CN109373916A - It is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG - Google Patents
It is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG Download PDFInfo
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- CN109373916A CN109373916A CN201811451508.8A CN201811451508A CN109373916A CN 109373916 A CN109373916 A CN 109373916A CN 201811451508 A CN201811451508 A CN 201811451508A CN 109373916 A CN109373916 A CN 109373916A
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- tfbg
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 18
- 239000010408 film Substances 0.000 claims abstract description 40
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 230000002269 spontaneous effect Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims abstract description 3
- 239000010931 gold Substances 0.000 claims description 21
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 18
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000243 solution Substances 0.000 claims description 7
- WTDHULULXKLSOZ-UHFFFAOYSA-N Hydroxylamine hydrochloride Chemical compound Cl.ON WTDHULULXKLSOZ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- NJSVDVPGINTNGX-UHFFFAOYSA-N [dimethoxy(propyl)silyl]oxymethanamine Chemical compound CCC[Si](OC)(OC)OCN NJSVDVPGINTNGX-UHFFFAOYSA-N 0.000 claims description 3
- 235000019441 ethanol Nutrition 0.000 claims description 3
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 claims description 3
- 239000002105 nanoparticle Substances 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 239000012224 working solution Substances 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005388 cross polarization Methods 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract description 2
- 238000000411 transmission spectrum Methods 0.000 abstract description 2
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229960000935 dehydrated alcohol Drugs 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229960004756 ethanol Drugs 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 210000003739 neck Anatomy 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/005—Specially adapted to detect a particular component for H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N2021/258—Surface plasmon spectroscopy, e.g. micro- or nanoparticles in suspension
Abstract
The invention discloses a kind of real time monitoring apparatus realized with TFBG and grown to Au film, by amplified spontaneous emission source, polarizing film, Polarization Controller, TFBG, temperature controller, spectrometer composition.After the surface TFBG deposits Au film, spectral characteristic will receive influence.Due to the surface plasma resonance effect of Au film and medium interface, after through TFBG, larger difference is will be present in transmission spectrum for two polarised light S light and P light in cross polarization.The Polarization Dependent Loss variation of TFBG in Au thin-film process is plated to realize the controllable deposition to Au film by real-time monitoring, and the real time monitoring to the Au film thickness of growth can be realized.
Description
Technical field
The invention belongs to metal nanometer thin film preparation technical fields, and in particular to a kind of realized with TFBG grows Au film
Real time monitoring device.
Background technique
Hydrogen is also important the raw material of industry as the highly important clean energy resource of today's society, and various necks are widely applied
Domain.But since hydrogen is colourless odorless, it is easy to which the diffusion leakage from medium encounters open fire and easily explodes, so research is used
It is very necessary in the hydrogen gas sensor of detection and monitoring.Previous Optical Fider Hybrogen Sensor is although sensitivity is very high, design
It is more difficult, therefore metal coating Optical Fider Hybrogen Sensor is studied, it has many advantages, such as small in size, high sensitivity.
Wherein noble metal plays key effect in this sensor as hydrogen sensitive material.Metal nano is prepared using chemical reduction method
Particle, and enable its be attached to above substrate formed nano thin-film can be with the performance of Optimization of Hydrogen sensor.
In the growth course of metal nanometer thin film, underlayer temperature, growth time, each growth parameter(s) pair such as external environment
The product weight of the single-item film eventually formed all has a significant impact.In previous test, generally complete by hand all
Technological operation, not only test mission is heavy, and manual operations inevitably bring human error, have studied one kind thus
The method of feasible real-time monitoring Au film growth, is become by the Polarization Dependent Loss that real-time monitoring plates TFBG in Au thin-film process
Change to realize the controllable deposition to Au film, convenient for the thickness of the metal nanometer thin film of regulation preparation, to effectively increase plating
Film quality.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of real time monitoring dresses realized with TFBG and grown to Au film
It sets, which may be implemented the Polarization Dependent Loss variation of TFBG during real-time monitoring plating Au nano thin-film, and then realization pair
The controllable deposition of Au film obtains high-test metal nano thin-film to be applied in hydrogen gas sensor.Because it is simple with equipment,
The advantages that at low cost, regulates and controls the physical characteristics such as the thickness of metal nanometer thin film in which can be convenient.Therefore before tool deposits very big development
Scape and research significance.
