CN208182839U - A kind of cvd furnace of reactive combustion device combiner and silica loosening body - Google Patents
A kind of cvd furnace of reactive combustion device combiner and silica loosening body Download PDFInfo
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- CN208182839U CN208182839U CN201820162006.2U CN201820162006U CN208182839U CN 208182839 U CN208182839 U CN 208182839U CN 201820162006 U CN201820162006 U CN 201820162006U CN 208182839 U CN208182839 U CN 208182839U
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Abstract
The utility model is the cvd furnace about a kind of reactive combustion device combiner and silica loosening body, wherein, reactive combustion device combiner includes multiple reactive combustion devices, point centered on the center of definition combiner, using the central point as origin, is drawn and justified as radius using origin to the distance of reactive combustion device, at least two default circles are obtained, it is each to preset on round circumference at least provided with a reactive combustion device.Complete silica dioxide granule depositional plane can be obtained without carrying out the movement in horizontal direction using the deposition that combiner provided by the utility model carries out silica loosening body.Simplify preparation process.
Description
Technical field
The utility model belongs to quartz glass production technical field, more particularly to a kind of reactive combustion device combiner,
Large scale silica loosening body and preparation method thereof and device.
Background technique
Currently, the preparation of quartz glass mainly has electric smelting, gas refining, chemical vapor deposition and plasma chemical vapor deposition etc.
Direct one-step method melting technology, and it is bonded into two step method preparation process.Wherein, direct method prepares quartz glass and refers in height
Quartz sand powder is directly melting into quartz glass under the conditions of temperature, either by silicon-containing compound after vaporizing in oxyhydrogen flame or
Occur to chemically react in plasma flame and deposits to form quartz glass.Between be bonded into that two step method preparation process refers to will be siliceous
Chemical reaction generation silica dioxide granule occurs for compound and deposits to form titanium dioxide in the combustion flame of low temperature after vaporizing
Silicon loosening body, then silica loosening body is sintered vitrifying at a certain temperature, quartz glass is made.Due to an engagement
Have many advantages, such as that depositing temperature is low, defect density is controllable at two step method preparation process, which has become current research heat
Point.
There are mainly two types of existing silica loosening body depositing operations, the first is axial chemical vapor deposition, i.e., logical
It crosses the silica dioxide granule that burner reaction generates gradually to deposit to obliquely on deposition basic rod that is vertical and rotating, the technique
Technology is to hang the loosening body for hauling deposition by basic rod, it is difficult to deposition prepares large-sized silica loosening body, moreover,
The loosening body uniformity of this technique preparation is relatively poor；Second is vertical chemical vapor deposition, i.e. burner deposits downwards
On the basic target surface of rotation, and move burner back and forth over long distances, still, the silica of this technique preparation is loose
Body easily cracks.
Utility model content
The main purpose of the utility model is that providing a kind of large scale silica loosening body and preparation method thereof and dress
It sets, the technical problem to be solved is that, being bonded between overcoming existing use during two-step method prepares quartz glass, it is difficult to make
Easily technical problems such as cracking in standby loosening body large-sized out and loosening body deposition process.Provided by the utility model two
The preparation method and device of silica loosening body make loosening body uniformity of temperature profile during the deposition process, and then are prepared
Even density, complete consistent large-sized silica loosening body.
It the purpose of this utility model and solves its technical problem and adopts the following technical solutions to realize.
According to the utility model proposes a kind of reactive combustion device combiner, the combiner includes multiple reactions
Burner defines point centered on the center of combiner, using the central point as origin, with origin to reactive combustion device
Distance be that radius draws circle, at least two default circles are obtained, at least provided with a reactive combustion on each circumference for presetting circle
Device.
It the purpose of this utility model and solves its technical problem also following technical measures can be used to further realize.
Preferably, reactive combustion device combiner above-mentioned, with the sequence of radius from small to large, the default circle is at least
Including the first default circle of successively arranging, the second default circle, described first presets the reactive combustion device provided circumferentially about of circle
Quantity presets the quantity of the reactive combustion device provided circumferentially about of circle no more than second.
