CN109471211A - A kind of depolarization light combination mirror film and its design method - Google Patents
A kind of depolarization light combination mirror film and its design method Download PDFInfo
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Abstract
The present invention relates to a kind of depolarization light combination mirror films, and including substrate and the first film being arranged in substrate, the film structure of the first film is Sub | x1H x2L x3H x4L......xk‑ 3H xk‑2L xk‑1H xkL | Air, wherein Sub is thin film device substrate, and Air is emergent medium air, and H and L are respectively the high-index material film layer and low-index material film layer of 1/4 central wavelength optical thickness, x1~xkFor the optical thickness coefficient of every layer film layer, k is film layer sum.Compared with prior art, the present invention has optimization process simple, membrane system is regular, convenient for accurately preparing, preparation complexity is reduced, depolarized effect is good, spectral characteristic is excellent, is convenient for the advantages that promoting the use of, there is wide practical prospect in large scale laser instrument optic path, can be used for the incoherent conjunction beam of different wave length laser.
Description
Technical field
The invention belongs to field of lasers, are related to a kind of optical thin film, more particularly, to a kind of depolarization light combination mirror film
And its design method
Background technique
Superpower laser is in laser-produced fusion, defense military, industrial production, medical instrument, space communication and space technology
Etc. play considerable effect.Some application fields propose high request to the power of laser, such as are cut by laser
The high power laser of multikilowatt is needed with welding, automobile manufacture field, national defense and military fields need high-power laser orientation
Weapon.These demands and application all propose the raising of the performance indicators such as the power, beam quality and delivery efficiency of current laser
A new challenge is gone out.The effective ways for improving laser output power are to be swashed different-waveband using combiner technology is swashed
Light carries out incoherent conjunction beam, obtains multiband, high-power output effect, this applies superlaser, long distance laser transmits
Etc. have great meaning.Under the principle for swashing combiner: light combination mirror is tilted to the left 45 degree of placements, laser beam λAVertically
It is incident to the right surface of light combination mirror, passes through the high reflection of light combination mirror film, horizontal exit；Laser beam λBGlancing incidence is to light combination mirror
Left surface, anti-reflection by light combination mirror film are penetrated, same horizontal exit, and the incoherent conjunction beam of two-beam greatly improves laser
The output power of device.The depolarization light combination mirror film that light combination mirror left surface and right surface are coated with, film is under corresponding wavelength
Efficiency of transmission and reflection efficiency will seriously affect the conjunction beam quality of laser.But (such as λ is usually closer due to closing Shu BochangAFor
976nm, λBBeam is closed for 1010nm), the polarization separation of P-polarized light and S polarized light under 45 degree of operating angles should be eliminated, is protected simultaneously
P-polarized light and S polarized light high reflection at 976nm are demonstrate,proved, P-polarized light and S polarized light are highly transmissive at 1010nm, this design to film
High challenge is brought with preparation.
Traditional depolarization closes beam film, and one of mentality of designing is the rule being alternately present using high low-index film
Whole high reflection membrane system carries out random optimization design as initial membrane system.But this initial membrane system cannot be considered in terms of sharp combiner institute
Efficient anti-reflection and height is anti-simultaneously for P-polarized light, the S polarized light needed, and P-polarized light and S polarized light polarization separation degree are very big.
Its optimization process is extremely cumbersome, and finally obtained membrane system is also extremely irregular.Meanwhile more complicated film structure is the essence of film
Really preparation also brings many difficulties:
1. film layer susceptibility is higher, lesser deposition thickness error can bring about biggish spectrum deviation；
2. film layer distribution is mixed and disorderly, bigger random error may be introduced；
3. introducing pole thick-layer and thin layer, bigger systematic error may be introduced.Factors lead to actual spectrum much
Deviate design spectrum, higher reflectivity, transmitance and good depolarization effect can not be obtained.Another method is benefit
It is designed with three kinds or multiple material, though depolarization effect is good, due to more using material, for most of plated film
For equipment, the practical difficulty for preparing is larger, can not be widely popularized.
Currently, a kind of not yet both can effectively solve polarization separation, and prepare the high design of feasibility.For asking above
It is found that depolarization light combination mirror film is badly in need of a kind of design method taken into account spectral characteristic and prepare feasibility, raising laser closes topic
Beam efficiency.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of depolarization light combination mirrors
Film and its design method.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of depolarization light combination mirror film is thin including substrate and the first film being arranged in substrate, described first
The film structure of film is Sub | x1H x2L x3H x4L......xk-3H xk-2L xk-1H xkL | Air, wherein Sub is membrane element
Part substrate, Air are emergent medium air, H and L be respectively 1/4 central wavelength optical thickness high-index material film layer and
Low-index material film layer, x1~xkFor the optical thickness coefficient of every layer film layer, k is film layer sum.
