CN113912270A - Preparation process for highly-uniform synthetic quartz lump - Google Patents

Preparation process for highly-uniform synthetic quartz lump Download PDF

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Publication number
CN113912270A
CN113912270A CN202111402818.2A CN202111402818A CN113912270A CN 113912270 A CN113912270 A CN 113912270A CN 202111402818 A CN202111402818 A CN 202111402818A CN 113912270 A CN113912270 A CN 113912270A
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China
Prior art keywords
quartz
lump
hydrogen
sintering furnace
electric telescopic
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Pending
Application number
CN202111402818.2A
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Chinese (zh)
Inventor
陈富伦
刘明伟
倪玲
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Lianyungang Pacific Semiconductor Materials Co Ltd
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Lianyungang Pacific Semiconductor Materials Co Ltd
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Priority to CN202111402818.2A priority Critical patent/CN113912270A/en
Publication of CN113912270A publication Critical patent/CN113912270A/en
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

The invention discloses a preparation process of a high-uniformity synthetic quartz lump, which comprises a sintering furnace, a heat preservation furnace, a burner, an electric telescopic rod, a quartz glass target holder and a pressurizing device, and comprises the following raw materials: the device comprises hydrogen, oxygen and quartz sand, wherein a quartz sand feeding port and a waste gas discharge pipeline are respectively arranged at two ends of the top of the sintering furnace, a burner is arranged at one end of the sintering furnace close to the bottom, the burner is divided into three layers, and the burners at two ends are respectively and fixedly connected with the hydrogen pipeline and the oxygen pipeline, and the device has the following beneficial effects: through the multilayer burner, the temperature of the quartz lump is kept, and the problem of quality caused by the excessively high cooling speed of the bottom of the quartz lump is prevented; the quartz lump is extruded through the pressurizing device, so that the quartz lump is convenient to form, and bubbles on the top of the quartz lump are convenient to remove through the heating and pressurizing device; through using evacuation equipment, be convenient for take out the air, the help reduces the bubble, through using heat preservation equipment, the quartz of being convenient for sticks together slowly to cool down, prevents to cool down too fast, prevents its damage.