Preferably, reactive combustion device combiner above-mentioned, with the sequence of radius from small to large, the default circle is at least
Including the first default circle of successively arranging, the second default circle and the default circle of third, and, the first default circle, the second default circle and third
The quantity for presetting the reactive combustion device provided circumferentially about of circle is identical, defines the half of radius and the first default circle that second presets circle
The difference of diameter be the first value, define third preset circle radius with second preset circle radius difference be second value, described first
Value is greater than second value.
Preferably, reactive combustion device combiner above-mentioned further includes one or more according to the default circle setting
A reactive combustion device positioning device.
Preferably, reactive combustion device combiner above-mentioned further includes that linear one or more reactive combustion devices are fixed
Position device.
It the purpose of this utility model and solves its technical problem also the following technical solution is employed to realize.
According to the utility model proposes a kind of silica loosening body cvd furnace, before being provided in the cvd furnace
Reactive combustion device combiner described in any one of stating.
It the purpose of this utility model and solves its technical problem also following technical measures can be used to further realize.
Preferably, the cvd furnace of a kind of silica loosening body above-mentioned, wherein be additionally provided in the cvd furnace to
A few sintering combustion device, depositing base and rotating member.
Preferably, the cvd furnace of a kind of silica loosening body above-mentioned further includes sintering combustion device positioning device.
Preferably, the cvd furnace of a kind of silica loosening body above-mentioned, further includes sintering combustion device, is used for loosening body side
The sintering of edge, improves marginal density and intensity, and the sintering temperature is 200-1400 DEG C.
It the purpose of this utility model and solves its technical problem and adopts the following technical solutions to realize.
According to the utility model proposes a kind of silica loosening body preparation method, according to combinations of the above component,
Unstrpped gas is passed through in the flame of reactive combustion device of combiner, nanometer silicon dioxide particle is generated, depositing base rotates,
Deposit the silica dioxide granule generated in the horizontal direction；Depositing base moves down in vertical direction or reactive combustion device
Combiner moves up in vertical direction, deposits the silica dioxide granule generated in vertical direction；Repeatedly, it obtains
To the silica loosening body, wherein the silica dioxide granule during the deposition process, using sintering combustion device to two
The edge of silica loosening body is sintered.
It the purpose of this utility model and solves its technical problem also following technical measures can be used to further realize.
Preferably, the preparation method of a kind of silica loosening body above-mentioned, the speed that depositing base moves down are 1-
500mm/h, the speed of depositing base rotation are that 2-100 turns/min；Alternatively, the speed that reactive combustion device combiner moves up
For 1-500mm/h, the speed of depositing base rotation is that 2-100 turns/min.
By above-mentioned technical proposal, a kind of preparation facilities of large-sized silica loosening body of the utility model and side
Method at least has the advantage that
1, the preparation that silica loosening body is carried out using device provided by the utility model, can be obtained large scale and side
The indehiscent loosening body of edge.
In the preparation facilities of silica loosening body provided by the utility model, including multiple sintering combustion devices, using institute
The sintering combustion device stated is sintered the edge of the loosening body in deposition process, reduces the temperature of loosening body edge and ontology
Difference improves the density of loosening body, and available diameter is not less than the large scale of 50mm not less than 600mm, thickness, edge is not opened
The silica loosening body split.
2, the preparation that silica loosening body is carried out using device provided by the utility model, improves the density of loosening body
Uniformity.
In the preparation facilities of silica loosening body provided by the utility model, including multiple reactive combustion devices, make entire
There is burner distribution on depositional plane, guarantees that each point has flame to burn it, reduce the temperature difference of depositional plane, prevent from depositing
Loosening body cracking, meanwhile, ensure that the uniformity consistency of loosening body Density Distribution.
