CN109360795A - A kind of intelligence magazine and its control method - Google Patents
A kind of intelligence magazine and its control method Download PDFInfo
- Publication number
- CN109360795A CN109360795A CN201810987107.8A CN201810987107A CN109360795A CN 109360795 A CN109360795 A CN 109360795A CN 201810987107 A CN201810987107 A CN 201810987107A CN 109360795 A CN109360795 A CN 109360795A
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- magazine
- module
- intelligent
- alarm
- sensor
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing And Monitoring For Control Systems (AREA)
Abstract
The present invention relates to a kind of intelligent magazine and its control methods, the intelligence magazine is in intelligent plant/digital factory, and it is connect with intelligent plant/digital factory intelligent terminal, the intelligence magazine includes sensor module, communication module, memory module, processor module, alarm module, identification module and battery storage module, the processor module is connected with sensor module, memory module, alarm module and identification module respectively, and the intelligent terminal includes information receiving module and background processor.The present invention with monitor magazine place and transportational process in temperature, humidity, external force and situations such as place, the touch switch of intelligent magazine two sides may be implemented to leak slotting baffle alarm, and personnel's authority managing and controlling may be implemented in the identification system of intelligent magazine.
Description
Technical field
The present invention relates to a kind of intelligent magazine and its control methods, belong to intelligent plant and encapsulation technology field.
Background technique
At present in semiconductor packaging process, after load, load before baking, bonding wire in plasma cleaning, bonding wire and encapsulating
The material process stage requires that lead frame product or pdm substrate are transmitted and protected by magazine.
Traditional magazine is as depicted in figs. 1 and 2, includes that magazine body 1 and magazine baffle 2, only transport and part are protected
Function, in placement process usually can, two side baffles improper because of falling head be not turned off etc. cause to fall material, get rid of material etc. it is different
Often.As the miniaturization, slimming, multiple rows ofization of product develop, the thickness of lead frame is more and more thinner, and area is increasing,
Even if transport, in loading process by slight external impacts, fall, also lead to lead frame deformation, Product jointing failure, very
To causing reliability hidden danger to flow to client.
So traditional magazine can not carry the monitoring control of product whole process in today of intelligent information high speed development
The manufacture requirement of system, not can guarantee product in the middle reliability of manufacturing process and security requirement.
Summary of the invention
The technical problem to be solved by the present invention is to provide one kind for the above-mentioned prior art and can constantly monitor to transport
Stress monitors, positions the intelligent magazine of placement region in journey.
The present invention solves the above problems used technical solution are as follows: a kind of intelligence magazine is used for intelligent plant/digitlization
It in factory, and is connect with intelligent plant/digital factory intelligent terminal, the intelligence magazine includes sensor module, communication
Module, memory module, processor module, alarm module, identification module and battery storage module, the processor module
It is connected respectively with sensor module, memory module, alarm module and identification module, the intelligent terminal includes information
Receiving module and background processor.
Preferably, sensor module includes pressure sensor, and pressure sensor is loaded into intelligent magazine side and bottom, right
Pressure range is arranged in each pressure sensor, if section of any one side pressure sensor stress beyond expected setting, is reported
Alert indicator light flashing, voice prompt alarm, pressure data is sent to information receiving module by communication module, and transfers to intelligent end
End, the data monitoring as transportational process.
Preferably, the setting of intelligent magazine bottom is there are four pressure sensor, under placement status, the pressure of intelligent magazine bottom four
If the force snesor wherein non-stress of any one or more sensors, or exceed with the quantity difference of other pressure sensors
Certain specification, it is contemplated that intelligent magazine places inclination at this time or bottom is not completely placed in plane, alarm lamp flashing, voice
Prompt alarm.
Preferably, sensor module further includes temperature sensor and humidity sensor, equally to temperature sensor and humidity
Specification section is arranged in sensor, if temperature sensor or humidity sensor receive specification section of the information beyond setting, reports
Alert indicator light flashing, voice prompt alarm, pressure data is sent to information receiving module by communication module, and goes to intelligent end
End, as data monitoring of the product in roasting procedure, transport and storing process.
Preferably, the position of baffle is inserted in intelligent magazine two sides, and trigger-type contact-making switch, contact when baffle inserts are set
In an ON state, contact-making switch is in an off state switch when baffle is removed；When intelligent magazine base pressure sensor is in
When force-free state, i.e., intelligent magazine, which is in carry, picks up state, such as any one trigger-type contact-making switch of intelligent magazine two sides
It is in an off state, then alarm lamp flashes, voice prompting device alarm.