Description

Preparation process for highly-uniform synthetic quartz lump
Technical Field
The invention discloses a preparation process of a high-uniformity synthetic quartz lump, and belongs to the technical field of preparation of quartz lumps.
Background
The quartz lump is an important blank for manufacturing various quartz products, and is generally produced by using a chemical vapor deposition method, and can be divided into a vertical type and a horizontal type.
In the process of manufacturing the quartz lump, a large amount of bubbles are easily generated, the product quality is influenced, the efficiency of the existing production process is low, the deposition mechanism of the quartz glass lump manufactured by the existing method is formed by forcing the quartz glass lump to gradually diffuse from the center to the edge part under the action of centrifugal force and gravity, and the cooling speed of one end of the quartz glass lump close to the middle part is high due to uneven reduced temperature, so that the longitudinal distribution of the quartz glass lump is layered, and the longitudinal structural uniformity of the quartz glass lump is seriously influenced.
Disclosure of Invention
The invention aims to solve the technical problems that a large amount of bubbles are easily generated in the existing quartz lump manufacturing process to influence the product quality, the existing production process has low efficiency, and a preparation process for synthesizing the quartz lump with high uniformity is provided, so that the problems are solved.
In order to achieve the purpose, the invention provides the following technical scheme: the preparation process of the high-uniformity synthetic quartz lump comprises a sintering furnace, a heat preservation furnace, a burner, an electric telescopic rod, a quartz glass target holder and a pressurizing device, and comprises the following raw materials: hydrogen, oxygen and quartz sand.
Preferably, sintering furnace top both ends are equipped with quartz sand respectively and throw in mouth and exhaust gas discharge pipeline, the sintering furnace is close to bottom one end and installs the combustor, the combustor divide into the three-layer, every layer combustor quantity is two, two combustor symmetric distribution is at the sintering furnace both ends, through multilayer combustor, keeps the temperature that quartz sticks together, prevents that its bottom cooling rate is too fast, leads to the quality to go wrong.
As preferred, there is electric telescopic handle in sintering furnace inner chamber bottom through bolt fixedly connected with, there is driving motor at the electric telescopic handle output through bolt fixedly connected with, driving motor top fixedly connected with quartz glass target holds in the palm, quartz glass target holds in the palm and is "concave" style of calligraphy mechanism, the even fixedly connected with substrate in quartz glass target holds in the palm bottom, and it is rotatory to drive quartz glass target through driving motor, and the effect that is convenient for quartz to stick together relies on the centrifugal force progressively to limit portion diffusion by the center, through the substrate of quartz glass target hold in the palm bottom, is convenient for absorb the heat for rising temperature is convenient for heat quartz bottom of sticking together.
As preferred, fixedly connected with electric telescopic handle in the middle of the sintering furnace inner chamber top, electric telescopic handle bottom output passes through bolt fixedly connected with pressure device, the inside heating coil that is equipped with of pressure device extrudees quartz lump through pressure device, and the shaping that the quartz lump of being convenient for through heating pressure device, the quartz lump of being convenient for gets rid of top bubble.
Preferably, the granularity of the quartz sand is 200 meshes, a heating device is arranged in the heat preservation furnace, a vacuumizing device is installed on the heat preservation furnace, the heat preservation furnace is vacuumized through the vacuumizing device until the vacuum degree is 8 x 10 < -5 > pa, and the vacuumizing device is used, so that air can be conveniently pumped away, and bubbles can be reduced.
As preferred, both ends the combustor is fixedly connected with hydrogen pipeline and oxygen pipeline respectively, all be provided with flowmeter and control valve on hydrogen pipeline and the oxygen pipeline, be equipped with some firearms on the combustor, hydrogen pipeline and oxygen pipeline reduce in proper order from the fritting furnace top to the bottom gas flow rate, the cooling that the quartz sticks together of being convenient for.
Preferably, the method comprises the following preparation steps:
(1) firstly, controlling a hydrogen pipeline at one end of a burner at the top to be opened, inputting hydrogen with small flow, opening an igniter to ignite, then opening an oxygen pipeline, continuously increasing the flow rate of the hydrogen and the oxygen, and preheating the device;
(2) inputting the quartz sand into a sintering furnace, sintering and melting the quartz sand onto a quartz glass target holder through combustion of oxygen and hydrogen, and continuously driving the quartz glass target holder to rotate and descend through a motor and an electric telescopic rod so as to deposit molten liquid on the quartz glass target holder;
(3) then heat quartz lump through other two sets of combustors, guarantee its temperature, drive pressure device through electric telescopic handle and descend for pressure device suppression quartz lump top, when being convenient for its fashioned, constantly heats quartz lump top through the inside heating structure of pressure device, is convenient for get rid of the bubble.
(4) At last with quartz stick together transport insulation can inside, use insulation can quartz stick together and heat, carry out evacuation processing to it simultaneously, get rid of quartz stick together and go up the bubble after slowly cool down the processing through the insulation can to quartz stick together, prevent that its cooling rate is too fast, lead to cracked.
Compared with the prior art, the invention has the following beneficial effects: through the multilayer burner, the temperature of the quartz lump is kept, and the problem of quality caused by the excessively high cooling speed of the bottom of the quartz lump is prevented; the quartz lump is extruded through the pressurizing device, so that the quartz lump is convenient to form, and bubbles on the top of the quartz lump are convenient to remove through the heating and pressurizing device; through using evacuation equipment, be convenient for take out the air, the help reduces the bubble, through using heat preservation equipment, the quartz of being convenient for sticks together slowly to cool down, prevents to cool down too fast, prevents its damage.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to achieve the purpose, the invention provides the following technical scheme: the preparation process of the high-uniformity synthetic quartz lump comprises a sintering furnace, a heat preservation furnace, a burner, an electric telescopic rod, a quartz glass target holder and a pressurizing device, and comprises the following raw materials: hydrogen, oxygen and quartz sand.
Wherein, fritting furnace top both ends are equipped with quartz sand respectively and put in mouth and waste gas exhaust pipe way, the fritting furnace is close to bottom one end and installs the combustor, the combustor divide into the three-layer, every layer of combustor quantity is two, two combustor symmetric distribution are at the fritting furnace both ends, both ends combustor fixedly connected with hydrogen pipeline and oxygen pipeline respectively, all be provided with flowmeter and control valve on hydrogen pipeline and the oxygen pipeline, be equipped with some firearm on the combustor, hydrogen pipeline and oxygen pipeline reduce in proper order from the fritting furnace top bottom gas flow rate, the control of being convenient for sinters quartz sand, and simultaneously, the temperature that prevents that quartz from sticking together is low excessively, the cooling rate is too fast, influence the quality that quartz sticks together.
Wherein, there is electric telescopic handle in sintering furnace inner chamber bottom through bolt fixedly connected with, there is driving motor at the electric telescopic handle output through bolt fixedly connected with driving motor, driving motor top fixedly connected with quartz glass target holder, the rotation that drives quartz glass target holder through driving motor, through the effect of centrifugal force, make quartz stick together can longitudinal deformation, prevent that it is highly too high, quartz glass target holder is "concave" style of calligraphy mechanism, the storage of the melt liquid when being convenient for just begin, prevent that it from sliding away, the even fixedly connected with substrate in quartz glass target holder bottom, be convenient for increase the area of quartz glass target holder, be convenient for its heat absorption.
Wherein, fixedly connected with electric telescopic handle in the middle of the fritting furnace inner chamber top, electric telescopic handle bottom output passes through bolt fixedly connected with pressure device, drives pressure device through electric telescopic handle and removes, is convenient for extrude quartzy shape that sticks together, prevents that it from rising too high influence shape, and pressure device is inside to be equipped with heating coil, and after passing through the pressure device heating, the extrusion is at quartzy top that sticks together, is convenient for wherein the bubble is discharged.
Wherein, quartz sand granularity is 200 meshes, and the inside heating device that is provided with of heat preservation stove prevents that quartz from sticking together the cooling rate at the excessive speed, leads to quartz to stick together the shape incomplete, influences the use, installs evacuation equipment on the heat preservation stove, and the heat preservation stove is through evacuation equipment evacuation to the vacuum degree be 8 x 10-5pa, takes out the inside air through evacuation equipment, can reduce quartz and stick together inside bubble.
Specifically, the invention firstly opens a hydrogen pipeline close to one end of a burner, inputs hydrogen with smaller flow, opens an igniter for ignition, opens an oxygen pipeline, continuously increases the flow rate of hydrogen and oxygen, preheats the device, after the device is preheated, puts quartz sand into a sintering furnace from an input port, melts the quartz sand through the combustion of oxygen and hydrogen so that the quartz sand is positioned on a quartz glass target holder, preliminarily forms quartz lumps through the quartz glass target holder in a groove shape, continuously drives the quartz glass target holder to rotate and descend through a motor and an electric telescopic rod, longitudinally deforms through the action of centrifugal force, is convenient for the use of the device, then opens the oxygen pipeline and the hydrogen pipeline on other two groups of burners, heats the quartz lumps, ensures the temperature of the quartz lumps, prevents the temperature of the quartz lumps from descending too fast to cause damage of the quartz lumps, the pressurizing device is driven to descend through the electric telescopic rod, so that the pressurizing device presses the top of the quartz lump, the quartz lump is convenient to form, meanwhile, a heating structure inside the pressurizing device is opened, the top of the quartz lump is continuously heated, and the quartz lump is convenient to remove bubbles; at last with quartz stick together transport insulation can inside, use insulation can quartz stick together and heat, carry out evacuation processing to it simultaneously, get rid of quartz stick together and go up the bubble after slowly cool down the processing through the insulation can to quartz stick together, prevent that its cooling rate is too fast, lead to cracked.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The preparation process of the high-uniformity synthetic quartz lump is characterized by comprising a sintering furnace, a heat preservation furnace, a burner, an electric telescopic rod, a quartz glass target holder and a pressurizing device, and comprises the following raw materials: hydrogen, oxygen and quartz sand.
2. The process for preparing the highly uniform synthetic quartz lump as defined in claim 1, wherein the two ends of the top of the sintering furnace are respectively provided with a quartz sand input port and a waste gas discharge pipe, the end of the sintering furnace near the bottom is provided with burners, the burners are divided into three layers, the number of the burners in each layer is two, and the two burners are symmetrically distributed at the two ends of the sintering furnace.
3. The preparation process of the highly uniform synthetic quartz lump as defined in claim 1, wherein an electric telescopic rod is fixedly connected to the bottom of the inner cavity of the sintering furnace through bolts, a driving motor is fixedly connected to the output end of the electric telescopic rod through bolts, a quartz glass target holder is fixedly connected to the top of the driving motor, the quartz glass target holder is a concave-shaped mechanism, and a substrate is uniformly and fixedly connected to the bottom of the quartz glass target holder.
4. The preparation process of the highly uniform synthetic quartz lump as defined in claim 1, wherein an electric telescopic rod is fixedly connected to the middle of the top of the sintering furnace inner cavity, an output end of the bottom of the electric telescopic rod is fixedly connected with a pressurizing device through a bolt, and a heating coil is arranged inside the pressurizing device.
5. The preparation process of the highly uniform synthetic quartz lump as defined in claim 1, wherein the quartz sand has a particle size of 200 meshes, the holding furnace is internally provided with a heating device, the holding furnace is provided with a vacuum-pumping device, and the holding furnace is evacuated to a vacuum degree of 8 x 10 "5 pa by the vacuum-pumping device.
6. The preparation process of the highly uniform synthetic quartz lump as defined in claim 1, wherein the burners at both ends are fixedly connected with a hydrogen pipe and an oxygen pipe, respectively, the hydrogen pipe and the oxygen pipe are provided with a flow meter and a control valve, the burners are provided with igniters, and the gas flow rates of the hydrogen pipe and the oxygen pipe are sequentially reduced from the top to the bottom of the sintering furnace.
7. The process for preparing highly uniform synthetic quartz lumps according to claim 1, comprising the following steps:
(1) firstly, controlling a hydrogen pipeline at one end of a burner at the top to be opened, inputting hydrogen with small flow, opening an igniter to ignite, then opening an oxygen pipeline, continuously increasing the flow rate of the hydrogen and the oxygen, and preheating the device;
(2) inputting the quartz sand into a sintering furnace, sintering and melting the quartz sand onto a quartz glass target holder through combustion of oxygen and hydrogen, and continuously driving the quartz glass target holder to rotate and descend through a motor and an electric telescopic rod so as to deposit molten liquid on the quartz glass target holder;
(3) then heat quartz lump through other two sets of combustors, guarantee its temperature, drive pressure device through electric telescopic handle and descend for pressure device suppression quartz lump top, when being convenient for its fashioned, constantly heats quartz lump top through the inside heating structure of pressure device, is convenient for get rid of the bubble.
(4) At last with quartz stick together transport insulation can inside, use insulation can quartz stick together and heat, carry out evacuation processing to it simultaneously, get rid of quartz stick together and go up the bubble after slowly cool down the processing through the insulation can to quartz stick together, prevent that its cooling rate is too fast, lead to cracked.
CN202111402818.2A 2021-11-24 2021-11-24 Preparation process for highly-uniform synthetic quartz lump Pending CN113912270A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115259655A (en) * 2022-08-15 2022-11-01 中天科技精密材料有限公司 Large-size quartz glass and preparation method and system thereof