Preferably, the base material is vitreous silica or K9 glass.
Preferably, the high-index material is HfO2、TiO2, ZrO2、Ta2O5, sulfide or selenides, low-refraction
Material is MgF2、SiO2Or Al2O3。
A kind of design method of depolarization light combination mirror film, comprising the following steps:
1) selected center's wavelength X0；
2) optical thickness proportion in the first film multilayer film film is adjusted, by 45 degree of optimal films of depolarization effect under incident
Initial configuration of the architecture as the first film, i.e. Sub | 1.34 (1.15 (HLHL) 0.85 (HLHL)) ^n | Air, wherein Sub
For thin film device substrate, Air is emergent medium air, and H and L are respectively the high-index material of 1/4 central wavelength optical thickness
Film layer and low-index material film layer, n are membrane stack number；
3) membrane system of the first film initial configuration is set in λ1< λA< λ2The P-polarized light and S-polarization light transmission of wave band be
Minimum value, λ3< λB< λ4The P-polarized light and S-polarization light transmission rate of wave band are maximum value, wherein λATo reflect band central wavelength,
λBFor transmission bands central wavelength, λ1For high anti-band optimization aim start wavelength, λ2Wavelength, λ are terminated for high anti-band optimization aim3For
High band optimization aim start wavelength thoroughly, λ4Wavelength, and λ are terminated for the high optimization aim of band thoroughly1< λA< λ2< λ0< λ3< λB< λ4；
4) initial configuration is optimized using Film Design software, specifically:
In optimization, guarantee that the membrane system main part of the first film is constant, Optimization Dept. is divided into sensitive layer, and advises with membrane system
Whole, the depolarized characteristic good of spectrum, λAReach high reflection, λBReach the highly transmissive termination condition as optimization；
5) film structure after finally being optimized are as follows: Sub | x1H x2L x3H x4L......xk-3H xk-2L xk-1H
xkL | Air, wherein x1~xkFor the optical thickness coefficient of every layer film layer.
Preferably, the operating angle of the depolarization light combination mirror film is 45 °.
Preferably, the central wavelength lambda0According to reflection band central wavelength lambdaAWith transmission bands central wavelength lambdaBIt is chosen,
Then have under the membrane system:
λA< λ0< λB。
Preferably, the height is instead with optimization aim start wavelength λ1, high anti-band optimization aim terminate wavelength X2, transmission bands
Central wavelength lambda3And the high optimization aim of band thoroughly terminates wavelength X4Shu Bochang is closed according to practical laser to be adjusted, and under the membrane system, is taken
λ1=0.98* λA,λ2=1.01* λA,λ3=0.99* λB, λ3=1.02* λB。
Membrane stack number n >=8.
Preferably, the Film Design software is TFC, Essential Macload or Optilayer, the function of application
Can be Hyper Newton, Modified DLS, Newton method, Sequential QP, Quasi-Newton DLS,
Conjugate gradients, Steepest descent, Gradient method, Simplex method and Variable
Metric。
Compared with prior art, the invention has the following advantages that
1, simplify optimization process: due to using special initial membrane system, depolarization effect is significant, therefore only needs slightly
Optimization can be obtained by ideal depolarization light combination mirror film, and optimization process uses common TFC, Macload, Optilayer
Software can be realized；
2, membrane system is regular: giving special initial configuration, can utmostly eliminate from high reflectance zone to high anti-reflection band mistake
The polarization separation generated when crossing, simple film thickness optimization can get fabulous spectral characteristic；
3, convenient for preparation: being regular film system due to designing obtained membrane system, film thickness error susceptibility is lower, i.e.,
Make under thickness error, to be also able to maintain excellent spectral characteristic within 1%, makes to prepare feasibility and greatly promote；
4, it reduces the complexity of preparation: due to being designed using two kinds of materials, being compared to traditional depolarization film
Multiple material method, reduce preparation complexity, reduce more uncontrollable factors, to effectively increase preparation
Feasibility；
5, depolarized effect is good, spectral characteristic is excellent: comprehensive design and preparation, the invention is than traditional design method, more
Good depolarized effect and spectral characteristic easy to accomplish.
Detailed description of the invention
Fig. 1 is the schematic diagram of 45 degree of near-infrared depolarization light combination mirror films of the embodiment of the present invention.
