CN103839860A - Film magazine lifting device and film magazine transmission system with film magazine lifting device - Google Patents
Film magazine lifting device and film magazine transmission system with film magazine lifting device Download PDFInfo
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- CN103839860A CN103839860A CN201210483285.XA CN201210483285A CN103839860A CN 103839860 A CN103839860 A CN 103839860A CN 201210483285 A CN201210483285 A CN 201210483285A CN 103839860 A CN103839860 A CN 103839860A
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- film magazine
- lifting device
- pallet
- box lifting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a film magazine lifting device comprising a shell which is internally provided with a bearing chamber; a film magazine pallet which is arranged in the bearing chamber and used for bearing film magazines; a driver which is used for driving the film magazine pallet to be liftable in the bearing chamber along a vertical direction; and at least four detection sensors which are respectively arranged on the film magazine pallet and corresponding to positions at which the film magazines are required to be arranged and are used for detecting whether the film magazines are arranged at the positions at which the film magazines are required to be arranged. According to the film magazine lifting device of the embodiment of the invention, a risk of crushing caused by the fact that the film magazines are not arranged at the positions at which the film magazines are required to be arranged can be avoided. The invention also discloses a film magazine transmission system with the aforementioned film magazine lifting device.
Description
Technical field
The present invention relates to semiconductor equipment and manufacture field, especially relate to a kind of box lifting device and there is its film magazine transmission system.
Background technology
In semi-conductive preparation technology, pending wafer need to progressively be sent in reaction chamber and carry out PROCESS FOR TREATMENT from atmospheric environment, such as etching technics, physical vapour deposition (PVD) etc.By wafer transmission system by wafer transmission in reaction chamber, this wafer transmission system comprises film magazine loading attachment, vacuum panels box lifting device, vacuum mechanical-arm and transmission chamber.
First the film magazine bogey that film magazine is housed is placed on film magazine loading attachment.Film magazine loading attachment takes out film magazine from film magazine bogey, and then the automatically-controlled door of vacuum panels box lifting device is opened, and film magazine loading attachment is delivered to film magazine on the film magazine pallet in vacuum panels box lifting device, and the automatically-controlled door of vacuum panels box lifting device is closed.Vacuum panels box lifting device is raised to correct position by film magazine as requested, and vacuum mechanical-arm takes out wafer from film magazine, delivers to and in reaction chamber, carries out corresponding technique.
In order to ensure the safe lifting of film magazine in vacuum panels box lifting device, need to detect the placement situation of film magazine on film magazine pallet.Whether prior art adopts as shown in Figure 4 mechanical film magazine to put transducer 309 and detects film magazine and place correctly, in the time that film magazine is put into film magazine pallet, utilizes clamp bar 310 and fixture block 311 to locate.Place when correct when film magazine position, film magazine is put transducer 309 and is depressed, and represents that film magazine position is accurate, and vacuum panels box lifting device can carry out descending operation.In the time that film magazine is put transducer and is not depressed, exist two kinds may: one is really there is no film magazine in current vacuum panels box lifting device; Another kind is to have film magazine in current vacuum panels box lifting device, but film magazine is not just being put.Therefore, existing safety assurance mechanism cannot realize and detect on film magazine pallet, whether be placed with magazine and confirm whether correct magazine position puts simultaneously.
Summary of the invention
The present invention is intended at least solve one of technical problem existing in prior art.
For this reason, one object of the present invention is to propose a kind of squeezed broken sheet box lifting device of film magazine of avoiding.
Another object of the present invention is to propose a kind of film magazine transmission system with above-mentioned box lifting device.
According to the sheet box lifting device of first aspect present invention embodiment, comprising: housing, has carrying chamber in described housing; Film magazine pallet, it is indoor for carrying tablet box that described film magazine pallet is located at described bearing cavity; Driver, described driver is used for driving described film magazine pallet indoor along vertical direction liftable at described bearing cavity; At least four detecting sensors, described detecting sensor is separately positioned on described film magazine pallet and is corresponding with the required putting position of described film magazine, whether is placed on described required putting position for detection of described film magazine.
According to the sheet box lifting device of the embodiment of the present invention, avoid in initialization procedure and course of normal operation film magazine not to be placed on described required putting position and squeezed broken risk, expensive cost and the unexpected system maintenance time of minimizing of avoiding crowded bad film magazine and wafer to bring, the fail safe that has improved sheet box lifting device.
