CN109373183A - 一种片状放大器的循环气体吹扫系统 - Google Patents
一种片状放大器的循环气体吹扫系统 Download PDFInfo
- Publication number
- CN109373183A CN109373183A CN201811400665.6A CN201811400665A CN109373183A CN 109373183 A CN109373183 A CN 109373183A CN 201811400665 A CN201811400665 A CN 201811400665A CN 109373183 A CN109373183 A CN 109373183A
- Authority
- CN
- China
- Prior art keywords
- valve
- gas
- pressure reducing
- storage tank
- oxygen atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 title claims abstract description 28
- 239000007789 gas Substances 0.000 claims abstract description 64
- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 claims abstract description 37
- 238000002156 mixing Methods 0.000 claims abstract description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 43
- 239000006200 vaporizer Substances 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 11
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 10
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 229910052779 Neodymium Inorganic materials 0.000 abstract description 12
- 239000011521 glass Substances 0.000 abstract description 12
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052724 xenon Inorganic materials 0.000 abstract description 10
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract description 10
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 238000001914 filtration Methods 0.000 abstract description 3
- 206010003497 Asphyxia Diseases 0.000 abstract 1
- 238000012423 maintenance Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000003344 environmental pollutant Substances 0.000 description 5
- 231100000719 pollutant Toxicity 0.000 description 5
- 239000000203 mixture Substances 0.000 description 3
- 239000000443 aerosol Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- OLBVUFHMDRJKTK-UHFFFAOYSA-N [N].[O] Chemical class [N].[O] OLBVUFHMDRJKTK-UHFFFAOYSA-N 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
- F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/011—Oxygen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/014—Nitrogen
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811400665.6A CN109373183B (zh) | 2018-11-22 | 2018-11-22 | 一种片状放大器的循环气体吹扫系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811400665.6A CN109373183B (zh) | 2018-11-22 | 2018-11-22 | 一种片状放大器的循环气体吹扫系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109373183A true CN109373183A (zh) | 2019-02-22 |
CN109373183B CN109373183B (zh) | 2024-08-13 |
Family
ID=65377445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811400665.6A Active CN109373183B (zh) | 2018-11-22 | 2018-11-22 | 一种片状放大器的循环气体吹扫系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109373183B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111092357A (zh) * | 2019-11-27 | 2020-05-01 | 中国工程物理研究院激光聚变研究中心 | 一种组合式片状激光放大器开放式窗口组件 |
Citations (12)
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---|---|---|---|---|
DE2053246A1 (de) * | 1969-10-31 | 1971-05-06 | Abramson N | Lasergerat zur Steuerung der Fre quenz eines Laserstrahles |
DE19842413C1 (de) * | 1998-09-16 | 1999-10-28 | Linde Ag | Gasversorgung mit Gasen aus Gasbehältern |
FR2872228A1 (fr) * | 2004-06-25 | 2005-12-30 | Europ D Electricite Automatism | Equipement de recyclage et de pressurisation d'un gaz condensable, notamment du xenon en circuit ferme |
DE102008017343A1 (de) * | 2008-04-04 | 2009-10-08 | Linde Aktiengesellschaft | Verfahren zum Abtrennen von Kohlendioxid aus Laserabgas |
WO2012114172A1 (en) * | 2011-02-25 | 2012-08-30 | Gigaphoton Inc. | Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus |
CN104303127A (zh) * | 2012-05-24 | 2015-01-21 | 气体产品与化学公司 | 用于提供气体混合物的方法和设备 |