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JP2002053332A (en) * 2000-08-10 2002-02-19 Nikon Corp Method and device for molding synthetic quartz glass
US20050272588A1 (en) * 2004-03-09 2005-12-08 Tatsuhiro Sato Quartz glass having excellent resistance against plasma corrosion and method for producing the same
JP2007099589A (en) * 2005-10-07 2007-04-19 Sumitomo Metal Ind Ltd Manufacturing method and apparatus for quartz glass ingot, and stream guide for manufacturing apparatus of quartz glass ingot
US20080119346A1 (en) * 2006-09-07 2008-05-22 Shin-Etsu Chemical Co., Ltd. Synthetic quartz glass substrate for excimer lasers and making method
CN102320724A (en) * 2011-09-08 2012-01-18 北京金格兰石英玻璃有限公司 Preparation method of square quartz glass substrate for photomask
CN105948468A (en) * 2016-06-07 2016-09-21 长飞光纤光缆股份有限公司 Quartz glass manufacturing device
CN109437551A (en) * 2018-12-12 2019-03-08 长飞光纤光缆股份有限公司 A method of high purity quartz material is prepared using tailing
CN111233309A (en) * 2020-04-02 2020-06-05 湖北菲利华石英玻璃股份有限公司 Production method of high-quality opaque quartz glass ingot

