CN109405593A - A kind of heat exchanger and its manufacturing method and heat exchange module and its manufacturing method - Google Patents
A kind of heat exchanger and its manufacturing method and heat exchange module and its manufacturing method Download PDFInfo
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- CN109405593A CN109405593A CN201810941201.XA CN201810941201A CN109405593A CN 109405593 A CN109405593 A CN 109405593A CN 201810941201 A CN201810941201 A CN 201810941201A CN 109405593 A CN109405593 A CN 109405593A
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- China
- Prior art keywords
- heat exchanger
- cooling tube
- outer cover
- heat exchange
- medical fluid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
- F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/0066—Multi-circuit heat-exchangers, e.g. integrating different heat exchange sections in the same unit or heat-exchangers for more than two fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/04—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being spirally coiled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/007—Auxiliary supports for elements
- F28F9/013—Auxiliary supports for elements for tubes or tube-assemblies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/02—Header boxes; End plates
- F28F9/04—Arrangements for sealing elements into header boxes or end plates
- F28F9/06—Arrangements for sealing elements into header boxes or end plates by dismountable joints
- F28F9/12—Arrangements for sealing elements into header boxes or end plates by dismountable joints by flange-type connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/02—Header boxes; End plates
- F28F9/04—Arrangements for sealing elements into header boxes or end plates
- F28F9/16—Arrangements for sealing elements into header boxes or end plates by permanent joints, e.g. by rolling
- F28F9/162—Arrangements for sealing elements into header boxes or end plates by permanent joints, e.g. by rolling by using bonding or sealing substances, e.g. adhesives
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F9/00—Casings; Header boxes; Auxiliary supports for elements; Auxiliary members within casings
- F28F9/26—Arrangements for connecting different sections of heat-exchange elements, e.g. of radiators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The present invention relates to a kind of heat exchanger and its manufacturing method and heat exchange module and its manufacturing methods, improve heat exchanger effectiveness by increasing the heat exchange area for carrying out heat exchange to medical fluid.Heat exchanger includes: body apparatus, is connected to the medical liquid discharge port of substrate board treatment, has the ontology outer cover for forming heat exchange space, which carries out heat exchange to the high temperature medical fluid being discharged from liquid outlet；Fixed device, including fixation member, the front end-plate of seal holder part part front end and the end plate of seal holder part part rear end inside ontology outer cover is arranged in；At least one cooling tube is wrapped in the lateral surface of fixation member in form of a coil, and the first layer cooling tube and second layer cooling tube that there is the radial direction along fixation member to be laminated, and carries out heat exchange with medical fluid by cooling fluid flowing；And the gap retaining member between first layer and second layer cooling tube, for keeping being spaced between first layer and second layer cooling tube is set.
Description
Technical field
The present invention relates to a kind of heat exchanger and its manufacturing method and heat exchange module and its manufacturing methods, and in particular to one
Kind for carrying out heat exchange to medical fluid and improves heat exchanger and its manufacture of heat exchanger effectiveness by increasing heat exchange area
Method and heat exchange module and its manufacturing method.
Background technique
In general, in semiconductor equipment or flat-panel monitor (FPD；Flat panel display) manufacturing process in, be
It will execute on substrate to be processed (silicon wafer or glass substrate) film of specific function, such as oxide film, metallic film, half
Shape needed for conductor thin film etc. is patterned into (patterning), will execute the photosensitive liquid reacted with light source the thin film coated
Process.
Like this, to realize fixed circuit pattern, to the thin film coated photosensitive liquid of substrate to be processed, correspond to circuit diagram
Case is exposed the light-sensitive surface, and the position progress development treatment at the position or no exposure to exposure is a series of come what is removed
Process is defined as developing procedure or photoetching (Photolithography) process.
For example, executing in photo-mask process to the substrate for completing exposure by light-sensitive surface, with devices such as conveyer belts to one
Direction horizontal transmission and the process imaged.
Specifically, when substrate is imaged and handled, the substrate surface to a direction horizontal transmission is carried out, is sprayed for imaging
Exposure position or unexposed position of the medical fluid to remove substrate after, recovery processing using the medical fluid imaged in substrate mistake
Journey.
On the other hand, heat exchanging process is carried out during released liquor, which controls medical fluid using heat exchanger
Temperature.
After traditional heat exchanger with a fixation member binding is used by the both ends of multi beam cooling tube respectively, setting is being filled out
The construction of the heat exchange chamber chamber interior of full medical fluid.That is, cooling tube is dissipated in the heat exchange chamber chamber interior for filling up medical fluid, and cooling tube
Both ends in the state of cohesion, be arranged with being bundled in the state an of fixation member respectively in the heat exchanger chambers.
But according to traditional heat exchanger, the cooling tube being bundled in fixation member is the case where both ends contact with each other
Under, group is not only untidy in appearance at not having spaced state between each other, but also can have the region that heat exchange does not occur,
Lead to the problem of heat exchanger effectiveness reduction.
Moreover, because the cooling tube of heat exchange chamber chamber interior is set with arbitrarily scatter state distribution, make cooling tube with
The mutual heat exchange of medical fluid becomes unevenly, it is non-uniform to lead to the problem of heat exchanger effectiveness.
Summary of the invention
The project to be solved
Project to be solved by this invention is to be increased by setting gap retaining member and additional heat exchanger for medicine
Liquid carry out the heat exchange area of heat exchange improve the heat exchanger of heat exchanger effectiveness and its manufacturing method and heat exchange module and
Its manufacturing method.
