CN109387794A - Extension fluorescent tube auxiliary detection device and its detection method - Google Patents
Extension fluorescent tube auxiliary detection device and its detection method Download PDFInfo
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- CN109387794A CN109387794A CN201811169153.3A CN201811169153A CN109387794A CN 109387794 A CN109387794 A CN 109387794A CN 201811169153 A CN201811169153 A CN 201811169153A CN 109387794 A CN109387794 A CN 109387794A
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- fluorescent tube
- control unit
- heating rate
- extension
- auxiliary
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/44—Testing lamps
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention relates to a kind of extension fluorescent tube auxiliary detection device and its detection methods, for executing detection, including control unit, the opening and closing of each fluorescent tube of independent control to several fluorescent tubes being set in an epitaxy machine platform；Multiple temperature measuring units, each temperature measuring unit are set to each fluorescent tube, and temperature measuring unit, which detects temperature of its corresponding fluorescent tube in a setting time and will test result, is sent to control unit；Control unit obtains the heating rate of fluorescent tube according to testing result, to judge whether fluorescent tube needs replacing.The present invention can make operator far from fluorescent tube region, and fluorescent tube detection can be completed by the single digital manipulation that executes.
Description
Technical field
The present invention relates to field of semiconductor manufacture more particularly to a kind of extension fluorescent tube auxiliary detection device and its detection sides
Method.
Background technique
In semiconductor fabrication process, epitaxy machine platform is chiefly used in forming epitaxial film on wafer, i.e., in single crystallization direction
On wafer on, then grow the film of directional arrangement.Need to heat it after the usual normal production maintenance of epitaxy machine platform fluorescent tube into
Row detection, traditional fluorescent tube detection operation need two people to complete, and a people operates the selection of fluorescent tube control panel in front of epitaxy machine platform
The light tube group that need to be tested, another people operate fluorescent tube testing button in the technique mould group at epitaxy machine platform rear to light test fluorescent tube
Group checks whether fluorescent tube emits light and heat by manually visualizing later, then replaces second group of light tube group and tested, and so on, total
It need to check more than ten groups of fluorescent tubes.
There are the following problems for traditional fluorescent tube detection: 1, there are security risks, are manually entered chamber observation, are easy because of fluorescent tube
Explosion sputtering skin occurs and leads to personal injury；Fluorescent tube is as will lead to the quick-fried sudden strain of a muscle of fluorescent tube when short circuit or power exception occurs, manually
Visually it may cause dysopia, it is serious it is also possible to will cause of short duration or permanent loss vision；2, can not a people complete, need
Two people operate simultaneously；3, entirely with visual judgement, judgment method leans on the subjective vision of operator completely for nilization display；4, it operates
Cumbersome, working efficiency is low.
Summary of the invention
The purpose of the present invention is to provide a kind of extension fluorescent tube auxiliary detection device and its detection methods, can make operator
Fluorescent tube detection can be completed far from fluorescent tube region, and by the single digital manipulation that executes in member.
In order to achieve the above object, the present invention provides a kind of extension fluorescent tube auxiliary detection device, for being set to one
Several fluorescent tubes in epitaxy machine platform execute detection, including control unit, including main control unit, and the main control unit is set to
On the outside of the epitaxy machine platform, described control unit is electrically connected the fluorescent tube, and the unlatching of each fluorescent tube of independent control and
It closes；Multiple temperature measuring units, each temperature measuring unit are set to each fluorescent tube, and it is corresponding that the temperature measuring unit detects its
Temperature of the fluorescent tube in a setting time simultaneously will test result and be sent to described control unit；Wherein, described control unit
The heating rate of the fluorescent tube is obtained according to the testing result, to judge whether the fluorescent tube needs replacing.
Optionally, the heating rate is in a setting range, then the fluorescent tube does not need to replace, conversely, the heating
Rate exceeds the setting range, then the fluorescent tube needs replacing.
Optionally, described control unit further includes Auxiliary Control Element, and the Auxiliary Control Element is used for according to the inspection
It surveys result and obtains the heating rate of the fluorescent tube, and judge whether the fluorescent tube needs replacing.
Optionally, the Auxiliary Control Element has display panel, to show the temperature and heating rate of the fluorescent tube.