In addition, also there is following additional technical feature according to of the present invention box lifting device:
Particularly, described detecting sensor is reflective photoelectric sensor, and the photoelectron emission of described reflective photoelectric sensor distance is adjustable.Thereby make film magazine lifting device structure simple.
Further, the described photoelectron emission of described reflective photoelectric sensor distance be less than in the time that described film magazine pallet is positioned on the bottom surface of described carrying chamber described in the extremely distance of the roof of described carrying chamber of film magazine pallet.Thereby further ensure to avoid film magazine squeezed broken owing to not being placed on described required putting position.
Further, on described film magazine pallet, be formed with multiple installing holes, wherein multiple reflective photoelectric sensors are located at respectively described multiple installing holes below.Thereby be convenient to the installation of reflective photoelectric sensor.
In some embodiments of the invention, described detecting sensor is four, and four described detecting sensors are located at respectively the corner of the adjacent edge of the described required putting position of described film magazine.Thereby can ensure that four detecting sensors can detect accurately film magazine and whether be placed on described required putting position.
In other embodiment of the present invention, described detecting sensor is four, and four described detecting sensors are located at respectively the center on the four edges of described required putting position of described film magazine.Thereby can ensure that four detecting sensors can detect accurately film magazine and whether be placed on described required putting position.
Further, sheet box lifting device also comprises: correlation photoelectric sensor, and described correlation photoelectric sensor comprises emission part and acceptance division, wherein said emission part and acceptance division are located at respectively on the left and right sides wall of described carrying chamber.Thereby further ensure to avoid film magazine owing to not being placed on described required putting position and squeezed broken.
According to the film magazine transmission system of second aspect present invention embodiment, the film magazine in described film magazine transmission system is used for carrying at least one wafer, comprising: for loading the film magazine loading attachment of film magazine; According to the sheet box lifting device of first aspect present invention embodiment, described film magazine loading attachment is for being transferred to described film magazine pallet by described film magazine; Slice getting device, described slice getting device is for getting sheet to the described wafer that is arranged on the described film magazine on described film magazine pallet; And process equipment, described process equipment is for carrying out PROCESS FOR TREATMENT to the described wafer taking out.
According to the film magazine transmission system of the embodiment of the present invention, in the process of the film magazine pallet lifting of sheet box lifting device, can avoid because film magazine is not placed on described required putting position and squeezed broken risk, high cost and the unexpected system maintenance time of minimizing of having avoided crowded bad film magazine and wafer to bring, thereby reduce costs, increase work efficiency.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Brief description of the drawings
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination is understood becoming the description of embodiment obviously and easily, wherein:
Fig. 1 is according to the schematic diagram of the sheet box lifting device of the embodiment of the present invention;
Fig. 2 is that film magazine pallet, the film magazine in the sheet box lifting device shown in Fig. 1 put the schematic diagram of transducer and detecting sensor;
Fig. 3 is according to the schematic diagram of the film magazine transmission system of the embodiment of the present invention;
Fig. 4 is the schematic diagram of the existing film magazine pallet that safety assurance mechanism is installed.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Be exemplary below by the embodiment being described with reference to the drawings, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of instructions such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of device or the element of instruction or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " be only for describing object, and can not be interpreted as instruction or hint relative importance.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be also electrical connection; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete meaning in the present invention.In addition,, in description of the invention, except as otherwise noted, the implication of " multiple " is two or more.
Describe according to a kind of sheet box lifting device 100 of first aspect present invention embodiment below with reference to Fig. 1 and Fig. 2, this sheet box lifting device 100 can be used for film magazine 9 to be sent to precalculated position.
As depicted in figs. 1 and 2, comprise according to the sheet box lifting device 100 of the embodiment of the present invention: housing 1, film magazine pallet 2, driver (scheming not shown) and at least four detecting sensors 4.Wherein, in housing 1, there is carrying chamber 10.Film magazine pallet 2 is located in carrying chamber 10 for carrying film magazine 9.Driver be used for driving film magazine pallet 2 carrying chamber 10 in along vertical direction liftable.Detecting sensor 4 is separately positioned on film magazine pallet 2 and is corresponding with the required putting position of film magazine 9, whether is placed on required putting position for detection of film magazine 9.Wherein, on film magazine pallet 2, can be formed with draw-in groove 20, the bottom of film magazine 9 is formed with the clamping part (scheming not shown) coordinating with draw-in groove 20, is firmly carried on film magazine pallet 2 thereby can be convenient to film magazine 9.
