CN109060728A - Inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor - Google Patents
Inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor Download PDFInfo
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 27
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 27
- 239000013307 optical fiber Substances 0.000 title claims abstract description 23
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title description 3
- 239000010409 thin film Substances 0.000 claims abstract description 41
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000010408 film Substances 0.000 claims abstract description 20
- 229910052737 gold Inorganic materials 0.000 claims abstract description 17
- 239000000835 fiber Substances 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims abstract description 15
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 230000010287 polarization Effects 0.000 claims abstract description 12
- 230000004888 barrier function Effects 0.000 claims abstract description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000010931 gold Substances 0.000 claims description 47
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005253 cladding Methods 0.000 abstract description 13
- 229910052763 palladium Inorganic materials 0.000 abstract description 9
- 230000002708 enhancing effect Effects 0.000 abstract description 8
- 230000008878 coupling Effects 0.000 abstract description 6
- 238000010168 coupling process Methods 0.000 abstract description 6
- 238000005859 coupling reaction Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 238000001228 spectrum Methods 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000002105 nanoparticle Substances 0.000 abstract description 3
- 230000004044 response Effects 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 3
- 238000007772 electroless plating Methods 0.000 abstract description 2
- 239000007791 liquid phase Substances 0.000 abstract description 2
- 239000010453 quartz Substances 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 43
- 230000008021 deposition Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- -1 palladium hydride Chemical class 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 229910003603 H2PdCl4 Inorganic materials 0.000 description 1
- NJSVDVPGINTNGX-UHFFFAOYSA-N [dimethoxy(propyl)silyl]oxymethanamine Chemical compound CCC[Si](OC)(OC)OCN NJSVDVPGINTNGX-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000033444 hydroxylation Effects 0.000 description 1
- 238000005805 hydroxylation reaction Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003938 response to stress Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
- G01N21/7743—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure the reagent-coated grating coupling light in or out of the waveguide
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
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- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
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- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
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Abstract
The invention discloses inclined optical fiber grating surface superstructures to enhance surface plasma resonance hydrogen sensor, is made of ASE wideband light source, Polarization Controller, single mode optical fiber, gas chamber pedestal, air inlet, gas outlet, Pd/Au thin film optical filters hydrogen gas sensor, spectroanalysis instrument and gas chamber barrier；Wherein Pd/Au thin film optical filters hydrogen gas sensor surface is coated with Au nano thin-film and Pd nano thin-film, and fibre core is carved with inclined Bragg grating.Au, Pd nanoparticle are prepared with chemical liquid phase reduction method.The controllable growth of Au, Pd nano thin-film on a quartz substrate is realized with molecular self-assembling (SAMs) technology and electroless plating.The tilted Bragg grating of film is coupled to light in a large amount of higher order modes guided by fibre cladding from fibre core, causes to radiate mode coupling enhancing.Within the scope of 1.5%-4% density of hydrogen, there is good linear response characteristic, and the every variation 1% of density of hydrogen, spectrum amplitude variable quantity are 0.005dB, have preferable sensitivity and resolution ratio.
Description
Technical field
The invention proposes inclined optical fiber grating surface superstructures to enhance surface plasma resonance hydrogen sensor, belongs to light
Fine field of sensing technologies.
Background technique
Pd is a kind of noble metal that chemical property is stable.Silvery white metallic luster is presented in pure Pd.Pd can be absorbed itself 900
Hydrogen again, and other most gases are not obviously absorbed, therefore can be used to do hydrogen sensing according to this characteristic of Pd
The sensitive material of device.If exciting SPR in Pd or Pd composite film surface, then can by monitor the variation of sensitive film layer resonance spectrum come
Measure density of hydrogen.
Compared with common FBG, TFBG grille plane is no longer normal to optical fiber axial direction, but has a tiltangleθ, so that light can
To be coupled in a large amount of higher order modes guided by fibre cladding from fibre core, cause to radiate mode coupling enhancing.
SPR detection technique have many advantages, such as in real time, quickly, it is highly sensitive and label-free, this metal of Au is easier
Excitating surface plasma resonance.Usually sensed with the SPR characteristic of Au film modified TFBG.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of the present invention is to provide inclined optical fiber grating surface superstructures to enhance surface
Plasma resonance hydrogen sensor.Au, Pd nanoparticle are prepared with chemical liquid phase reduction method.With molecular self-assembling (SAMs) technology
The controllable growth of Au, Pd nano thin-film on a quartz substrate is realized with electroless plating.Passing through the pretreated surface TFBG
The Au nano thin-film that deposition growing thickness is about 20nm, after be 1.25mmol/L with concentration H2PdCl4Liquid deposition Pd nanometer thin
Film.After Pd film absorption hydrogen, palladium hydride is formed, the effective refractive index of Pd/Au film changes, thus to cladding mode light
The transmission characteristic of wave has an impact, and leads to the variation of transmitted spectrum, generates spectrum amplitude response.The tilted Bragg grating of film
It is coupled to light in a large amount of higher order modes guided by fibre cladding from fibre core, causes to radiate mode coupling enhancing.?
