CN109378391A - A kind of solar battery mask plate for spin coating proceeding - Google Patents
A kind of solar battery mask plate for spin coating proceeding Download PDFInfo
- Publication number
- CN109378391A CN109378391A CN201811469584.1A CN201811469584A CN109378391A CN 109378391 A CN109378391 A CN 109378391A CN 201811469584 A CN201811469584 A CN 201811469584A CN 109378391 A CN109378391 A CN 109378391A
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- China
- Prior art keywords
- solar battery
- grid
- plate
- spin coating
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004528 spin coating Methods 0.000 title claims abstract description 30
- 230000002093 peripheral effect Effects 0.000 claims abstract description 33
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 238000000576 coating method Methods 0.000 claims abstract description 23
- 238000002360 preparation method Methods 0.000 claims abstract description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000003466 welding Methods 0.000 claims description 5
- 210000000988 bone and bone Anatomy 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 6
- 238000009826 distribution Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 description 14
- 239000011521 glass Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
The present invention provides a kind of solar battery mask plates for spin coating proceeding, including peripheral frame skeleton and the electrode domain thin plate being fixed on peripheral frame skeleton；Peripheral frame skeleton is equipped with several grid, each quadrille four edges；Several grid also are provided on electrode domain thin plate；The grid of electrode domain thin plate and the grid of peripheral frame skeleton are correspondingly arranged；Coating film area is equipped on each grid of electrode domain thin plate, coating film area is made of several ring structures and rectangular configuration.The invention solar battery mask plate uses the coating film area of several ring structures and rectangular configuration, the specific region with same battery structure distribution can be selected with frame, it is possible thereby to determine the optimal region of battery efficiency, and then the region specific structural features are studied, adjusts technological parameter；Can also a plurality of ring structure cell area in this way, judge the uniformity of technique preparation.
Description
Technical field
The invention belongs to mask plate technical field, in particular to a kind of mask that solar battery is prepared for spin coating proceeding
Plate.
Background technique
Perovskite solar battery is very fast as a kind of novel solar battery development that photovoltaic industry occurs, at present
There are the projects such as associated subject study, such as high efficiency, stability, large area direction in domestic many colleges and universities.Perovskite
Solar battery since 2009 discovery since its photoelectric conversion efficiency from 3.8% promoted by now 22% or more,
Improved efficiency speed is that various solar batteries are promoted fastest in the market, and its photoelectric conversion efficiency has been approached or surpasses
Cross conventional crystalline silicon, copper indium gallium selenide and cadmium telluride cells on the market.Another big advantage of perovskite solar battery is exactly to make
Process flow, which is compared, greatly shortens simplification with conventional crystalline silicon battery, and cost of manufacture is also greatly reduced.Perovskite solar-electricity
Pond is usually made of the material film of multilayer different function, and the preparation of film can use solwution method, i.e. spin coating proceeding system
It is standby.Metal material as electrode generally uses the techniques such as vacuum evaporation, magnetron sputtering to prepare.
In general, metal electrode (such as gold, silver, aluminium as electrode etc.) generallys use vapour deposition process plated film.Gas
Required electrode pattern is generally deposited in phase sedimentation using the mask plate for designing special pattern, and mask plate is by certain amount of phase
It is formed with cage, each grid accommodates, fixes glass substrate；Coating film area in grid is the figure of electrode evaporation, with one
Determine the rectangle that mode arranges to constitute.The corresponding electrode of each rectangle, electrode have a differentiation of positive and negative electrode, one of electrode with
Other polarity of electrode are opposite.Other parts are masked plate and block, no plating film pattern.The cage of mask plate and glass substrate
Size matches, and generally slightly expands compared with the size of glass substrate, with allow glass substrate cutting, hand break during caused by
The presence of size slight change phenomenon.
