CN109406047A - A kind of slight torque generating means and its implementation - Google Patents
A kind of slight torque generating means and its implementation Download PDFInfo
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- CN109406047A CN109406047A CN201811358444.7A CN201811358444A CN109406047A CN 109406047 A CN109406047 A CN 109406047A CN 201811358444 A CN201811358444 A CN 201811358444A CN 109406047 A CN109406047 A CN 109406047A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
- G01L25/003—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency for measuring torque
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Abstract
The invention discloses a kind of slight torque generating means and its implementation, device includes standard micro-nano force value generator, flexible hinge and output end, and implementation method includes: that the micro-nano power of standard is generated by standard micro-nano force value generator；The pure moment of couple is converted by the micro-nano power of standard by flexible hinge, obtain the slight torque of standard and is exported by output end.Present invention employs the modes that flexible hinge and standard micro-nano force value generator combine, the pure moment of couple is converted by the micro-nano power of standard by flexible hinge, obtain the slight torque of standard, traditional lever, which is eliminated, using flexible hinge adds influence of the counterweight for output end in counterweight method, the influence of the factors such as frictional force, aerostatic buoyancy, acceleration of gravity, supporting point is eliminated simultaneously, error is small, and accurate, applicability is extensively and reliable.It the composite can be widely applied to metering field.
Description
Technical field
The present invention relates to metering field, especially a kind of slight torque generating means and its implementation.
Background technique
With the deep development of modern science and technology, miniaturization, micromation and nanofabrication technique are used widely,
Incident ultra micro geometric sense, ultra micro force measurement become the key technique in production.For geometric measurement,
On the basis of optical wavelength, using optical wavelength and interference subdivision technology, 1nm resolution ratio may be implemented, use is best in length completely
Interferometer can even obtain the resolution ratio of 10pm；But it is still main at present for the magnitude tracing research of slight torque in mechanical quantity
It rests under macro-scale, measurement and the magnitude tracing of slight torque below for 1Nm are studied relatively fewer.
Slight torque sensor is as a kind of novel sensor in smart instrumentation, fine measuring instrument, automatic control system
There is application in the devices such as system, industrial robot, automotive instruments instrument, the accuracy of measurement will affect obtaining for relevant parameter
Precision is taken, the measurement accuracy of slight torque must ensure that slight torque magnitude tracing is ground by effective magnitude tracing
Study carefully and is related to numerous high skills such as high-end equipment manufacture, aerospace industries, advanced national defence and military weaponry, automobile industry
The performance of kernel component in art industry.In addition, slight torque sensor, microdrive, small torsion equipment exploitation and
The calibration of slight torque must be all carried out in manufacturing process, that is, determines output by applying defined standard torque load
Actual torque value representated by electric signal, even the torque sensor product sold out, in order to guarantee torque sensor complete
It uses under good state, also want periodically or frequently it is demarcated, the accuracy being calibrated will directly affect measurement result
Accuracy and reliability.If slight torque measurement can not carry out magnitude tracing, key technology in industrial production can be not only hindered
The promotion of quality, and the accuracy that will lead to slight torque measurement data in high tip research is unable to get guarantee, serious shadow
The development of the every field such as national defence, military project, aerospace, instrument and meter, minute manufacturing is rung.Therefore the amount of slight torque is studied
Value trace to the source it is high-tech for China development, seize novel industry commanding elevation and promoted key technology level all there is important meaning
Justice.
At present in slight torque magnitude tracing research process, most of researcher is all made of traditional lever and adds weight
Code (i.e. using load counterweight on the arm of force) generates standard torque.This method has centainly excellent in large torque standard set-up
Gesture, because error caused by frictional force is within the scope of acceptable for large torque value in large torque.But this method
Friction and Tiny Mass counterweight due to lever are influenced vulnerable to external condition, cause it during slight torque magnitude tracing
It has the following problems:
(1) for slight torque, itself is a small quantities for slight torque, 10-3Nm magnitude is even more small, therefore
The small lever frictional force of this method will produce serious influence to the accuracy of slight torque.
(2) it is all the lesser counterweight of quality that this method, which generates used when slight torque, and when the quality of counterweight is smaller
When, the difficulty of production is larger, and relative error is also larger, and the influence of aerostatic buoyancy is for the accuracy in counterweight institute's loading force source
There is larger impact, the standard slight torque error that thus this method generates is also larger.
