CN109461667A - Semiconductor chip packaging bonding apparatus and implementation method - Google Patents
Semiconductor chip packaging bonding apparatus and implementation method Download PDFInfo
- Publication number
- CN109461667A CN109461667A CN201811489807.0A CN201811489807A CN109461667A CN 109461667 A CN109461667 A CN 109461667A CN 201811489807 A CN201811489807 A CN 201811489807A CN 109461667 A CN109461667 A CN 109461667A
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- Prior art keywords
- chip
- substrate
- suction nozzle
- bonding
- transfer device
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 153
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000005476 soldering Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- IYLGZMTXKJYONK-ACLXAEORSA-N (12s,15r)-15-hydroxy-11,16-dioxo-15,20-dihydrosenecionan-12-yl acetate Chemical compound O1C(=O)[C@](CC)(O)C[C@@H](C)[C@](C)(OC(C)=O)C(=O)OCC2=CCN3[C@H]2[C@H]1CC3 IYLGZMTXKJYONK-ACLXAEORSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- IYLGZMTXKJYONK-UHFFFAOYSA-N ruwenine Natural products O1C(=O)C(CC)(O)CC(C)C(C)(OC(C)=O)C(=O)OCC2=CCN3C2C1CC3 IYLGZMTXKJYONK-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Die Bonding (AREA)
Abstract
A kind of semiconductor chip packaging bonding apparatus and implementation method, wherein, equipment includes rack, it is set on the rack mounting plate, and for the substrate transfer device to bonding part transfer substrate, for the chip transfer device and bonding part to bonding part transfer chip, the substrate transfer device includes base plate transfer mechanism and the substrate suction nozzle servo-actuated with base plate transfer mechanism, the chip transfer device of chip includes chip transfer mechanism and the chip suction nozzle servo-actuated with chip transfer mechanism, the substrate suction nozzle is more than two substrate suction nozzles for being suitable for different model substrate, and each substrate suction nozzle is respectively driven by an independent substrate suction nozzle driving mechanism；The chip suction nozzle is more than two chip suction nozzles for being suitable for different model chip, and each chip suction nozzle is respectively driven by an independent chip suction nozzle driving mechanism.The present invention has the advantages of applied widely, to save the replacement substrate suction nozzle time in the prior art, efficiency can be improved.
Description
Technical field
The present invention relates to a kind of semiconductor chip packaging bonding apparatus and implementation methods.
Background technique
Wafer (Wafer) is the carrier for producing used in integrated circuits, since its shape is circle, therefore is gained the name therefrom, again
Referred to as chip or disk.Since first piece of integrated circuit in 1958 is born, silicon technology accounts for master in the production of integrated circuit
Status is led, Silicon Wafer is the basic material for manufacturing semiconductor chip.Bonding (Bonding) be by two or more materials (or knot
Structure) it is combined into one, it is indispensable important link in semiconductor fabrication.Wafer direct bonding is (commonly abbreviated as
" wafer bonding " or " Direct Bonding "), the semiconductor crystal wafer by polishing can be made to combine without using binder
Together, have in IC manufacturing, MEMS (MEMS) encapsulation with the integrated equal fields of multifunction chip and widely answer
With.
Existing strong conjunction equipment include substrate (generally printed wiring board) transfer device, chip (wafer) transfer device and
Three parts of bonding part, when work, substrate transfer device is by substrate suction nozzle first by base plate transfer to bonding part, and bonding part is to base
Plate heating, then, chip is transferred to application one at a certain temperature after being heated by chip suction nozzle by chip transfer device
Chip is bonded by fixed pressure with substrate.
But existing same substrate needs the chip of a variety of different models, closed when bonder is strong to same chip
After complete, when needing to be bonded the chip of another model, replacement is generally required to chip suction nozzle library and finds corresponding chip suction nozzle simultaneously
Replacement, can just work on, this looks for the time of chip suction nozzle longer, generally require 3 minutes or so, likewise, when needing
When replacing the substrate of different model, it is also desirable to find corresponding substrate suction nozzle to substrate suction nozzle library and replace, can just continue work
Make, look for the time of substrate suction nozzle longer, generally require 3 minutes or so, along with bonding needs (usually 1-3 points of certain time
Clock), so that the operating rate of bonder is very slow, and generation is extremely limited.How the production effect of bonder is improved
Rate is industry urgent problem to be solved.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provide a kind of high production efficiency replacement suction nozzle it is fast
Semiconductor chip packaging bonding apparatus and implementation method.
