CN109374580A - A kind of Terahertz lamination image probe positional error correction method - Google Patents

A kind of Terahertz lamination image probe positional error correction method Download PDF

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CN109374580A
CN109374580A CN201811156782.2A CN201811156782A CN109374580A CN 109374580 A CN109374580 A CN 109374580A CN 201811156782 A CN201811156782 A CN 201811156782A CN 109374580 A CN109374580 A CN 109374580A
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CN109374580B (en
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王大勇
戎路
唐超
王云新
赵洁
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Beijing University of Technology
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
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    • G01N2201/12746—Calibration values determination

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Abstract

The invention discloses a kind of Terahertz lamination image probe positional error correction methods, this method includes that the collected diffraction pattern of detector is carried out angular spectrum to pass back to object plane, since the diffraction pattern of object plane includes the information of object function, computing cross-correlation is done by the object plane amplitude returned to adjacent two width diffraction pattern, since object plane amplitude overlaps place, there is duplicate parts, so can obtain the offset of adjacent two width probe location by finding relevant peaks, the location information of whole probes can be obtained behind definition initial point position, using the position acquired as input, it is used as the position coordinates of lamination iterative algorithm probe.By the adjacent pinhole difiration figure for carrying sample message, probe is calculated in object plane location information with the matched method of sub-pix.The relative position variable quantity that probe and sample are obtained with sub-pixel precision, improves the operation efficiency and convergence rate of iterative algorithm, and improves imaging fidelity.

Description

A kind of Terahertz lamination image probe positional error correction method
Technical field
The present invention relates to a kind of methods of Terahertz lamination image probe location error correction, more particularly to a kind of continuous The imaging position error correction of Terahertz lamination is to improve the computational efficiency of representation approach and fidelity is imaged.
Background technique
THz wave (Terahertz, THz) refers to positioned at infrared between microwave band, frequency is 0.1 to 10THz model In enclosing, corresponding wavelength be 0.03 electromagnetic wave for arriving 3mm, due to wide spectrum, high-penetration, low energy, fear it is aqueous etc. a variety of Key property produces far-reaching influence to fields such as safety check anti-terrorism, non-destructive testing, medical imagings.Terahertz lamination is imaged It is a kind of by acquire overlapping diffraction pattern recover sample COMPLEX AMPLITUDE without lens coherent diffraction imaging technology.It is imaged Principle are as follows: the illuminating bundle constrained by aperture forms illuminator probe in object plane, there is relative movement between illuminator probe and sample, The strength information that different sample positions correspond to diffraction pattern is acquired in recording surface, the lamination representation approach based on Phase Retrieve Algorithm The absorption coefficient for obtaining sample and phase information and illuminator probe are rebuild in the COMPLEX AMPLITUDE of object plane.It can retain too The exclusive transmission characteristic of Hertz wave can also give full play to lamination imaging to the excellent of large scale sample high-resolution fast imaging Gesture.Compared with other imaging methods, compact with light channel structure, low to light source coherence requirement, sample size is no longer limited The advantages that, it is a kind of to be realized using THz devices at this stage, meet the lossless visual research of modern biomedical and compel to be essential The continuous THz wave imaging technique asked.Terahertz lamination quality reproduction depends on accurate probe location, but translation stage is smart Degree, THz wave light distribution is uneven, power is unstable etc., and factors all inevitably cause location error.Existing error Correcting algorithm is all that new constraint condition is introduced in through circulation every time, successive ignition Step wise approximation actual position, but repeatedly Iteration influences computational efficiency.We have proposed one kind in the case where not needing has precognition to probe location thus, directly with spreading out It penetrates and probe location information is calculated, precision can reach sub-pix rank, use it as the probe location coordinate of iterative algorithm The requirement to translation stage, stepper motor precision used in experiment can be greatly reduced, while improving the operation effect of iterative algorithm Rate, convergence rate and imaging fidelity.
Summary of the invention
It is an object of the invention to the pinhole difiration figures by adjacent carrying sample message, with the matched method meter of sub-pix Calculation obtains probe in object plane location information.The relative position variable quantity of probe and sample is obtained with sub-pixel precision, thus To more accurately probe location, reduce the requirement to translation stage, stepper motor precision used in experiment, improves iterative algorithm Operation efficiency and convergence rate, and improve imaging fidelity.