Optionally, the main control unit includes several selection keys and a test switch, is selected by the selection key
In the fluorescent tube in need of test, the lamp that the selection key chooses is opened or closed by the test
Pipe.
Optionally, the Auxiliary Control Element is integrated in the main control unit；Alternatively, the main control unit and institute
Auxiliary Control Element is stated to be detachably connected.
Optionally, the temperature measuring unit is temperature transducer.
The present invention also provides a kind of extension fluorescent tube aided detection methods, and described method includes following steps:
Extension fluorescent tube auxiliary detection device as described above is provided；
Control unit selects and opens the fluorescent tube for needing to detect；
Temperature measuring unit detects the temperature of the fluorescent tube in a setting time and will test result and be sent to described control unit；
Described control unit obtains the heating rate of the fluorescent tube according to the testing result, and passes through the heating rate
Judge whether the fluorescent tube needs replacing.
Optionally, judge that the step of whether fluorescent tube needs replacing is by the heating rate, the heating rate
In a setting range, then the fluorescent tube does not need to replace, conversely, the heating rate exceeds the setting range, then it is described
Fluorescent tube needs replacing.
Optionally, the step of determining the setting range is that the fluorescent tube of multiple normal uses is opened the setting time
And multiple heating rates are obtained, the setting range is obtained by the multiple heating rate.
Optionally, the heating rate be the setting time in the fluorescent tube temperature maximum value and minimum value between
Difference and the setting time ratio.
The present invention will test result and be sent to described control unit by connecting temperature measuring unit on the fluorescent tube, by
Described control unit obtains the heating rate of the fluorescent tube according to testing result, to judge whether the fluorescent tube needs more
It changes, realizes the working condition that digitlization judges fluorescent tube；Further, by by one union of fluorescent tube selection function and test function
At in described control unit, realize one man operation can be completed fluorescent tube detection.
Detailed description of the invention
Fig. 1 a is fluorescent tube arrangement schematic diagram provided by the invention；
Fig. 1 b is each temperature measuring unit connection schematic diagram of Auxiliary Control Element provided by the invention and fluorescent tube；
Fig. 2 is main control unit schematic diagram on epitaxy machine platform provided by the invention.
In figure: 1- wafer；2- fluorescent tube；3- main control unit；31- selection key；32- test switch；The viewing area 33-；4-
Auxiliary Control Element；41- display panel；5- temperature measuring unit.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description,
Advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and using non-accurate
Ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
The present invention provides a kind of extension fluorescent tube auxiliary detection devices, for several lamps being set in an epitaxy machine platform
Pipe executes detection, including control unit, including main control unit 3, and the main control unit 3 is set to outside the epitaxy machine platform
Side, described control unit are electrically connected the fluorescent tube 2, and the opening and closing of each fluorescent tube 2 of independent control；Multiple thermometrics
Unit 5, each temperature measuring unit 5 are set to each fluorescent tube 2, and the temperature measuring unit 5 detects its corresponding described fluorescent tube 2
Temperature in a setting time simultaneously will test result and be sent to described control unit；Wherein, described control unit is according to
Testing result obtains the heating rate of the fluorescent tube 2, to judge whether the fluorescent tube 2 needs replacing.
Further, the heating rate is in a setting range, then the fluorescent tube 2 does not need to replace, conversely, the liter
Warm rate exceeds the setting range, then the fluorescent tube 2 needs replacing.
Further, described control unit further includes Auxiliary Control Element 4, and the Auxiliary Control Element 4 is used for according to institute
It states testing result and obtains the heating rate of the fluorescent tube 2, and judge whether the fluorescent tube 2 needs replacing.
Specifically, being provided with the growth chamber for growing epitaxial film for wafer 1 in the board of outer as shown in Fig. 1 a and Fig. 1 b
Room is provided with a pedestal in growth chamber, and wafer 1 is placed on pedestal, and the over and under outside the growth chamber is all provided with
There is fluorescent tube 2, the fluorescent tube 2 of over and under transversely and is longitudinally arranged respectively, in addition, also setting up above 1 center of the wafer
There is the fluorescent tube of several point light sources, these fluorescent tubes 2 are used to generate heating to wafer 1 when 1 surface of wafer grows epitaxial film
Effect.The fluorescent tube 2 is divided into several groups, in the present embodiment, transversely with longitudinal respectively 11 fluorescent tubes 2 of arrangement, 1 top cloth of wafer
4 fluorescent tubes 2 are set, amount to 26 fluorescent tubes 2, and be divided into 16 groups, the number of every group of fluorescent tube 2 is set in a control unit in advance.
