CN109437551A - A method of high purity quartz material is prepared using tailing - Google Patents
A method of high purity quartz material is prepared using tailing Download PDFInfo
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- CN109437551A CN109437551A CN201811515001.4A CN201811515001A CN109437551A CN 109437551 A CN109437551 A CN 109437551A CN 201811515001 A CN201811515001 A CN 201811515001A CN 109437551 A CN109437551 A CN 109437551A
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- tailing
- quartz
- high purity
- mixture
- quartzy
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
Abstract
The invention discloses a kind of methods for preparing high purity quartz material using tailing, comprising the following steps: (1) raw material gradation: being by quartzy tailing and quartz particles gradation and heats and be mixed into mixture；Quartzy tailing volume ratio is 2%-9% in mixture, and mixture density is in 1.2-1.8g/cm3Between；(2) it fires deposition: mixture being entered into rotating and depositing furnace by feeding device after blowtorch heating melting, is deposited on substrate, forms quartz material.The present invention is matched by the mixed class of tailing and quartz particles material, it is prepared into mixture, take full advantage of tailing purity is high, even-grained characteristic, preparation produces the higher high purity quartz material of added value, cost is reduced up to 5% or more, tailing is effectively utilized, it is possible to reduce melt the bubble inside the quartzy embryo material of formation, improve product quality.
Description
Technical field
The invention belongs to quartz material preparation fields, prepare high purity quartz material using tailing more particularly, to a kind of
Method.
Background technique
Preform and pure quartz glass material during the preparation process, have the not formed product of raw material of part,
It by dust collecting system, is collected as tailing, tailing is SiO2 particle, has the characteristics that purity is high, density are small, especially
Synthetic method preparation is preparing optical fiber prefabricated rod mandrel, casing and high-purity synthetic quartz, can generate a large amount of tailing, but current tailing
It is not recycled very well.
It prepares preform at present and the main method of high purity quartz material is chemical synthesis, such as VAD (gas phase axis
To sedimentation), OVD (outside vapor deposition), quartz material purity is high, the excellent quality of the preparation of chemical synthesis, but same
When at least 30% the not formed product of raw material and be collected, produce a large amount of tailing, it is main to the tailing of collection at present
Processing mode is filled into the materials such as rubber using tailing as filler material.It is this kind of using method more low side, tailing it is high-purity
Performance is not utilized very well.
Norsk Hydro ASA, Norway proposes that fine silica powder a system can be passed through in patent CN101472839A
The chemical method of column, converts it into silicon tetrachloride, can be applied to other high-end fields.But process is complicated, processing cost
Height simultaneously has a series of environmental issue.
Corning Incorporated proposed that the tailing that (patent No. US 2016/0251253) produces OVD technique returned in 2016
It receives, and by compression, is then sintered, forms the outsourcing material of preform.The high-purity property for the tailing that this method utilizes
Can, added value with higher, but due to the density very little of tailing, in compression process, volume change is big, in sintering process easily
Cracking, yield rate are low.
Therefore, the utilization of tailing finds effective scheme, by the high-purity and of uniform size spy of tailing still in exploration at present
Property bring into play, it is a more effective route that tailing, which is prepared into pure quartz glass blank, have be widely used, add
It is worth the advantages that high.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, high purity quartz is prepared using tailing the present invention provides a kind of
The method of material, its object is to by being former material to the tailing of chemical synthesis production quartz material (including VAD, OVD etc.)
Material is mixed with natural high-purity quartz sand or synthetic quartz powder (being referred to as quartz particles material), forms the mixture of certain gradation,
It is fired into quartzy idiosome material homogeneous, that internal stress is small by specific technology for blanking, thus solving the prior art can not
The technical issues of efficiently using the tailing of chemical synthesis production quartz material.