Wherein, in the process of working at lowering or hoisting gear 100, in the time that each at least four detecting sensors 4 all detects signal, represent to carry film magazine 9 on film magazine pallet 2 and this film magazine 9 is placed on described required putting position, now driver can drive film magazine pallet 2 to carry out descending operation.
In the time that each at least four detecting sensors 4 does not all detect signal, represent not to be placed with film magazine 9 on film magazine pallet 2, now can new film magazine 9 is placed on film magazine pallet 2 and be located on described required putting position, then lowering or hoisting gear 100 carries out descending operation again.
In the time that a part of detecting sensor 4 at least four detecting sensors 4 does not detect that signal and another part detecting sensor 4 detect signal, represent to be placed with film magazine 9 on film magazine pallet 2 but film magazine 9 is not placed on described required putting position, now operating personnel are placed in incorrect putting position film magazine 9 on described required putting position, and then sheet box lifting device 100 carries out descending operation again.
According to the sheet box lifting device 100 of the embodiment of the present invention, by being provided with at least four detecting sensors 4, can avoid in initialization procedure and course of normal operation film magazine 9 not to be placed on described required putting position and squeezed broken risk, expensive cost and the unexpected system maintenance time of minimizing of avoiding crowded bad film magazine 9 and wafer to bring, the fail safe that has improved sheet box lifting device 100.
Alternatively, detecting sensor 4 is reflective photoelectric sensor, and the photoelectron emission of reflective photoelectric sensor 4 distance can preset and adjustable.Reflective photoelectric sensor 4 has advantages of that the wiring of installation is easy, is convenient to light path alignment while installing and using, is not subject to shape, color and the material of checking matter affect and save and install and use space, thereby makes sheet box lifting device 100 simple in structure.
Further, the default photoelectron emission of reflective photoelectric sensor 4 distance is less than the distance of film magazine pallet 2 roofs to carrying chamber 10 in the time that film magazine pallet 2 is positioned on the bottom surface of carrying chamber 10.Thereby in the time that reflective photoelectric sensor 4 does not detect signal, the light of reflective photoelectric sensor 4 can not be transmitted into the roof of carrying chamber 10 and be reflected back, and has avoided wrong signal, has further ensured the accuracy of sheet box lifting device 100.
Further, as shown in Figure 2, be formed with multiple installing holes 21 on film magazine pallet 2, wherein multiple reflective photoelectric sensors 4 are located at respectively multiple installing holes 21 belows.Thereby be convenient to the installation of reflective photoelectric sensor 4.
In some embodiments of the invention, as shown in Figure 2, multiple reflective photoelectric sensors 4 are located on film magazine pallet 2.Certainly the invention is not restricted to this, multiple reflective photoelectric sensors 4 also can be located on the roof of carrying chamber 10.In the time that reflective photoelectric sensor 4 is located on the roof that carries chamber 10, the default photoelectron emission distance of reflective photoelectric sensor 4 is less than the distance between diapire and the roof that carries chamber 10.In an example of the present invention, reflective photoelectric sensor 4 comprises four, and four reflective photoelectric sensors 4 be located at respectively film magazine 9 described required putting position edge and be symmetrical arranged with respect to 20 one-tenth of draw-in grooves.Thereby can ensure that four reflective photoelectric sensors 4 can detect accurately film magazine 9 and whether be placed on described required putting position.
In another example of the present invention, reflective photoelectric sensor 4 comprises four, and four reflective photoelectric sensors 4 are located at respectively the corner of the adjacent edge of the described required putting position of film magazine 9, in other words, the position that described required putting position takies while being film magazine 9 correct placement on film magazine pallet 2, in example of the present invention, film magazine 9 is rendered as substantially square, therefore described required putting position is also rendered as square (as shown in the dotted line in Fig. 2) substantially, now the corner of the adjacent edge of described required putting position is four substantially square angles.Thereby can ensure that four reflective photoelectric sensors 4 can detect accurately film magazine 9 and whether be placed on described required putting position.
In another example of the present invention, detecting sensor 4 is four, and four detecting sensors 4 are located at respectively the center on the four edges of described required putting position of film magazine 9.Thereby can ensure that four detecting sensors 4 can detect accurately film magazine 9 and whether be placed on described required putting position.