It is respectively connected with a temperature measuring unit 5 on several described fluorescent tubes 2, is capable of the temperature of fluorescent tube 2 described in real-time detection, and will test knot
Fruit is sent to the Auxiliary Control Element 4.The temperature measuring unit 5 can be temperature transducer, need to have high sensitivity, so as to energy
Enough test results for accurately reflecting the fluorescent tube 2.The Auxiliary Control Element can be PLC or other control system.
Further, display panel 41, and 4 basis of the Auxiliary Control Element are provided on the Auxiliary Control Element 4
The testing result calculates the heating rate of the fluorescent tube 2, and show on the display panel 41 fluorescent tube 2 temperature,
The testing time of setting and heating rate, specifically, the Auxiliary Control Element 4 by the testing result of the temperature measuring unit 5 into
Row calculates, and obtains the heating rate of the fluorescent tube 2 within the set time, and show on the display panel 41, convenient for operation
Person judges according to the numerical value of the heating rate.Refer in addition, being provided with access instruction in the Auxiliary Control Element 4 and modifying
It enables, makes it have the function of consulting data and modify data, operator can also consult and modify on the Auxiliary Control Element 4
Data.
As shown in Fig. 2, the main control unit 3 is set to the outside of the epitaxy machine platform, and the main control unit 3 wraps
Several selection keys 31 and a test switch 32 are included, the lamp in need of test can be selected by the selection key 31
Pipe 2 opens or closes the fluorescent tube 2 that the selection key is chosen by testing switch 32.Specifically, the main control unit
Multiple subregions are provided on 3, several selection keys 31 correspond to the respective packets of fluorescent tube 2, operate any one key, i.e., controllable
The fluorescent tube 2 of the corresponding grouping of selection is tested.If operating the key in 1st area in such as figure, corresponding 1 group of fluorescent tube 2 is tested.
Further, the Auxiliary Control Element 4 is integrated in the main control unit 3；Alternatively, the main control unit
3 are detachably connected with the Auxiliary Control Element 4.
Embodiment 1, the Auxiliary Control Element 4 is independently arranged, and the epitaxy machine platform is set in the form of moveable
Outside, it can be specifically portable hand-held formula, operate and check testing result convenient for operator.Institute on the main control unit 3
The test switch 32 of setting can control the open and close of test fluorescent tube 2, i.e., traditional is set to epitaxy machine platform rear work
Test switch in skill mould group moves on the main control unit 3 in front of epitaxy machine platform.In this way, operator can pass through the master
The fluorescent tube 2 of the selection test of selection key 31 in control unit 3, the fluorescent tube 2 of test is opened or closed by testing switch 32, then
By consulting the heating rate value of the fluorescent tube 2 shown on the Auxiliary Control Element 4, that is, it can determine whether the state of the fluorescent tube 2, in fact
Show one and operates the test that all fluorescent tubes 2 can be completed on the main control unit 3 and the Auxiliary Control Element 4.
Embodiment 2, the Auxiliary Control Element 4 are set to outside epitaxy machine platform in the form of moveable, specifically can be
Portable hand-held formula.Further, selection instruction and test instruction are provided in the Auxiliary Control Element 4, to open or close
The corresponding fluorescent tube 2.It is provided with option program in the Auxiliary Control Element 4, to select the fluorescent tube 2 of test, the selection
Program realizes the function of selection key 31 on the main control unit 3, it is only necessary to execute selection on the Auxiliary Control Element 4
Instruction is operated instead of the selection key 31 executed on the main control unit 3.It is provided in the Auxiliary Control Element 4
Test program, to control the open and close of test fluorescent tube 2, it is only necessary to test instruction is executed on the auxiliary execution unit, i.e.,
Instead of the operation of the test switch 32.In this way, operator only need to complete all behaviour on the Auxiliary Control Element 4
Make, without executing operation on main control unit 3 again.The selection is executed by operating on the Auxiliary Control Element 4
Instruction and test instruction, and the heating rate value of the fluorescent tube 2 shown on the Auxiliary Control Element 4 is consulted, to judge the lamp
The state of pipe 2, realizing one operation on the auxiliary execution unit 4 can be completed the test of all fluorescent tubes 2.