(3) for slight torque, when adding counterweight to generate small standard torque using traditional lever, due to small torsion
Square itself is exactly a small quantity, therefore when small counterweight is as power source, precision shadow of the local acceleration of gravity for power source
Sound be can not ignore, and the accurate measurement of acceleration is itself is a complicated problem in science, thus the applicability of this method by
To very big limitation.
(4) during applying standard torque to sensor or micro motor, when adding counterweight pair using traditional lever
When lever applies standard force source, if supporting point in the center line perpendicular to sensor to be measured or motor and does not include Weight gravity
Plane within, will result in the bending that the radial force that lever weight and counterweight weight are formed turns round axis to sensor to be measured or motor
Effect, for slight torque sensor or for related slight torque device, which may be for related accurate
Structure damages, less reliable.
Summary of the invention
In order to solve the above technical problems, it is an object of the invention to: provide that a kind of error is small, accurate, applicability is wide and can
The slight torque generating means and its implementation leaned on.
One aspect of the present invention is adopted the technical scheme that:
A kind of slight torque generating means, comprising:
Standard micro-nano force value generator, for generating the micro-nano power of standard；
Flexible hinge, for providing the arm of force of generation standard slight torque and the micro-nano power of Transfer Standards；
Output end, for the slight torque according to the micro-nano power outputting standard of the arm of force and standard of standard slight torque；
The flexible hinge is connect with standard micro-nano force value generator, and the output end is located at the center of flexible hinge.
It further, further include peripheral fixed structure, the periphery fixed structure is used for fixed standard micro-nano force value generator
And/or flexible hinge.
Further, the standard micro-nano force value generator use interdigital capacitor device, two of the interdigital capacitor device
Structure between pole plate is interdigitated configuration, and two pole plates of interdigital micro- force value generator are separately mounted to peripheral fixed structure
On flexible hinge.
Further, the flexible hinge includes connector, the first elastomer, rotary structure and the second elastomer, described
Connector is connect with a pole plate of interdigital capacitor device, and the connector passes through the first elastomer and the second elastomer respectively
The two sides connection opposite with rotary structure.
It further, further include third elastomer and the 4th elastomer, the connector passes through third elastomer and respectively
Four elastomers and the connection of opposite with peripheral fixed structure two sides.
Further, the connector is using approximate " returning " font connector.
Further, the interdigital quantity of the interdigital capacitor device is adjustable or the interdigital spacing of the interdigital capacitor device
The voltage applied between two pole plates of the adjustable or described interdigital capacitor device is adjustable.
Another aspect of the present invention is adopted the technical scheme that:
A kind of implementation method of slight torque generating means, comprising the following steps:
The micro-nano power of standard is generated by standard micro-nano force value generator；
The pure moment of couple is converted by the micro-nano power of standard by flexible hinge, the slight torque of standard is obtained and passes through output
End output.
Further, the standard micro-nano force value generator use interdigital capacitor device, two of the interdigital capacitor device
Structure between pole plate is interdigitated configuration.
Further, the expression formula of the value of the slight torque of the standard are as follows:
Wherein, MOutputFor the value of the slight torque of standard, N is number interdigital in interdigital capacitor device, ε0For air dielectric
Constant, the voltage value that U applies between two pole plates of interdigital capacitor device, g is adjacent two interdigital side in interdigital capacitor device
The half of distance, x are the half of adjacent two interdigital intersection length in interdigital capacitor device, and l is the power of standard slight torque
Arm.
The beneficial effects of the present invention are: a kind of slight torque generating means of the present invention and its implementation, use flexibility
The mode that hinge and standard micro-nano force value generator combine converts pure couple for the micro-nano power of standard by flexible hinge
Square obtains the slight torque of standard, eliminates traditional lever using flexible hinge and adds in counterweight method counterweight for output end
Influence, while eliminating the influence of the factors such as frictional force, aerostatic buoyancy, acceleration of gravity, supporting point, error is small, accurate, suitable
It is wide and reliable with property.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of slight torque generating means provided in an embodiment of the present invention；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is a kind of structural schematic diagram of the standard micro-nano force value generator of Fig. 1；
Fig. 4 is the structural parameters schematic diagram of interdigital capacitor device of the present invention；
Fig. 5 is that the corresponding standard micro-nano force value of Fig. 1 loads schematic diagram；
Fig. 6 is the output end and peripheral parts force analysis figure of Fig. 1.