To achieve the above object, according to one aspect of the present invention, it provides and a kind of prepares high purity quartz material using tailing
The method of material, comprising the following steps:
(1) raw material gradation: being by quartzy tailing and quartz particles gradation and heats and is mixed into mixture；It is quartzy in mixture
Tailing volume ratio is 2%-9%, and mixture density is in 1.2-1.8g/cm3Between；
(2) it fires deposition: the mixture obtained in step (1) is entered into rotation by feeding device after blowtorch heating melting
Turn cvd furnace, be deposited on substrate, forms quartz material
Preferably, the method for preparing high purity quartz material using tailing, it is described by quartzy tailing and quartz particles
Gradation is and heats and be mixed into mixture specifically:
Be by quartzy tailing and quartz particles gradation and heat mixing, heating temperature at 200-300 DEG C, stir 3 hours with
On.
Preferably, the method for preparing high purity quartz material using tailing, the quartz tailing bulk density 0.1g/
cm3-0.6g/cm3, for partial size between 40nm-500nm, the quartz particles material average grain diameter is 50-250um.
Preferably, the method for preparing high purity quartz material using tailing, the quartz tailing bulk density 0.2g/
Cm3-0.4g/cm3, partial size are between 120nm-200nm.
Preferably, the method for preparing high purity quartz material using tailing, the quartz particles material average grain diameter are
80-150um。
Preferably, the method for preparing high purity quartz material using tailing, quartzy tailing volume in the mixture
Than for 3%-6%, mixture density is in 1.4-1.6g/cm3Between.
Preferably, the method for preparing high purity quartz material using tailing, step (2) described feeding device, carrier gas
Use hydrogen or oxygen, carrier gas flux 10-40slm, preferably 20-35slm；Feeding speed 10g/min-50g/min, preferably
15-30g/min。
Preferably, the method for preparing high purity quartz material using tailing, the control of step (2) hydrogen flowing quantity for 80~
160slm, oxygen flux control are 45~120slm, and hydrogen and oxygen proportion are controlled in 1.4:1~1.8:1.
Preferably, the method for preparing high purity quartz material using tailing, the rotating and depositing furnace are built in blowtorch
Rotating and depositing furnace, burner hearth preheat 1470~1700 DEG C and stablize, and more preferably fire box temperature is stablized at 1550~1680 DEG C.
Preferably, the method for preparing high purity quartz material using tailing, under step (2) controls as follows
Material:
Blanking rate is V1, and substrate is located on rotating platform (114), and platform decrease speed is V2.The blanking rate is full
It is enough lower relationship:
V1=[1+k (r, h)] V2r2ρ
Wherein: V1For blanking rate, i.e., raw material injected volume in the unit time；V2For using the rotation of quartz particles fusion sediment
Turn platform fall off rate；R is target quartz ingot radius；ρ is quartz material density；K (r, h) is correction factor, and value range is
0.02~0.15, it is positively correlated with the quartzy ingot height h dullness in deposition, with the quartzy ingot radius dullness positive in deposition
It closes.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1, matched by the mixed class of tailing and quartz particles material, be prepared into mixture, take full advantage of tailing purity is high, grain
Uniform characteristic is spent, preparation produces the higher high purity quartz material of added value, reduces cost up to 5% or more, effectively utilizes
Tailing.
2, by the gradation of tailing and quartz particles material, while the gas inside the quartzy embryo material that melting is formed can be reduced
Bubble improves product quality；
3, tailing due to density it is small, can not be by modes such as rotary shaft, air-breathing, air blowings come independent uniform blanking, it may appear that
Blocking and the discontinuous problem of blanking, and the density of the mixture of tailing and quartz particles increases to 1.4-2.1g/cm3, improve
Mixture mobility is, it can be achieved that uniformly continuous blanking.
4, by the quartzy embryo material of melt-mixed material deposition preparation, purity reaches 99.9% or more, can be applied to light
The fields such as fibre, semiconductor, solar energy, added value with higher.