Preferably, intelligent magazine top loading identification system identifies operator's by fingerprint or label mode
Identity is passed the information on to processor module, processor module contrast operation personal information whether with the information one in memory
It causes, such as comparison finds non-designated operator, then alarm lamp flashes, voice prompting device alarm.
A kind of intelligence magazine transportational process monitoring method, the described method comprises the following steps:
Step S10, intelligent magazine sensor module receive external condition information；
Step S20, judges whether sensor module pressure exceeds the preset pressure upper limit, is, executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
A kind of intelligence magazine placement period control method, the described method comprises the following steps:
Step S10, intelligent magazine sensor module receive external condition information；
Step S40, judges whether the pressure sensor data difference of magazine bottom four exceeds pre-set specifications, is to execute
S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
It is a kind of intelligence magazine baking and storage when course monitoring method, the described method comprises the following steps:
Step S10, intelligent magazine sensor receive external condition information；
Step S50, judges whether intelligent magazine temperature and moisture sensors exceed pre-set specifications, is to execute S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
A kind of intelligence magazine damper status monitoring method when taking, the described method comprises the following steps:
Step S10, intelligent magazine sensor receive external condition information；
Step S60 judges whether stress is 0 to the pressure sensor of intelligent magazine bottom four, is to execute S70；
Step S70 judges that any one trigger-type contact-making switch of intelligent magazine two sides is in an off state, is to execute
S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
A kind of control method of intelligence magazine operating right, the described method comprises the following steps:
Step S80, intelligent magazine identification system receive operator's information；
Step S90 judges whether operator's information is consistent with the preset personal information of memory, otherwise executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
Compared with the prior art, the advantages of the present invention are as follows:
The present invention is mounted with pressure sensor, temperature sensor and humidity sensor, Ke Yijian because of the intelligent magazine
Material controlling box place and transportational process in temperature, humidity, external force and place situations such as, the trigger-type of intelligent magazine two sides
Switch may be implemented to leak slotting baffle alarm, and the identification system of intelligent magazine may be implemented personnel's authority managing and controlling, described in cooperation
Intelligent terminal can monitor magazine state in real time, can be applied in intelligent plant/digital factory guarantee product whole process
The manufacture requirement that key characteristic monitors and controls.
Detailed description of the invention
Fig. 1 is the top view of traditional magazine.
Fig. 2 is the schematic perspective view of traditional magazine.
Fig. 3 is a kind of hardware structural diagram of intelligent magazine of the present invention.
Fig. 4 is a kind of schematic illustration of intelligent magazine transportational process monitoring method of the present invention.
Fig. 5 is the schematic illustration that a kind of intelligent magazine of the present invention places period control method.
The schematic illustration of course monitoring method when Fig. 6 is a kind of intelligent magazine baking of the present invention and storage.
Fig. 7 is the schematic illustration of damper status monitoring method when a kind of intelligent magazine of the present invention is taken.
Fig. 8 is a kind of schematic illustration of the control method of intelligent magazine operating right of the present invention.
Specific embodiment
The present invention will be described in further detail below with reference to the embodiments of the drawings.
As shown in figure 3, one of the present embodiment intelligence magazine 100, is used in intelligent plant/digital factory, and with
Intelligent plant/digital factory intelligent terminal 200 connects；The intelligence magazine 100 includes sensor module 10, communication module
20, memory module 30, processor module 40, alarm module 50, identification module 60 and battery storage module 70, the place
Reason device module 40 is connected with sensor module 10, memory module 30, alarm module 50 and identification module 60 respectively, institute
It states and is stored with computer program in memory module 30, the computer program is executed by processor module 40, the sensor
Module 10 and identification module 60 receive external information, and send information to processor module 40, the intelligent terminal 200
Include information receiving module and background processor；
As first embodiment, sensor module 10 includes pressure sensor 11, temperature sensor 12 or humidity sensor
13, pressure sensor 11 is loaded into intelligent magazine side and bottom, and humidity sensor 12 and humidity sensor 13 are loaded into intelligence
At the top of magazine；
Pressure range is arranged to each pressure sensor, if any one side pressure sensor stress is beyond expected setting
Section, then alarm lamp flashing, voice prompt alarm, pressure data is sent to information receiving module by communication module, and is turned
It send to intelligent terminal, the data monitoring as transportational process；
As second embodiment, under placement status, if the pressure sensor of intelligent magazine bottom four wherein any one
Or multiple non-stress of sensor, or exceed certain specification with the quantity difference of other pressure sensors, it is contemplated that intelligence at this time
Magazine places inclination or bottom is not completely placed in plane, alarm lamp flashing, voice prompt alarm.