To achieve the above object, the technical solution adopted by the present invention is a kind of Terahertz lamination image probe location error school Correction method realizes that the imaging system optical path of this method includes that carbon dioxide pumps continuous thz laser device, and two gold-plated off-axis Paraboloidal mirror, band circular hole mask plate, sample, three-D electric translation stage, planar array type pyroelectric detector.Carbon dioxide pumping Continuous thz laser device is as radiation source；Off axis paraboloidal mirror by laser radiation go out continuous THz wave beam-expanding collimation at Directional light；Mask plate center is the aperture that a diameter is 3.3mm；Sample is placed in mask plate and planar array type pyroelectricity detects Between device, sample proximity mask plate, while as close as possible to detector, sample is fixed on three-D electric translation stage, three-dimensional Motorized precision translation stage x-axis, y-axis to it is horizontal, vertically move sample to be tested, z-axis adjusts sample along the position of optical axis direction；Terahertz After wave is generated by laser, beam-expanding collimation is carried out by two off axis paraboloidal mirrors, is radiated on sample by mask plate, is penetrated It is recorded after sample by pyroelectric detector.By moving three dimension translation stage, pyroelectric detector collects the overlapping aperture of sample Diffraction pattern Ij (u), wherein j=1,2,3 ... J, J are the sums of diffraction pattern.
This method includes that the collected diffraction pattern of detector is carried out angular spectrum to pass back to object plane, due to spreading out for object plane The information that figure includes object function is penetrated, computing cross-correlation can be done by the object plane amplitude returned to adjacent two width diffraction pattern, by Overlapping place in object plane amplitude, there is duplicate parts, it is possible to obtain adjacent two width probe location by finding relevant peaks Offset can obtain the location informations of whole probes after defining initial point position, using the position acquired as inputting, for making For the position coordinates of lamination iterative algorithm probe.
A kind of method of Terahertz lamination image probe location error correction, improves imaging fidelity, improves iteration and calculate The operation efficiency of method and the process of convergence rate are divided into three steps:
S1 adjusts probe and sample spacing is d1, sample and detector spacing are d2, remove probe, with detection Device records the hologram I0 (u) of sample, and using holographic autofocus algorithm, accurate calculation goes out diffraction distance d2。
Probe is added in optical path S2, and the pinhole difiration figure I of sample is successively acquired according to the scan path of motorized precision translation stagej (u), wherein j=1,2,3 ... J, J are the sums of diffraction pattern.
S3 is passed through using angular spectrum passback algorithm to diffraction pattern Ij(u) initial position co-ordinates are acquired.Acquire the mistake of position coordinates Journey is divided into following four step:
S3.1 sample transmittance function and probe functions are expressed as O (r) and P (r), and the COMPLEX AMPLITUDE of object plane is O (r) P (r), then the diffraction pattern intensities I measuredj(u) it indicates are as follows:
Ij(u)=| G < O (r-Rj)P(r)>|2 (1)
Wherein r=(x, y) is the coordinate vector on object plane, Rj=(Xj,Yj) indicate being translated towards for j-th of diffraction pattern Amount.G<>indicates diffraction propagation operator, and propagation distance is object plane to detector face spacing d2。
First position object plane complex amplitude ψ of S3.21(r) it indicates are as follows:
Complex amplitude can also be expressed as sample transmittance function O (r-R1) form that is multiplied with probe functions P (r):
ψ1(r)=O (r-R1)P(r) (3)
Which contain the location informations of first object function.Second position object plane complex amplitude ψ2(r) it indicates are as follows:
Which contain the location informations of second object function.
S3.3 returns the ψ that object plane acquires by angular spectrum1(u) and ψ2(u) sub-pix matching is carried out.It is done respectively first fast Fast Fourier transformation obtains its spectrum distribution Ψ1(v) and Ψ2(v), it calculatesWhereinIndicate Ψ2(v) answer Conjugation.Result is embedded in the matrix of k times of an amplification, the size of k is determined by sub-pixel precision, and the other parts of matrix are by zero Filling.Matrix is subjected to Fast Fourier Transform (FFT) and obtains up-sampling cross-correlation, can determine probe location by positioning peak value Offset (Δ x1,Δy1), remaining position offset is successively calculated according to iteration sequence.