Perovskite solar battery in the production process, the functions such as electron transfer layer, perovskite active layer, hole transmission layer
Thin layer mostly uses spin coating proceeding to be prepared.And spin coating proceeding is weaker in the control of the thickness uniformity of thin layer, preparation
Thickness of thin layer is in by center radial change of gradient around.In the prior art, as shown in fig. 6, using rectangular graph mask plate
Electrode battery is prepared, is unfavorable for distinguishing the corresponding battery efficiency in different cell thickness regions, simultaneously in final test battery efficiency
Electrical property difference caused by this difference in thickness cannot be embodied；As shown in fig. 7, the grid size of mask plate and the size of substrate
Match, substrate is possible to be stuck in inside grid when being put into taking-up, is not easy to the adjustment and movement of glass substrate.
Summary of the invention
The purpose of the present invention is to provide a kind of solar battery mask plates suitable for spin coating proceeding, to solve above-mentioned skill
Art problem.The annular slab graph structure of mask plate of the invention can select the specific region with same battery structure distribution with frame,
It is possible thereby to determine the optimal region of battery efficiency.
To achieve the goals above, the technical solution adopted by the present invention is that:
A kind of solar battery mask plate for spin coating proceeding, including peripheral frame skeleton and the electricity being fixed on peripheral frame skeleton
Pole domain thin plate；Peripheral frame skeleton is equipped with several grid, each quadrille four edges；It also is provided on electrode domain thin plate several
A grid；The grid of electrode domain thin plate and the grid of peripheral frame skeleton are correspondingly arranged；On each grid of electrode domain thin plate
Equipped with coating film area, coating film area is made of several ring structures and rectangular configuration.
Further, at least one vertex is equipped with recess in each grid of peripheral frame skeleton.
Further, the circular recess that recess is 3/4ths.
Further, peripheral frame skeleton includes outline border and several demarcation plates in outline border, between the grid of peripheral frame skeleton
Pass through divides.
Further, with peripheral frame skeleton using being welded and fixed, welding junction polishes electrode domain thin plate.
Further, peripheral frame skeleton is made of steel plate, steel plate thickness 1.25mm.
Further, electrode domain thin plate is made of steel plate, steel plate thickness 0.2mm.
Further, mask plate is separated into 8 × 8 evenly arranged 64 square lattices by outline border and demarcation plate,
2.5mm is spaced between the grid of peripheral frame skeleton.
Further, coating film area is hollowed out area in electrode domain thin plate, and other parts are masked plate and block.
Further, the solar battery mask plate for spin coating proceeding preparation method the following steps are included:
1) production obtains the peripheral frame skeleton of solar battery mask plate；
2) production obtains the electrode domain thin plate equipped with coating film area；
3) the electrode domain thin plate in step 2) is fixed on the peripheral frame skeleton in step 1) using welding manner, is obtained
Solar battery mask plate for spin coating proceeding.
Compared with prior art, the beneficial effects of the present invention are as follows:
A kind of solar battery mask plate for spin coating proceeding, using the plated film area for having several annulars and rectangular configuration
Domain can select the specific region of the distribution with same battery structure with frame, it is possible thereby to determine the optimal region of battery efficiency,
And then study the region specific structural features, adjust technological parameter, it can also be judged by several ring structure cell areas
Spin coating proceeding prepares the uniformity of solar battery.Recess is arranged using grid vertex, the tools such as tweezers can be accommodated, is convenient for glass
Being put into of glass substrate is taken out and the adjustment of the position of glass substrate.
Detailed description of the invention
Fig. 1 is one of the mask plate of the present invention example schematic with 8 × 8 totally 64 grid peripheral frame skeletons.
Fig. 2 is one of the mask plate of the present invention example schematic with 8 × 8 totally 64 electrode domain thin plates.
Fig. 3 is the electrode domain thin plate partial schematic diagram of mask plate of the present invention.
Fig. 4 is the peripheral frame skeleton partial schematic diagram of mask plate of the present invention.
Fig. 5 is the electrode domain thin plate coating film area structural schematic diagram of mask plate of the present invention.
Fig. 6 is the plated film graphic structure schematic diagram of traditional mask board.
Fig. 7 is the coating film area structural schematic diagram of traditional mask board.
Specific embodiment
The embodiment that the present invention will be described in detail with reference to the accompanying drawings and examples.