The invention is realized by the following technical scheme: it is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG,
By amplified spontaneous emission source (1), polarizing film (2), Polarization Controller (3), TFBG (4), temperature controller (5), work pool (6), work
Make liquid (7), spectrometer (8) composition；It is characterized by: the light of amplified spontaneous emission source (1) outgoing is incident by polarizing film (2)
To in Polarization Controller (3), the right end of Polarization Controller (3) is connected with TFBG (4), and TFBG (4) is placed in work pool (6),
And heated using temperature controller (5), TFBG (4) right end is connected with spectrometer (8)；By the spectroscopic data measured and use atomic force microscopy
The result that mirror AFM demarcates film thickness is associated, and the monitoring to growing film thickness can be realized.
TFBG (4) is pre-processed first before plated film, is cleaned by ultrasonic 5 points with organic solvent ethyl alcohol, acetone and methanol respectively
Clock, with dense H2SO4And H2O2Volume ratio is that 7:3 solution handles 15 minutes at 80 DEG C, hydroxylated TFBG (4) are immersed 1%
It APTMS methanol solution 0.5 hour, is adsorbed for Au nanoparticle.
Temperature controller (5) the control temperature is held constant at 22.5 DEG C.
The working solution (7) is the mixed solution of concentration 0.01% gold chloride and 0.4 mM of hydroxylamine hydrochloride.
The working principle of the invention is: after the surface TFBG deposits Au film, will affect its spectral characteristic.Due to Au film
With the SPR effect of medium interface, after through TFBG, transmission spectrum will appear larger the polarised light s light and p light of two cross polarizations
Difference.This characteristic can be described with Polarization Dependent Loss (PDL).PDL is defined as:
Wherein TxAnd TyIt is the transmitted spectrum of s and p-polarization state.Based on the above basic principle, can with the structure of design come pair
Spectrum real-time monitoring in the growth course of film.By the spectroscopic data measured and the result phase demarcated with AFM to film thickness
Association, can be realized the monitoring to growing film thickness.In addition, usually sensed with the SPR characteristic of Au film modified TFBG,
It is best that this requires the SPR of film to match, and frosting phenomenon is most obvious.Therefore, it even if changing reaction condition, can also be surveyed in real time
To spectrum in observe maximum SPR frosting phenomenon when, at once stop plated film.
Detailed description of the invention
Fig. 1 is a kind of real time monitoring apparatus schematic diagram realized with TFBG and grown to Au film.
Specific embodiment
TFBG (4) is pre-processed first before plated film, is cleaned by ultrasonic 5 points with organic solvent ethyl alcohol, acetone and methanol respectively
Clock, and with ultrapure water rinsing drying, with dense H2SO4And H2O2Volume ratio is that 7:3 solution handles 15 minutes, by hydroxyl at 80 DEG C
The TFBG (4) of change immerses APTMS methanol solution 0.5 hour of 1%, adsorbs for Au nanoparticle；In coating process, in room temperature
It is lower that TFBG (4) is placed in deposition life in the hybrid working liquid (7) that concentration is 0.01% gold chloride and 0.4 mM of hydroxylamine hydrochloride
Long Au nano thin-film, and so that temperature is held constant at 22.5 DEG C using temperature controller (5).
As shown in Figure 1, a kind of realize the real time monitoring apparatus grown to Au film with TFBG, by amplified spontaneous emission source
(1), polarizing film (2), Polarization Controller (3), TFBG (4), temperature controller (5), work pool (6), working solution (7), spectrometer (8) group
At；It is characterized by: the light of amplified spontaneous emission source (1) outgoing is incident in Polarization Controller (3) by polarizing film (2),
The right end of Polarization Controller (3) is connected with TFBG (4), and TFBG (4) is placed in work pool (6), and is added using temperature controller (5)
Heat, TFBG (4) right end are connected with spectrometer (8), start timing and real-time monitoring spectrum.Solution temperature is 22.5 in coating process
It DEG C keeps constant.
First 5 minutes for can measuring in plated film are tested, there are lesser recess at 1530nm-1540nm；30 minutes when
Time start to appear apparent recess at 1540nm, at 1540nm Polarization Dependent Loss amplitude with the growth of sedimentation time it is continuous
Reduce, and drift about to long wave length direction, when the time of plated film proceeding to 50 minutes, the maximum recess of Polarization Dependent Loss expands
It opens up near 1542nm.
Final step, washes with water the TFBG for having plated film and use is dried with nitrogen.The TFBG that Au nano thin-film is wrapped up points
Not Jin Ru water, in dehydrated alcohol and be exposed in air.According to the experimental results, in air, TFBG is not occurred bright
Aobvious SPR phenomenon；When TFBG immerses ultrapure water, occurs maximum SPR resonance frosting phenomenon at 1543nm；It is molten in dehydrated alcohol
In liquid, SPR resonant wavelength is near 1565nm, but delustring is not most obviously, to illustrate that SPR wavelength at this time is not best match
Value.