CN104953444A (zh) * | 2015-07-03 | 2015-09-30 | 中国科学院光电研究院 | 一种用于准分子激光器的气体循环系统 |
CN205159771U (zh) * | 2015-10-29 | 2016-04-13 | 中国工程物理研究院激光聚变研究中心 | 一种片状激光放大器冷却装置 |
CN106841456A (zh) * | 2017-03-10 | 2017-06-13 | 成都凯圣捷科技有限公司 | 正压吹扫防爆色谱仪 |
CN107342531A (zh) * | 2017-07-26 | 2017-11-10 | 中国工程物理研究院激光聚变研究中心 | 一种组合式片状激光放大器和光路 |
CN108445151A (zh) * | 2017-12-18 | 2018-08-24 | 中国原子能科学研究院 | 干法手套箱气溶胶监测系统及监测方法 |
CN209725833U (zh) * | 2018-11-22 | 2019-12-03 | 中国工程物理研究院激光聚变研究中心 | 一种片状放大器的循环气体吹扫系统 |
-
2018
- 2018-11-22 CN CN201811400665.6A patent/CN109373183B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2053246A1 (de) * | 1969-10-31 | 1971-05-06 | Abramson N | Lasergerat zur Steuerung der Fre quenz eines Laserstrahles |
DE19842413C1 (de) * | 1998-09-16 | 1999-10-28 | Linde Ag | Gasversorgung mit Gasen aus Gasbehältern |
FR2872228A1 (fr) * | 2004-06-25 | 2005-12-30 | Europ D Electricite Automatism | Equipement de recyclage et de pressurisation d'un gaz condensable, notamment du xenon en circuit ferme |
DE102008017343A1 (de) * | 2008-04-04 | 2009-10-08 | Linde Aktiengesellschaft | Verfahren zum Abtrennen von Kohlendioxid aus Laserabgas |
WO2012114172A1 (en) * | 2011-02-25 | 2012-08-30 | Gigaphoton Inc. | Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus |
CN104303127A (zh) * | 2012-05-24 | 2015-01-21 | 气体产品与化学公司 | 用于提供气体混合物的方法和设备 |
CN104953444A (zh) * | 2015-07-03 | 2015-09-30 | 中国科学院光电研究院 | 一种用于准分子激光器的气体循环系统 |
CN205159771U (zh) * | 2015-10-29 | 2016-04-13 | 中国工程物理研究院激光聚变研究中心 | 一种片状激光放大器冷却装置 |
CN106841456A (zh) * | 2017-03-10 | 2017-06-13 | 成都凯圣捷科技有限公司 | 正压吹扫防爆色谱仪 |
CN107342531A (zh) * | 2017-07-26 | 2017-11-10 | 中国工程物理研究院激光聚变研究中心 | 一种组合式片状激光放大器和光路 |
CN108445151A (zh) * | 2017-12-18 | 2018-08-24 | 中国原子能科学研究院 | 干法手套箱气溶胶监测系统及监测方法 |
CN209725833U (zh) * | 2018-11-22 | 2019-12-03 | 中国工程物理研究院激光聚变研究中心 | 一种片状放大器的循环气体吹扫系统 |
Non-Patent Citations (2)
Title |
---|
张攀政;冯滔;谢静;任志远;杨晓伟;王利;李菁辉;张志祥;曹兆栋;夏志强;胡静芬;柴志豪;刘志刚;周申蕾;马伟新;朱俭;: "间断多次氮气吹扫法提高片状放大器在线洁净度研究", 中国激光, no. 04, 1 December 2017 (2017-12-01) * |
程晓锋;王洪彬;苗心向;秦朗;叶亚云;陈远斌;吕海兵;熊迁;贺群;马志强;赵龙彪;刘勇;贺少勃;袁晓东;朱启华;景峰;郑万国;: "高功率固体激光驱动器污染控制及片状放大器洁净度改进", 强激光与粒子束, no. 05, 15 May 2013 (2013-05-15) * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111092357A (zh) * | 2019-11-27 | 2020-05-01 | 中国工程物理研究院激光聚变研究中心 | 一种组合式片状激光放大器开放式窗口组件 |
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CN109373183B (zh) | 2024-08-13 |
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CB03 | Change of inventor or designer information |
Inventor after: Chen Lin Inventor after: Dong Yifang Inventor after: Zhang Kun Inventor after: Huang Xing Inventor after: Peng Zhitao Inventor after: Su Jingqin Inventor after: Chen Bo Inventor after: Zheng Kuixing Inventor after: Wei Xiaofeng Inventor after: Zheng Wanguo Inventor after: Zhu Qihua Inventor after: Wang Zhenguo Inventor after: Liu Yong Inventor after: Liu Jianguo Inventor after: Wu Wenlong Inventor after: Lin Donghui Inventor after: Fu Xuejun Inventor after: Jiang Xuejun Inventor after: Wang Lin Inventor before: Wang Zhenguo Inventor before: Dong Yifang Inventor before: Zhang Kun Inventor before: Huang Xing Inventor before: Peng Zhitao Inventor before: Su Jingqin Inventor before: Chen Bo Inventor before: Zheng Kuixing Inventor before: Wei Xiaofeng Inventor before: Zheng Wanguo Inventor before: Zhu Qihua Inventor before: Chen Lin Inventor before: Liu Yong Inventor before: Liu Jianguo Inventor before: Wu Wenlong Inventor before: Du Donghui Inventor before: Fu Xuejun Inventor before: Jiang Xuejun Inventor before: Wang Lin |
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CB03 | Change of inventor or designer information |