Within the scope of 1.5%-4% density of hydrogen, there are good linear response characteristic, and the every variation 1% of density of hydrogen, the variation of spectrum amplitude
Amount is 0.005dB, has preferable sensitivity and resolution ratio.
The invention is realized by the following technical scheme: inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen
Dependent sensor, it is characterised in that: by ASE wideband light source (1), Polarization Controller (2), single mode optical fiber (3), gas chamber pedestal (4), into
Port (5), gas outlet (6), Pd/Au thin film optical filters hydrogen gas sensor (7), spectroanalysis instrument (8) and gas chamber barrier (9) composition；
Wherein Pd/Au thin film optical filters hydrogen gas sensor (7) surface is coated with Au nano thin-film (10) and Pd nano thin-film (11), and fibre core is carved
Have inclined Bragg grating (12), Polarization Controller (2) left end is connect with ASE wideband light source (1), right end and single mode optical fiber
(3) left end connects, and single mode optical fiber (3) right end is connect with spectroanalysis instrument (8)；Polarization Controller (2) is for controlling incident light
Polarization state is adjusted Polarization Controller (2), and air inlet is equal with the rate of outlet in gas chamber, and stability contorting is in 1000sccm, experiment
Temperature is controlled at 23 degrees Celsius.
The slant Bragg grating (12) of the Pd/Au thin film optical filters hydrogen gas sensor (7) passes through phase by single mode optical fiber
The matched method in position is made, grating length 10mm, screen periods 556.6nm, and tilt angle is 4 °.
The wave-length coverage of the ASE wideband light source (1) is 1420nm~1620nm.
The Au nano thin-film (10) modifies TFBG, and thickness is about 20nm, and surface is etched to equilateral triangle gold bullion
Superstructure array is for exciting strong surface plasma resonance；Equilateral triangle gold bullion with a thickness of 10 nanometers, equilateral triangle gold
Block side length is 10 nanometers, and the spacing between equilateral triangle gold bullion center is 20 nanometers.
The Pd nano thin-film (11) is sensitive material, and thickness is in 5-100nm range.
The working principle of the invention is: the polarization direction of transmission light is controlled with Polarization Controller, incident light is by having
The Pd/Au thin film optical filters hydrogen gas sensor (7) of inclined Bragg grating (12) can be coupled to from fibre core to be drawn by fibre cladding
In a large amount of higher order modes led.Cause to radiate mode coupling enhancing.Oblique raster meets following phase-matching condition:
λB=2neffΛ/cosθ (1)
Wherein, neff、WithIt is λ respectivelyBThe corresponding fibre core Effective index of wavelength,It is corresponding fine
The effective refractive index of core model effective refractive index and the i-th rank cladding mode.Λ and θ is the period of TFBG and the inclination of inner grid respectively
Angle.Only the wavelength of cladding mode can drift about with extraneous variations in refractive index, this variation and cladding mode caused by extraneous refractive index
Degree of dispersion it is related.When hydrogen appears near Pd film, Pd film is converted into palladium hydride, and reacts reversible, according to Pd and
PdHxOptical characteristics, the dielectric constant of Pd film reduces with the increase of hydrogen concentration, so as to cause extraneous variations in refractive index,
If extraneous refractive index change delta ns, derive the wave length shift Δ λ of Prague mould and cladding modeB,It is respectively as follows:
Again because TFBG structure does not change,And have for the single mode optical fiber of standard (such as SMF-28)WithSo
ΔλB=0 (5)
For the present invention using Pd nano thin-film (11), itself 900 times of hydrogen is can be absorbed in Pd, and to other most gas
Body does not obviously absorb, therefore Pd can be used to do the sensitive material of hydrogen gas sensor.When hydrogen appears near Pd film, hydrogen
Gas molecule (H2) will be dissociated into hydrogen atom (H), and then hydrogen atom will be easy to diffuse through Pd film, and last Pd film is converted into palladium
Hydride, and react reversible, according to Pd and PdHxOptical characteristics, the dielectric constant of Pd film drops with the increase of hydrogen concentration
It is low, so as to cause extraneous variations in refractive index.