Shift offset indicates are as follows:
Δ x=(Δ x1,Δx2,...ΔxJ-1) (5)
Δ y=(Δ y1,Δy2,...ΔyJ-1) (6)
S3.4 defines the position coordinates (x of starting material function1,y1), according to
xj=xj-1+Δxj-1(j=2,3 ..., J) (7)
yj=yj-1+Δyj-1(j=2,3 ..., J) (8)
To calculate remaining corresponding probe core position coordinates with sub-pixel precision.
The test result of exemplary embodiments of the invention show by by it is adjacent carry sample message pinhole difiration figure into Row angular spectrum passes back to object plane, acquires the offset of probe location with sub-pixel precision using related operation searching relevant peaks, fixed The location information of whole probes is obtained behind adopted initial point position.In the case where not needing has precognition to probe location, obtain More accurate location information reduces the requirement to translation stage, stepper motor precision used in experiment.And since it is repeatedly Before algorithm, operation time is greatly reduced, improves the operation efficiency and convergence rate of iterative algorithm.
Compared with prior art, the method for a kind of Terahertz lamination image probe location error correction proposed by the present invention, The collected diffraction pattern of detector is subjected to angular spectrum and passes back to object plane, finds relevant peaks using related operation with sub-pix essence Degree acquires the offset of probe location, obtains the location information of whole probes after defining initial point position.It is not needing to probe In the case that there is precognition in position, more accurate location information has been obtained, has been reduced to translation stage used in experiment, stepper motor The requirement of precision.And since it can obtain more accurately probe location coordinate before iterative algorithm, greatly subtract Lack operation time, improves the operation efficiency and convergence rate of iterative algorithm.
Detailed description of the invention
Fig. 1 is the system light path of a kind of method of Terahertz lamination image probe location error correction.In figure: 1, The continuous thz laser device of FIRL295 type carbon dioxide pumping, the 2, first off axis paraboloidal mirror, the 3, second off axis paraboloidal mirror, 4, band circular hole mask plate, 5, sample, 6, three-D electric translation stage, 7, PY-III planar array type pyroelectric detector.
Specific embodiment
As shown in Figure 1, a kind of Terahertz lamination image probe positional error correction method, it is characterised in that: realize the party The imaging system optical path of method includes that FIRL295 type carbon dioxide pumps continuous thz laser device 1, and focal length is the first of 50.8mm Gold-plated off axis paraboloidal mirror 2, focal length are the second gold-plated off axis paraboloidal mirror 3 of 101.6mm, band circular hole mask plate 4, sample 5, three-D electric translation stage 6, PY-III planar array type pyroelectric detector 7.FIRL295 type carbon dioxide pumps continuous Terahertz and swashs Light device 1 is used as radiation source, and working gas is methanol, and output frequency 2.52THz, corresponding central wavelength is 118.83 μm, output Power is up to 500mW；The system of first off axis paraboloidal mirror 2, the second off axis paraboloidal mirror 3 composition gives off laser 1 Continuous THz wave expand twice, and be collimated into the directional light that diameter is about 16mm；4 center of mask plate is that a diameter is The aperture of 3.3mm；Sample 5 is placed between mask plate 4 and PY-III planar array type pyroelectric detector 7, sample 5 close to Mask plate, while as close as possible to detector 7, and be fixed on three-D electric translation stage 6.Three-D electric translation stage 6 is Thorlabs MT3-Z8, maximum range 12mm, x-axis, y-axis to it is horizontal, vertically move sample to be tested, z-axis adjusts sample edge The position of optical axis direction, set step-length is 0.8mm in experiment, and scan path is snakelike sequence, guarantees the overlapping of neighboring diffraction figure Area is about 75%；PY-III planar array type pyroelectric detector 7 acquires the overlapping pinhole difiration figure of sample, number of pixels 124 × 124, pixel dimension is 100 × 100 μm.