Film transmission rate spectrum when Fig. 2 is 1.34 (1.15 (HLHL) 0.85 (HLHL)) 45 degree of incidence of film structure.
Fig. 3 is regular highly reflecting films optical transmission spectra.
Fig. 4 is the optical constant of JGS1 fused silica substrate in the embodiment of the present invention.
Fig. 5 is high-index material Ta in the embodiment of the present invention2O5Optical constant.
Fig. 6 is low-index material SiO in the embodiment of the present invention2Optical constant.
Fig. 7 is the initial membrane system optical transmission spectra given in the embodiment of the present invention.
Fig. 8 is the film thickness profile in the embodiment of the present invention after simple optimization.
Fig. 9 is the film transmission spectrum in the embodiment of the present invention after simple optimization.
Figure 10 is to pass through the film thickness profile after regular high reflection coating optimization.
Figure 11 is to pass through the film transmission rate spectrum after regular high reflection coating optimization.
S polarized light error analysis transmissivity light when Figure 12 is 45 degree of incidence of film in the embodiment of the present invention after simple optimization
Spectrum.
P-polarized light error analysis transmissivity light when Figure 13 is 45 degree of incidence of film in the embodiment of the present invention after simple optimization
Spectrum.
Description of symbols in figure:
1, substrate, 2, the first film.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
The content of present invention is mainly can control to the progress of its equivalent refractive index using the optical thickness different ratio of multilayer film
System, to reduce the polarization separation degree of film layer.For monofilm, the parameter of indexing is polarized are as follows: polarize the parameter of indexing
For
Wherein, n is monofilm Refractive Index of Material, and θ is refraction angle, θ0For incidence angle, ηPFor P-polarized light effective admittance, ηSFor
S polarized light effective admittance.Obviously, polarization separation degree perseverance is greater than 1, and monofilm is there are polarization separation, wherein ηP> ηs.In addition to this,
One of an important factor for monofilm refractive index n values are also polarisation-affecting separating degree.By appropriate adjustment monofilm refractive index n values,
The polarization separation degree of film can be effectively reduced.In fact, using multilayer film equivalent refraction rate theory, it can be equivalent by multilayer film
As monofilm, the combination admittance of multilayer film is equivalent to the refractive index of monofilm, therefore the present invention is thick using the optics of multilayer film
Degree different ratio controllably modulates its equivalent refractive index, and the polarization separation degree of film layer is effectively reduced.
The present invention provides a kind of depolarization light combination mirror film and design method, and the membrane structure is by substrate 1 and the first film 2
Composition, as shown in Figure 1, the initial configuration of the first film 2 is Sub | 1.34 (1.15 (HLHL) 0.85 (HLHL)) ^n | Air,
In, Sub is thin film device substrate, and Air is emergent medium air, and H and L are the high refraction of 1/4 central wavelength optical thickness respectively
Rate material and low-index material, n are membrane stack number, the design procedure of the film structure are as follows:
1) according to actual needs, selected center's wavelength X0；
2) optical thickness proportion in multilayer film film is adjusted, the optimal membrane system knot of depolarization effect under 45 degree of incidence is obtained
Structure, optical transmission spectra are shown in Fig. 2, thereby determine that the initial configuration of the first film (2) is Sub | 1.34 (1.15 (HLHL) 0.85
(HLHL))^n|Air；
3) membrane system of the first film (2) initial configuration is set in λ1< λA< λ2The P-polarized light and S-polarization light transmission of wave band
Rate is minimum value, λ3< λB< λ4The P-polarized light and S-polarization light transmission rate of wave band are maximum value, wherein λAFor reflection band center
Wavelength, λBFor transmission bands central wavelength, λ1< λA< λ2< λ0< λ3< λB< λ4,；
4) the first film (2) initial configuration set in step 3) is optimized using Film Design software, is optimized
When guarantee membrane system main part it is constant, only optimize part sensitive layer, with membrane system almost regular, the depolarized characteristic good of spectrum, λAIt reaches
To high reflection, λBReach the highly transmissive termination condition for optimization；
5) the final film structure after being optimized are as follows: Sub | x1H x2L x3H x4L......xk-3H xk-2L xk-1H
xkL | Air wherein, x1~xkFor the optical thickness coefficient of every layer film, k is film layer sum, the work of depolarization light combination mirror film
Making angle is 45 °.
