CN109433285A - Micro-and nano-particles micro-fluidic chip based on surface acoustic wave - Google Patents
Micro-and nano-particles micro-fluidic chip based on surface acoustic wave Download PDFInfo
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- CN109433285A CN109433285A CN201811613253.0A CN201811613253A CN109433285A CN 109433285 A CN109433285 A CN 109433285A CN 201811613253 A CN201811613253 A CN 201811613253A CN 109433285 A CN109433285 A CN 109433285A
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/02—Adapting objects or devices to another
- B01L2200/026—Fluid interfacing between devices or objects, e.g. connectors, inlet details
- B01L2200/027—Fluid interfacing between devices or objects, e.g. connectors, inlet details for microfluidic devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/043—Moving fluids with specific forces or mechanical means specific forces magnetic forces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
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Abstract
The present invention relates to micro-nano material fields, provide a kind of micro-and nano-particles micro-fluidic chip based on surface acoustic wave, include microfluidic channel layer and the piezoelectric substrate combined closely thereunder；Have in microfluidic channel layer positioned at the hollow channel of its underpart, channel has main channel, at least two sample inlet channels and at least three sample export channels, is connected between each sample access road and each sample exit passageway by main channel；Main channel is conversion zone close to the side of each sample access road, it is separated region close to the side of each sample exit passageway, separated region two sides setting a pair in main channel is parallel to each other and separation interdigital transducer group staggered relatively, separates two in interdigital transducer group between interdigital transducer and main channel in default angle theta.The present invention makes the reaction between micro-and nano-particles more efficient more rapidly on chip, realizes the separation for the efficient high-purity of micro-and nano-particles that will combine together and be not associated with.
Description
Technical field
The present invention relates to micro-fluidic chip, biochemistry and micro-nano material fields, in particular to a kind of to be based on sound surface
The micro-and nano-particles micro-fluidic chip of wave.
Background technique
Micro-fluidic chip refers to the technology of a kind of accurate control and manipulation minute yardstick fluid also referred to as on piece laboratory,
Minute yardstick fluid is intended to less sample, occupies less volume, the faster reaction time, and more precisely more accurate
Control.By the various biochemical experimentations usually completed on large apparatus in one piece of micro-fluidic core
On piece is completed.Surface acoustic wave be applied to micro-fluidic chip on various particles driving, detect and control, relative to magnetic field, electric field,
The control modes such as mechanical force have high-biocompatibility, without the advantages such as invasive, highly sensitive, wide usage is strong.
It is frequently necessary to mix various micro-and nano-particles in Biochemistry Experiment and brings it about various biochemical reactions, such as
Nano material, magnetic bead, cell, the micro-and nano-particles such as fluorescent microsphere, and then realize such as magnetic marker, fluorescent marker and various materials
The reaction be combineding with each other between material.To which micro-and nano-particles are realized with the detection of combination between each other and a certain or several substances
Deng application.The disadvantages of traditional hybrid mode has the time long, and process is cumbersome, and mixing efficiency is not high, it is also relatively difficult to achieve after mixing
The separation of various particles after reaction.
Summary of the invention
Goal of the invention: aiming at the problems existing in the prior art, the present invention provides a kind of based on the micro-nano of surface acoustic wave
Particle micro-fluidic chip can realize that the micro-and nano-particles that will combine together and unbonded micro-and nano-particles are high on chip
Imitate the separation of high-purity.
Technical solution: the present invention provides a kind of micro-and nano-particles micro-fluidic chip based on surface acoustic wave includes miniflow
Control channel layer and the piezoelectric substrate combined closely thereunder；Have in the microfluidic channel layer positioned at the hollow of its underpart
Channel, the channel have main channel, at least two sample inlet channels and at least three sample export channels, each sample
It is connected between product access road and each sample export channel by the main channel；The main channel is close to each sample
The side of access road is conversion zone, and the side close to each sample export channel is separated region, in the main channel
Separated region two sides setting a pair be parallel to each other and separation interdigital transducer group staggered relatively, the separation interdigital transducer
Two interdigital transducers in group and between the main channel in default angle theta.