As shown in Fig. 1,4, the present invention provides a kind of solar battery mask plate for spin coating proceeding, including peripheral frame skeleton
1；Peripheral frame skeleton 1 includes outline border 11 and demarcation plate 12；Mask plate is separated into several grid 3 by outline border 11 and demarcation plate 12, is used for
Fixed glass substrate；Each grid 3 has four edges；The square lattice plays a part of to accommodate, fixes glass substrate；Each grid
3 vertex are equipped with 3/4ths cylindrical recess 31, can accommodate the tools such as tweezers, convenient for being put into of glass substrate, take out and
Position adjustment.
As shown in Fig. 2,3,5, a kind of solar battery mask plate for spin coating proceeding further includes electrode domain thin plate 2,
Several grid also are provided on electrode domain thin plate 2；The grid of electrode domain thin plate 2 and the grid 3 one of peripheral frame skeleton 1 are a pair of
It answers；Each grid of electrode domain thin plate 2 is equipped with coating film area 21；Coating film area 21 is by ring structure 221 and rectangular configuration
222 are constituted；On electrode domain thin plate 2 in addition to 21 region of coating film area, other parts are by mask plate shielding.
It as shown in Figure 6,7, is solar battery mask plate traditional in the prior art, traditional mask plate peripheral frame skeleton
The square lattice of formation is not provided with notch, is not easy to the position adjustment and movement of glass substrate；Traditional electrode domain is thin
Coating film area on plate is rectangular configuration；The coating film area of rectangular configuration is unfavorable for distinguishing different cell thickness regions corresponding
Battery efficiency.
A kind of production method of the solar battery mask plate for spin coating proceeding of the present invention, comprising the following steps:
1) production obtains the peripheral frame skeleton 1 of solar battery mask plate；
2) production obtains the electrode domain thin plate 2 equipped with coating film area 21；
3) the electrode domain thin plate 2 in step 2) is fixed on the peripheral frame skeleton 1 in step 1) using welding manner, is obtained
To the solar energy mask plate for spin coating proceeding.
Embodiment
A kind of solar battery mask plate for spin coating proceeding, outline border skeleton 1 are constituted using steel plate, with a thickness of
1.25mm, identical as experimental glass substrate thickness, mask plate is separated into 8 × 8 by the outline border 11 and demarcation plate 12 of outline border skeleton 1
Totally 64 square lattices 3, between grid 3 between be divided into 2.5mm.The grid of electrode domain thin plate 2 and the grid 3 one of outline border skeleton 1
One is correspondingly arranged, and is welded and fixed with peripheral frame skeleton 1；Electrode domain thin plate 2 is constituted using steel plate, with a thickness of 0.2mm；Electrode version
Coating film area 21 is set on figure thin plate 2, and coating film area is made of ring structure 221 and rectangular configuration 222；Electrode domain thin plate 2
On in addition to 21 region of coating film area, other parts are by mask plate shielding.
Other structures form of the invention can change the size and quantity of domain annular region on the basis of the present invention
To adapt to the required region tested, rectangular area electrode can also be changed and draw position and the spacing of section to adapt to different batteries surveys
Try fixture.
The foregoing is merely an example of the present invention, are not intended to restrict the invention.For the professional technique of this field
For personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, that is done any repairs
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of solar battery mask plate for spin coating proceeding, which is characterized in that including peripheral frame skeleton (1) and be fixed on side
Electrode domain thin plate (2) on frame skeleton (1)；Peripheral frame skeleton (1) is equipped with several grid (3), and each grid (3) has four
Side；Several grid also are provided on electrode domain thin plate (2)；The grid of electrode domain thin plate (2) and the grid of peripheral frame skeleton (1)
It is correspondingly arranged；It is equipped on each grid of electrode domain thin plate (2) coating film area (21), coating film area (21) is by several annulars
Structure (221) and rectangular configuration (222) are constituted.
2. a kind of solar battery mask plate for spin coating proceeding according to claim 1, which is characterized in that frame bone
At least one vertex is equipped with recess (31) in each grid (3) of frame (1).
3. a kind of solar battery mask plate for spin coating proceeding according to claim 2, which is characterized in that recess
(31) circular recess for being 3/4ths.