Specific embodiment
Referring to Figures 1 and 2, the embodiment of the invention provides a kind of slight torque generating means, comprising:
Standard micro-nano force value generator 1, for generating the micro-nano power of standard；
Flexible hinge 2, for providing the arm of force of generation standard slight torque and the micro-nano power of Transfer Standards；
Output end 3, for the slight torque according to the micro-nano power outputting standard of the arm of force and standard of standard slight torque；
The flexible hinge 2 is connect with standard micro-nano force value generator 1, and the output end 3 is located at the center of flexible hinge 2
Place.
Specifically, as shown in Fig. 1 and Fig. 2 (Fig. 2 bend represents gap), 1 is standard in the slight torque generating means
Micro-nano force value generator, for generating the small force value of standard for being applied to flexible hinge, to provide power source for standard slight torque；
2 be flexible hinge, is mainly used for providing the arm of force of generation standard slight torque, while to also act as Transfer Standards micro- for the flexible hinge
Receive the effect of force value；3 be output end, the slight torque for outwardly outputting standard.
Structure shown in FIG. 1 had both can be used in flexible hinge 2, and the converting standard force value to of other shapes can also be taken pure
The structure of the moment of couple.
Output end 3, which can be installed, needs to carry out slight torque calibration/calibration equipment and sensor, to be calibrated and be marked
It is fixed.
It, will by flexible hinge by above content as it can be seen that the output end 3 of the present embodiment is located at the center of flexible hinge 2
The micro-nano power of standard is converted into the pure moment of couple, obtains the slight torque of standard, eliminates traditional lever using flexible hinge and adds
Influence of the counterweight for output end in counterweight method, while eliminating frictional force, aerostatic buoyancy, acceleration of gravity, supporting point etc.
The accuracy of the standard torque value of output greatly improved in the influence of factor, and error is small, and accurate, applicability is extensively and reliable.
Referring to Figures 1 and 2, it is further used as preferred embodiment, further includes peripheral fixed structure 4, the periphery is solid
Structure 4 is determined for fixed standard micro-nano force value generator 1 and/or flexible hinge 2.
Specifically, peripheral fixed structure 4, is mainly used for fixed standard micro-nano force value generator 1, and lifting device consolidates
Property.In addition, peripheral fixed structure 4 can be also used for fixed flexible hinge 2.It generates and fills in order to further enhance entire slight torque
The stability set, peripheral fixed structure 4 can also be fixed by 4 fixing threaded holes 5 as depicted in figs. 1 and 2.
Peripheral fixed structure 4 can also use other shapes of structure other than using the structure of Fig. 1 and Fig. 2.
As shown in Figure 1, being further used as preferred embodiment, the standard micro-nano force value generator uses interdigital capacitor
Device, the structure between two pole plates of the interdigital capacitor device are interdigitated configuration, the two of interdigital micro- force value generator
A pole plate is separately mounted on peripheral fixed structure and flexible hinge.
Specifically, the electrostatic micro-nano of this interdigitated configuration of interdigital capacitor device can be used in standard micro-nano force value generator
Force value generator can greatly reduce errors in position measurement and position error to output micro-nano power as the power source of micro-nano force value
The influence of value eliminates high-precision position measurement and registration aid, simplifies apparatus structure and cost, be convenient for collecting
At.
Interdigital capacitor device shown in Fig. 3 can be used in standard micro-nano force value generator, wherein 6,7,8 belong to fixed fork and refer to portion
Point, it is fixed on peripheral fixed structure 4, is remained in the course of work static.6 be that the fixed fork of interdigital capacitor device refers to (i.e. work
It is remained stationary during making interdigital)；7 be conductive layer, refers to (being two in Fig. 3) for being connected to several fixed forks, it is each fixed to make
The voltage of interdigital upper application is identical；8 be insulating layer, for being dielectrically separated from peripheral fixed structure 4 and conductive layer 7, prevents standard micro-
The component electrification received other than force value generator.