Embodiment 3, the Auxiliary Control Element 4 are integrated in the main control unit 3, and in the master control unit 3
On be provided with test switch 32, with control test fluorescent tube 2 open and close.A viewing area is set on the main control unit 3
33, the display panel 41 of the Auxiliary Control Element 4 is arranged, to make the test result of the Auxiliary Control Element 4 can
Directly to be read from the main control unit 3.In this way, can be with by operating selection key 31 on the main control unit 3
The fluorescent tube 2 for selecting test can open or close test fluorescent tube 2 by operation test switch 32, by consulting the main control
The heating rate value of fluorescent tube 2 shown by the viewing area 33 of unit 3, to judge the state of the fluorescent tube 2, realize one
The test of all fluorescent tubes 2 can be completed in operation on the main control unit 3.
The present invention also provides a kind of extension fluorescent tube aided detection methods, and described method includes following steps:
Extension fluorescent tube auxiliary detection device as described above is provided；
Control unit selects and opens the fluorescent tube for needing to detect；
Temperature measuring unit detects the temperature of the fluorescent tube in a setting time and will test result and be sent to described control unit；
Described control unit obtains the heating rate of the fluorescent tube according to the testing result, and passes through the heating rate
Judge whether the fluorescent tube needs replacing.
Specifically, operator need to only operate selection on the main control unit 3 and press in embodiment 1 and embodiment 3
Key 31 and test switch 32 may be selected to need the fluorescent tube 2 detected and be lighted.In example 2, operator only need to be
Selection instruction and test instruction are operated on the Auxiliary Control Element 4, that is, may be selected to need the fluorescent tube 2 detected and are lighted.
Then, the heating rate of the fluorescent tube 2 is consulted from the Auxiliary Control Element, and the lamp is judged by the heating rate
Whether pipe 2 needs replacing.
Further, judge that the step of whether fluorescent tube needs replacing is by the heating rate, the heating speed
Rate is in a setting range, then the fluorescent tube does not need to replace, conversely, the heating rate exceeds the setting range, then institute
Fluorescent tube is stated to need replacing.If the heating rate is lower than the minimum value of the setting range, show 2 aging of fluorescent tube；If
The heating rate is higher than the maximum value of the setting range, then shows 2 short circuit of fluorescent tube or distortion.
Wherein it is determined that the step of setting range is, the fluorescent tube of multiple normal uses is opened into the setting time simultaneously
Multiple heating rates are obtained, the setting range is obtained by the multiple heating rate.
Specifically, detection operation is executed to the fluorescent tube of dozens of normal use, by Auxiliary Control Element 4 according to received
Testing result calculate heating rate of each fluorescent tube in the setting time, and its average value is calculated, in this, as rear
Reference value when continuous test fluorescent tube.Wherein, the heating rate is the maximum value of the temperature of the fluorescent tube in the setting time
The ratio between difference and the setting between minimum value, the heating rate performance is the test lamp in setting time
The temperature change of pipe, when executing fluorescent tube detection, normal fluorescent tube 2 can be with the 12% of full power acutely heating, i.e. the fluorescent tube 2 is normal
Running.It is realized by Auxiliary Control Element 4 and collects data function, the heating rate after collecting the new fluorescent tube test of dozens of is averaged
Value shows 2 aging of fluorescent tube if the heating rate is lower than setting ratio compared with the reference value；If the heating
Rate is higher than the setting ratio compared with the reference value, then shows 2 short circuit of fluorescent tube or distortion.When it is implemented, institute
State setting ratio value can be according to actual conditions depending on, such as be set as 10%.