4. a kind of solar battery mask plate for spin coating proceeding according to claim 1, which is characterized in that frame bone
Frame (1) includes outline border (11) and several demarcation plates (12) in outline border, passes through between the grid (3) of peripheral frame skeleton (1) and divides
Partition (12) separates.
5. a kind of solar battery mask plate for spin coating proceeding according to claim 1, which is characterized in that electrode version
With peripheral frame skeleton (1) using being welded and fixed, welding junction polishes figure thin plate (2).
6. a kind of solar battery mask plate suitable for spin coating proceeding according to claim 1, which is characterized in that frame
Skeleton (1) is made of steel plate, steel plate thickness 1.25mm.
7. a kind of solar battery mask plate for spin coating proceeding according to claim 1, which is characterized in that electrode version
Figure thin plate (2) is made of steel plate, steel plate thickness 0.2mm.
8. a kind of solar battery mask plate for spin coating proceeding according to claim 4, which is characterized in that outline border
(11) and mask plate is separated into 8 × 8 evenly arranged 64 square lattices (3), peripheral frame skeleton (1) by demarcation plate (12)
Grid (3) between be spaced 2.5mm.
9. a kind of solar battery mask plate for spin coating proceeding according to claim 1, which is characterized in that electrode version
Coating film area (21) is hollowed out area in figure thin plate (2), and other parts are masked plate and block.
10. a kind of solar battery mask plate for spin coating proceeding according to any one of claim 1 to 9, special
Sign is, the preparation method of the solar battery mask plate for spin coating proceeding the following steps are included:
1) production obtains the peripheral frame skeleton (1) of solar battery mask plate；
2) production obtains the electrode domain thin plate (2) equipped with coating film area (21)；
3) it on the peripheral frame skeleton (1) for using welding manner to be fixed in step 1) the electrode domain thin plate (2) in step 2), obtains
To the solar battery mask plate for spin coating proceeding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811469584.1A CN109378391A (en) | 2018-11-28 | 2018-11-28 | A kind of solar battery mask plate for spin coating proceeding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811469584.1A CN109378391A (en) | 2018-11-28 | 2018-11-28 | A kind of solar battery mask plate for spin coating proceeding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109378391A true CN109378391A (en) | 2019-02-22 |
Family
ID=65375386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811469584.1A Pending CN109378391A (en) | 2018-11-28 | 2018-11-28 | A kind of solar battery mask plate for spin coating proceeding |
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| Country | Link |
|---|---|
| CN (1) | CN109378391A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1908665A (en) * | 2005-08-02 | 2007-02-07 | 中国科学院电子学研究所 | Blended self-assembly membrane based micro ampere immunity sensor and preparation thereof |
| US20110259392A1 (en) * | 2010-11-04 | 2011-10-27 | Sungeun Lee | Thin film solar cell and method of manufacturing the same |
| CN105045032A (en) * | 2015-08-27 | 2015-11-11 | 京东方科技集团股份有限公司 | Mask plate, spacer and display device |
| CN206432282U (en) * | 2017-01-22 | 2017-08-22 | 苏州阿特斯阳光电力科技有限公司 | A kind of PERC batteries plated film mask structure |
| CN208939013U (en) * | 2018-11-28 | 2019-06-04 | 中国华能集团有限公司 | A kind of solar battery mask plate for spin coating proceeding |
-
2018
- 2018-11-28 CN CN201811469584.1A patent/CN109378391A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1908665A (en) * | 2005-08-02 | 2007-02-07 | 中国科学院电子学研究所 | Blended self-assembly membrane based micro ampere immunity sensor and preparation thereof |
| US20110259392A1 (en) * | 2010-11-04 | 2011-10-27 | Sungeun Lee | Thin film solar cell and method of manufacturing the same |
| CN105045032A (en) * | 2015-08-27 | 2015-11-11 | 京东方科技集团股份有限公司 | Mask plate, spacer and display device |
| CN206432282U (en) * | 2017-01-22 | 2017-08-22 | 苏州阿特斯阳光电力科技有限公司 | A kind of PERC batteries plated film mask structure |
| CN208939013U (en) * | 2018-11-28 | 2019-06-04 | 中国华能集团有限公司 | A kind of solar battery mask plate for spin coating proceeding |
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