And 9,10, the 11 of Fig. 3 belong to dynamic interdigitated portions, which is fixed on flexible hinge 2, will send out in the course of work
Raw minute movement.9 be that the moving fork of interdigital capacitor refers to；10 be conductive layer, refers to (being three in Fig. 3) for being connected to several moving forks,
Each moving fork is set to refer to that the voltage of upper application is identical；11 be insulating layer, for being dielectrically separated from flexible hinge 2 and conductive layer 7, is prevented soft
Property hinge 2 charge.
Referring to Fig.1, it is further used as preferred embodiment, the flexible hinge 2 includes connector 21, the first elastomer
22, rotary structure 24 and the second elastomer 23, the connector 21 are connect with a pole plate of interdigital capacitor device, the company
Junctor 21 is connect by the first elastomer 22 and the second elastomer 23 two sides opposite with rotary structure 24 respectively.
Specifically, connector 21, for that can be produced in the micro force applied by standard micro-nano force value generator
Raw small displacement or deformation.Approximate " returning " character form structure shown in FIG. 1 can be used (by the structure of 4 plates in connector 21
Composition, every structure have certain length and width) or other structures realize.
First elastomer 22 and the second elastomer 23, for being generated under the small displacement or deformation drive in connector 21
Corresponding displacement or deformation, so that rotary structure 24 generates displacement or deformation.First elastomer 22 and the second elastomer 23
Elastic material can be used to be made.
First elastomer 22 and the second elastomer 23 can be symmetricly set on the two sides of rotary structure 24, and connector 21,
First elastomer 22, rotary structure 24 and the second elastomer 23 constitute straight beam type flexible hinge structure shown in FIG. 1 or its
His flexible hinge structure.In this way, when the two-plate of interdigital capacitor device attracts each other because applying voltage and generates attraction, even
Junctor 21 can generate corresponding micro-displacement or deformation because of the attraction, and the first elastomer 22 and the second elastomer 23 is driven to produce
Raw corresponding miniature deformation or displacement, so that rotary structure 24 generates slight torque because of rotation, to realize output
The slight torque purpose of standard.
Rotary structure 24, for being rotated in stress.Cuboid knot shown in FIG. 1 can be used in rotary structure 24
Structure or other structures.
Referring to Fig.1, it is further used as preferred embodiment, further includes third elastomer 25 and the 4th elastomer 26, institute
Connector 21 is stated to connect by third elastomer 25 and the 4th elastomer 26 two sides opposite with peripheral fixed structure 4 respectively.
Specifically, third elastomer 25 and the 4th elastomer 26, for the small displacement or deformation band in connector 21
Dynamic lower generation displacement or deformation accordingly, plays auxiliary positioning.Bullet can be used in third elastomer 25 and the 4th elastomer 26
Property material is made, and can be symmetricly set on the two sides of peripheral fixed structure 4.Connector 21, third elastomer 25, the 4th elastomer
26 also constitute straight beam type flexible hinge structure or other flexible hinge structures shown in FIG. 1 with peripheral fixed structure 4.This implementation
Example is additionally arranged third elastomer 25 and the 4th elastomer 26, the positioning of slight torque generating means can be made more accurate, into one
Step improves the accuracy of the standard torque value of output.
Referring to Fig.1, it is further used as preferred embodiment, the connector is using approximate " returning " font connector.
It is further used as preferred embodiment, the interdigital quantity of the interdigital capacitor device is adjustable or described interdigital
The voltage applied between the interdigital spacing of capacitive means is adjustable or two pole plates of the interdigital capacitor device is adjustable.
As shown in the above, the slight torque generating means of the present embodiment can be by applying not on interdigital capacitor device
With voltage, interdigital quantity or interdigital spacing realize the purpose of the micro-nano force value of outputting standard, it is more flexible and conveniently.
As depicted in figs. 1 and 2, the slight torque generating means of this specific embodiment pass through standard micro-nano force value generator 1
The small force value of standard for being applied to flexible hinge 2 is generated, due to the particularity of 2 structure of flexible hinge, which passes through flexible hinge
After chain 2, a slight torque will be generated in output end 3, which can be used as a standard slight torque value to corresponding
Slight torque sensor or other need to carry out slight torque calibration/equipment and sensor of calibration calibrate/and demarcate.
When applying voltage at the both ends of interdigital capacitor device, the work of the power F to attract each other will be generated between interdigital capacitor
With the force value size are as follows:
Each parameter in formula (1) is as shown in Figure 4.