3, the utility model provides a kind of reactive combustion device combiner, passes through the number of reactive combustion device in combiner
Amount and position arrangement, using the combiner prepare silica loosening body when, without carry out horizontal direction movement (that is,
Depositing base or reactive combustion device are not necessarily to carry out the movement of horizontal direction), the silica dioxide granule that reaction can be made to generate is covered with
Entire depositional plane completes the deposition in horizontal direction.Preparation process is simplified, meanwhile, the silica of combiner deposition
The deposition site of particle is more accurate, improves the density uniformity for the silica loosening body being prepared.
It 4, further include auxiliary heating dress in the preparation facilities of large scale silica loosening body provided by the utility model
It sets, the bottom of depositional plane is arranged in the assisted heating device, further reduces the temperature gradient of entire depositional plane, prevents
The loosening body of deposition cracks, meanwhile, it ensure that the uniformity consistency of loosening body Density Distribution.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and can be implemented in accordance with the contents of the specification, below on the preferred embodiment of the present invention and the accompanying drawings in detail
It describes in detail bright as after.
Detailed description of the invention
Fig. 1 is the schematic diagram of the preparation facilities of large scale silica loosening body provided by the embodiment of the utility model.
1 reactive combustion device, 2 sintering combustion devices, the loosening body that 3 depositions are formed, 4 deposition collets, 5 flue gas discharge openings, 6 depositions
The bonnet of furnace, 7 brace foundation bars (connecting elements), 8 quartz sands, 9 quartz glass deposition plates, 10 assisted heating devices, 11 two dimensions
Mobile platform and rotating device.
Fig. 2 is reactive combustion device sub-assembly schematic diagram provided by the embodiment of the utility model.
Fig. 3 is another schematic diagram of reactive combustion device sub-assembly provided by the embodiment of the utility model.
Fig. 4 is the schematic diagram of sintering combustion device provided by the embodiment of the utility model.
Specific embodiment
Further to illustrate that the utility model is the technical means and efficacy reaching predetermined purpose of utility model and being taken,
Below in conjunction with attached drawing and preferred embodiment, to according to the utility model proposes a kind of large-sized silica loosening body system
Standby device and method, specific embodiment, structure, feature and its effect, detailed description is as follows.In the following description, different
" embodiment " or " embodiment " refer to be not necessarily the same embodiment.In addition, special characteristic in one or more embodiments,
Structure or feature can be combined by any suitable form.
Embodiment 1
A kind of reactive combustion device combiner is present embodiments provided, the combiner includes multiple reactive combustions
Device defines point centered on the center of combiner, using the central point as origin, with origin to reactive combustion device away from
Justify from being drawn for radius, obtains at least two default circles, each preset on the circumference of circle at least provided with a reactive combustion device.
Present embodiments providing one kind includes multiple reactive combustion device combiners." default circle " therein is virtually to tie
Structure, for determining position of multiple reactive combustion devices in combiner.Multiple reactive combustion devices during the deposition process, same to stepping
The deposition of row silica makes that more reactive combustion device is distributed on entire depositional plane, guarantees that each point does not leave the combustion of flame
Burner reduces the temperature difference of depositional plane, prevents the loosening body of deposition from cracking from face, meanwhile, it ensure that loosening body Density Distribution
Uniformity consistency.And the utility model makes to set on each default circle by the arrangement of reactive combustion device position in combiner
One or more reactive combustion devices are equipped with, it is each to preset the heavy of the reactive combustion device on circle in the case where depositing base rotation
Product path is circle, and multiple reactive combustion devices then form multiple circles.With the increase of default radius of circle, default circle can be increased
The quantity of upper reactive combustion device, without carrying out the movement of horizontal direction, the silica dioxide granule that reaction can be made to generate is covered with whole
A depositional plane completes the deposition in horizontal direction.Preparation process is simplified, meanwhile, the silica of combiner deposition
The site of grain is more accurate, improves the density uniformity for the silica loosening body being prepared.Preferably, the reaction
Reactive combustion device outlet in burner combination component is vertical with deposition plate, is deposited on silicon dioxide vertical on deposition plate.