Detailed description of the invention
Fig. 1 is that quartz sand prepares schematic diagram.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 101 be feed dress
It sets, 102 be hydrogen, and 103 be oxygen, and 104 be torch flame, and 105 be blowtorch, and 106 be quartzy cylindrical material, and 107 be burner hearth,
108 be observation panel, and 109 be temperature-measuring port, and 110 be extractor fan, and 111 be steam drainage device, and 112 be burner, and 113 be base
Plate, 114 be rotating platform, and 115 be support shaft.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below each other it
Between do not constitute conflict and can be combined with each other.
The method provided by the invention for preparing high purity quartz material using tailing, comprising the following steps:
(1) raw material gradation: being by quartzy tailing and quartz particles gradation and heats and is mixed into mixture；Heating temperature exists
200-300 DEG C, stirring 3 hours or more, the quartz tailing bulk density 0.1g/cm3-0.6g/cm3, partial size is in 40nm-500nm
Between, preferably bulk density 0.2g/cm3-0.4g/cm3, partial size are between 120nm-200nm；Quartz particles material average grain diameter is
50-250um, preferably 80-150um；Quartzy tailing volume ratio is 2%-9%, preferably 3%-6%, mixture density in mixture
In 1.2-1.8g/cm3Between, preferred 1.4-1.6g/cm3Between.
(2) it fires deposition: the mixture obtained in step (1) is entered into rotation by feeding device after blowtorch heating melting
Turn cvd furnace, be deposited on substrate, forms quartz material；The feeding device carrier gas flux 10-40slm, preferably 20-35slm；
Feeding speed 10g/min-50g/min, preferably 15-30g/min, hydrogen flowing quantity control are 80~160slm, oxygen flux control
For 45~120slm, hydrogen and oxygen proportion are controlled in 1.4:1~1.8:1.
The rotating and depositing furnace is preferably rotating and depositing furnace built in blowtorch, and burner hearth preheats 1470~1700 DEG C and stablizes, more
Excellent fire box temperature is stablized at 1550~1680 DEG C.The central axes deviation of the central axes of blowtorch and rotating platform (114) is no more than
3mm；Burner hearth is preheated with flame, while rotating platform is risen with the speed of 5~10mm/min, reaches sight from burner hearth lower end
The position Cha Kou.
Using raw material of the mixture as rotating and depositing for being mixed with quartzy tailing, gradation process improves mixed the present invention
The mobility for closing material, to realize the blanking of uniformly continuous.And the carrier gas of cvd furnace and the gas supply of oxyhydrogen flame then affect use
Quality of the mixture as the raw material availability and quartz material when preparing quartz material of raw material.
Rotating and depositing furnace built in the preferred blowtorch of the present invention, avoid lightweight in mixture quartzy tailing disperse caused by
Environmental pollution and significant loss, while temperature is stably and controllable in burner hearth, ensure that final quartz material stay in grade matter obtained
Ground is uniform.
Preferred embodiment controls blanking as follows:
Blanking rate is V1, and substrate is located on rotating platform (114), and platform decrease speed is V2.The blanking rate is full
It is enough lower relationship:
V1=[1+k (r, h)] V2r2ρ
Wherein: V1For blanking rate, i.e., raw material injected volume in the unit time；V2For using the rotation of quartz particles fusion sediment
Turn platform fall off rate；R is target quartz ingot radius；ρ is quartz material density；K (r, h) is correction factor, and value range is
0.02~0.15, it is positively correlated with the quartzy ingot height h dullness in deposition, with the quartzy ingot radius dullness positive in deposition
It closes.
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
For quartz embryo material purity prepared by the present invention 99.9% or more, the utilization rate of tailing is higher than 93%, compared to use
Pure quartz sand is that raw material prepare high purity quartz embryo material, and cost can reduce by 5% or more, and the granularity of tailing is compared and quartz
Sand is much smaller, can be filled in the gap of quartz sand, reduces the content of bubble, improves the product of the quartz material of preparation
Matter.