Preferably, the sample inlet channel is two, and respectively the first sample inlet channel and the second sample inlet are logical
Road, first sample inlet channel have the first sample inlet, and second sample inlet channel has the second sample inlet.
Two sample inlet channels are then suitable for the reaction between two kinds of samples, and it is preferable to use two kinds of samples in the present invention, are actually answering
In, two or more samples also can be used and reacted, it is only necessary to correspondingly increase sample inlet channel.
Preferably, the sample export channel is three, respectively the first sample export channel, the second sample export channel
With third sample export channel；First sample export channel has the first sample export, second sample export channel
With the second sample export, third sample export channel has third sample export.It will appear three after two kinds of example reactions
Kind particle: particle and two kinds of unbonded particles after two kinds of particles combinations, the separation of three kinds of particles then need three samples to go out
Mouth channel, the separation if it is three kinds of samples then need correspondingly to increase sample export channel.
Preferably, the default angle is 0 ~ 90 °.
Preferably, the piezoelectric substrate is made out of a piezoelectric material.
Preferably, the piezoelectric material is lithium columbate crystal, quartz crystal or bismuth-germanium-oxide crystal.
The utility model has the advantages that remarkable advantage of the present invention is:
By separated region after conversion zone reaction of several micro-and nano-particles samples in main channel, in separated region by
The effect for the surface acoustic wave field that inclined separation interdigital transducer group is formed, different micro-and nano-particles samples can be will receive
Different size of active force generates different deflection angles and deflects different distances, later unbonded several micro-nano grain of rices
Subsample and the sample of combination flow out chip via different sample export channels respectively, complete to mixing on chip
Different micro-and nano-particles afterwards are separated simultaneously, the micro-and nano-particles after can directly obtaining the combination of high-purity.It separates interdigital
The setting of energy converter group is so that this chip can be realized the particle that will combine together and unbonded particle efficient high-purity
Separation then can also correspondingly increase the length of separation interdigital transducer group if the separated region of main channel is longer.
(3) the microfluidic chip of the invention uses sound wave as the isolated mode of action, has extremely outstanding biology
Compatibility so the reaction that can be carried out on this chip is not limited to the substances such as various particles and microvesicle, while can carry out cell etc.
The highly effective reaction of biological particle and combination.
(4) it can be realized by the frequency and power for adjusting each interdigital transducer input signal to a variety of different particle reactions
The separation of high-purity afterwards, applicability are extensive.
Sound is used the present invention is based on the micro-and nano-particles micro-fluidic chip of surface acoustic wave, in particular in micro-fluidic chip
Separation of the surface wave as driving method control micro-and nano-particles on chip, to realize micro-and nano-particles in micro-fluidic chip
High-purity separation after upper reaction.Many advantages, such as it has structure simple, and wide usage is strong, good biocompatibility, is a kind of energy
Enough high-purities obtain the micro-fluidic chip for combining rear particle, before biochemistry and field of nanometer material technology have good application
Scape.
Surface acoustic wave is applied to the driving of various particles on micro-fluidic chip, detects and controls in the present invention, relative to magnetic
The control modes such as field, electric field, mechanical force have high-biocompatibility, without the advantages such as invasive, highly sensitive, wide usage is strong.Solution
After the hybrid mode mixing for having determined traditional after reaction relatively difficult to achieve the disadvantages of the separation of various particles.
Detailed description of the invention
Fig. 1 is the birds-eye perspective of the micro-and nano-particles micro-fluidic chip in the present invention based on surface acoustic wave；
Fig. 2 is the top view of the microfluidic channel layer with hollow channel during this is clearly demarcated；
Fig. 3 is the top view in the present invention with the piezoelectric substrate for focusing interdigital transducer group.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing.