As shown in Fig. 2, being provided at least one reactive combustion device 1 on each default circle.Meanwhile using sintering combustion device
The edge of loosening body in 2 pairs of deposition process is sintered, and prevents loosening body crack at edge.
It should be noted that the utility model to the position of reactive combustion device on default circle with no restrictions, it is preferred that it is single
Multiple burners on default circle are evenly distributed on the default circle.
Preferably, the every increase 50-100mm of the diameter of silica loosening body increases 1-2 default circles, and on default circle
The quantity of the reactive combustion device of setting increases 1-10.
Embodiment 2
The present embodiment further provides a kind of arrangement mode of reactive combustion device in reactive combustion device combiner.
In the present embodiment, silica dioxide granule can be realized by increasing the method for presetting the upper reactive combustion device quantity of circle
Deposition in the horizontal plane.
With the sequence of radius from small to large, the default circle is preset including at least the default circle of successively arrangement first, second
Circle, the described first quantity for presetting the reactive combustion device provided circumferentially about of circle preset the provided circumferentially about of circle less than second
The quantity of reactive combustion device.
For example, as shown in figure 3, default circle includes the first default circle 112 of default circle 111, second, the default circle 113 of third, the
Setting is there are two reactive combustion device 101,102 on one default circle, on the second default circle setting there are three reactive combustion device 103,
104,105, third presets setting on circle, and there are four reactive combustion devices 106,107,108,109.
It should be noted that arrangement mode of the present embodiment in order to illustrate reactive combustion device in combiner, may omit
The default circle in part.In practical applications, the quantity of circle can be preset by increase, round radius is preset in adjustment, it is default to increase
The modes such as quantity of reactive combustion device on circle, obtain different combinations, to realize silica dioxide granule in the heavy of horizontal plane
Product.
Preferably, the difference of adjacent two radiuses for presetting circle is 0-200mm, further preferably 50-200mm.
Embodiment 3
The present embodiment further provides a kind of arrangement mode of reactive combustion device in reactive combustion device combiner.
In the present embodiment, it can realize that silica dioxide granule exists by the way that the distance between adjacent two default circles are gradually reduced
Deposition on horizontal plane.Preferably, the quantity for the reactive combustion device being arranged on adjacent two default circles can be identical.
With the sequence of radius from small to large, the default circle is preset including at least the default circle of successively arrangement first, second
The difference of the default circle of round and third, the radius that the radius of circle is preset in definition second and first presets circle is the first value, and it is pre- to define third
If the radius of circle and second presets the difference of round radius as second value, first value is greater than second value.
It should be noted that portion is omitted in order to illustrate the arrangement mode of reactive combustion device in combiner in the present embodiment
Divide default circle.In practical applications, the modes such as the quantity of circle, the radius for adjusting default circle are preset by increasing, obtained different
Combination, to realize silica dioxide granule in the deposition of horizontal plane.
Embodiment 4
The present embodiment further provides a kind of positioning device of reactive combustion device.
According to position of multiple reactive combustion devices in default circle, the positioning device of reactive combustion device is set, it will be multiple
Reactive combustion device is fixed.
Preferably, which can be one or more circular shaped supports.According to virtual multiple default circle settings
Corresponding multiple circular shaped supports can further be connected multiple supporting elements by connecting elements, so that multiple reactions are fired
Burner becomes an entirety, is convenient for practical application.Specifically, the connection of the connecting elements and supporting element is to be detachably connected, with
Convenient for connecting different supporting elements, the reactive combustion device combiner of various combination is obtained.
Embodiment 5
The present embodiment further provides the positioning device of another reactive combustion device.
The positioning device of reactive combustion device provided in this embodiment is linear supporting element.
Specifically, the type that the reactive combustion device being located on different default circles can be arranged in a straight line, passes through one or more
Linear supporting element positions reactive combustion device.
Embodiment 6
A kind of cvd furnace of silica loosening body is present embodiments provided, is provided with above-mentioned reactive combustion in cvd furnace
Device combiner, at least one sintering combustion device, depositing base and rotating member.