Project solution
To solve the above subject, the present invention provides a kind of heat exchanger, it is characterized in that, including body apparatus, it is connected to base
The medical liquid discharge port of plate processing unit simultaneously has ontology outer cover, which forms heat exchange space, for the medical fluid
The high temperature medical fluid of outlet discharge carries out heat exchange；Fixed device, including be arranged in fixation member inside the ontology outer cover,
It seals the front end-plate of the fixation member front end and seals the end plate of the fixation member rear end；At least one cooling tube, with
The form of coil is wrapped in the lateral surface of the fixation member, and has first of the radial direction stacking along the fixation member
Layer cooling tube and second layer cooling tube, flow coolant liquid, and the medical fluid is made to carry out heat exchange；And gap retaining member, setting
Between the first layer cooling tube and the second layer cooling tube, for keeping the first layer cooling tube and the second layer cooling
Interval between pipe.
The body apparatus can also include the first lid, for sealing the front end of the ontology outer cover, with the substrate
The medical liquid discharge port of processing unit is connected, and is provided with medical fluid and flows into port, empty for the medical fluid to be flowed into the heat exchange
Between.
The heat exchanger can also include that mouth is arranged in the first cooling tube, and the front end of the ontology outer cover is arranged in, and
It is set as being connected to the inside of the ontology outer cover, so that one end of the cooling tube is run through and is exposed to outside.
Moreover, the heat exchanger can also include the first flowing controling part, the inside of the ontology outer cover is set,
And be arranged between first lid and the front end-plate, for the medical fluid of inflow to be distributed to the heat exchange space.
First flowing controling part is formed as hollow circle tube, and the outer wall of first flowing controling part can be with
Multiple first movement holes are formed, makes to flow into the medical fluid that port is flowed into inside by the medical fluid, it is empty to be moved to the heat exchange
Between side.
The front end-plate may include: the first outer side frame body；First interior plate is formed to have side frame outer than described first
Body smaller diameter, is set as the radial direction to the described first outer side frame body, it is separated by a distance inwardly and with it is described solid
The front end for determining component combines；Multiple first connection frameworks, one end are connected to the first outer side frame body, and the other end is connected in first
Side plate, for connecting the described first outer side frame body and first interior plate；And first through hole, it is formed in the multiple first and connects
It connects among two adjacent first connection frameworks in framework, to be passed through by the medical fluid.
The front end-plate can also have including first movement concave part, the cooling tube formed the first layer cooling tube it
Afterwards, the mobile cooling tube to be to form the second layer cooling tube,.
The gap retaining member can be created as netted mesh enclosure.
Other implementation forms according to the present invention, the present invention provide a kind of for manufacturing the manufacturer of the heat exchanger
Method, including first combine step, and medical fluid is flowed into port and the first flowing controling part and is integrated to the first lid；Second combines step
Suddenly, the ontology will be integrated in conjunction with first lid that the medical fluid flows into port and first flowing controling part
The front end of outer cover；Cooling tube setting steps, the step following processes repeatedly, are combined in the front end-plate and the end plate
The first layer cooling tube is formed around the fixation member, and interval holding portion is set around the first layer cooling tube
After part, the second layer cooling tube is formed around the gap retaining member；With fixation member setting steps, will be arranged
The inside that the fixation member of the cooling tube is inserted into the ontology outer cover is configured.
Moreover, another implementation form according to the present invention, the present invention provide a kind of heat exchanger module, it is characterized in that,
Include above-mentioned heat exchanger；First flange is combined with the side of the heat exchanger body outer cover；Second flange, side
It is combined with the side of the second ontology outer cover of the additional heat exchanger, the other side is combined with the first flange, and is mentioned
The interconnected structure in the heat exchange space in heat exchange space and the additional heat exchanger for the heat exchanger.
The heat exchanger module can also include seal member, be arranged in the first flange and the second flange knot
The medical fluid is flowed out from the part that the first flange and the second flange combine for preventing in the position of conjunction.
Moreover, the heat exchanger module can also include, mouth is arranged in the first cooling tube, is set as through the heat exchange
The front end of the ontology outer cover of device, for being run through by one end of the cooling tube and being exposed to outside；Mouth is arranged in second cooling tube,
It is set as the rear end of the ontology outer cover through the heat exchanger, for being run through and being exposed to by the other end of the cooling tube
It is external；Mouth is arranged in third cooling tube, is set as the front end of the ontology outer cover through the additional heat exchanger, for by described
One end of second cooling tube is run through and is exposed to outside；Mouth is set with the 4th cooling tube, is set as through the added heat exchange
The rear end of the ontology outer cover of device, for being run through by the other end of second cooling tube and being exposed to outside.
Here, the ontology outer cover of the ontology outer cover of the heat exchanger and the additional heat exchanger is with array arrangement, institute
Cooling tube and second cooling tube are stated to be arranged in juxtaposition.
Another implementation form according to the present invention, the present invention are manufactured for manufacturing the heat exchanger of the heat exchanger module
Method provides a kind of manufacturing method of heat exchanger module, including, the first module combination step combines the first flange
To the rear end of the ontology outer cover of the heat exchanger；The second flange is integrated to described additional by the second module combination step
The front end of second ontology outer cover of heat exchanger；The second flange is integrated to first method by third module combination step
Orchid is to connect the heat exchanger and the additional heat exchanger.