The present invention is no longer normal to optical fiber axial direction using inclined Bragg grating (12), grille plane, but
There is a tiltangleθ, light is coupled in a large amount of higher order modes guided by fibre cladding from fibre core, leads to radiation mode coupling
Close enhancing.For the influence of extraneous refractive index, only the wavelength of cladding mode can drift about with extraneous variations in refractive index, roll over the external world
The degree of dispersion for penetrating cladding mode caused by rate is related.For temperature-responsive, the wavelength of all resonance of TFBG is having the same
Temperature dependency (they deviate about 10pm/ DEG C), by considering that relative wavelength drift can eliminate every other sensing mode
Temperature cross-over susceptibility.For stress response, Prague mould is bigger than the wavelength stress drift of high-order cladding mode.
The beneficial effects of the present invention are: proposing extremely strong to absorption of hydrogen power Pd nano thin-film (11) doing hydrogen sensing
The sensibility that extraneous density of hydrogen changes will be remarkably reinforced in the sensitive material of device, the sensor.Meanwhile using inclined Bradley
Lattice grating TFBG (12), makes to radiate mode coupling enhancing, finds that the sensitivity of the hydrogen gas sensor will be mentioned significantly by monitoring
Rise, for hydrogen detection provide one kind it is relatively simple easily build, reliably, the new method of high sensitivity.
Detailed description of the invention
Fig. 1 is superstructure enhancing surface plasma resonance hydrogen sensor feature dress in inclined optical fiber grating surface of the invention
Set schematic diagram.
Fig. 2 is inclined optical fiber grating surface superstructure enhancing surface plasma resonance hydrogen sensor surface plating of the invention
The equilateral triangle gold bullion superstructure array schematic diagram on some Au nano thin-films surface.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
Referring to attached drawing 1, inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor, and feature exists
In: by ASE wideband light source (1), Polarization Controller (2), single mode optical fiber (3), gas chamber pedestal (4), air inlet (5), gas outlet
(6), Pd/Au thin film optical filters hydrogen gas sensor (7), spectroanalysis instrument (8) and gas chamber barrier (9) composition；Wherein Pd/Au film light
Fine hydrogen gas sensor (7) surface is coated with Au nano thin-film (10) and Pd nano thin-film (11), Au nano thin-film (10) with a thickness of
20nm, Au nano thin-film (10) surface is etched to equilateral triangle gold bullion superstructure array for exciting strong surface plasma total
Vibration；Equilateral triangle gold bullion with a thickness of 10 nanometers, equilateral triangle gold bullion side length is 10 nanometers, equilateral triangle gold bullion center
Between spacing be 20 nanometers；Pd nano thin-film (11) thickness range is 5-100nm；Pd/Au thin film optical filters hydrogen gas sensor (7)
Fibre core be carved with inclined Bragg grating (12), inclined Bragg grating (12) length is 10mm, and screen periods are
556.6nm, tilt angle are 4 °, and Polarization Controller (2) left end is connect with ASE wideband light source (1), right end and single mode optical fiber (3)
Left end connection, Pd/Au thin film optical filters hydrogen gas sensor (7) right end are connect with spectroanalysis instrument (8).
Pd/Au thin film optical filters hydrogen gas sensor (7) is coated with Au nano thin-film (10) and Pd nano thin-film (11) above.It is first
Layer of Au nano thin-film first is grown in optical fiber surface, later again in Au film surface deposition growing Pd film.Specific steps are successively
Are as follows: TFBG surface clean, surface hydroxylation, self assembly coupling agent APTMS monolayer, absorption Au nanoparticle, growth Au are thin
Film, in the Au nano thin-film for being about 20nm by the pretreated surface TFBG deposition growing thickness.Sedimentation time is 15min,
Coated solution temperature is 23 DEG C.The H for being then 1.25mmol/L with concentration2PdCl4Liquid deposition Pd nano thin-film, finally to plating
The sensor packaging protection of good film.