In cvd furnace provided in this embodiment, including at least one sintering combustion device, the sintering combustion device for pair
The edge of silica loosening body is sintered in deposition process.The utility model to the structure of sintering combustion device with no restriction,
I.e., it is possible to provide the equipment of 200-1400 DEG C of sintering temperature can be used as the sintering combustion device in the utility model, it is preferred that from effect
On fruit, sprayable 200-1400 DEG C of sintering combustion device of the flame, to the silica loosening body in deposition process
Edge is sintered.Preferably, from structure, the knot of sintering combustion device provided by the utility model and the reactive combustion device
Structure is same or like, alternatively, the difference of the two is, the sintering combustion device can be not provided with material feeding tube.It can lead to
The sintering angle for overregulating sintering combustion device is sintered the edge of loosening body, it is preferred that the sintering combustion device and heavy
The angle of product plate is 0-90 °.
Rotating member is additionally provided in cvd furnace provided in this embodiment, the rotating member is used to support deposition base
Body, and, drive depositing base rotation.
Embodiment 7
The present embodiment further provides a kind of positioning device of sintering combustion device.
Positioning device provided in this embodiment positions sintering combustion device in preset position for fixing sintering combustion device
Sintering.The shape or construction of positioning device are not limited in the present embodiment.Preferably, the shape of positioning device can be round, side
Shape etc..In the present embodiment, the quantity of sintering combustion device is more than or equal to 2.Multiple burners are fixed on the positioning dress
It sets, while the edge for the silica loosening body that deposition is formed is sintered.Multiple sintering combustion devices are on the positioning device
Be uniformly distributed, as shown in figure 4, be uniformly distributed the first sintering combustion device 201 on the positioning device, the second sintering combustion device 202,
Third sintering combustion device 203, the 4th sintering combustion device 204.Preferably, positioning device is circle, as shown in figure 4, therein 12
For the positioning device of sintering combustion device.The construction of positioning device can be supporting element, and material can be the hard materials such as metal.It burns
It is fixed on the positioning device by connector to tie burner.Preferably, the number of sintering combustion device is 1-20.The utility model
It is sintered using edge of the sintering combustion device to the loosening body formed in deposition process, improves the density at loosening body edge,
It avoids loosening body edge and leads to the problem of cracking.It can be by adjusting the sintering angle of sintering combustion device to the edge of loosening body
It is sintered, it is preferred that the angle of the sintering combustion device and deposition plate is 0-90 °.
Embodiment 8
The present embodiment further provides a kind of composition of depositing base.
Depositing base provided in this embodiment includes deposition collet, is provided with deposition plate on the deposition collet.Two
In the deposition process of silica loosening body, silica dioxide granule be can be directly deposited on the deposition plate, alternatively, in deposition plate
On be equipped with quartz sand, silica dioxide granule is deposited on the quartz sand.Preferably, the quartz sand with a thickness of
1-2mm；Further, the deposition plate is quartz glass deposition plate or corundum refractory deposition plate.
Embodiment 9
Cvd furnace provided in this embodiment further includes assisted heating device.
Assisted heating device provided in this embodiment is between the deposition collet and deposition plate.The utility model is adopted
It is heated with depositional plane of the assisted heating device to formation, ensure that the uniformity of the temperature of depositional plane each point, further mention
The high homogeneity of the density of loosening body.Preferably, Resistant heating, high-temperature heating stick can be used in the assisted heating device
Or the heating methods such as induction heating.
Embodiment 10
Present embodiments provide a kind of preparation method of silica loosening body.
Using above-mentioned reactive combustion device combiner, unstrpped gas is passed through to the flame of the reactive combustion device of combiner
In, nanometer silicon dioxide particle is generated, depositing base rotation deposits the silica dioxide granule generated in the horizontal direction；It is heavy
Product matrix moves down in vertical direction or reactive combustion device combiner moves up in vertical direction, makes generate two
Silicon oxide particle deposits in vertical direction；Repeatedly, the silica loosening body is obtained, wherein the dioxy
Silicon carbide particle during the deposition process, is sintered using edge of the sintering combustion device to silica loosening body.