Detailed description of the invention
Fig. 1 shows in heat exchanger provided in an embodiment of the present invention the schematic diagram it can be seen that internal structure.
Fig. 2 shows showing for the state that the first lid and the second lid are combined to ontology outer cover provided in an embodiment of the present invention
It is intended to.
Fig. 3 shows the schematic diagram of the structure of fixed device provided in an embodiment of the present invention.
Fig. 4 is shown in front end-plate provided in an embodiment of the present invention, and cooling tube is moved to form first layer cooling tube
With the schematic diagram of the structure of second layer cooling tube.
Fig. 5 shows in cooling tube provided in an embodiment of the present invention and sets between first layer cooling tube and second layer cooling tube
Set the schematic diagram of the process of gap retaining member.
Fig. 6 shows in heat exchanger module provided in an embodiment of the present invention the schematic diagram it can be seen that internal structure.
Fig. 7 is shown before heat exchanger and additional heat exchanger combine in heat exchanger module provided in an embodiment of the present invention
The schematic diagram of state.
Specific embodiment
Hereinafter, the attached drawing of reference the preferred embodiment of the present invention is illustrated, which can implement
State project to be solved.When illustrating embodiment, same names and the same symbol are used to identical constitute, hereinafter omitted accordingly
Repeat description.
Fig. 1 shows in heat exchanger 100 provided in an embodiment of the present invention the schematic diagram it can be seen that internal structure.Fig. 2
Show the signal that the state of the first lid 112 and the second lid 113 is combined to ontology outer cover 111 provided in an embodiment of the present invention
Figure.Fig. 3 shows the schematic diagram of the structure of fixed device 120 provided in an embodiment of the present invention.Fig. 4 shows the embodiment of the present invention
Cooling tube is moved to form the schematic diagram of the structure of first layer cooling tube and second layer cooling tube in the front end-plate of offer.
Referring to figs. 1 to Fig. 4, heat exchanger 100 provided in an embodiment of the present invention includes body apparatus 110, fixed device
120, cooling tube 140 and gap retaining member 150.
Body apparatus 110 is cylindrical shape, and medical liquid discharge port (not shown) phase with substrate board treatment (not shown)
Even, including ontology outer cover 111, is formed with heat exchange space 111a, the high temperature medical fluid for will be discharged from medical liquid discharge port into
Row heat exchange.
Body apparatus 110 can also include the first lid 112 and the second lid 113.
First lid 112 is disc-shape, the front end for seal body outer cover 111.
At this point, the rear portion of the first lid 112 can be set to be combined with ontology outer cover 111 from the first lid 112
Prominent the first binding end 112a formed in rear portion.
That is, the first binding end 112a of the first lid 112 is inserted into the front end side of ontology outer cover 111a by operator
Behind portion, the first lid 112 is fixed to the front end of ontology outer cover 111 with the method for welding.
Medical fluid can be set on the first lid 112 and flowed into port 114, be connected to the medical fluid discharge of substrate board treatment
Mouthful, for medical fluid to be flowed into the heat exchange space 111a.
Second lid 113 with the first lid 112 is formed with identical shape, the rear end of seal body outer cover 111.This
When, behind the second lid 113, i.e. against the face of ontology outer cover 111, the second binding end 113a can be set.Similarly,
Two lids 113 can be fixed to ontology outer cover 111 by the second binding end 113a.
Medical fluid discharge port 115 can be set in second lid 113, for that hot friendship will be completed in the 111a of heat exchange space
The medical fluid changed is discharged to the outside.
The heat exchanger provided according to embodiments of the present invention can also include that the first cooling tube setting mouth 161 and second are cooling
Mouth 162 is arranged in pipe.
Before the first cooling tube setting mouth 161 can be formed as cylindrical shape and the ontology outer cover 111 is arranged in
End.
Here, one end of the cooling tube 140 inside the ontology outer cover 111 is set, is set across first cooling tube
It sets mouth 161 and is exposed to the outside of ontology outer cover 111.Therefore, cooling tube 140 is from external cooling fluid feedway (not shown)
Obtain the supply of cooling fluid.
Second cooling tube is arranged mouth 162 and is formed with shape identical with the first cooling tube setting mouth 161 and ontology is arranged in
The rear end of outer cover 111.
Likewise, the other end for the cooling tube 140 being arranged in inside ontology outer cover 111, which passes through the second cooling tube, is arranged mouth
162 and it is exposed to the outside of ontology outer cover 111.
As a result, the other end of cooling tube 140 is exposed to the outside of ontology outer cover 111 after passing through the second cooling tube 162, and
The cooling fluid that heat exchange is completed in the 111a of heat exchange space is discharged to the outside.
Heat exchanger provided in an embodiment of the present invention can also include the first flowing controling part 170.The setting of its component exists
The inside of ontology outer cover 111, and be arranged between the first lid 112 and front end-plate 122, for the medical fluid of inflow to be distributed to heat
Swapace 111a.
At this point, the first flowing controling part 170 is formed as hollow cylindrical shape.Outside first flowing controling part 170
Wall can form multiple first movement holes 171, the medical fluid for being flowed into inside by medical fluid inflow port 114 can be moved to heat
The side swapace 111a.
More specifically, when being provided with the first flowing control unit between 122 front of front end-plate behind the first lid 112
When part 170, medical fluid flows into port 114 and the inner space of the first flowing controling part 170 and is in connected state.