The following are embodiments:
Embodiment 1
A method of high purity quartz material is prepared using tailing, comprising the following steps:
(1) raw material gradation: being packed into mixing device for tailing and natural siliceous sand and carry out heating stirring mixing at 300 DEG C,
Tailing density 0.34g/cm3, average grain diameter 209nm, the quartz sand particle size average grain diameter 122um of selection, after mixing, the body of tailing
Product is than being 4.7%, and the density of mixture is 1.55g/cm3, and obtained mixture is cooled to room temperature and is fitted into feeding device.
(2) fire deposition: first backward blowtorch is passed through hydrogen and oxygen is lighted, and forms stable oxyhydrogen flame, hydrogen total flow
For 158slm, oxygen total flow is 105slm, and rotating platform rises 474mm to taking things philosophically with the speed of 5.3mm/min from stockhole
The position of Cha Kou, fire box temperature stability contorting open feeding device at 1570 DEG C ± 20 DEG C, the mixing that will be obtained in step (1)
It is 26.27g/min, rotating platform revolving speed that material enters rotating and depositing furnace blanking rate by feeding device after blowtorch heating melting
For 14rpm, fall off rate is initially set 1.10mm/min.Fall off rate with deposition can change, lower reduction of speed
Rate can be gradually reduced, and the blanking rate meets following relationship:
V1=[1+k (r, h)] V2r2ρ
After 571min, fall off rate is reduced to 0.87mm/min, stops blanking later,
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
The present embodiment is prepared into size φ 136.4mm ± 2.3mm, and the apparent size of height 505mm is uniform, without visual gas
Bubble, and bright quartzy column idiosome material, for quartzy idiosome material purity up to 99.98%, the utilization rate of tailing is 96.6%.
Embodiment 2
A method of high purity quartz material is prepared using tailing, comprising the following steps:
(1) raw material gradation: being packed into mixing device for tailing and natural siliceous sand and carry out heating stirring mixing at 300 DEG C,
Tailing density 0.54g/cm3, average grain diameter 226nm, the quartz sand particle size average grain diameter 122um of selection, after mixing, the body of tailing
Product is than being 7.4%, and the density of mixture is 1.31g/cm3, and obtained mixture is cooled to room temperature and is fitted into feeding device.
(2) fire deposition: first backward blowtorch is passed through hydrogen and oxygen is lighted, and forms stable oxyhydrogen flame, hydrogen total flow
For 148slm, oxygen total flow is 105slm, and rotating platform rises 474mm to taking things philosophically with the speed of 5.3mm/min from stockhole
The position of Cha Kou, fire box temperature stability contorting open feeding device at 1560 DEG C ± 20 DEG C, the mixing that will be obtained in step (1)
It is 26.27g/min, rotating platform revolving speed that material enters rotating and depositing furnace blanking rate by feeding device after blowtorch heating melting
For 14rpm, fall off rate is initially set 1.10mm/min.Fall off rate with deposition can change, lower reduction of speed
Rate can be gradually reduced, and the blanking rate meets following relationship:
V1=[1+k (r, h)] V2r2ρ
After 571min, fall off rate is reduced to 0.87mm/min, stops blanking later,
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
The present embodiment is prepared into size φ 131.0mm ± 3.0mm, and the apparent size of height 505mm is uniform, without visual gas
Bubble, and bright quartzy column idiosome material, for quartzy idiosome material purity up to 99.93%, the utilization rate of tailing is 94.1%.
Embodiment 3
A method of high purity quartz material is prepared using tailing, comprising the following steps:
(1) raw material gradation: being packed into mixing device for tailing and natural siliceous sand and carry out heating stirring mixing at 300 DEG C,
Tailing density 0.34g/cm3, average grain diameter 209nm, the quartz sand particle size average grain diameter 122um of selection, after mixing, the body of tailing
Product is than being 2.2%, and the density of mixture is 1.89g/cm3, and obtained mixture is cooled to room temperature and is fitted into feeding device.