Present embodiments provide for a kind of micro-and nano-particles micro-fluidic chip based on surface acoustic wave, in conjunction with Fig. 1 to Fig. 3,
The chip includes microfluidic channel layer 1 and piezoelectric substrate 2, and piezoelectric substrate 2 is combined closely in the lower surface of microfluidic channel layer 1,
Piezoelectric substrate 2 is made out of a piezoelectric material, and it is preferable to use lithium columbate crystal, quartz crystal or bismuth-germanium-oxide crystals for piezoelectric material；Miniflow
Controlling has hollow channel in channel layer 1, which is located at the lower part of microfluidic channel layer 1, and channel has main channel
3, two sample inlet channels 4 and three sample export channels 5；Two sample inlet channels 4 are respectively to have the first sample
First sample inlet channel 401 of entrance 403 and the second sample inlet channel 402 with the second sample inlet 404；First sample
It is connected between product access road 401 and the second sample inlet channel 402 and sample export channel 5 by main channel 3.
Three sample export channels 5 are respectively the first sample export channel 501 with the first sample export 504, have
Second sample export channel 502 of the second sample export 505 and third sample export channel with third sample export 506
503；Main channel 3 is conversion zone 301 close to the side of the first sample inlet channel 401 and the second sample inlet channel 402, is leaned on
The side in nearly first sample export channel 501, the second sample export channel 502 and third sample export channel 503 is Disengagement zone
Domain 302 also sets up a pair of be parallel to each other and separation interdigital transducer staggered relatively in 302 two sides of separated region of main channel 3
7 are organized, two interdigital transducers in the separation interdigital transducer group 7 are located at 302 two sides of separated region of main channel 3, and
Two interdigital transducers are between main channel 3 in 0 ~ 90 ° of angle setting.
The micro-and nano-particles micro-fluidic chip based on surface acoustic wave in present embodiment at work, micro-and nano-particles sample
Product 1 enter the first sample inlet channel 401 by the first sample inlet 403, and enter main lead to by the first sample inlet channel 401
The conversion zone 301 in road；Micro-and nano-particles sample 2 enters the second sample inlet channel 402 by the second sample inlet 404, and
The conversion zone 301 for entering main channel by the second sample inlet channel 402, in conversion zone 301, two kinds of micro-and nano-particles samples
Product are gathered together in the conversion zone 301 of main channel 3, and two be gathered together kind micro-and nano-particles are in conversion zone 301
Enter separated region 302 after interior reaction, two interdigital transducers in interdigital transducer group 7 are segregated in separated region 302
The effect of surface acoustic wave that generates of two opposite interdigital electrodes, the different micro-nano grain of rice of three kinds for being combined together and being not associated with
Son will receive the different size of active force of surface acoustic wave, generate different deflection angles, later unbonded micro-and nano-particles
Sample 1 and unbonded micro-and nano-particles sample 2 and the micro-and nano-particles sample combined are logical via the first sample export respectively
First sample export 504 in road 501, second sample export 505 in the second sample export channel 502 and third sample export channel
503 third sample export 506 flows out chip.
If the separated region of main channel 3 is longer, then it can also correspondingly increase the length of separation interdigital transducer group 7.
A kind of typical production process of micro-and nano-particles micro-fluidic chip in present embodiment based on surface acoustic wave is as follows:
Piezoelectric substrate 2 is prepared using materials such as piezoelectric material lithium columbate crystal, quartz crystal or bismuth-germanium-oxide crystals.
In piezoelectric substrate 2 use PECVD(plasma enhanced chemical vapor deposition), vapor deposition, sputtering etc. techniques formed
The metallic films such as platinum, gold or copper form separation interdigital transducer group 7 by the methods of photoetching and subsequent metal etch.
On a silicon substrate by optical graving for SU-8 formpiston, pouring preparation using PDMS later has the micro- of hollow channel
Flow control channel layer 1.
By to brigadier's microfluidic channel layer 1 with have separate interdigital transducer group 7 piezoelectric substrate 2 combine into
Row builds conjunction, that is, completes the preparation of the micro-and nano-particles micro-fluidic chip based on surface acoustic wave.