Claims (1)
1. a kind of realize the real time monitoring apparatus grown to Au film with TFBG, by amplified spontaneous emission source (1), polarizing film
(2), Polarization Controller (3), TFBG(4), temperature controller (5), work pool (6), working solution (7), spectrometer (8) composition；Its feature
Be: the light of amplified spontaneous emission source (1) outgoing is incident in Polarization Controller (3) by polarizing film (2), Polarization Controller
(3) right end is connected with TFBG(4), and TFBG(4) is placed in work pool (6), and is heated using temperature controller (5), TFBG(4) it is right
End is connected with spectrometer (8)；First to TFBG(4 before plated film) it pre-processes, it is super with organic solvent ethyl alcohol, acetone and methanol respectively
Sound cleans 5 minutes, with dense H2SO4And H2O2Volume ratio is that 7:3 solution handles 15 minutes, by hydroxylated TFBG(4) at 80 DEG C
APTMS methanol solution 0.5 hour of 1% is immersed, is adsorbed for Au nanoparticle；In coating process, TFBG(4) is placed in concentration
For deposition growing Au nano thin-film in the hybrid working liquid (7) of 0.01% gold chloride and 0.4 mM of hydroxylamine hydrochloride, and utilize
Temperature controller (5) makes temperature be held constant at 22.5 DEG C.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451508.8A CN109373916A (en) | 2018-11-30 | 2018-11-30 | It is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG |
| CH000985/2019A CH715639B9 (en) | 2018-11-30 | 2019-08-05 | Apparatus for real-time monitoring of the growth of an Au thin film by TFBG. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811451508.8A CN109373916A (en) | 2018-11-30 | 2018-11-30 | It is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109373916A true CN109373916A (en) | 2019-02-22 |
Family
ID=65376169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811451508.8A Pending CN109373916A (en) | 2018-11-30 | 2018-11-30 | It is a kind of to realize the real time monitoring apparatus grown to Au film with TFBG |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109373916A (en) |
| CH (1) | CH715639B9 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718571A (en) * | 2009-12-04 | 2010-06-02 | 天津理工大学 | Tilt fiber bragg grating (TFBG) liquid level change measuring instrument |
| CN103604777A (en) * | 2013-12-02 | 2014-02-26 | 暨南大学 | Orthogonal polarization optical fiber biological refractive index sensor and detecting method thereof |
| US20150140556A1 (en) * | 2012-06-20 | 2015-05-21 | Spartan Bioscience Inc. | Optical fiber with grating and particulate coating |
| CN105887052A (en) * | 2016-05-04 | 2016-08-24 | 中国计量大学 | Side surface coating method and device for oblique fiber Bragg grating |
| CN107741409A (en) * | 2017-09-15 | 2018-02-27 | 武汉理工大学 | A kind of cancer markers detection means and method based on slant Bragg grating |
-
2018
- 2018-11-30 CN CN201811451508.8A patent/CN109373916A/en active Pending
-
2019
- 2019-08-05 CH CH000985/2019A patent/CH715639B9/en unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718571A (en) * | 2009-12-04 | 2010-06-02 | 天津理工大学 | Tilt fiber bragg grating (TFBG) liquid level change measuring instrument |
| US20150140556A1 (en) * | 2012-06-20 | 2015-05-21 | Spartan Bioscience Inc. | Optical fiber with grating and particulate coating |
| CN103604777A (en) * | 2013-12-02 | 2014-02-26 | 暨南大学 | Orthogonal polarization optical fiber biological refractive index sensor and detecting method thereof |
| CN105887052A (en) * | 2016-05-04 | 2016-08-24 | 中国计量大学 | Side surface coating method and device for oblique fiber Bragg grating |
| CN107741409A (en) * | 2017-09-15 | 2018-02-27 | 武汉理工大学 | A kind of cancer markers detection means and method based on slant Bragg grating |
Non-Patent Citations (2)
| Title |
|---|
| 冯建松: "基于Pd/Au纳米粒子的光纤表面等离子体共振氢气传感器研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
| 杨蕊竹等: "长周期光纤光栅的特性及传感应用的研究", 《中国博士学位论文全文数据库信息科技辑》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CH715639A2 (en) | 2020-06-15 |
| CH715639B9 (en) | 2023-07-14 |
| CH715639B1 (en) | 2023-05-31 |
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