To sum up, in a kind of extension fluorescent tube auxiliary detection device provided in an embodiment of the present invention and its detection method, in institute
It states and connects temperature measuring unit on fluorescent tube, and test result is sent to described control unit, the lamp is calculated by described control unit
The heating rate of pipe realizes the working condition that digitlization judges fluorescent tube to judge whether the fluorescent tube needs replacing；Into one
Step, by the way that fluorescent tube selection function and test function to be integrated in described control unit together, realize one man operation
Complete the detection of fluorescent tube.Also, operator is conducive to improve operational safety far from fluorescent tube region；And digitized operation
It improves work efficiency, is continually and steadily run for equipment and create good condition.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (11)
1. a kind of extension fluorescent tube auxiliary detection device, for executing detection to several fluorescent tubes being set in an epitaxy machine platform,
It is characterized in that, comprising:
Control unit, including main control unit, the main control unit are set on the outside of the epitaxy machine platform,
Described control unit is electrically connected the fluorescent tube, and the opening and closing of each fluorescent tube of independent control；
Multiple temperature measuring units, each temperature measuring unit are set to each fluorescent tube, and it is corresponding that the temperature measuring unit detects its
Temperature of the fluorescent tube in a setting time simultaneously will test result and be sent to described control unit；
Wherein, described control unit obtains the heating rate of the fluorescent tube according to the testing result, to judge the fluorescent tube
Whether need replacing.
2. extension fluorescent tube auxiliary detection device as described in claim 1, which is characterized in that the heating rate sets model one
In enclosing, then the fluorescent tube does not need to replace, conversely, the heating rate exceeds the setting range, then the fluorescent tube needs more
It changes.
3. extension fluorescent tube auxiliary detection device as described in claim 1, which is characterized in that described control unit further includes auxiliary
Control unit, the Auxiliary Control Element is used to obtain the heating rate of the fluorescent tube according to the testing result, and judges
Whether the fluorescent tube needs replacing.
4. extension fluorescent tube auxiliary detection device as claimed in claim 3, which is characterized in that the Auxiliary Control Element has aobvious
Show panel, to show the temperature and heating rate of the fluorescent tube.
5. extension fluorescent tube auxiliary detection device as described in claim 1, which is characterized in that the main control unit includes several
Selection key and a test switch, choose the fluorescent tube in need of test by the selection key, pass through the test
Open or close the fluorescent tube that the selection key is chosen.
6. extension fluorescent tube auxiliary detection device as claimed in claim 3, which is characterized in that the Auxiliary Control Element is integrated in
In the main control unit；Alternatively, the main control unit is detachably connected with the Auxiliary Control Element.
7. extension fluorescent tube auxiliary detection device as described in claim 1, which is characterized in that the temperature measuring unit is temperature transducers
Device.
8. a kind of extension fluorescent tube aided detection method, which is characterized in that described method includes following steps:
Such as extension fluorescent tube auxiliary detection device of any of claims 1-7 is provided；
Control unit selects and opens the fluorescent tube for needing to detect；
Temperature measuring unit detects the temperature of the fluorescent tube in a setting time and will test result and be sent to described control unit；
Described control unit obtains the heating rate of the fluorescent tube according to the testing result, and is judged by the heating rate
Whether the fluorescent tube needs replacing.
9. extension fluorescent tube aided detection method as claimed in claim 8, which is characterized in that judge institute by the heating rate
State that the step of whether fluorescent tube needs replacing is, the heating rate is in a setting range, then the fluorescent tube does not need to replace, instead
It, the heating rate exceeds the setting range, then the fluorescent tube needs replacing.
10. extension fluorescent tube aided detection method as claimed in claim 9, which is characterized in that determine the step of the setting range
Suddenly it is, the fluorescent tube of multiple normal uses is opened into the setting time and obtains multiple heating rates, passes through the multiple heating
Rate obtains the setting range.
11. extension fluorescent tube aided detection method as claimed in claim 10, which is characterized in that the heating rate is described sets
Fix time the interior fluorescent tube temperature maximum value and minimum value between difference and the setting time ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811169153.3A CN109387794A (en) | 2018-10-08 | 2018-10-08 | Extension fluorescent tube auxiliary detection device and its detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811169153.3A CN109387794A (en) | 2018-10-08 | 2018-10-08 | Extension fluorescent tube auxiliary detection device and its detection method |
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| Publication Number | Publication Date |
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| CN109387794A true CN109387794A (en) | 2019-02-26 |
Family
ID=65419267
Family Applications (1)
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| CN201811169153.3A Pending CN109387794A (en) | 2018-10-08 | 2018-10-08 | Extension fluorescent tube auxiliary detection device and its detection method |
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Application publication date: 20190226 |