The technical scheme is that a kind of semiconductor chip packaging bonding apparatus, including rack are provided, if on the rack
Mounting plate, and for bonding part transfer substrate substrate transfer device, for bonding part transfer chip chip turn
Moving device and bonding part, the substrate transfer device include that base plate transfer mechanism and the substrate being servo-actuated with base plate transfer mechanism are inhaled
Mouth, the chip transfer device of chip include chip transfer mechanism and the chip suction nozzle servo-actuated with chip transfer mechanism, the substrate
Suction nozzle is more than two substrate suction nozzles for being suitable for different model substrate, and each substrate suction nozzle is respectively by an independent substrate
The driving of suction nozzle driving mechanism；The chip suction nozzle is more than two chip suction nozzles for being suitable for different model chip, and each
Chip suction nozzle is respectively driven by an independent chip suction nozzle driving mechanism.
As improvement of the present invention, the substrate transfer device further includes substrate stage, in the substrate stage
It is equipped with substrate fixture, the substrate stage drives the substrate fixture to move in X/Y plane.
As improvement of the present invention, the chip transfer device further includes chip operation platform, in the chip operation platform
It is equipped with chip fixture, the chip operation platform drives the chip fixture to move in X/Y plane.
As improvement of the present invention, the substrate transfer device and the chip transfer device are located on frame, described
Frame is set on a mounting board, the first guideway and the second guideway is equipped in the frame, described in first guideway driving
Substrate transfer device is moved back and forth along frame, and second guideway drives the chip transfer device to move back and forth along frame.
As improvement of the present invention, the bonding part includes being bonded heating platform, clamping structure and material fetching mechanism, described
Clamping structure compresses the substrate being located on bonding heating platform and chip, and the material fetching mechanism takes the strong substrate completed that closes
Out.
As improvement of the present invention, the material fetching mechanism includes feeding soldering tip, the feeding suction nozzle being located on feeding soldering tip,
And the stent holder for being used to place the substrate after bonding below feeding soldering tip, the feeding suction nozzle will be bonded heated flat
The substrate after bonding on platform is moved on stent holder.
As improvement of the present invention, the substrate transfer device further includes that the substrate positioned to substrate positions CCD.
As improvement of the present invention, the substrate transfer device further includes to the substrate calibration CCD of substrate calibration.
As improvement of the present invention, the chip transfer device further includes to the chip positioning CCD of chip positioning.
As improvement of the present invention, the chip transfer device further includes that the chip calibrated to chip calibrates CCD.
The present invention also proposes a kind of bonding implementation method, includes the following steps:
S1, bracket is put on stent holder (323), substrate is placed on substrate fixture (1) 4, chip is placed into chip
Fixture (24)；
Substrate absorption in substrate fixture (14) is put into substrate calibration by substrate suction nozzle (12) by S2, base plate transfer mechanism (11)
On platform 17, and CCD(16 is positioned by the substrate of top) it is positioned；
S3, substrate are calibrated by substrate calibration CCD(18) and substrate calibration platform (17)；
Substrate absorption is put into bonding platform by substrate suction nozzle (12) by base plate transfer mechanism (11) after the completion of S4, calibration
(31), bonding platform (31) is heated the substrate by heating device；
Chip pick-up is put into chip by chip suction nozzle (22) and calibrates platform by S5, at the same time, chip transfer mechanism (21)
(15), pass through the chip positioning CCD(26 of top) and chip operation platform (23) positioned, chip calibrate platform (15) by X,
Y, Φ motor and chip calibrate CCD(24) chip is calibrated；
After the completion of S6, chip calibration, drawn again by chip suction nozzle (22) on the substrate being put on bonding platform 31, and pass through
Upper and lower motor applies certain pressure to chip, to complete to be bonded；
After the completion of S7, bonding, feeding suction nozzle (27) are driven to inhale substrate with chip of the bonding after good by feeding soldering tip (321)
It takes, is placed into stent holder (323), bonding is completed for the first time.
The present invention has an advantage that
1. being mounted with the substrate suction nozzle of multiple and different models in base plate transfer mechanism, each substrate suction nozzle is up and down by independent horse
Up to control, to adapt to various sizes of size of substrate, so that the present invention have it is applied widely, save it is in the prior art
The substrate suction nozzle time is replaced, is improved efficiency；
2. being mounted with the chip suction nozzle of multiple and different models on chip transfer mechanism, each chip suction nozzle is up and down by independent horse
Up to control, to adapt to various sizes of chip size, so that the present invention is applied widely, replacement chip in the prior art is saved
It the suction nozzle time, improves efficiency；
3. substrate fixture can place 12 kinds of different types of substrates, while chip fixture can also place 12 kinds of different types of cores
For piece, it can be achieved that needing the requirement of different chip bondings to single substrate, use scope is wide.