At this point, medical fluid, which flows into port 114 by medical fluid, is flowed into the inside of the first flowing controling part 170, it is flowed into the
Medical fluid inside one flowing controling part 170 is dispersed when passing through first movement hole 171 and is moved to the heat exchange space
111a。
The heat exchanger provided according to embodiments of the present invention can also include the second flowing controling part 180, and component is set
Set the ontology outer cover 111 inside and configure between second lid 113 and the end plate 128, can make through
115 side of medical fluid discharge port is moved to by the medical fluid of heat exchange space 111a.
Similarly, the second flowing controling part 180 is formed as hollow cylindrical shape.Second flowing controling part 180
Outer wall can form multiple second moving hole 181, can will be flowed into the second flowing control via the medical fluid of heat exchange space 111a
The inside of component 180 processed.
When the second mobile control unit 180 be arranged in behind the second lid 113 and before end plate 128 between, medicine
The inner space of liquid discharge port 115 and the second flowing controling part 180 is at connected state.
At this point, the medical fluid via heat exchange space 111a is flowed into the second flowing controling part by the second moving hole 181
180 inner space, the medical fluid for being flowed into 180 inner space of the second flowing controling part are discharged by medical fluid discharge port 115
To outside.
As shown in figure 3, fixing device 120 as the composition for aftermentioned cooling tube 140 to be arranged, and this fixed device 120
It may include fixation member 121, front end-plate 122 and end plate 128.
Fixation member 121 can be formed as cylindrical shape, and have enclosed construction by front end-plate 122 and end plate 128.
At this point, cooling tube 140 winds and is arranged in around fixation member 121.
Front end-plate 122 may include the first outer side frame body 123, the first interior plate 124, multiple first connection, 125 and of framework
First through hole 126.
First outer side frame body 123 can be formed as the cut-off cutting ring-shaped of a part, and the first interior plate 124 can be with shape
As disc-shape.
At this point, the first interior plate 124 can be formed to have the diameter smaller than the first outer side frame body 123.
Also, the first interior plate 124 is set as the radial direction to the first outer side frame 123, separated by a distance inwardly
State and can be combined with the front end of fixation member 121.As a result, the front end of fixation member 121 is by 124 institute of the first interior plate
Closing.
One end of first connection framework 125 is connected with outer side frame body 123, and the other end is connected with the first interior plate 124, thus
Connect the first outer side frame 123 and the first interior plate 124.
First through hole 126 is formed in multiple first connection frameworks 125 between two adjacent first connection frameworks.This
In, heat exchange space 111a is moved to via the first through hole 126 by the medical fluid in first movement hole 171.
End plate 128 may include the second outer side frame body 129, the second interior plate 130, multiple second connection, 131 and of framework
Second through-hole 132.
Because the structure and function of end plate 128 is identical as above-mentioned front end-plate 122, therefore description is omitted.
At this point, the second interior plate 130 is combined with the rear end of fixation member 121, the rear end of fixation member 121 is closed.
Fig. 4 show cooling tube 140 in front end-plate 122 provided in an embodiment of the present invention moved it is cold to form first layer
But the schematic diagram of the structure of pipe 141 (Fig. 5) and second layer cooling tube 142 (Fig. 5).
As shown in figure 4, front end-plate 122 can also include first movement concave part 127, for forming the in cooling tube 140
After one cooling tube 141, cooling tube 140 is mobile to form second layer cooling tube 142.
Cutting region that mobile concave part 127 is cut off in the first outer side frame 123, corresponding in cut off region first
It is formed between a part of region in 124 outside of side plate and the two first connection frameworks that cutting region two sides are set.
When forming first layer cooling tube 141 around cooling tube 140 is wrapped in fixation member 121, to form the second layer
Cooling tube 142, cooling tube 140 pass through first movement concave part 127, hang over the side for being formed in first movement concave part 127
After first connection frame 125, pass through first through hole 126.
After forming first layer cooling tube 141, the outer of first layer cooling tube 141 is arranged in gap retaining member 150
Side.Later, it is further would around the lateral surface of gap retaining member 150 by the cooling tube 140 of first through hole 126, forms the
Two cooling tubes 142.
Likewise, end plate 128 can also include the second mobile concave part 133, for forming the second layer in cooling tube 140
Mobile cooling tube 140, forms third layer cooling tube (not shown) after cooling tube 142.
Because the structure and function of the second mobile concave part 133 is identical as first movement concave part 127, it is omitted specifically
It is bright.
On the other hand, relative to first movement concave part 127, the angle of the second mobile concave part 133 is set as about inclining
Oblique 120 degree or so are advisable.This is in order to be fastened component 121 and in the state of complete setting in cooling tube 140, by cooling tube
140 one end is arranged mouth 161 by the first cooling tube and is exposed to outside, the other end by the second cooling tube be exposed to outside when
It waits, is bent cooling tube 140 not.
Fig. 5 shows the first layer cooling tube 141 and second layer cooling tube of cooling tube 140 provided in an embodiment of the present invention
The schematic diagram of the process of gap retaining member 150 is set between 142.
At this point, Fig. 5 a is to indicate that cooling tube 140 is wrapped in around fixation member 121, first layer cooling tube 141 is formed
The schematic diagram of state.Fig. 5 b is the state indicated in the outside of first layer cooling tube 141, provided with gap retaining member 150
Schematic diagram, Fig. 5 c are to indicate that cooling tube 140 is wrapped in the outside of gap retaining member 150, form the shape of second layer cooling tube 142
The schematic diagram of state.