Claims (1)
1. inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor, it is characterised in that: by the broadband ASE
Light source (1), Polarization Controller (2), single mode optical fiber (3), gas chamber pedestal (4), air inlet (5), gas outlet (6), Pd/Au film light
Fine hydrogen gas sensor (7), spectroanalysis instrument (8) and gas chamber barrier (9) composition；Wherein Pd/Au thin film optical filters hydrogen gas sensor (7)
Surface is coated with Au nano thin-film (10) and Pd nano thin-film (11), and Au nano thin-film (10) is with a thickness of 20nm, Au nano thin-film
(10) surface is etched to equilateral triangle gold bullion superstructure array for exciting strong surface plasma resonance；Equilateral triangle gold
Block with a thickness of 10 nanometers, equilateral triangle gold bullion side length is 10 nanometers, and the spacing between equilateral triangle gold bullion center is 20
Nanometer；Pd nano thin-film (11) thickness range is 5-100nm；The fibre core of Pd/Au thin film optical filters hydrogen gas sensor (7) is carved with inclination
Bragg grating (12), inclined Bragg grating (12) length is 10mm, screen periods 556.6nm, and tilt angle is
4 °, Polarization Controller (2) left end is connect with ASE wideband light source (1), and right end is connect with single mode optical fiber (3) left end, Pd/Au film
Optical Fider Hybrogen Sensor (7) right end is connect with spectroanalysis instrument (8).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811059808.1A CN109060728A (en) | 2018-09-12 | 2018-09-12 | Inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor |
| CH00984/19A CH715321B1 (en) | 2018-09-12 | 2019-08-05 | Surface plasmon resonance based hydrogen sensor with a tilted fiber grating surface structure. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811059808.1A CN109060728A (en) | 2018-09-12 | 2018-09-12 | Inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor |
Publications (1)
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| CN109060728A true CN109060728A (en) | 2018-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811059808.1A Pending CN109060728A (en) | 2018-09-12 | 2018-09-12 | Inclined optical fiber grating surface superstructure enhances surface plasma resonance hydrogen sensor |
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| CH (1) | CH715321B1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109916861A (en) * | 2019-04-22 | 2019-06-21 | 中国计量大学 | A kind of double D-type optical fiber hydrogen sensors based on surface plasma resonance |
| CN109946239A (en) * | 2019-04-18 | 2019-06-28 | 中国计量大学 | A kind of fibre optical sensor based on thin-core fibers measurement volatile organic gas |
| CN110186913A (en) * | 2019-06-20 | 2019-08-30 | 中国计量大学 | A kind of slant Bragg fiber grating hydrogen gas sensor based on PDMS |
| CN110261351A (en) * | 2019-06-03 | 2019-09-20 | 暨南大学 | Plasma resonance inclined optical fiber grating hydrogen gas sensor, detection system and method |
| CN110286090A (en) * | 2019-04-19 | 2019-09-27 | 武汉理工大学 | Optical Fider Hybrogen Sensor and its preparation method and application based on Au@Pd nano particle |
| CN113203703A (en) * | 2021-04-29 | 2021-08-03 | 闽江学院 | Optical fiber sensor for detecting trivalent arsenic ions |
| GB2606952B (en) * | 2020-01-20 | 2024-04-10 | Calyx Inc | Optical detector for detecting gas and suspended matter |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111879691A (en) * | 2020-07-31 | 2020-11-03 | 燕山大学 | Atmospheric corrosivity monitoring device and method based on optical fiber surface plasma resonance |
| CN113552124A (en) * | 2021-05-14 | 2021-10-26 | 南京鋆扬信息科技有限公司 | Durability optimization method of fiber grating hydrogen sensor |
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| US20050169807A1 (en) * | 2004-02-04 | 2005-08-04 | The Research Foundation Of State University Of New York | Methods for forming palladium alloy thin films and optical hydrogen sensors employing palladium alloy thin films |
| US20090263072A1 (en) * | 2006-10-25 | 2009-10-22 | Jacques Albert | Tilted Grating Sensor |
| US20090303489A1 (en) * | 2006-07-13 | 2009-12-10 | Aston University | Surface Plasmons |
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| CN105841840A (en) * | 2016-03-30 | 2016-08-10 | 东北大学 | Optical fiber sensor capable of simultaneously measuring hydrogen concentration and temperature |
| CN106290253A (en) * | 2016-11-02 | 2017-01-04 | 中国计量大学 | A kind of optical-fiber type sensor measuring relative humidity in air |
| CN206095937U (en) * | 2016-10-19 | 2017-04-12 | 中国计量大学 | Hygrometry sensor based on PCF air chamber and slope fiber grating |
| CN106896083A (en) * | 2016-07-14 | 2017-06-27 | 暨南大学 | Plasma resonance inclined optical fiber grating sensor, detecting system and method |
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2018
- 2018-09-12 CN CN201811059808.1A patent/CN109060728A/en active Pending
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2019
- 2019-08-05 CH CH00984/19A patent/CH715321B1/en unknown
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