Substrate (1) material is vitreous silica or K9 glass；
Central wavelength lambda0Beam wavelength X can be closed according to laserAAnd λBIt is chosen, usually takes λA< λ0< λB；
High-index material is HfO2、TiO2, ZrO2、Ta2O5, sulfide or selenides, low-index material MgF2、
SiO2Or Al2O3；
The membrane stack number n of membrane system can close the demand of beam according to laser used and feature is arbitrarily chosen, and film structure n >=
8。
λ1、λ2、λ3、λ4Shu Bochang can be closed according to practical laser to be adjusted, under the membrane system, λ1=0.98* λA,λ2=
1.01*λA,λ3=0.99* λB, λ3=1.02* λB；
Film Design software is TFC, Essential Macload or Optilayer；
The function of Film Design software application be Hyper Newton, Modified DLS, Newton method,
Sequential QP, Quasi-Newton DLS, Conjugate gradients, Steepest descent, Gradient
Method, Simplex method and Variable Metric.
Embodiment:
The present embodiment provides a kind of 45 degree of near-infrared depolarization light combination mirror films and design methods.It swashs combiner wavelength:
λAFor 976nm, λBFor 1010nm, that is, need to meet the P-polarized light and S polarized light high reflection of 976nm, the P-polarized light of 1010nm and
S polarized light is highly transmissive, and eliminates the polarization separation of P-polarized light and S polarized light.Fig. 3 show regular highly reflecting films: Sub | and (HL)
^20 | Air optical transmission spectra, it can be seen that the initial membrane system has very big polarization separation degree, even if passing through optimization, it is also difficult to complete
It totally disappeared except polarization.Therefore significantly more efficient Design of Depolarization Thin method is needed.
Specific design method includes the following steps:
45 degree of near-infrared depolarization light combination mirror membrane structures, as shown in Figure 1, include from bottom to top set gradually substrate 1,
The first film 2.
Selected reference wavelength λ0For 1000nm；Select base material Sub for JGS1, optical constant is as shown in Figure 4；It is selected
High-index material H is Ta2O5, optical constant is as shown in Figure 5；Low-index material L is SiO2, optical constant such as Fig. 6 institute
Show.
45 degree of near-infrared depolarization light combination mirror films, membrane system initial configuration are designed in the first film (2) are as follows:
Sub|1.34(1.15(HLHL)0.85(HLHL))^8|Air.It is calculated by spectrum as can be seen that initial film ties up to
960-1050 polarization separation degree very little.Even if the depolarization membrane system of optimization and a function admirable is not added.Its spectrum such as Fig. 7
It is shown.
Set P-polarized light and S polarized light of the film structure in 956nm < λ < 985nm wave band of the first film (2)
Transmissivity is minimum value, and the P-polarized light and S-polarization light transmission rate of 1000nm < λ < 1030nm wave band are maximum value, is used
The Conjugate gradients optimization function of Optilayer optimizes the initial configuration of the first film (2),
Film structure after simple optimization are as follows:
It is as shown in Figure 8 to optimize 45 degree of obtained near-infrared depolarization light combination mirror pellicle film distribution maps, it can be seen that this letter
It is almost regular singly to optimize obtained membrane system, it is convenient to bring for practical preparation.Optimize 45 degree of obtained near-infrared depolarizations and closes beam
Mirror film, in 45 degree of incidence, the optical transmission spectra of P-polarized light and S polarized light is as shown in Figure 9: P-polarized light and S are inclined at 976nm
Vibration light reflectivity is up to P light transmission rate and S light transmission rate at 99.95%, 1010nm and is above 99.8%.Fig. 7 is to pass through routine
Optimize obtained depolarization light combination mirror film, film layer distribution map is as shown in Figure 10, designs membrane system compared to the present embodiment, very not
It is regular, there are pole thick-layer 607nm and thin layer 20nm, this brings very big difficulty to practical preparation.Its optical transmission spectra is as schemed
Shown in 11, polarization separation degree is still bigger, and 976nm high reflectance zone reflectivity is not high enough, and 1010nm transmissivity is not high enough.
Meanwhile error analysis is carried out to this film using Optilayer software, Ta is set2O5And SiO2Thicknesses of layers miss
Difference is 1%.As shown in Figure 12 and Figure 13: when 45 degree of incidence, P-polarized light and S polarized light expectation reflectivity are still up at 976nm
P light transmission rate and S light transmission rate are above 98.5% at 99.75%, 1010nm.This membrane system error suseptibility is absolutely proved
It is low, convenient for the advantage of preparation.
The operating angle that the wide-angle depolarization of the present embodiment closes beam film is 45 degree.Design spectrum is described in detail above
Preferred embodiment of the invention.It should be appreciated that those skilled in the art can basis without creative work
Many modifications and variations are made in design of the invention.Therefore, all technician in the art are under this invention's idea existing
Have by the available technical solution of logical analysis, reasoning, or a limited experiment on the basis of technology, it all should be by right
In protection scope determined by claim.