Detailed description of the invention
Fig. 1 is the schematic perspective view of plate in the present invention.
Specific embodiment
Below with reference to concrete case, the present invention will be described.
Referring to Figure 1, what Fig. 1 was disclosed is a kind of semiconductor chip packaging bonding apparatus, including rack 6, is located in rack 6
Mounting plate 5, and for bonding part 3 transfer substrate substrate transfer device 1, for bonding part 3 transfer chip core
Piece transfer device 2 and bonding part 3, the substrate transfer device 1 include base plate transfer mechanism 11 and with base plate transfer mechanism 11 with
Dynamic substrate suction nozzle 12, the chip transfer device 2 of chip include chip transfer mechanism 21 and are servo-actuated with chip transfer mechanism 21
Chip suction nozzle 22, the substrate suction nozzle 12 are more than two substrate suction nozzles for being suitable for different model substrate (in the present embodiment
For 4 substrate suction nozzles, practical upper substrate suction nozzle can be 2 or more integers, not exceed 10 preferably), and each base
Plate suction nozzle 12 respectively by an independent substrate suction nozzle driving mechanism driving (be not drawn into, substrate suction nozzle driving mechanism can with motor,
It can be cylinder isoline driving mechanism)；The chip suction nozzle 22 is more than two chips for being suitable for different model chip
Suction nozzle (is 4 chip suction nozzles in the present embodiment, actually chip suction nozzle can be 2 or more integers, not exceed preferably
10), and each chip suction nozzle 22 respectively (is not drawn into, chip suction nozzle driving by an independent chip suction nozzle driving mechanism driving
Mechanism can be also possible to cylinder isoline driving mechanism with motor).
Preferably, the substrate transfer device 1 further includes substrate stage 13, and base is equipped on the substrate stage 13
Board clamp 14, the substrate stage 13 drive the substrate fixture 14 to move in X/Y plane.
Preferably, the chip transfer device 2 further includes chip operation platform 23, and core is equipped on the chip operation platform 23
Plate clamp 24, the chip operation platform 23 drive the chip fixture 24 to move in X/Y plane.
Preferably, the substrate transfer device 1 and the chip transfer device 2 are located on frame 4, and the frame 4 is located at
On mounting plate 5, it is equipped with the first guideway and the second guideway in the frame 4, first guideway drives the substrate to turn
Moving device 1 is moved back and forth along frame 4, and second guideway drives the chip transfer device 2 to move back and forth along frame 4.
Preferably, the bonding part 3 includes bonding heating platform 31, clamping structure and material fetching mechanism 32, the clamping knot
Structure compresses the substrate being located on bonding heating platform 31 and chip, and the material fetching mechanism 32 takes out the strong substrate completed that closes.
Preferably, the material fetching mechanism 32 includes feeding soldering tip 321, the feeding suction nozzle 322 being located on feeding soldering tip 321,
And positioned at 321 lower section of feeding soldering tip for placing the stent holder 323 of the substrate after being bonded, the feeding suction nozzle 322 will
The substrate after bonding on bonding heating platform 31 is moved on stent holder 323.
Preferably, the substrate transfer device 1 further includes that the substrate positioned to substrate positions CCD14.
Preferably, the substrate transfer device 1 further includes to the substrate calibration CCD15 of substrate calibration.
Preferably, the chip transfer device 2 further includes to the chip positioning CCD26 of chip positioning.
Preferably, the chip transfer device 2 further includes that the chip calibrated to chip calibrates CCD25.