It in the preparation method of silica loosening body provided by the utility model, can be, reactive combustion device and sintering combustion
Burner does not all move completely, and depositing base does continuous slowly decline movement, keep the outlet of reactive combustion device and depositing base it
Between constant distance；It is also possible to sintering combustion device not move completely, reactive combustion device only does continuous slowly promoted and moves,
And moved horizontally without any, at this moment depositing base is motionless, keeps the distance between the outlet of reactive combustion device and depositing base
It is constant.
The utility model can be by controlling each feeding quantity for presetting the reactive combustion device on round circumference, or control
Reactive combustion device quantity on each circumference for presetting circle guarantees the planarization and uniformly of entire depositional plane silica loosening body
Property.In general, should control along radial direction if control feeding quantity from center to edge, the feeding quantity of reactive combustion device according to
Secondary increase, wherein the reactive combustion device feeding quantity closer to center is smaller, the reactive combustion device feeding quantity at edge is maximum；If control
The number of burners on each circumference is made, then should be controlled from center to edge along radial direction, on the same circumference anti-
The quantity of burner is answered to successively increase, wherein the quantity of reactive combustion device is fewer on the circumference at center, the circumference at edge
On reactive combustion device quantity it is most.
Preferably, the silicon-containing material after the raw material can gasify, alternatively, the mixing of silicon-containing material and doped raw material
Object.Further, silicon-containing material gas is SiCl4, silane, organosilan, at least one in organosiloxane and polysiloxanes
Kind；The doped raw material include boron, aluminium Al, fluorine F, iron Fe, titanium Ti, cerium Ce, calcium Ca, magnesium Mg, sodium Na, potassium K, barium Ba, yttrium Y,
At least one of lanthanum La, zirconium Zr, germanium Ge compound.
Embodiment 11
Present embodiments provide the preparation facilities and method of a kind of large scale silica loosening body, wherein preparation facilities
As shown in Figure 1.
First by octamethylcy-clotetrasiloxane (D4)、TiCl4After material gasification, it is passed through reactive combustion device group by a certain percentage
Close component 1 (be made of 8 default circles, the quantity of each default upper reactive combustion device of circle is followed successively by 1,1,2,2,3,3,4,4)
The center feeder pipe of all reactive combustion devices adjusts the D of each reactive combustion device by mass flow controller4And TiCl4Raw material
Gas flow is 20g/min and 1.5g/min, and the flow of the fuel such as hydrogen and oxygen in each reactive combustion device is kept to distinguish
Burner, D are carried out for 120L/min, 80L/min4And TiCl4Unstrpped gas chemically reacts in burned flame, is formed
The silica dioxide granule of Doped with Titanium；The outlet of reactive combustion device is vertical with deposition plate 9.
The Doped with Titanium silica dioxide granule formed in oxyhydrogen flame is gradually deposited on the deposition plate 9 of rotation, deposition plate
For quartz glass substrate, resistance wire 10 is provided between deposition plate 9 and deposition collet 4, heating temperature is 1100 DEG C；Deposition
Board diameter is diameter 1200mm；4 sintering combustion devices 2 are symmetrical arranged at loosening body edge to be sintered loosening body edge,
The angle of sintering combustion device and deposition plate is 60 °, improves its density；Deposition plate is with the speed uniform descent of 12mm/h；When deposition
Between be 50 hours, the large scale Doped with Titanium silica loosening body 3 that diameter is 1200mm, thickness is 600mm is prepared.Through outer
Detection is seen, the silica loosening body of Doped with Titanium is complete, does not generate any cracking or peeling obscission, and loosening body is heavy
Product surface evenness is preferable；Through density measurement, the effective coverage (the removal edge position sintered by sintering combustion device) of loosening body
Interior density variation is within 0.05% range.