This method includes that the collected diffraction pattern of detector is carried out angular spectrum to pass back to object plane, due to spreading out for object plane The information that figure includes object function is penetrated, computing cross-correlation can be done by the object plane amplitude returned to adjacent two width diffraction pattern, by Overlapping place in object plane amplitude, there is duplicate parts, it is possible to obtain adjacent two width probe location by finding relevant peaks Offset can obtain the location informations of whole probes after defining initial point position, using the position acquired as inputting, for making For the position coordinates of lamination iterative algorithm probe.
A kind of method of Terahertz lamination image probe location error correction, improves imaging fidelity, improves iteration and calculate The operation efficiency of method and the process of convergence rate are divided into three steps:
S1 adjusts probe and sample spacing is d1, sample and detector spacing are d2, remove probe, with detection Device records the hologram I0 (u) of sample, and using holographic autofocus algorithm, accurate calculation goes out diffraction distance d2。
Probe is added in optical path S2, and the pinhole difiration figure I of sample is successively acquired according to the scan path of motorized precision translation stagej (u), wherein j=1,2,3 ... J, J are the sums of diffraction pattern.
S3 is passed through using angular spectrum passback algorithm to diffraction pattern Ij(u) initial position co-ordinates are acquired.Acquire the mistake of position coordinates Journey is divided into following four step:
S3.1 sample transmittance function and probe functions are expressed as O (r) and P (r), and the COMPLEX AMPLITUDE of object plane is O (r) P (r), the then diffraction pattern intensities measured can indicate are as follows:
Ij(u)=| G < O (r-Rj)P(r)>|2 (1)
Wherein r=(x, y) is the coordinate vector on object plane, Rj=(Xj,Yj) indicate j-th of sample translation vector.G< > indicating diffraction propagation operator, propagation distance is object plane to detector face spacing d2。
First position object plane Complex Amplitude of S3.2 are as follows:
Complex amplitude is also denoted as the form that sample transmittance function is multiplied with probe functions:
ψ1(r)=O (r-R1)P(r) (3)
Which contain the location informations of first object function.Similarly second position object plane complex amplitude can indicate are as follows:
Which contain the location informations of second object function.
S3.3 returns the ψ that object plane acquires by angular spectrum1(u) and ψ2(u) sub-pix matching is carried out.It is done respectively first fast Fast Fourier transformation obtains its spectrum distribution Ψ1(v) and Ψ2(v), it calculatesWhereinIndicate Ψ2(v) Complex conjugate.Result is embedded in k times of matrix of an amplification, the size of k is determined by sub-pixel precision, the other parts of matrix by Zero filling.Matrix is subjected to Fast Fourier Transform (FFT) and obtains up-sampling cross-correlation, can determine probe location by positioning peak value Offset (Δ x1,Δy1), remaining position offset is successively calculated according to iteration sequence.
Shift offset can indicate are as follows:
Δ x=(Δ x1,Δx2,...ΔxJ-1) (5)
Δ y=(Δ y1,Δy2,...ΔyJ-1) (6)
S3.4 defines the position coordinates (x of starting material function1,y1), according to recurrence relation:
xj=xj-1+Δxj-1(j=2,3 ..., J) (7)
yj=yj-1+Δyj-1(j=2,3 ..., J) (8)
To calculate remaining corresponding probe core position coordinates with sub-pixel precision.
The test result of exemplary embodiments of the invention show by by it is adjacent carry sample message pinhole difiration figure into Row angular spectrum passes back to object plane, acquires the offset of probe location with sub-pixel precision using related operation searching relevant peaks, fixed The location information of whole probes is obtained behind adopted initial point position.In the case where not needing has precognition to probe location, obtain More accurate location information reduces the requirement to translation stage, stepper motor precision used in experiment.And since it is repeatedly Before algorithm, operation time is greatly reduced, improves the operation efficiency and convergence rate of iterative algorithm.