(2) fire deposition: first backward blowtorch is passed through hydrogen and oxygen is lighted, and forms stable oxyhydrogen flame, hydrogen total flow
For 158slm, oxygen total flow is 108slm, and rotating platform rises 474mm to taking things philosophically with the speed of 5.3mm/min from stockhole
The position of Cha Kou, fire box temperature stability contorting open feeding device at 1575 DEG C ± 20 DEG C, the mixing that will be obtained in step (1)
It is 25.82g/min, rotating platform revolving speed that material enters rotating and depositing furnace blanking rate by feeding device after blowtorch heating melting
For 14rpm, fall off rate is initially set 1.06mm/min.Fall off rate with deposition can change, lower reduction of speed
Rate can be gradually reduced, and the blanking rate meets following relationship:
V1=[1+k (r, h)] V2r2ρ
After 571min, fall off rate is reduced to 0.84mm/min, stops blanking later,
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
The present embodiment is prepared into size φ 138.5mm ± 2.7mm, and the apparent size of height 505mm is uniform, without visual gas
Bubble, and bright quartzy column idiosome material, for quartzy idiosome material purity up to 99.95%, the utilization rate of tailing is 95.7%.
Embodiment 4
A method of high purity quartz material is prepared using tailing, comprising the following steps:
(1) raw material gradation: being packed into mixing device for tailing and natural siliceous sand and carry out heating stirring mixing at 300 DEG C,
Tailing density 0.34g/cm3, average grain diameter 209nm, the quartz sand particle size average grain diameter 122um of selection, after mixing, the body of tailing
Product is than being 4.8%, and the density of mixture is 1.64g/cm3, and obtained mixture is cooled to room temperature and is fitted into feeding device.
(2) fire deposition: first backward blowtorch is passed through hydrogen and oxygen is lighted, and forms stable oxyhydrogen flame, hydrogen total flow
For 120slm, oxygen total flow is 88slm, from rotating platform rises 474mm arrival from stockhole with the speed of 5.3mm/min
The position of mouth, fire box temperature stability contorting open feeding device at 1480 DEG C ± 20 DEG C, will the middle mixture obtained of step (1)
Entering rotating and depositing furnace blanking rate after blowtorch heating melting by feeding device is 26.41g/min, and rotating platform revolving speed is
14rpm, fall off rate are initially set 1.08mm/min.Fall off rate with deposition can change, fall off rate
It can be gradually reduced, the blanking rate meets following relationship:
V1=[1+k (r, h)] V2r2ρ
After 571min, fall off rate is reduced to 0.85mm/min, stops blanking later,
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
The present embodiment is prepared into size φ 121.7mm ± 4.1mm, and the apparent size of height 505mm is uniform, without visual gas
Bubble, and bright quartzy column idiosome material, for quartzy idiosome material purity up to 99.92%, the utilization rate of tailing is 97.1%.
Embodiment 5
A method of high purity quartz material is prepared using tailing, comprising the following steps:
(1) raw material gradation: being packed into mixing device for tailing and natural siliceous sand and carry out heating stirring mixing at 300 DEG C,
Tailing density 0.54g/cm3, average grain diameter 226nm, the quartz sand particle size average grain diameter 122um of selection, after mixing, the body of tailing
Product is than being 6.7%, and the density of mixture is 1.39g/cm3, and obtained mixture is cooled to room temperature and is fitted into feeding device.