Referring to Fig. 5, cooling tube 140 can be set to be wrapped in form of a coil on the lateral surface of fixation member 121.
The first layer cooling tube 141 and the second layer that there is cooling tube 140 radial direction along fixation member 121 to be laminated are cooling
Pipe 142, internal flow for medical fluid carry out heat exchange cooling fluid.At this point, technical cooling can be used in cooling fluid
The substances such as water (Process cooling water:PCW) and refrigerant.
That is, the form winding that cooling tube is laminated along the radial direction of fixation member 121, forms first layer cooling tube 141
With second layer cooling tube 142.
Gap retaining member 150 is arranged between first layer cooling tube 141 and second layer cooling tube 142, keeps first layer
Interval between cooling tube 141 and second layer cooling tube 142.At this point, first layer cooling tube 141 and second layer cooling tube 142 it
Between interval be formed within the scope of 1mm -5mm and be advisable.
That is, due between first layer cooling tube 141 and second layer cooling tube 142 be provided with gap retaining member 150, first
Gap is formed between layer cooling tube 141 and second layer cooling tube 142.
At this point, as liquid medicine flow is formed by gap between first layer cooling tube 141 and second layer cooling tube 142
In, the heat exchange area between medical fluid and cooling tube 140 is increased, heat exchanger effectiveness can be improved.
On the other hand, netted mesh enclosure can be used in gap retaining member 150.
That is, gap retaining member 150 uses mesh enclosure, by between first layer cooling tube 141 and second layer cooling tube 142
Medical fluid passes through simultaneously between the fine and closely woven hole of mesh enclosure, can further increase the heat exchange area between medical fluid and cooling tube 140.
On the other hand, although gap retaining member 150 has been prompted to use mesh enclosure in one embodiment of the present of invention,
As long as if the structure that the interval between first layer cooling tube 141 and second layer cooling tube 142 can be kept, can use
Any structure does not limit the material and structure of gap retaining member 150.
Referring to figs. 1 to Fig. 5, the manufacturing method of the heat exchanger of the embodiment provided according to the present invention is said as follows
It is bright.
The manufacturing method for the heat exchanger that one embodiment of the present of invention provides includes the first combination step, the second combination step
Suddenly, cooling tube setting steps, fixation member setting steps, setting mouth combination step and the 4th combine step.
Firstly, what execution combined the first lid 112 with medical fluid inflow port 114 and the first flowing controling part 170
First combines step.It is arranged in front of the first lid 112 at this point, medical fluid flows into port 114, the first flowing controling part 170
It is arranged in behind the first lid 112.
At this point, medical fluid inflow port 114 is pasted before the first lid 112 by bonding, the bonding for bonding
It, can be by the way that bond site be welded and fixed after agent is dry.First flowing controling part 170 can be by being adhesively secured to the first lid
Behind body 112.
At the same time, medical fluid discharge port 115 and the second flowing controling part 180 can be fixed to the second lid 113.
Then, it executes second and combines step, medical fluid will be combined and flow into port 114 and the first flowing controling part 170
The front end of first lid 112 and ontology outer cover 111 is combined.
At this point, the first binding end 112a for being formed in the first lid 112 is inserted into the front end of ontology outer cover 111 by operator
It,, can be by the way that bonding part be welded and fixed after the adhesive used in the bonding is dry by being pasted after inside
Position.
Then, the setting steps for executing cooling tube 140 repeatedly, in the fixed part that front end-plate 122 and end plate 128 are combined
Cooling tube 140 is wound around part 121, forms first layer cooling tube 141, and interval is set around first layer cooling tube 141
After holding member 150, cooling tube is wound around gap retaining member 150, forms second layer cooling tube 142.
On the other hand, executing 140 setting steps of cooling tube before first combines step can also be with.
Then, 121 setting steps of fixation member are executed, the fixation member 121 for being provided with cooling tube 140 is inserted into ontology
The inside of outer cover 111.
At this point, one end of cooling tube 140 and the other end are to be exposed to outside by each combined hole (not shown), the combined hole
It is to be formed in order to which the first cooling tube setting mouth 161 and the second cooling tube setting mouth 162 are integrated to ontology outer cover 111.
Then, setting mouth combination step is executed, mouth 161 is arranged in the first cooling tube and 162 knot of mouth is arranged in the second cooling tube
Close the front and rear of ontology outer cover 111.
At this point, one end of cooling tube 140, which passes through the first cooling tube setting mouth 161, is exposed to outside.Similarly, cooling tube
140 other end passes through the second cooling tube setting mouth 162 and is exposed to outside.
Then, it executes after the second lid 113 is integrated to ontology outer cover 111 by process identical with the first lid 112
The process at end.
Heat exchanger provided in an embodiment of the present invention can be manufactured by the above process.
Heat exchanger provided in an embodiment of the present invention as above and its manufacturing method and heat exchange module and its manufacturing method,
By set gap retaining member between the first layer cooling tube and second layer cooling tube of cooling tube, medical fluid is allow to exist
It is flowed between first layer cooling tube and second layer cooling tube, has the effect of improving heat exchanger effectiveness.
It now begins to be illustrated heat exchange module provided in an embodiment of the present invention.
Fig. 6 shows in heat exchanger module provided in an embodiment of the present invention the schematic diagram it can be seen that internal structure, Fig. 7
Show showing for state before the combination of the heat exchanger and additional heat exchanger of heat exchanger module provided in an embodiment of the present invention
It is intended to.