Claims (2)

1. a kind of Terahertz lamination image probe positional error correction method realizes that the imaging system optical path of this method includes dioxy Change carbon and pumps continuous thz laser device, two gold-plated off axis paraboloidal mirrors, band circular hole mask plate, sample, three-D electric Translation stage, planar array type pyroelectric detector；Carbon dioxide pumps continuous thz laser device as radiation source；Off axis paraboloidal mirror The continuous THz wave beam-expanding collimation that laser radiation is gone out is at directional light；Mask plate center is that a diameter is the small of 3.3mm Hole；Sample is placed between mask plate and planar array type pyroelectric detector, sample proximity mask plate, while as close as possible to Detector, sample are fixed on three-D electric translation stage, three-D electric translation stage x-axis, y-axis to it is horizontal, vertically move it is to be measured Sample, z-axis adjust sample along the position of optical axis direction；After THz wave is generated by laser, pass through two off axis paraboloidal mirrors Beam-expanding collimation is carried out, is radiated on sample by mask plate, is recorded through after sample by pyroelectric detector；Pass through moving three dimension Translation stage, pyroelectric detector collect the overlapping pinhole difiration figure I of samplej(u), wherein j=1,2,3 ... J, J are diffraction patterns The sum of sample；
It is characterized by: the collected diffraction pattern of detector is carried out angular spectrum by this method passes back to object plane, due to object plane Diffraction pattern include object function information, computing cross-correlation is done by the object plane amplitude returned to adjacent two width diffraction pattern, by Overlapping place in object plane amplitude, there is duplicate parts, it is possible to obtain adjacent two width probe location by finding relevant peaks Offset can obtain the location informations of whole probes after defining initial point position, using the position acquired as inputting, for making For the position coordinates of lamination iterative algorithm probe.
2. a kind of Terahertz lamination image probe positional error correction method according to claim 1, it is characterised in that: S1 It adjusts probe and sample spacing is d1, sample and detector spacing are d2, remove probe, record sample with detector Hologram I0(u), using holographic autofocus algorithm, accurate calculation goes out diffraction distance d2；
Probe is added in optical path S2, and the pinhole difiration figure I of sample is successively acquired according to the scan path of motorized precision translation stagej(u), Wherein j=1,2,3 ... J, J are the sums of diffraction pattern；
S3 is passed through using angular spectrum passback algorithm to diffraction pattern Ij(u) initial position co-ordinates are acquired；The process for acquiring position coordinates is divided into Following four step:
S3.1 sample transmittance function and probe functions are expressed as O (r) and P (r), and the COMPLEX AMPLITUDE of object plane is O (r) P (r), then the diffraction pattern intensities I measuredj(u) it indicates are as follows:
Ij(u)=| G < O (r-Rj)P(r)>|2 (1)
Wherein r=(x, y) is the coordinate vector on object plane, Rj=(Xj,Yj) indicate j-th of diffraction pattern translation vector；G< > indicating diffraction propagation operator, propagation distance is object plane to detector face spacing d2；
First position object plane complex amplitude ψ of S3.21(r) it indicates are as follows:
Complex amplitude can also be expressed as sample transmittance function O (r-R1) form that is multiplied with probe functions P (r):
ψ1(r)=O (r-R1)P(r) (3)
Which contain the location informations of first object function；Second position object plane complex amplitude ψ2(r) it indicates are as follows:
Which contain the location informations of second object function；
S3.3 returns the ψ that object plane acquires by angular spectrum1(u) and ψ2(u) sub-pix matching is carried out；It is done to quick Fu respectively first In leaf transformation obtain its spectrum distribution Ψ1(v) and Ψ2(v), it calculatesWhereinIndicate Ψ2(v) it is multiple altogether Yoke；Result is embedded in the matrix of k times of an amplification, the size of k is determined by sub-pixel precision, and the other parts of matrix are by zero Filling；Matrix is subjected to Fast Fourier Transform (FFT) and obtains up-sampling cross-correlation, the offset of probe location is determined by positioning peak value Measure (Δ x1,Δy1), remaining position offset is successively calculated according to iteration sequence；
Shift offset indicates are as follows:
Δ x=(Δ x1,Δx2,...ΔxJ-1) (5)
Δ y=(Δ y1,Δy2,...ΔyJ-1) (6)
S3.4 defines the position coordinates (x of starting material function1,y1), according to
xj=xj-1+Δxj-1(j=2,3 ..., J) (7)
yj=yj-1+Δyj-1(j=2,3 ..., J) (8)
To calculate remaining corresponding probe core position coordinates with sub-pixel precision.
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