(2) fire deposition: first backward blowtorch is passed through hydrogen and oxygen is lighted, and forms stable oxyhydrogen flame, hydrogen total flow
For 158slm, oxygen total flow is 105slm, and rotating platform rises 474mm to taking things philosophically with the speed of 5.3mm/min from stockhole
The position of Cha Kou, fire box temperature stability contorting open feeding device at 1570 DEG C ± 20 DEG C, the mixing that will be obtained in step (1)
It is 33.06g/min, rotating platform revolving speed that material enters rotating and depositing furnace blanking rate by feeding device after blowtorch heating melting
For 12rpm, fall off rate is initially set 1.50mm/min.Fall off rate with deposition can change, lower reduction of speed
Rate can be gradually reduced, and the blanking rate meets following relationship:
V1=[1+k (r, h)] V2r2ρ
After 571min, fall off rate is reduced to 1.02mm/min, stops blanking later,
(3) polishing treatment: to the quartz material of step (2) preparation, flame polish is carried out, that is, uses the burner of lower end
(112) quartz material is heated, makes not siphoned away by exhaust equipment, and be adhered to a small amount of silica dust on product
Particle fusion makes surfacing bright.
The present embodiment is prepared into size φ 144.4mm ± 2.5mm, and the apparent size of height 505mm is uniform, without visual gas
Bubble, and bright quartzy column idiosome material, for quartzy idiosome material purity up to 99.92%, the utilization rate of tailing is 93.1%.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of method for preparing high purity quartz material using tailing, which comprises the following steps:
(1) raw material gradation: being by quartzy tailing and quartz particles gradation and heats and is mixed into mixture；Quartzy tailing in mixture
Volume ratio is 2%-9%, and mixture density is in 1.2-1.8g/cm3Between；
(2) it fires deposition: the middle mixture obtained of step (1) being entered into rotation by feeding device after blowtorch heating melting and is sunk
Product furnace, is deposited on substrate, forms quartz material.
2. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that described by quartzy tail
Material and quartz particles gradation are and heat and be mixed into mixture specifically:
It is by quartzy tailing and quartz particles gradation and heats mixing, heating temperature is at 200-300 DEG C, and stirring 3 hours or more.
3. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that the quartz tailing
Bulk density 0.1g/cm3-0.6g/cm3, for partial size between 40nm-500nm, the quartz particles material average grain diameter is 50-
250um。
4. the method for preparing high purity quartz material using tailing as claimed in claim 3, which is characterized in that the quartz tailing
Bulk density 0.2g/cm3-0.4g/cm3, partial size are between 120nm-200nm.
5. the method for preparing high purity quartz material using tailing as claimed in claim 3, which is characterized in that the quartz particles
Material average grain diameter is 80-150um.
6. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that in the mixture
Quartzy tailing volume ratio is 3%-6%, and mixture density is in 1.4-1.6g/cm3Between.
7. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that step (2) is described
Feeding device carrier gas flux 10-40slm, preferably 20-35slm；Feeding speed 10g/min-50g/min, preferably 15-30g/min.
8. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that step (2) hydrogen
Flow control is 80~160slm, and oxygen flux control is 45~120slm, and hydrogen and oxygen proportion are controlled in 1.4:1~1.8:
1。
9. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that the rotating and depositing
Furnace is rotating and depositing furnace built in blowtorch, and burner hearth preheats 1470~1700 DEG C and simultaneously stablizes, more preferably fire box temperature stablize 1550~
1680℃。
10. the method for preparing high purity quartz material using tailing as described in claim 1, which is characterized in that step (2) according to
Following method controls blanking:
Blanking rate is V1, and substrate is located on rotating platform (114), and platform decrease speed is V2.The blanking rate meets following
Relationship:
V1=[1+k (r, h)] V2r2ρ
Wherein: V1For blanking rate, i.e., raw material injected volume in the unit time；V2For using the rotary flat of quartz particles fusion sediment
Platform fall off rate；R is target quartz ingot radius；ρ is quartz material density；K (r, h) is correction factor, value range 0.02
~0.15, the quartzy ingot height h dullness positive correlation in deposition is positively correlated with the quartzy ingot radius dullness in deposition.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113912270A (en) * | 2021-11-24 | 2022-01-11 | 连云港太平洋半导体材料有限公司 | Preparation process for highly-uniform synthetic quartz lump |
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