Operation instruction of the invention:
Bracket is put on stent holder 323 by craft first, substrate is placed on substrate fixture 14, chip is placed into core
Plate clamp 24, base plate transfer mechanism 11 drive substrate suction nozzle 12 will by the substrate positioning CCD16 and substrate stage 13 of top
Substrate absorption in substrate fixture 14 is put on substrate calibration platform 17；Substrate is flat by substrate calibration CCD18 and substrate calibration
Platform 17 is calibrated, and drives substrate suction nozzle 12 that substrate absorption is put into bonding platform by base plate transfer mechanism 11 after the completion of calibration
31；Bonding platform 31 is heated the substrate by heating device, while chip transfer mechanism 21 drives chip suction nozzle 22 that will lead to
Chip pick-up is put into chip and calibrates platform 15 by the chip positioning CCD26 and chip operation platform 23 for crossing top；Chip calibrates platform
15, which calibrate CCD24 by X, Y, Φ motor and chip, calibrates chip；After the completion of chip calibration, again by chip suction nozzle
22 draw on the substrate being put on bonding platform 31, and apply certain pressure to chip by upper and lower motor (not shown), with
Achieve the purpose that bonding；After the completion of bonding, chip pick-up of the feeding suction nozzle 27 by bonding after good is driven by feeding soldering tip 321, is put
It sets in stent holder 323, bonding is completed for the first time.The bonding of second chip or more is such as carried out, is repeated above-mentioned
Step.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of semiconductor chip packaging bonding apparatus, including rack (6), the mounting plate (5) being located on rack (6), Yi Jiyong
In the substrate transfer device (1) to bonding part (3) transfer substrate, the chip transfer device for transferring chip to bonding part (3)
(2) and bonding part (3), the substrate transfer device (1) include base plate transfer mechanism (11) and with base plate transfer mechanism (11) with
Dynamic substrate suction nozzle (12), the chip transfer device (2) of chip include chip transfer mechanism (21) and with chip transfer mechanism
(21) servo-actuated chip suction nozzle (22), it is characterised in that: the substrate suction nozzle (12) is suitable for different model to be more than two
The substrate suction nozzle of substrate, and each substrate suction nozzle (12) is respectively driven by an independent substrate suction nozzle driving mechanism；The chip
Suction nozzle (22) is more than two chip suction nozzles for being suitable for different model chip, and each chip suction nozzle (22) is respectively only by one
Vertical chip suction nozzle driving mechanism driving.
2. semiconductor chip packaging bonding apparatus according to claim 1, it is characterised in that: the substrate transfer device
(1) further include substrate stage (13), be equipped with substrate fixture (14) on the substrate stage (13), the substrate stage
(13) substrate fixture (14) is driven to move in X/Y plane.
3. semiconductor chip packaging bonding apparatus according to claim 1 or 2, it is characterised in that: the chip transfer dress
Setting (2) further includes chip operation platform (23), is equipped with chip fixture (24) on the chip operation platform (23), the chip operation
Platform (23) drives the chip fixture (24) to move in X/Y plane.
4. semiconductor chip packaging bonding apparatus according to claim 3, it is characterised in that: the substrate transfer device
(1) it is located on frame (4) with the chip transfer device (2), the frame (4) is located on mounting plate (5), in the frame
(4) it is equipped with the first guideway and the second guideway, first guideway drives the substrate transfer device (1) along frame (4)
It moves back and forth, second guideway drives the chip transfer device (2) to move back and forth along frame (4).
5. semiconductor chip packaging bonding apparatus according to claim 1 or 2, it is characterised in that: bonding part (3) packet
Bonding heating platform (31), clamping structure and material fetching mechanism (32) are included, the clamping structure will be located at bonding heating platform (31)
On substrate and chip compress, the material fetching mechanism (32) by it is strong close complete substrate take out.
6. semiconductor chip packaging bonding apparatus according to claim 5, it is characterised in that: material fetching mechanism (32) packet
The feeding suction nozzle (322) for including feeding soldering tip (321), being located on feeding soldering tip (321), and be located at below feeding soldering tip (321)
For places bonding after substrate stent holder (323), the feeding suction nozzle (322) will bonding heating platform (31) on
Substrate after bonding is moved on stent holder (323).
7. semiconductor chip packaging bonding apparatus according to claim 1 or 2, it is characterised in that: the substrate transfer dress
Setting (1) further includes that the substrate positioned to substrate positions CCD(16).
8. semiconductor chip packaging bonding apparatus according to claim 1 or 2, it is characterised in that: the substrate transfer dress
Setting (1) further includes to the substrate calibration CCD(15 of substrate calibration).
9. semiconductor chip packaging bonding apparatus according to claim 1 or 2, it is characterised in that: the chip transfer dress
Setting (2) further includes to the chip positioning CCD(26 of chip positioning)；The chip transfer device (2) further includes calibrating to chip
Chip calibrates CCD(25).