Referring to figure 6 and figure 7, heat exchange module provided in an embodiment of the present invention includes heat exchanger 1000, is arranged adjacent
In the additional heat exchanger 200 of heat exchanger 1000, the first flange 300 and one combined with the side of heat exchanger 1000
Side is combined with the side of heat exchanger, the second flange 400 that the other side is combined with first flange 300.
At this point, the heat exchange space 111a of heat exchanger and the second heat exchange space 211a of additional heat exchanger are set as
Being interconnected is advisable.
Meanwhile the heat exchanger 1000 having in heat exchanger module provided in this embodiment and heat exchanger above-mentioned
100 have similar structure.But heat exchanger 1000 provided in this embodiment does not have the second of the heat exchanger 100
Lid 113 (Fig. 1).
In addition, additional heat exchanger 200 has similar structure with aforesaid heat exchangers 100.Only the present embodiment provides
Additional heat exchanger 200 do not have the first lid 112 (Fig. 1) of heat exchanger 100.
That is, because heat exchanger 1000 provided in this embodiment and additional heat exchanger 200 need to be interconnected, so setting
First flange 300 and second flange 400, for combining heat exchanger 1000 and additional heat exchanger 200.
By being connected to the heat exchange space 111a of heat exchanger and the heat exchange space 211a of additional heat exchanger, make hot friendship
The medical fluid by heat exchange space 111a of parallel operation is moved to the second heat exchange space 211a of additional heat exchanger 200.
Additional heat exchanger 200 includes the second body apparatus 210, the second fixed device, the second cooling tube (not shown) and
Second gap retaining member (not shown).
Second body apparatus 210 includes the second ontology outer cover 211 and the second lid 213.
Second ontology outer cover 211 forms the second heat exchange space 211a.At this point, the second heat exchange space 211a and heat exchange
The heat exchange space 111a of device 1000 forms the state of connection.
In heat exchange module, the second lid 213 plays a part of to close 211 rear end of the second ontology outer cover.At this point, second lid
Medical fluid discharge port 215 is set on 213, for that will carry out heat in heat exchange space 111a and the second heat exchange space 211a
The medical fluid of exchange is discharged to the outside.
Second fixed device may include the second fixation member 221, the second front end-plate 222 and the second end plate 228.
At this point, the second front end-plate 222 may include the outer side frame 223 of third, third interior plate 224, multiple thirds connection frame
225, third through-hole 226 and the mobile concave part 227 of third.
Second end plate 228 may include the 4th outer side frame 229, the 4th interior plate 230, multiple 4th connection, 231 and of frame
Fourth hole 232 and the 4th mobile concave part 233.
The structure of second fixation member of above-mentioned additional heat exchanger 200 and the fixation device of heat exchanger above-mentioned
120 (Fig. 3's) is structurally and functionally identical, therefore omits the detailed description to the second fixed device.
Although not shown, the second cooling tube may include third layer cooling tube and the 4th layer of cooling tube, the second cooling tube and heat
The cooling tube 140 (Fig. 5) of exchanger 100 it is structurally and functionally identical, therefore omit detailed description.
Second gap retaining member is (not shown) to be arranged between third layer cooling tube and the 4th layer of cooling tube, the second interval
Holding member is structurally and functionally identical as the gap retaining member 150 (Fig. 5), therefore omits detailed description.
Additional heat exchanger 200 can also include third cooling tube setting mouth 261 and mouth 262 is arranged in the 4th cooling tube, the
Three cooling tubes be arranged mouth 261 and the 4th cooling tube setting mouth 262 and heat exchanger the first cooling tube setting mouth 161 (Fig. 2) and
The structurally and functionally identical of mouth 162 (Fig. 2) is arranged in second cooling tube, therefore omits detailed description.
Additional heat exchanger 200 can also include the third flowing controling part 270 and shape for being formed with third moving hole 271
4th flowing controling part (not shown) of tetra- moving hole of Cheng You (not shown), third flowing controling part 270 and the 4th stream
The knot of the first flowing controling part 170 (Fig. 2) and the second flowing controling part 180 (Fig. 2) of dynamic control unit and heat exchanger
Structure is identical with effect, therefore omits detailed description.
On the other hand, in heat exchanger module provided in an embodiment of the present invention, 111 He of ontology outer cover of heat exchanger 1000
The ontology outer cover 211 of additional heat exchanger 200 arranges that cooling tube 140 and the second cooling tube are with juxtaposition cloth with straight column mode
It sets.
That is, by the way that cooling tube 140 and the second cooling tube are juxtaposed on each ontology outer cover (111,211), Ke Yiti
Height flow to the heat exchanger effectiveness between the internal medical fluid of each ontology outer cover (111,211) and cooling fluid.
First flange 300 can be incorporated into the rear end of heat exchanger body outer cover 111.
The side of second flange 400 can be incorporated into the front end of the second ontology outer cover 211 in additional heat exchanger 200, separately
Side can be incorporated into first flange 300.
At this point, first flange 300 and second flange 400 can be attached by bolt.
That is, passing through first flange 300 and and added heat exchange in conjunction with the rear end of the ontology outer cover 111 of heat exchanger
The second flange 400 that the front end of second ontology outer cover 211 of device is combined be combined with each other, to make heat exchanger 1000 and add
Heat exchanger 200 is connected.
On the other hand, heat exchange module provided in an embodiment of the present invention can also include seal member 500.
The part that first flange 300 and second flange 400 combine is arranged in seal member 500, prevents from first flange
300 and second flange 400 combine part outflow medical fluid.