The technical concepts and features of above embodiment only to illustrate the invention, its object is to allow be familiar with technique
People cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention.It is all according to the present invention
The equivalent transformation or modification that Spirit Essence is done, should be covered by the protection scope of the present invention.
Claims (6)
1. a kind of micro-and nano-particles micro-fluidic chip based on surface acoustic wave, it is characterised in that: comprising microfluidic channel layer (1) and
The piezoelectric substrate (2) combined closely thereunder；Have in the microfluidic channel layer (1) and leads to positioned at the hollow of its underpart
Road, the channel have main channel (3), at least two sample inlet channels (4) and at least three sample export channels (5),
It is connected between each sample inlet channel (4) and each sample export channel (5) by the main channel (3)；The master
Channel (3) is conversion zone (301) close to the side of each sample inlet channel (4), close to each sample export channel
(5) side be separated region (302), separated region (302) two sides of the main channel (3) be arranged a pair be parallel to each other and
Separation interdigital transducer group (7) staggered relatively, it is described separation interdigital transducer group (7) in two interdigital transducers with it is described
In default angle theta between main channel (3).
2. the micro-and nano-particles micro-fluidic chip according to claim 1 based on surface acoustic wave, it is characterised in that: the sample
Product access road (4) is two, respectively the first sample inlet channel (401) and the second sample inlet channel (402), described the
A sample access road (401) has the first sample inlet (403), and second sample inlet channel (402) has the second sample
Product entrance (404).
3. the micro-and nano-particles micro-fluidic chip according to claim 1 based on surface acoustic wave, it is characterised in that: the sample
Product exit passageway (5) is three, respectively the first sample export channel (501), the second sample export channel (502) and third sample
Product exit passageway (503)；First sample export channel (501) has the first sample export (504), and second sample goes out
Mouth channel (502) has the second sample export (505), and third sample export channel (503) has third sample export
(506).
4. the micro-and nano-particles micro-fluidic chip according to any one of claim 1 to 3 based on surface acoustic wave, feature
Be: the default angle theta is 0 ~ 90 °.
5. the micro-and nano-particles micro-fluidic chip according to any one of claim 1 to 3 based on surface acoustic wave, feature
Be: the piezoelectric substrate (2) is made out of a piezoelectric material.
6. the micro-and nano-particles micro-fluidic chip according to claim 7 based on surface acoustic wave, it is characterised in that: the pressure
Electric material is lithium columbate crystal, quartz crystal or bismuth-germanium-oxide crystal.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110653014A (en) * | 2019-10-28 | 2020-01-07 | 西安交通大学 | Particle multilayer film structure generating device based on surface acoustic wave |
| CN111085281A (en) * | 2020-01-08 | 2020-05-01 | 西安交通大学 | Surface acoustic wave regulated high-flux micro-droplet generation device and method |
| WO2020210868A1 (en) * | 2019-04-15 | 2020-10-22 | Royal Melbourne Institute Of Technology | Metal organic frameworks and methods of preparation thereof |
| CN112492471A (en) * | 2020-12-04 | 2021-03-12 | 西安交通大学 | Acoustic valve device based on micro-fluidic and surface acoustic wave technology |
| CN115382590A (en) * | 2022-08-19 | 2022-11-25 | 南京理工大学 | Sheath-flow-free particle sorting micro-fluidic chip based on surface acoustic waves |
| CN115518699A (en) * | 2022-09-28 | 2022-12-27 | 苏州大学 | Microfluidic separation device for blood cells and microfluidic and standing wave acoustic forceps control method |
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| CN112492471A (en) * | 2020-12-04 | 2021-03-12 | 西安交通大学 | Acoustic valve device based on micro-fluidic and surface acoustic wave technology |
| CN115382590A (en) * | 2022-08-19 | 2022-11-25 | 南京理工大学 | Sheath-flow-free particle sorting micro-fluidic chip based on surface acoustic waves |
| CN115518699A (en) * | 2022-09-28 | 2022-12-27 | 苏州大学 | Microfluidic separation device for blood cells and microfluidic and standing wave acoustic forceps control method |
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