10. a kind of bonding implementation method, which comprises the steps of:
S1, bracket is put on stent holder (323), substrate is placed on substrate fixture (1) 4, chip is placed into chip
Fixture (24)；
Substrate absorption in substrate fixture (14) is put into substrate calibration by substrate suction nozzle (12) by S2, base plate transfer mechanism (11)
On platform 17, and CCD(16 is positioned by the substrate of top) it is positioned；
S3, substrate are calibrated by substrate calibration CCD(18) and substrate calibration platform (17)；
Substrate absorption is put into bonding platform by substrate suction nozzle (12) by base plate transfer mechanism (11) after the completion of S4, calibration
(31), bonding platform (31) is heated the substrate by heating device；
Chip pick-up is put into chip by chip suction nozzle (22) and calibrates platform by S5, at the same time, chip transfer mechanism (21)
(15), pass through the chip positioning CCD(26 of top) and chip operation platform (23) positioned, chip calibrate platform (15) by X,
Y, Φ motor and chip calibrate CCD(24) chip is calibrated；
After the completion of S6, chip calibration, drawn again by chip suction nozzle (22) on the substrate being put on bonding platform 31, and pass through
Upper and lower motor applies certain pressure to chip, to complete to be bonded；
After the completion of S7, bonding, feeding suction nozzle (27) are driven to inhale substrate with chip of the bonding after good by feeding soldering tip (321)
It takes, is placed into stent holder (323), bonding is completed for the first time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811489807.0A CN109461667A (en) | 2018-12-06 | 2018-12-06 | Semiconductor chip packaging bonding apparatus and implementation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811489807.0A CN109461667A (en) | 2018-12-06 | 2018-12-06 | Semiconductor chip packaging bonding apparatus and implementation method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109461667A true CN109461667A (en) | 2019-03-12 |
Family
ID=65612650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811489807.0A Pending CN109461667A (en) | 2018-12-06 | 2018-12-06 | Semiconductor chip packaging bonding apparatus and implementation method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109461667A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109411397A (en) * | 2018-12-06 | 2019-03-01 | 深圳市佳思特光电设备有限公司 | Semiconductor chip packaging is bonded mould group and bonding technology |
| CN110610869A (en) * | 2019-10-22 | 2019-12-24 | 苏州艾科瑞思智能装备股份有限公司 | Chip packaging equipment |
| CN117810103A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Epoxy resin bonding equipment and process |
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|---|---|---|---|---|
| JPH10163265A (en) * | 1996-12-02 | 1998-06-19 | Matsushita Electric Ind Co Ltd | Mounting equipment of chip |
| CN103400784A (en) * | 2013-08-08 | 2013-11-20 | 王敕 | Multipurpose encapsulating equipment |
| CN104701199A (en) * | 2015-03-20 | 2015-06-10 | 北京中电科电子装备有限公司 | Flip chip bonding equipment |
| CN107887294A (en) * | 2016-09-30 | 2018-04-06 | 上海微电子装备（集团）股份有限公司 | General batch of bonding apparatus of chip and method |
| CN108886002A (en) * | 2016-03-14 | 2018-11-23 | 华封科技有限公司 | Chip encapsulating device and its method |
-
2018
- 2018-12-06 CN CN201811489807.0A patent/CN109461667A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10163265A (en) * | 1996-12-02 | 1998-06-19 | Matsushita Electric Ind Co Ltd | Mounting equipment of chip |
| CN103400784A (en) * | 2013-08-08 | 2013-11-20 | 王敕 | Multipurpose encapsulating equipment |
| CN104701199A (en) * | 2015-03-20 | 2015-06-10 | 北京中电科电子装备有限公司 | Flip chip bonding equipment |
| CN108886002A (en) * | 2016-03-14 | 2018-11-23 | 华封科技有限公司 | Chip encapsulating device and its method |
| CN107887294A (en) * | 2016-09-30 | 2018-04-06 | 上海微电子装备（集团）股份有限公司 | General batch of bonding apparatus of chip and method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109411397A (en) * | 2018-12-06 | 2019-03-01 | 深圳市佳思特光电设备有限公司 | Semiconductor chip packaging is bonded mould group and bonding technology |
| CN110610869A (en) * | 2019-10-22 | 2019-12-24 | 苏州艾科瑞思智能装备股份有限公司 | Chip packaging equipment |
| CN117810103A (en) * | 2024-02-29 | 2024-04-02 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Epoxy resin bonding equipment and process |
| CN117810103B (en) * | 2024-02-29 | 2024-05-07 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Epoxy resin bonding equipment and process |
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