It now begins to be illustrated the manufacturing method of heat exchanger module provided in an embodiment of the present invention.
The manufacturing method of heat exchanger module provided in an embodiment of the present invention may include the first module combination step, second
Module combination step and third module combination step.
Firstly, the first module combination step is executed, by the rear end of the ontology outer cover 111 of heat exchanger 1000 and first flange
300 combine.At this point, first flange 300 is pasted the rear end of ontology outer cover 111 by operator by way of bonding, in bonding
It, can be by the way that bond site be welded and fixed after the adhesive used is dry.
Then, the second module combination step is executed, second flange 400 is integrated in additional heat exchanger 200 second
The front end of external cover 221.At this point, before second flange 400 is pasted ontology outer cover 211 by operator by way of bonding
It holds, it, can be by the way that bond site be welded and fixed after adhesive used in bonding is dry.
Then, third module combination step is executed, to combine heat exchanger 1000 and additional heat exchanger 200, by second
Flange 400 is integrated to first flange 300.At this point, first flange 300 and second flange 400 can be attached by bolt.
By the above process, the second heat exchange of the heat exchange space 111a of heat exchanger and additional heat exchanger 200 is empty
Between 211a be in connected state.
Heat exchange module provided in an embodiment of the present invention can be manufactured by the above process.
Moreover, heat exchange module of the invention carries out one by cooling fluid of the heat exchanger to medical fluid and the first cooling tube
Secondary heat exchange carries out secondary heat exchange by cooling fluid of the additional heat exchanger to medical fluid and the second cooling tube, to have
Improve the effect of heat exchanger effectiveness.
As described above, being wanted the present invention is not limited to above-mentioned specific preferred embodiment in the right for not departing from of the invention
Under the premise of seeking main idea, those skilled in the art to carry out the change of multiplicity, and such change belongs to the present invention
Range.
Claims (13)
1. a kind of heat exchanger characterized by comprising
Body apparatus is connected to the medical liquid discharge port of substrate board treatment, has ontology outer cover, which forms heat exchange
Space, for carrying out heat exchange to the medical fluid being discharged from the medical liquid discharge port；
Fixed device, the front end including being set to fixation member inside the ontology outer cover, the sealing fixation member front end
Plate and the end plate for sealing the fixation member rear end；
At least one cooling tube is wrapped in the lateral surface of the fixation member in form of a coil, has along the fixation member
Radial direction stacking first layer cooling tube and second layer cooling tube, so that the medical fluid is carried out hot friendship by the flowing of coolant liquid
It changes；With
Gap retaining member is arranged between the first layer cooling tube and the second layer cooling tube, for keeping described the
Interval between one layer of cooling tube and second layer cooling tube.
2. heat exchanger according to claim 1, which is characterized in that the body apparatus further includes the first lid, is used for
The front end for sealing the ontology outer cover, is connected to the medical liquid discharge port of the substrate board treatment, and is provided with medical fluid and flows into end
Mouthful, which is used to the medical fluid being flowed into the heat exchange space.
3. heat exchanger according to claim 2, which is characterized in that further include the first cooling tube setting mouth, be arranged in institute
The front end for stating ontology outer cover is set as being connected to the inside of the ontology outer cover, so that one end of the cooling tube is run through simultaneously
It is exposed to outside.
4. heat exchanger according to claim 2, which is characterized in that further include the first flowing controling part, be arranged in institute
The inside of ontology outer cover is stated, and is arranged between first lid and the front end-plate, for the medical fluid of inflow to be distributed to
The heat exchange space.
5. heat exchanger according to claim 4, which is characterized in that
First flowing controling part is formed as hollow cylinder shape,
Multiple first movement holes are formed in the outer wall of first flowing controling part, end is flowed by the medical fluid for making
The medical fluid that mouth is flowed into inside can be moved to heat exchange space side.
6. heat exchanger according to claim 1, which is characterized in that the front end-plate includes:
First outer side frame body；
First interior plate has side frame body smaller diameter outer than described first, is set as the half of the described first outer side frame body
Diameter direction, it is separated by a distance inwardly and combined with the front end of the fixation member；
Multiple first connection frameworks, one end are connected to the first outer side frame body, and the other end is connected to the first interior plate, for connecting
State the first outer side frame body and first interior plate；With
First through hole is formed among two adjacent first connection frameworks in the multiple first connection framework, to pass through
The medical fluid.
7. heat exchanger according to claim 6, which is characterized in that the front end-plate further includes first movement concave part,
For after the cooling tube forms the first layer cooling tube, the mobile cooling tube to be cooling to form the second layer
Pipe.
8. heat exchanger according to claim 1, it is characterised in that the gap retaining member is created as netted net
Cover.
9. the manufacturing method for heat exchanger described in manufacturing claims 1 characterized by comprising
First combines step, and medical fluid is flowed into port and the first flowing controling part is integrated to the first lid；
Second combines step, will flow into first lid of port and first flowing controling part in conjunction with the medical fluid
It is integrated to the front end of the ontology outer cover；
Cooling tube setting steps, the step following processes repeatedly: the front end-plate and the end plate in conjunction with it is described solid
Determine to form the first layer cooling tube around component, after gap retaining member is set around the first layer cooling tube,
The second layer cooling tube is formed around the gap retaining member；With
The fixation member that the cooling tube has been arranged is inserted into the inside of the ontology outer cover by fixation member setting steps
It is configured.