In some embodiments of the invention, sheet box lifting device 100 also comprises correlation photoelectric sensor 5, and correlation photoelectric sensor 5 comprises emission part 50 and acceptance division 51, and wherein emission part 50 and acceptance division 51 are located at respectively on the left and right sides wall of carrying chamber 10.In the example of Fig. 1, emission part 50 is located on the right side wall of carrying chamber 10, and acceptance division 51 is located on the left side wall of carrying chamber 10.Carry the film magazine pallet 2 that is placed on the film magazine 9 on described required putting position in the process of lifting, the light that the emission part 50 of correlation photoelectric sensor 5 is launched can be blocked by film magazine 9 always, make acceptance division 51 cannot receive the light that emission part 50 is launched, thereby by being provided with correlation photoelectric sensor 5, can be used to detect on film magazine pallet 2, whether to be placed with film magazine 9 and whether film magazine 9 is placed on described required putting position, thereby further ensured to avoid film magazine 9 owing to not being placed on described required putting position and squeezed broken.
Whether in further embodiment of the present invention, sheet box lifting device 100 also can include film magazine and put transducer 3, and this is put transducer 3 and is located on film magazine pallet 2, block to draw-in groove 20 for detection of film magazine 9.In the time that each at least four detecting sensors 4 all detects signal, represent that film magazine 9 is placed on described required putting position, now film magazine 9 snaps in draw-in groove 20, put transducer 3 and be depressed, thereby can further ensure to avoid film magazine 9 owing to not being placed on described required putting position and squeezed broken.
Describe according to a kind of film magazine transmission system 200 of second aspect present invention embodiment below with reference to Fig. 1-Fig. 3, film magazine 9 is for carrying at least one wafer.
As shown in Figure 3, comprise according to the film magazine transmission system 200 of the embodiment of the present invention: film magazine loading attachment 6, sheet box lifting device 100, slice getting device 7 and process equipment 8, wherein, film magazine loading attachment 6 is for loading film magazine 9.Sheet box lifting device 100 is the sheet box lifting device 100 according to first aspect present invention embodiment, and film magazine loading attachment 6 is for being transferred to film magazine pallet 2 by film magazine 9.Slice getting device 7 is for getting sheet to the wafer that is arranged on the film magazine 9 on film magazine pallet 2.Process equipment 8 is for carrying out PROCESS FOR TREATMENT to the wafer taking out.
Film magazine loading attachment 6 is transferred to film magazine 9 on the film magazine pallet 2 of sheet box lifting device 100, driver drives film magazine pallet 2 in sheet box lifting device 100 carrying chamber 10 in along vertical direction lifting, so that the film magazine on film magazine pallet 29 is transferred to suitable position, then slice getting device 7 is delivered to and in process equipment 8, is carried out PROCESS FOR TREATMENT after wafer being taken out from film magazine 9.Alternatively, slice getting device 7 can be manipulator.
According to the film magazine transmission system 200 of the embodiment of the present invention, in the process of film magazine pallet 2 liftings of sheet box lifting device 100, can avoid because film magazine 9 is not placed on described required putting position and squeezed broken risk, high cost and the unexpected system maintenance time of minimizing of having avoided crowded bad film magazine 9 and wafer to bring, thereby reduce costs, increase work efficiency.
In the description of this specification, the description of reference term " embodiment ", " some embodiment ", " illustrative examples ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And specific features, structure, material or the feature of description can be with suitable mode combination in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, amendment, replacement and modification to these embodiment, scope of the present invention is limited by claim and equivalent thereof.
Claims (8)
1. a sheet box lifting device, is characterized in that, comprising:
Housing, has carrying chamber in described housing;
Film magazine pallet, it is indoor for carrying tablet box that described film magazine pallet is located at described bearing cavity;
Driver, described driver is used for driving described film magazine pallet indoor along vertical direction liftable at described bearing cavity; With
At least four detecting sensors, described detecting sensor is separately positioned on described film magazine pallet and is corresponding with the required putting position of described film magazine, whether is placed on described required putting position for detection of described film magazine.
2. according to claim 1 box lifting device, is characterized in that, described detecting sensor is reflective photoelectric sensor, and the photoelectron emission of described reflective photoelectric sensor distance is adjustable.