As 3rd embodiment, in intelligent magazine side mounting temperature sensor and humidity sensor, equally temperature is passed
Specification section is arranged in sensor and humidity sensor, if sensor receives specification section of the information beyond setting, police instruction
Lamp flashing, voice prompt alarm, pressure data is sent to information receiving module by communication module, and goes to intelligent terminal, as
Data monitoring of the product in roasting procedure, transport and storing process.
As fourth embodiment, the position of baffle is inserted in intelligent magazine two sides, trigger-type contact-making switch is set, baffle is inserted
In an ON state, contact-making switch is in an off state contact-making switch when baffle is removed when putting；When intelligent magazine base pressure passes
When sensor is in force-free state, i.e., intelligent magazine, which is in carry, picks up state, such as any one trigger-type of intelligent magazine two sides
Contact-making switch is in an off state, then alarm lamp flashes, voice prompting device alarm.
As the 5th embodiment, different responsibility personnel are set in intelligent terminal and possess different permissions, pass through communication module
It is sent to the information receiving module of intelligent magazine, is stored in intelligent magazine memory module；
In intelligent magazine top loading identification system, it can choose and identify operator by modes such as fingerprint, labels
The identity of member is passed the information on to the processor module at top, processor module contrast operation personal information whether with memory
In information it is consistent, such as comparison finds non-designated operator, then alarm lamp flashes, voice prompting device alarm.
Communication module 20 can be connected by local area network or internet with intelligent plant/digital factory intelligent terminal 20
It connects, communication module 20 can send information or instruction；
Memory 30 can be used for storing various data and software program.Memory can mainly include storing program area and deposit
Data field is stored up, wherein storing program area can (such as the alarm command of application program needed for storage program area, at least one function
Function etc.)；Storage data area can store required data when intelligent magazine uses, and (for example sensor needs control bound number
Value etc.).In addition, memory may include high-speed random access memory, it can also include nonvolatile memory, for example, at least
One disk memory, flush memory device or other volatile solid-state parts.
Processor module 40 is the control centre of intelligent magazine, utilizes the entire intelligent magazine of various interfaces and connection
Various pieces, by running or execute the software program and/or module that are stored in memory, and call and be stored in storage
Data in device execute the various functions and processing data of intelligent magazine, to carry out integral monitoring to intelligent magazine.Processor
Module may include one or more processing units, it is preferred that processor module can integrate application processor and modulation /demodulation processing
Device, wherein the main processing operation system of application processor, user interface and application program etc., modem processor is mainly located
Reason wireless communication.It is understood that above-mentioned modem processor can not also be integrated into the processor.
Battery storage module 70 is powered for each modular system.
It will be understood by those skilled in the art that intelligence magazine structure shown in Fig. 3 does not constitute the limit to intelligent magazine
It is fixed, it may include perhaps combining certain components or different component layouts than illustrating more or fewer components.
As shown in figure 4, one of the present embodiment intelligence magazine transportational process monitoring method, is applied to intelligent plant/number
Intelligent magazine in word chemical plant, the intelligence magazine and intelligent terminal communication connection, the intelligence magazine monitoring method include:
Step S10, intelligent magazine sensor module receive external condition information；
Step S20, judges whether sensor module pressure exceeds the preset pressure upper limit, is, executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
In the present embodiment, the upper pressure limit of the pressure sensor of the different zones including intelligent magazine is pre-set
, the different magazine state of setting may be selected in intelligent magazine, such as is set as transport, feeding, idle state etc., and guarantee will not be
Invalid alarm occurs when magazine is vacant.
As shown in figure 5, one of the present embodiment intelligence magazine places period control method, the intelligence magazine control method
Include:
Step S10, intelligent magazine sensor module receive external condition information；
Step S40, judges whether the pressure sensor data difference of magazine bottom four exceeds pre-set specifications, is to execute
S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
As shown in fig. 6, the course monitoring method when intelligence magazine baking of one of the present embodiment and storage, is applied to intelligence
Intelligent magazine in energy factory/digital factory, the intelligence magazine and intelligent terminal communication connection, the intelligence magazine controlling party
Method includes:
Step S10, intelligent magazine sensor receive external condition information；
Step S50, judges whether intelligent magazine temperature and moisture sensors exceed pre-set specifications, is to execute S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
As shown in fig. 7, damper status monitoring method when one of the present embodiment intelligence magazine is taken, the intelligence magazine
Monitoring method includes:
Step S10, intelligent magazine sensor receive external condition information；
Step S60 judges whether stress is 0 to the pressure sensor of intelligent magazine bottom four, is to execute S70；
Step S70 judges that any one trigger-type contact-making switch of intelligent magazine two sides is in an off state, is to execute
S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
As shown in figure 8, the control method of one of the present embodiment intelligence magazine operating right, the intelligence magazine control
Method includes:
Step S80, intelligent magazine identification system receive operator's information；
Step S90 judges whether operator's information is consistent with the preset personal information of memory, otherwise executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
In addition to the implementation, all to use equivalent transformation or equivalent replacement the invention also includes there is an other embodiments
The technical solution that mode is formed should all be fallen within the scope of the hereto appended claims.