Claims (8)
1. a kind of depolarization light combination mirror film, which is characterized in that including substrate (1) and be arranged on substrate (1) first thin
Film (2), the film structure of the first film (2) they are Sub | x1H x2L x3H x4L......xk-3H xk-2L xk-1H xkL|
Air, wherein Sub is thin film device substrate, and Air is emergent medium air, and H and L are respectively 1/4 central wavelength optical thickness
High-index material film layer and low-index material film layer, x1~xkFor the optical thickness coefficient of every layer film layer, k is thin
Film layer sum.
2. a kind of depolarization light combination mirror film according to claim 1, which is characterized in that described substrate (1) material is
Vitreous silica or K9 glass.
3. a kind of depolarization light combination mirror film according to claim 1, which is characterized in that the high-index material is
HfO2、TiO2, ZrO2、Ta2O5, sulfide or selenides, low-index material MgF2、SiO2Or Al2O3。
4. a kind of design method of depolarization light combination mirror film, which comprises the following steps:
1) selected center's wavelength X0；
2) optical thickness proportion in the first film multilayer film film is adjusted, by 45 degree of optimal membrane system knots of depolarization effect under incident
Initial configuration of the structure as the first film, i.e. Sub | 1.34 (1.15 (HLHL) 0.85 (HLHL)) ^n | Air, wherein Sub is thin
Membrane component substrate, Air are emergent medium air, and H and L are respectively the high-index material film of 1/4 central wavelength optical thickness
Layer and low-index material film layer, n are membrane stack number；
3) membrane system of the first film initial configuration is set in λ1< λA< λ2The P-polarized light and S-polarization light transmission of wave band are minimum
Value, λ3< λB< λ4The P-polarized light and S-polarization light transmission rate of wave band are maximum value, wherein λAFor reflection band central wavelength, λBFor
Transmission bands central wavelength, λ1For high anti-band optimization aim start wavelength, λ2Wavelength, λ are terminated for high anti-band optimization aim3It is high saturating
Band optimization aim start wavelength, λ4Wavelength, and λ are terminated for the high optimization aim of band thoroughly1< λA< λ2< λ0< λ3< λB< λ4；
4) initial configuration is optimized using Film Design software, specifically:
In optimization, guarantee that the membrane system main part of the first film is constant, Optimization Dept. is divided into sensitive layer, and, light regular with membrane system
Compose depolarized characteristic good, λAReach high reflection, λBReach the highly transmissive termination condition as optimization；
5) film structure after finally being optimized are as follows: Sub | x1H x2L x3H x4L......xk-3H xk-2L xk-1H xkL|
Air, wherein x1~xkFor the optical thickness coefficient of every layer film layer.
5. a kind of design method of depolarization light combination mirror film according to claim 4, which is characterized in that the depolarization closes
The operating angle of beam mirror film is 45 °.
6. a kind of design method of depolarization light combination mirror film according to claim 4, which is characterized in that the center
Wavelength X0According to reflection band central wavelength lambdaAWith transmission bands central wavelength lambdaBIt is chosen, is then had under the membrane system:
λA< λ0< λB。
7. a kind of design method of depolarization light combination mirror film according to claim 4, which is characterized in that the height is anti-
Band optimization aim start wavelength λ1, high anti-band optimization aim terminate wavelength X2, transmission bands central wavelength lambda3And the high optimization mesh of band thoroughly
Mark terminates wavelength X4Shu Bochang is closed according to practical laser to be adjusted, and under the membrane system, takes λ1=0.98* λA,λ2=1.01* λA,λ3
=0.99* λB, λ3=1.02* λB。
8. a kind of depolarization light combination mirror film according to claim 4, which is characterized in that membrane stack number n >=8.
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| CN112130339A (en) * | 2020-09-29 | 2020-12-25 | 苏州众为光电有限公司 | Laser polarization beam combination system |
| CN112146563A (en) * | 2020-09-29 | 2020-12-29 | 苏州众为光电有限公司 | Laser interferometer |
| CN113960707A (en) * | 2021-10-13 | 2022-01-21 | 苏州众为光电有限公司 | Angle-tunable depolarizing filter |
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| CN113960707A (en) * | 2021-10-13 | 2022-01-21 | 苏州众为光电有限公司 | Angle-tunable depolarizing filter |
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| Publication number | Publication date |
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| CN109471211B (en) | 2021-07-02 |
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