10. a kind of heat exchanger module characterized by comprising
Heat exchanger described in claim 1；
The position adjacent with the heat exchanger is arranged in additional heat exchanger；
First flange is combined with the side of the heat exchanger body outer cover；With
Second flange, side are combined with the side of the second ontology outer cover of the additional heat exchanger, the other side and described the
One flange combines,
Wherein, the heat exchange space of the heat exchanger and the second heat exchange space of the additional heat exchanger are interconnected.
11. heat exchanger module according to claim 10, which is characterized in that further include seal member, be arranged described
The part that first flange and the second flange combine is combined for preventing from the first flange and the second flange
Part flow out the medical fluid.
12. heat exchanger module according to claim 10, which is characterized in that further include；
Mouth is arranged in first cooling tube, is set as the front end of the ontology outer cover through the heat exchanger, for by the cooling
One end of pipe is run through and is exposed to outside；
Mouth is arranged in second cooling tube, is set as the rear end of the ontology outer cover through the heat exchanger, for by the cooling
The other end of pipe runs through and is exposed to outside；
Mouth is arranged in third cooling tube, is set as the front end of the ontology outer cover through the additional heat exchanger, for by described
One end of second cooling tube is run through and is exposed to outside；With
Mouth is arranged in 4th cooling tube, is set as the rear end of the ontology outer cover through the additional heat exchanger, for by described
The other end of second cooling tube runs through and is exposed to outside,
Wherein, the ontology outer cover of the ontology outer cover of the heat exchanger and the additional heat exchanger is described cold with array arrangement
But pipe and second cooling tube are to be arranged in juxtaposition.
13. the manufacturing method for heat exchanger module described in manufacturing claims 10 characterized by comprising
The first flange, is integrated to the rear end of the ontology outer cover of the heat exchanger by the first module combination step；
Second module combination step, before the second flange to be integrated to the second ontology outer cover of the additional heat exchanger
End；With
Third module combination step, is integrated to the first flange for the second flange, connects the heat exchanger and described
Additional heat exchanger.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170104717A KR102010330B1 (en) | 2017-08-18 | 2017-08-18 | Heat exchanger and heat exchanger module and manufacturing method of heat exchanger |
| KR10-2017-0104717 | 2017-08-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109405593A true CN109405593A (en) | 2019-03-01 |
| CN109405593B CN109405593B (en) | 2020-07-07 |
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ID=65464334
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810941201.XA Active CN109405593B (en) | 2017-08-18 | 2018-08-17 | Heat exchanger and manufacturing method thereof, and heat exchange module and manufacturing method thereof |
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| Country | Link |
|---|---|
| KR (1) | KR102010330B1 (en) |
| CN (1) | CN109405593B (en) |
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| JPH1193669A (en) * | 1997-09-19 | 1999-04-06 | Showa Alum Corp | Heat exchanger |
| CN2365633Y (en) * | 1999-05-13 | 2000-02-23 | 巨桐林 | Efficient shell type heat exchanger |
| CN2539122Y (en) * | 2002-04-26 | 2003-03-05 | 夏忠华 | Closed cooler |
| KR20040082457A (en) * | 2003-03-19 | 2004-09-30 | 한라공조주식회사 | Heat exchanging accumulator |
| KR20050004498A (en) * | 2003-07-02 | 2005-01-12 | 학교법인 인제학원 | Shell and Tube Type Heat Exchanger |
| CN102654365A (en) * | 2012-04-20 | 2012-09-05 | 常州水鑫机械设备有限公司 | Cooler |
| CN103517775A (en) * | 2011-05-10 | 2014-01-15 | 阿尔弗雷德·凯驰两合公司 | Heat exchanger and method for producing same |
| KR20170006156A (en) * | 2015-07-07 | 2017-01-17 | 주식회사 두발 | Boiler having parallel coupled multi heat exchanger |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101725717B1 (en) | 2016-02-15 | 2017-04-12 | 전북대학교산학협력단 | multi-tube exchanger with double shell |
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2017
- 2017-08-18 KR KR1020170104717A patent/KR102010330B1/en active IP Right Grant
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1193669A (en) * | 1997-09-19 | 1999-04-06 | Showa Alum Corp | Heat exchanger |
| CN2365633Y (en) * | 1999-05-13 | 2000-02-23 | 巨桐林 | Efficient shell type heat exchanger |
| CN2539122Y (en) * | 2002-04-26 | 2003-03-05 | 夏忠华 | Closed cooler |
| KR20040082457A (en) * | 2003-03-19 | 2004-09-30 | 한라공조주식회사 | Heat exchanging accumulator |
| KR20050004498A (en) * | 2003-07-02 | 2005-01-12 | 학교법인 인제학원 | Shell and Tube Type Heat Exchanger |
| CN103517775A (en) * | 2011-05-10 | 2014-01-15 | 阿尔弗雷德·凯驰两合公司 | Heat exchanger and method for producing same |
| CN102654365A (en) * | 2012-04-20 | 2012-09-05 | 常州水鑫机械设备有限公司 | Cooler |
| KR20170006156A (en) * | 2015-07-07 | 2017-01-17 | 주식회사 두발 | Boiler having parallel coupled multi heat exchanger |
Also Published As
| Publication number | Publication date |
|---|---|
| KR102010330B1 (en) | 2019-08-14 |
| KR20190020247A (en) | 2019-02-28 |
| CN109405593B (en) | 2020-07-07 |
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