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002053332A (en) * 2000-08-10 2002-02-19 Nikon Corp Method and device for molding synthetic quartz glass
US20050272588A1 (en) * 2004-03-09 2005-12-08 Tatsuhiro Sato Quartz glass having excellent resistance against plasma corrosion and method for producing the same
JP2007099589A (en) * 2005-10-07 2007-04-19 Sumitomo Metal Ind Ltd Manufacturing method and apparatus for quartz glass ingot, and stream guide for manufacturing apparatus of quartz glass ingot
US20080119346A1 (en) * 2006-09-07 2008-05-22 Shin-Etsu Chemical Co., Ltd. Synthetic quartz glass substrate for excimer lasers and making method
CN102320724A (en) * 2011-09-08 2012-01-18 北京金格兰石英玻璃有限公司 Preparation method of square quartz glass substrate for photomask
CN105948468A (en) * 2016-06-07 2016-09-21 长飞光纤光缆股份有限公司 Quartz glass manufacturing device
CN109437551A (en) * 2018-12-12 2019-03-08 长飞光纤光缆股份有限公司 A method of high purity quartz material is prepared using tailing
CN111233309A (en) * 2020-04-02 2020-06-05 湖北菲利华石英玻璃股份有限公司 Production method of high-quality opaque quartz glass ingot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115259655A (en) * 2022-08-15 2022-11-01 中天科技精密材料有限公司 Large-size quartz glass and preparation method and system thereof

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Application publication date: 20220111

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