Claims (11)
1. a kind of intelligence magazine, it is characterised in that: in intelligent plant/digital factory, and with intelligent plant/number chemical industry
The intelligent terminal of factory connects, and the intelligence magazine includes sensor module, communication module, memory module, processor module, report
Alert module, identification module and battery storage module, the processor module respectively with sensor module, memory module,
Alarm module is connected with identification module, and the intelligent terminal includes information receiving module and background processor.
2. a kind of intelligent magazine according to claim 1, it is characterised in that: sensor module includes pressure sensor, pressure
Force snesor is loaded into intelligent magazine side and bottom, pressure range is arranged to each pressure sensor, if any one side pressure
Section of the force snesor stress beyond expected setting, then alarm lamp flashing, voice prompt alarm, communication module is by number pressure
According to being sent to information receiving module, and intelligent terminal is transferred to, the data monitoring as transportational process.
3. a kind of intelligent magazine according to claim 2, it is characterised in that: there are four pressure to pass for intelligent magazine bottom setting
Sensor, under placement status, if the pressure sensor of the intelligent magazine bottom four wherein non-stress of any one or more sensors,
Or exceed certain specification with the quantity difference of other pressure sensors, it is contemplated that intelligent magazine places inclination or bottom at this time
It is not completely placed in plane, alarm lamp flashing, voice prompt alarm.
4. a kind of intelligent magazine according to claim 1, it is characterised in that: sensor module further include temperature sensor and
Specification section equally is arranged to temperature sensor and humidity sensor, if temperature sensor or humidity sensor in humidity sensor
Device receives specification section of the information beyond setting, then alarm lamp flashing, voice prompt alarm, and communication module is by pressure data
It is sent to information receiving module, and goes to intelligent terminal, as data prison of the product in roasting procedure, transport and storing process
Control.
5. a kind of intelligent magazine according to claim 2, it is characterised in that: insert the position of baffle in intelligent magazine two sides
It sets, trigger-type contact-making switch is set, in an ON state, contact-making switch is in disconnected to contact-making switch when baffle is removed when baffle inserts
Open state；When intelligent magazine base pressure sensor is in force-free state, i.e., intelligent magazine, which is in carry, picks up state, such as
Any one trigger-type contact-making switch of intelligent magazine two sides is in an off state, then alarm lamp flashes, voice prompting device report
It is alert.
6. a kind of intelligent magazine according to claim 1, it is characterised in that: intelligent magazine top loading identification system
System, the identity of operator is identified by fingerprint or label mode, is passed the information on to processor module, processor module comparison
Whether operator's information is consistent with the information in memory module, and such as comparison finds non-designated operator, then alarm refers to
Show that lamp flashes, voice prompting device alarm.