As shown in figure 5, the standard electrostatic power F that the moving fork finger tip of interdigital capacitor device is subject to is applied on flexible hinge 2,
Standard electrostatic power F will make flexible hinge generate small flexible deformation after being applied to flexible hinge 2, at this time output end 3 and its
The stress condition of peripheral parts is as shown in Figure 6,.
As shown in fig. 6, the special designing of 2 structure of flexible hinge, so that output end 3 and peripheral parts (the one of flexible hinge 2
Part) can only be respectively by tie point (i.e. the first elastomer 22 and the second elastomer 23) stress of two sides, stress size
F1And F2, and it is contrary.At this point, according to the design in such as Fig. 5, then according to the force analysis to flexible hinge 2 it is found that F1
=F2=F.The slight torque of standard caused by output end 3 at this time are as follows:
MOutput=F1×l1+F2×l2=F × (l1+l2)=F × l (2)
Due to F1And F2It is equal in magnitude, contrary, therefore additional offset loading force will not be generated in output end 3, the i.e. dress
Set output is a pure moment of couple.
Formula (1) substitution formula (2) can be obtained, the outputting standard slight torque value of the device are as follows:
It can be seen that the thought based on control variate method, keeps when the dimensional parameters of slight torque generating means determine
After constant, the standard slight torque value of device output is only related with on-load voltage, thus can by adjusting the size of on-load voltage,
Control outputting standard slight torque value.Similarly based on the thought of control variate method, when in slight torque generating means in addition to interdigital
Other parameters except quantity or interdigital spacing determine remain unchanged after, the standard slight torque value of device output only with it is interdigital
Quantity or interdigital spacing are related, therefore can also be by adjusting interdigital quantity or interdigital spacing, needed for control device output
Standard slight torque value.Preferably, the standard micro-nano power of application can be changed by changing on-load voltage in actual use
Value, to change the standard torque value of output, can have high sensitivity in this way, can be realized minimum output torque and differentiate
Rate.
In addition, the characteristics of according to interdigital capacitor device outputting standard micro-nano force value, even if moving fork refers to that one end (drives flexible hinge
That end of chain) occur micro-displacement when minor change (i.e. x occur), the standard micro-nano force value of interdigital capacitor device output is also hardly
Become, this also just greatly reduces the variation for due to the variation of load force value and causing the standard slight torque of output, to provide height
The standard slight torque value of precision provides guarantee.
Meanwhile interdigital capacitor device this micro-nano standard force source can directly generate micro- ox or even receive the micro-nano power of ox magnitude
Value, without other ancillary equipments, and the size of flexible hinge is 10-1~10-2Magnitude (if for MEMS system, it can
To reach 10-3Magnitude is even more small), therefore its outputting standard slight torque can reach 10-6Nm is even more small.
The embodiment of the invention also provides a kind of implementation methods of slight torque generating means, comprising the following steps:
The micro-nano power of standard is generated by standard micro-nano force value generator；
The pure moment of couple is converted by the micro-nano power of standard by flexible hinge, the slight torque of standard is obtained and passes through output
End output.
As shown in the above, the present embodiment can convert the pure moment of couple for the micro-nano power of standard by flexible hinge, obtain
To the slight torque of standard, traditional lever is eliminated using flexible hinge and adds in counterweight method counterweight for the shadow of output end
It rings, while eliminating the influence of the factors such as frictional force, aerostatic buoyancy, acceleration of gravity, supporting point, the mark of output greatly improved
The accuracy of quasi- torque value, error is small, and accurate, applicability is extensively and reliable.
It is further used as preferred embodiment, the standard micro-nano force value generator uses interdigital capacitor device, described
Structure between two pole plates of interdigital capacitor device is interdigitated configuration.
Specifically, the electrostatic micro-nano of this interdigitated configuration of interdigital capacitor device can be used in standard micro-nano force value generator
Force value generator greatly reduces errors in position measurement and position error to output micro-nano force value as the power source of micro-nano force value
Influence, eliminate the measurement of high-precision position and registration aid, simplify apparatus structure and cost, be convenient for collecting
At.
It is further used as preferred embodiment, the expression formula of the value of the slight torque of the standard are as follows:
Wherein, MOutputFor the value of the slight torque of standard, N is number interdigital in interdigital capacitor device, ε0For air dielectric
Constant, the voltage value that U applies between two pole plates of interdigital capacitor device, g is adjacent two interdigital side in interdigital capacitor device
The half of distance, x are the half of adjacent two interdigital intersection length in interdigital capacitor device, and l is the power of standard slight torque
Arm.