By the silica loosening body of Doped with Titanium, hydroxy radical content is prepared in sintered glass under 1500 DEG C, vacuum condition
It is 5 × 10 less than 1ppm, the coefficient of expansion-8/ DEG C super-low expansion quartz glass, performance better than existing CVD technology prepare
Super-low expansion quartz glass correlated performance.
In the above-described embodiments, it all emphasizes particularly on different fields to the description of each embodiment, there is no the portion being described in detail in some embodiment
Point, reference can be made to the related descriptions of other embodiments.
It is understood that the correlated characteristic in above-mentioned apparatus can be referred to mutually.In addition, in above-described embodiment " the
One ", " second " etc. is and not represent the superiority and inferiority of each embodiment for distinguishing each embodiment.
Numberical range described in the utility model includes numerical value all within the scope of this, and including any within the scope of this
The value range of two values composition.The different numerical value of the same index occurred in all embodiments of the utility model, can be any
Combination, compositing range value.
Technical characteristic in the utility model claims and/or specification can be combined, and a combination thereof mode is unlimited
The combination obtained in claim by adduction relationship.Group is carried out by the technical characteristic in claim and/or specification
Close obtained technical solution and the protection scope of the utility model.
The above descriptions are merely preferred embodiments of the present invention, not makees in any form to the utility model
Limitation, any simple modification, equivalent change and modification made by the above technical examples according to the technical essence of the present invention,
It is still within the scope of the technical solutions of the present invention.
Claims (6)
1. a kind of reactive combustion device combiner, it is characterised in that:
The combiner includes multiple reactive combustion devices,
Point centered on the center of definition combiner, using the central point as origin, with origin to reactive combustion device
Distance draws circle for radius, obtains at least two default circles, each presets on the circumference of circle at least provided with a reactive combustion device；
The combiner further includes the one or more reactive combustion device positioning devices being arranged according to the default circle, or
Person, linear one or more reactive combustion device positioning device.
2. a kind of reactive combustion device combiner according to claim 1, it is characterised in that:
With the sequence of radius from small to large, the default circle includes at least the default circle of first successively to arrange, the second default circle,
The quantity that described first presets the reactive combustion device provided circumferentially about of circle is preset no more than described second on the circumference of circle
The quantity of the reactive combustion device of setting.
3. a kind of reactive combustion device combiner according to claim 1, it is characterised in that:
With the sequence of radius from small to large, the default circle includes at least the default circle of first successively to arrange, the second default circle
Circle is preset with third,
Define second preset circle radius with first preset circle radius difference be the first value, define third preset circle radius and
Second difference for presetting the radius of circle is second value, and first value is greater than second value.
4. a kind of cvd furnace of silica loosening body, it is characterised in that:
Reactive combustion device combiner of any of claims 1-3 is provided in the cvd furnace.
5. a kind of cvd furnace of silica loosening body according to claim 4, it is characterised in that:
At least one sintering combustion device, depositing base and rotating member are additionally provided in the cvd furnace.
6. a kind of cvd furnace of silica loosening body according to claim 4, it is characterised in that:
Further include sintering combustion device, for the sintering at loosening body edge, improves marginal density and intensity, the temperature of the sintering are
200-1400℃。
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820162006.2U CN208182839U (en) | 2018-01-30 | 2018-01-30 | A kind of cvd furnace of reactive combustion device combiner and silica loosening body |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108298798A (en) * | 2018-01-30 | 2018-07-20 | 中国建筑材料科学研究总院有限公司 | A kind of preparation facilities and method of large-sized silica loosening body |
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2018
- 2018-01-30 CN CN201820162006.2U patent/CN208182839U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108298798A (en) * | 2018-01-30 | 2018-07-20 | 中国建筑材料科学研究总院有限公司 | A kind of preparation facilities and method of large-sized silica loosening body |
| CN108298798B (en) * | 2018-01-30 | 2023-05-23 | 中国建筑材料科学研究总院有限公司 | Preparation device and method of large-size silica loose body |
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