7. a kind of intelligence magazine transportational process monitoring method, it is characterised in that the described method comprises the following steps:
Step S10, intelligent magazine sensor module receive external condition information；
Step S20, judges whether sensor module pressure exceeds the preset pressure upper limit, is, executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
8. a kind of intelligence magazine places period control method, it is characterised in that the described method comprises the following steps:
Step S10, intelligent magazine sensor module receive external condition information；
Step S40, judges whether the pressure sensor data difference of magazine bottom four exceeds pre-set specifications, is to execute S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
9. course monitoring method when a kind of intelligence magazine baking and storage, it is characterised in that the described method comprises the following steps:
Step S10, intelligent magazine sensor receive external condition information；
Step S50, judges whether intelligent magazine temperature and moisture sensors exceed pre-set specifications, is to execute S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
Damper status monitoring method when 10. a kind of intelligence magazine is taken, it is characterised in that the described method comprises the following steps:
Step S10, intelligent magazine sensor receive external condition information；
Step S60 judges whether stress is 0 to the pressure sensor of intelligent magazine bottom four, is to execute S70；
Step S70 judges that any one trigger-type contact-making switch of intelligent magazine two sides is in an off state, is to execute S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
11. a kind of control method of intelligence magazine operating right, it is characterised in that the described method comprises the following steps:
Step S80, intelligent magazine identification system receive operator's information；
Step S90 judges whether operator's information is consistent with the preset personal information of memory, otherwise executes S30；
Step S30 sends alarm command and information to the intelligent terminal, while sending a command to alarm module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810987107.8A CN109360795A (en) | 2018-08-28 | 2018-08-28 | A kind of intelligence magazine and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810987107.8A CN109360795A (en) | 2018-08-28 | 2018-08-28 | A kind of intelligence magazine and its control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109360795A true CN109360795A (en) | 2019-02-19 |
Family
ID=65350005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810987107.8A Pending CN109360795A (en) | 2018-08-28 | 2018-08-28 | A kind of intelligence magazine and its control method |
Country Status (1)
| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110096038A (en) * | 2019-04-03 | 2019-08-06 | 长电科技（宿迁）有限公司 | A kind of functional module automatic control system and its control method |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19752439A1 (en) * | 1997-11-26 | 1999-06-02 | Siemens Ag | Micromechanical inclination sensor, especially for motor vehicles |
| CN1369901A (en) * | 2001-02-09 | 2002-09-18 | 株式会社东芝 | Mfg. method of semiconductor device |
| KR20040021985A (en) * | 2002-09-06 | 2004-03-11 | 엘지.필립스 엘시디 주식회사 | Structure for sensing of cassette loading in Automatically Guided Vehichle |
| KR20060075551A (en) * | 2004-12-28 | 2006-07-04 | 동부일렉트로닉스 주식회사 | Standard mechanical interface apparatus |
| CN102446790A (en) * | 2010-09-30 | 2012-05-09 | 芝浦机械电子装置股份有限公司 | Sealed container and semiconductor manufacturing apparatus |
| CN102473664A (en) * | 2009-07-09 | 2012-05-23 | 信越聚合物株式会社 | Substrate-storing container |
| CN103839860A (en) * | 2012-11-23 | 2014-06-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film magazine lifting device and film magazine transmission system with film magazine lifting device |
| CN205452253U (en) * | 2016-03-09 | 2016-08-10 | 武汉新芯集成电路制造有限公司 | Intelligence FOUP |
| CN106206359A (en) * | 2015-05-05 | 2016-12-07 | 中芯国际集成电路制造(上海)有限公司 | Control method in semiconductor fabrication processes and system |
| CN206363994U (en) * | 2017-01-17 | 2017-07-28 | 中芯国际集成电路制造（天津）有限公司 | Wafer load device |
-
2018
- 2018-08-28 CN CN201810987107.8A patent/CN109360795A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19752439A1 (en) * | 1997-11-26 | 1999-06-02 | Siemens Ag | Micromechanical inclination sensor, especially for motor vehicles |
| CN1369901A (en) * | 2001-02-09 | 2002-09-18 | 株式会社东芝 | Mfg. method of semiconductor device |
| KR20040021985A (en) * | 2002-09-06 | 2004-03-11 | 엘지.필립스 엘시디 주식회사 | Structure for sensing of cassette loading in Automatically Guided Vehichle |
| KR20060075551A (en) * | 2004-12-28 | 2006-07-04 | 동부일렉트로닉스 주식회사 | Standard mechanical interface apparatus |
| CN102473664A (en) * | 2009-07-09 | 2012-05-23 | 信越聚合物株式会社 | Substrate-storing container |
| CN102446790A (en) * | 2010-09-30 | 2012-05-09 | 芝浦机械电子装置股份有限公司 | Sealed container and semiconductor manufacturing apparatus |
| CN103839860A (en) * | 2012-11-23 | 2014-06-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film magazine lifting device and film magazine transmission system with film magazine lifting device |
| CN106206359A (en) * | 2015-05-05 | 2016-12-07 | 中芯国际集成电路制造(上海)有限公司 | Control method in semiconductor fabrication processes and system |
| CN205452253U (en) * | 2016-03-09 | 2016-08-10 | 武汉新芯集成电路制造有限公司 | Intelligence FOUP |
| CN206363994U (en) * | 2017-01-17 | 2017-07-28 | 中芯国际集成电路制造（天津）有限公司 | Wafer load device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110096038A (en) * | 2019-04-03 | 2019-08-06 | 长电科技（宿迁）有限公司 | A kind of functional module automatic control system and its control method |
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Application publication date: 20190219 |
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