3. according to claim 2 box lifting device, it is characterized in that, the described photoelectron emission distance of described reflective photoelectric sensor be less than in the time that described film magazine pallet is positioned on the bottom surface of described carrying chamber described in the extremely distance of the roof of described carrying chamber of film magazine pallet.
4. according to claim 3 box lifting device, is characterized in that, on described film magazine pallet, is formed with multiple installing holes, and wherein multiple reflective photoelectric sensors are located at respectively described multiple installing holes below.
5. according to claim 1 box lifting device, is characterized in that, described detecting sensor is four, and four described detecting sensors are located at respectively the corner of the adjacent edge of the described required putting position of described film magazine.
6. according to claim 1 box lifting device, is characterized in that, described detecting sensor is four, and four described detecting sensors are located at respectively the center on the four edges of described required putting position of described film magazine.
7. according to the sheet box lifting device described in any one in claim 1-6, it is characterized in that, also comprise:
Correlation photoelectric sensor, described correlation photoelectric sensor comprises emission part and acceptance division, wherein said emission part and acceptance division are located at respectively on the left and right sides wall of described carrying chamber.
8. a film magazine transmission system, the film magazine in described film magazine transmission system is used for carrying at least one wafer, it is characterized in that, comprising:
For loading the film magazine loading attachment of film magazine;
According to the sheet box lifting device described in any one in claim 1-7, described film magazine loading attachment is for being transferred to described film magazine pallet by described film magazine;
Slice getting device, described slice getting device is for getting sheet to the described wafer that is arranged on the described film magazine on described film magazine pallet; With
Process equipment, described process equipment is for carrying out PROCESS FOR TREATMENT to the described wafer taking out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210483285.XA CN103839860B (en) | 2012-11-23 | 2012-11-23 | Piece box lifting device and the film magazine Transmission system with which |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210483285.XA CN103839860B (en) | 2012-11-23 | 2012-11-23 | Piece box lifting device and the film magazine Transmission system with which |
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| Publication Number | Publication Date |
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| CN103839860A true CN103839860A (en) | 2014-06-04 |
| CN103839860B CN103839860B (en) | 2017-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210483285.XA Active CN103839860B (en) | 2012-11-23 | 2012-11-23 | Piece box lifting device and the film magazine Transmission system with which |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104370105A (en) * | 2014-06-17 | 2015-02-25 | 微密冲压件(无锡）有限公司 | Quick hard disk cover collecting system |
| CN109360795A (en) * | 2018-08-28 | 2019-02-19 | 长电科技（宿迁）有限公司 | A kind of intelligence magazine and its control method |
| CN114789865A (en) * | 2021-01-26 | 2022-07-26 | 丰田自动车株式会社 | Detection system, transportation system, detection method, and storage medium |
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| JPH09115988A (en) * | 1995-10-24 | 1997-05-02 | Toshiba Mach Co Ltd | Method and apparatus for detecting cassette |
| CN101383307A (en) * | 2007-09-04 | 2009-03-11 | 东京毅力科创株式会社 | Substrate positional misalignment detection system |
| CN201523000U (en) * | 2009-10-30 | 2010-07-07 | 和舰科技(苏州)有限公司 | Fast-heat annealing machine platform |
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Patent Citations (3)
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| JPH09115988A (en) * | 1995-10-24 | 1997-05-02 | Toshiba Mach Co Ltd | Method and apparatus for detecting cassette |
| CN101383307A (en) * | 2007-09-04 | 2009-03-11 | 东京毅力科创株式会社 | Substrate positional misalignment detection system |
| CN201523000U (en) * | 2009-10-30 | 2010-07-07 | 和舰科技(苏州)有限公司 | Fast-heat annealing machine platform |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104370105A (en) * | 2014-06-17 | 2015-02-25 | 微密冲压件(无锡）有限公司 | Quick hard disk cover collecting system |
| CN104370105B (en) * | 2014-06-17 | 2017-01-25 | 微密冲压件(无锡）有限公司 | Quick hard disk cover collecting system |
| CN109360795A (en) * | 2018-08-28 | 2019-02-19 | 长电科技（宿迁）有限公司 | A kind of intelligence magazine and its control method |
| CN114789865A (en) * | 2021-01-26 | 2022-07-26 | 丰田自动车株式会社 | Detection system, transportation system, detection method, and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103839860B (en) | 2017-03-29 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |