理的基板的一侧上测量的。CIE L*a*b*或CIELAB是由国际照明委员会(International Commission on Illumination)指定的颜色空间。
本发明还涉及N的单电荷和多电荷离子的混合物用于降低玻璃基板的反射率并且同时保持反射颜色为中性的用途,单电荷和多电荷离子的混合物以有效地减少玻璃基板的反射率并且同时保持反射颜色为中性的离子剂量和加速电压被注入玻璃基板中。
有利地,以有效地将玻璃基板的反射率减少到至多6.5%、优选到至多6%、更优选到至多5.5%的离子剂量和加速电压将N的单电荷和多电荷离子的混合物注入玻璃基板中。同时,保持反射颜色为中性,即–1≤a*≤1且–1≤b*≤1。
玻璃基板在处理之前的反射率是约8%。
更有利地,使用N的单电荷和多电荷离子的混合物将玻璃基板的反射率减少到至多6.5%、优选到至多6%、更优选到至多5.5%。同时,保持反射颜色为非常中性,即-0.3≤a*≤0.3且-0.3≤b*≤0.3。
根据本发明,N的单电荷和多电荷离子的混合物优选包含N+、N2+、以及N3+。
根据本发明,有效地减少玻璃基板的反射率并且同时保持反射颜色为中性的加速电压和离子剂量优选包括在以下范围内:
表2
参数 | 优选的范围 |
加速电压A[kV] | 20至25 |
离子剂量D[离子/cm<sup>2</sup>] | 6×10<sup>16</sup>至-5.00×10<sup>15</sup>×A/kV+2.00×10<sup>17</sup> |
本发明还涉及具有减少的反射率的经离子注入的玻璃基板,其中,N的单电荷和多电荷离子的混合物已经根据本发明的方法注入。
有利地,本发明的经离子注入的玻璃基板具有至多6.5%、优选至多6%、更优选至多5.5%的反射率。它们还具有中性反射颜色,即–1≤a*≤1且–1≤b*≤1,优选–0.3≤a*≤0.3且–0.3≤b*≤0.3。
在本发明的优选的实施例中,在本发明的玻璃基板中的注入离子是N的单电荷和多电荷离子。
根据本发明的另一个优选的实施例,N的单电荷和多电荷离子的混合物包含比N+和N2+各自更少量的N3+。在本发明的更优选的实施例中,N的单电荷和多电荷离子的混合物包含40%-70%的N+、20%-40%的N2+、和2%-20%的N3+。
有利地,离子注入深度可以包括在0.1μm与1μm之间、优选地在0.1μm与0.5μm之间。
本发明中使用的玻璃基板通常是具有两个相反的主表面的片状玻璃基板。本发明的离子注入可以在这些表面中的一个或两个上进行。本发明的离子注入可以在玻璃基板的表面的一部分或在整个表面上进行。
在另一个实施例中,本发明还涉及一种结合了本发明的减反射玻璃基板的嵌装玻璃,无论它们是整体式的、层压的还是具有插入的气体层的多层的。
这些嵌装玻璃可以同时用作内部和外部建筑嵌装玻璃,以及用作物品,如面板,显示窗,玻璃家具(如柜台、冷藏展示柜等)的防护玻璃,还用作汽车嵌装玻璃,如层压的挡风玻璃,反射镜,电脑的防眩光屏幕,显示器和装饰性玻璃。
结合了根据本发明的减反射玻璃基板的嵌装玻璃可以具有有意义的附加特性。因此,其可以是具有安全功能的嵌装玻璃,如层压嵌装玻璃。其还可以是具有防盗、隔音、防火或抗菌功能的嵌装玻璃。
还可以此种方式选择嵌装玻璃,使得用根据本发明的方法在其一个面上处理的基板包括沉积在其另一个面上的层堆叠体。层的堆叠体可以具有特定功能,例如防晒或吸热,或者还具有抗紫外线、抗静电(例如略微导电的掺杂金属氧化物层)以及低辐射的例如基于银的层或掺杂锡氧化物层。它还可以是具有抗污特性的层,例如非常精细的TiO2层,或具有防水功能的疏水有机层或具有抗凝结功能的亲水层。
层堆叠体可以是具有反射镜功能的含银涂层,并且所有构造都是可能的。因此,在具有反射镜功能的整体式嵌装玻璃的情况下,所关注的是定位本发明的减反射玻璃基板,其中经处理面作为面1(即,在旁观者所处的一侧)并且银涂层在面2(即,在反射镜附接到壁上的一侧)上,从而根据本发明的减反射堆叠体防止了反射图像的分裂。
在双层嵌装玻璃的情况下(其中根据惯例,玻璃基板的面从最外面开始编号),因此有可能使用减反射的经处理面作为面1,以及在面2上的其他功能层用于抗紫外线或防晒层,以及面3上的其他功能层用于低辐射层。在双层嵌装玻璃中,因此有可能具有作为基板的面之一的至少一个减反射面以及提供补充功能的至少一个层或层的堆叠体。双层嵌装玻璃还可以具有若干个减反射经处理面,特别是至少在面2、3或4上。对于整体式嵌装玻璃1,有可能沉积与减反射面相关联的抗静电功能层。
基板还可以进行表面处理,特别是酸蚀刻(蒙砂),离子注入处理可以在经蚀刻的面上或在相反面上进行。
基底或与其相关联的那些之一还可以是印刷的装饰玻璃类型或可以是丝网方法印刷的。
结合了根据本发明的减反射玻璃基板的特别令人关注的嵌装玻璃是具有层压结构的嵌装玻璃,所述层压结构包括插入在本发明的减反射玻璃基板与另一个玻璃基板之间的聚合物型组件片材,其中所述经离子注入处理的表面背向所述聚合物组件片材。聚合物组件片材可以来自聚乙烯醇缩丁醛(PVB)型、聚乙酸乙烯酯(EVA)型或聚环己烷(COP)型。优选地,所述另一个玻璃基板是根据本发明的减反射玻璃基板。
这种构造,特别是经过两次热处理,即弯曲和/或回火的基板,使得可能获得汽车嵌装玻璃并且特别是具有非常有利性质的挡风玻璃。标准要求汽车具有在正入射时具有至少75%的高透光率的挡风玻璃。由于将经热处理的减反射玻璃基板结合在传统挡风玻璃的层压结构中,嵌装玻璃的透光率得到特别改进,使得其能量透射可以通过其他手段略微减少,同时仍然保持在透光率标准内。因此,挡风玻璃的防晒效果可以例如通过玻璃基板的吸收得到改进。标准的层压挡风玻璃的光反射值可以从8%提高到小于5%。
根据本发明的玻璃基板可以是具有以下组成范围的任何厚度的玻璃片,这些范围以玻璃的总重量的重量百分比表示:
根据本发明的玻璃基板优选是在钠钙玻璃片、硼硅酸盐玻璃片、或铝硅酸盐玻璃片中选择的玻璃片。在特别优选的实施例中,玻璃片是透明玻璃片。
根据本发明的玻璃基板优选在经受离子注入的一侧不具有涂层。
根据本发明的玻璃基板可以是在离子注入处理之后将被切割成其最终尺寸的大玻璃片,或者其可以是已经被切割成其最终尺寸的玻璃片。
有利地,本发明的玻璃基板可以是浮法玻璃基板。本发明的离子注入方法可以在浮法玻璃基板的空气侧和/或浮法玻璃基板的锡侧进行。优选地,本发明的离子注入方法在浮法玻璃基板的空气侧进行。
在本发明的一个实施例中,玻璃基板可以是预先化学强化的玻璃基板。
使用Hunterlab Ultrascan Pro分光光度计测量光学特性。
具体实施方式
离子注入实例是根据下表中详述的各种参数使用用于产生单电荷和多电荷离子束的RCE离子源制备的。使用的离子源是来自Quertech Ingénierie S.A.的Hardion+RCE离子源。
所有样品具有10×10cm2的尺寸并且通过以在20mm/s与30mm/s的速度将所述玻璃基板位移通过离子束在整个表面上进行处理。
将被处理的玻璃基板的区域的温度保持在小于或等于所述玻璃基板的玻璃化转变温度的温度下。
对于所有实例,在真空室中在10-6毫巴的压力下进行注入。
将N的离子注入4mm厚的普通透明钠钙玻璃和铝硅酸盐玻璃基板中。在用本发明的离子注入方法进行注入之前,玻璃基板的反射率为约8%。关键的注入参数和光学测量值可以在下表中找到。
表4
如可以从本发明的实例E1至E6中看到的,所选择的用于离子注入的关键参数(其中,加速电压A包括在20kV与25kV之间并且剂量D包括在6×1016离子/cm2与-5.00×1015×A/kV+2.00×1017离子/cm2之间)一方面导致减少的反射率(至多6.5%、至多6.0%或甚至至多5.5%),以及另一方面,这些实例的反射颜色是中性的,即–1≤a*≤1且–1≤b*≤1。为实例E3、E4和E5选择的关键注入参数导致非常中性的反射颜色,即–0.3≤a*≤0.3且–0.3≤b*≤0.3。
此外,对本发明的实例E1至E6进行XPS测量,并且发现在整个注入深度中N的注入离子的原子浓度低于8原子%。
Claims (4)
1.N的单电荷和多电荷离子的混合物用于降低玻璃基板的反射率并且同时保持反射颜色为中性的用途,所述单电荷和多电荷离子的混合物以有效地减少所述玻璃基板的反射率并且同时保持所述反射颜色为中性的离子剂量和加速电压被注入玻璃基板中,其中用加速电压A和剂量D注入所述单电荷和多电荷离子的混合物,所述加速电压A包括在20kV与25kV之间并且所述剂量D包括在6×1016个离子/cm2与-5.00×1015×A/kV+2.00×1017个离子/cm2之间,其中注入的N的浓度在整个注入深度中低于2原子%,并且其中将所述玻璃基板的反射率减少到至多6.5%并且所述反射颜色为中性使得–1≤a*≤1且–1≤b*≤1。
2.根据权利要求1所述的N的单电荷和多电荷离子的混合物用于降低玻璃基板的反射率并且同时保持反射颜色为中性的用途,其中,所述单电荷和多电荷离子的混合物以有效地将所述玻璃基板的反射率减少到至多6.5%并且同时保持所述反射颜色为中性使得–0.3≤a*≤0.3且–0.3≤b*≤0.3的离子剂量和加速电压被注入所述玻璃基板中。
4.根据权利要求1或2所述的N的单电荷和多电荷离子的混合物用于降低玻璃基板的反射率并且同时保持反射颜色为中性的用途,其中所述玻璃基板选自钠钙玻璃片、硼硅酸盐玻璃片或铝硅酸盐玻璃片。
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FR1300336A (fr) | 1961-06-23 | 1962-08-03 | Carnaud & Forges | Perfectionnements à la fabrication dés emballages métalliques tels que boîtes de conserve |
JPH0323238A (ja) * | 1989-06-19 | 1991-01-31 | Nippon Sheet Glass Co Ltd | ガラス基材の表面改質法 |
CA2961865A1 (en) | 2014-10-24 | 2016-04-28 | Agc Glass Europe | Ion implantation process and ion implanted glass substrates |
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- 2017-03-13 ES ES17709997T patent/ES2883165T3/es active Active
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CN1676663A (zh) * | 2004-12-01 | 2005-10-05 | 深圳国家863计划材料表面工程技术研究开发中心 | 单mevva离子源渗注镀复合处理工艺 |
US7727867B2 (en) * | 2006-02-21 | 2010-06-01 | Sumco Corporation | Method for manufacturing SIMOX wafer |
CN103898469A (zh) * | 2012-12-26 | 2014-07-02 | 核工业西南物理研究院 | 一种低温高负载状况下材料表面的无界面强化处理方法 |
CN105121380A (zh) * | 2013-02-15 | 2015-12-02 | 奎尔科技 | 通过气体的单电荷或多电荷离子束处理制备抗反射玻璃材料的方法 |
CN105073675A (zh) * | 2013-03-28 | 2015-11-18 | 奎尔科技 | 制备超亲水性玻璃材料的离子束处理方法 |
Also Published As
Publication number | Publication date |
---|---|
BR112018070860A2 (pt) | 2019-04-24 |
EP3442922B1 (en) | 2021-06-02 |
KR102309419B1 (ko) | 2021-10-07 |
WO2017178170A1 (en) | 2017-10-19 |
PL3442922T3 (pl) | 2022-01-03 |
SG11201808096PA (en) | 2018-10-30 |
JP6948344B2 (ja) | 2021-10-13 |
JP2019513676A (ja) | 2019-05-30 |
KR20190116904A (ko) | 2019-10-15 |
US11339089B2 (en) | 2022-05-24 |
US20200325067A1 (en) | 2020-10-15 |
EA201892161A1 (ru) | 2019-04-30 |
CA3019269A1 (en) | 2017-10-19 |
EP3442922A1 (en) | 2019-02-20 |
TW201808851A (zh) | 2018-03-16 |
ES2883165T3 (es) | 2021-12-07 |
CN109476535A (zh) | 2019-03-15 |
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