In conclusion a kind of slight torque generating means of the present invention and its implementation, using micro-nano electrostatic force generator
The method combined with flexible hinge structure generates standard slight torque, by directlying adopt this micro-nano of interdigital capacitor device
Electrostatic force standard force source, so that the structure of small standard torque equipment is simple, convenient for integrated, while cost is extremely low；Utilize flexibility
The pure moment of couple is converted to the clever structure of hinge by micro-nano standard force source, eliminates influence of the unbalance loading for output end, simultaneously
The influence of the other factors such as frictional force in conventional apparatus, aerostatic buoyancy, acceleration of gravity and supporting point is eliminated, is had extremely strong
Applicability is created condition suitable for various application and environments for wideling popularize for device.
It is to be illustrated to preferable implementation of the invention, but the present invention is not limited to the embodiment above, it is ripe
Various equivalent deformation or replacement can also be made on the premise of without prejudice to spirit of the invention by knowing those skilled in the art, this
Equivalent deformation or replacement are all included in the scope defined by the claims of the present application a bit.
Claims (10)
1. a kind of slight torque generating means, it is characterised in that: include:
Standard micro-nano force value generator, for generating the micro-nano power of standard；
Flexible hinge, for providing the arm of force of generation standard slight torque and the micro-nano power of Transfer Standards；
Output end, for the slight torque according to the micro-nano power outputting standard of the arm of force and standard of standard slight torque；
The flexible hinge is connect with standard micro-nano force value generator, and the output end is located at the center of flexible hinge.
2. a kind of slight torque generating means according to claim 1, it is characterised in that: it further include peripheral fixed structure,
The periphery fixed structure is used for fixed standard micro-nano force value generator and/or flexible hinge.
3. a kind of slight torque generating means according to claim 2, it is characterised in that: the standard micro-nano force value occurs
Device uses interdigital capacitor device, and the structure between two pole plates of the interdigital capacitor device is interdigitated configuration, described interdigital micro-
Two pole plates of force value generator are separately mounted on peripheral fixed structure and flexible hinge.
4. a kind of slight torque generating means according to claim 3, it is characterised in that: the flexible hinge includes connection
Body, the first elastomer, rotary structure and the second elastomer, the connector are connect with a pole plate of interdigital capacitor device,
The connector is connected by the first elastomer and the second elastomer two sides opposite with rotary structure respectively.
5. a kind of slight torque generating means according to claim 4, it is characterised in that: further include third elastomer and
Four elastomers, the connector are connected by third elastomer and the 4th the elastomer two sides opposite with peripheral fixed structure respectively
It connects.
6. a kind of slight torque generating means according to claim 4, it is characterised in that: the connector is using approximate
" returning " font connector.
7. according to a kind of described in any item slight torque generating means of claim 3-6, it is characterised in that: the interdigital capacitor
The interdigital spacing of the adjustable perhaps described interdigital capacitor device of the interdigital quantity of device is adjustable or the interdigital capacitor device
The voltage applied between two pole plates is adjustable.
8. a kind of implementation method of slight torque generating means, it is characterised in that: the following steps are included:
The micro-nano power of standard is generated by standard micro-nano force value generator；
Convert the pure moment of couple for the micro-nano power of standard by flexible hinge, obtain the slight torque of standard and by output end it is defeated
Out.
9. a kind of implementation method of slight torque generating means according to claim 8, it is characterised in that: the standard is micro-
Force value generator of receiving uses interdigital capacitor device, and the structure between two pole plates of the interdigital capacitor device is interdigitated configuration.
10. a kind of implementation method of slight torque generating means according to claim 9, it is characterised in that: the standard
Slight torque value expression formula are as follows:
Wherein, MOutputFor the value of the slight torque of standard, N is number interdigital in interdigital capacitor device, ε0For dielectric constant of air,
The voltage value that U applies between two pole plates of interdigital capacitor device, g is adjacent two interdigital lateral distance in interdigital capacitor device
Half, x are the half of adjacent two interdigital intersection length in interdigital capacitor device, and l is the arm of force of standard slight torque.
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