CN109358019B - Gas sensor based on infrared spectrum analysis - Google Patents
Gas sensor based on infrared spectrum analysis Download PDFInfo
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- CN109358019B CN109358019B CN201811524404.5A CN201811524404A CN109358019B CN 109358019 B CN109358019 B CN 109358019B CN 201811524404 A CN201811524404 A CN 201811524404A CN 109358019 B CN109358019 B CN 109358019B
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- 238000004458 analytical method Methods 0.000 title claims abstract description 18
- 238000002329 infrared spectrum Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 85
- 238000004566 IR spectroscopy Methods 0.000 claims description 16
- 238000004891 communication Methods 0.000 claims description 16
- 238000013461 design Methods 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000005494 condensation Effects 0.000 abstract description 4
- 238000009833 condensation Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 238000011161 development Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000012844 infrared spectroscopy analysis Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
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- 238000010521 absorption reaction Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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- 230000007547 defect Effects 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
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- 238000000034 method Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention relates to a gas sensor based on infrared spectrum analysis, which comprises an optical cavity, a sensor body and a sensor body, wherein the optical cavity is used for accommodating measured gas and carrying out infrared spectrum analysis on the measured gas; the infrared light source is connected with the optical cavity and is used for generating convergent or discrete infrared light; and the detector is connected with the optical cavity and the infrared light source and is used for receiving the infrared light reflected by the optical cavity for multiple times. The gas sensor based on infrared spectrum analysis of the invention designs a reflection focusing system combined with a plane by utilizing the characteristic of light condensation of an elliptical surface, optimizes elliptical parameters and positions by optical simulation software, and realizes a long-optical-path and high-focusing optical cavity in a smaller space. Compared with the prior art, the infrared gas sensor has the advantages of longer optical path, higher efficiency, higher detection precision and sensitivity, simple structure, convenience in installation, stability, reliability and the like.
Description
Technical Field
The invention relates to the field of sensors, in particular to the field of gas sensors, and particularly relates to a gas sensor based on infrared spectrum analysis.
Background
Gas sensors based on infrared spectroscopy detect the concentration of a gas using the principle that the detected gas molecules can absorb a specific infrared wavelength and the absorption increases as the concentration of the gas molecules increases (NDIR). A typical infrared gas sensor mainly comprises an optical cavity according to the present invention, an infrared light source for emitting infrared light and an infrared detector for detecting the intensity of the infrared light. Infrared light emitted by the infrared light source is reflected for multiple times in the optical cavity and then is transmitted to the infrared detector, the detected gas concentration in the optical cavity is different, the infrared light intensity detected by the infrared detector is different, and the detected output signal of the infrared detector is converted into the detected gas concentration through certain signal processing and algorithm.
The detection precision and resolution of the infrared gas sensor are important indexes of the infrared detector, and the design of the optical cavity is required to have the characteristics of long light path and light condensation in order to improve the detection precision of the infrared detector. Earlier design of optical cavity mainly adopts straight cylinder light path, and the sensor size is great, and light utilization is relatively poor, and there is the design of some small-size spotlight optical cavity yet, and the structure is different, and spotlight effect also has great difference. With the development of low power consumption and miniaturization of the sensor, the design of an efficient and small-size optical cavity is a trend of the development of an infrared gas sensor.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides the gas sensor based on infrared spectrum analysis, which has the advantages of simple structure, long optical path and high efficiency.
In order to achieve the above object, the gas sensor based on infrared spectroscopic analysis of the present invention is as follows:
the gas sensor based on infrared spectrum analysis is mainly characterized in that the sensor comprises:
the optical cavity is used for accommodating the detected gas and carrying out infrared spectrum analysis on the detected gas;
the infrared light source is connected with the optical cavity and is used for generating convergent or discrete infrared light;
and the detector is connected with the optical cavity and the infrared light source and is used for receiving the infrared light reflected by the optical cavity for multiple times.
Preferably, the optical cavity comprises an upper cover and a lower cover, and the upper cover and the lower cover are mutually connected.
Preferably, the upper cover includes a first elliptical surface, a second plane, a third plane, a fourth elliptical surface, a fifth plane, a sixth elliptical surface, a seventh reflecting surface and an eighth plane, and the first elliptical surface, the second plane, the third plane, the fourth elliptical surface, the fifth plane, the sixth elliptical surface, the seventh reflecting surface and the eighth plane are all located inside the upper cover and are all connected with each other.
Preferably, the lower cover includes a ninth reflection plane, and the ninth reflection plane is located at the top of the lower cover and is connected with the upper cover.
Preferably, the lower cover of the optical cavity is provided with a circuit board clamping groove for data acquisition and communication.
Preferably, the depth of the circuit board clamping groove is not more than 2mm and not less than 0.5mm.
Preferably, the infrared light source is a columnar light source, and is mounted on the circuit board slot and placed at the focus F1 of the first elliptical surface.
Preferably, the detector is mounted on the circuit board slot and is placed at the bottom of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a paraboloid, and the center of the sensitive element of the detector is the focal point of the seventh reflecting surface.
Preferably, the seventh reflecting surface is an ellipsoid, and the center of the sensitive element of the detector is one of the focuses of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a spherical surface, and the center of the sensitive element of the detector is the center of the sphere of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a plane, and the seventh reflecting surface is inclined downward.
Preferably, the seventh reflecting surface includes a plurality of curved surfaces and a plane, and the plurality of curved surfaces includes a paraboloid, an ellipsoid and a sphere, and then the center of the sensitive element of the detector is the focus or the center of sphere of the plurality of curved surfaces.
The gas sensor based on infrared spectrum analysis of the invention designs a reflection focusing system combined with a plane by utilizing the characteristic of light condensation of an elliptical surface, optimizes elliptical parameters and positions by optical simulation software, and realizes a long-optical-path and high-focusing optical cavity in a smaller space. Compared with the prior art, the infrared gas sensor has the advantages of longer optical path, higher efficiency, higher detection precision and sensitivity, simple structure, convenience in installation, stability, reliability and the like.
Drawings
Fig. 1 is a bottom view of an optical cavity top cover of a gas sensor based on infrared spectroscopy according to the present invention.
FIG. 2 is a top view of the gas sensor of the present invention with the optical cavity cover removed based on infrared spectroscopy.
Fig. 3 is a cross-sectional view of the gas sensor based on infrared spectroscopy of the present invention, fig. 1.
Fig. 4 is a cross-sectional view of the gas sensor based on infrared spectroscopy of the present invention, fig. 2.
FIG. 5 is a split view of a gas sensor based on infrared spectroscopy of the present invention.
Reference numerals:
optical cavity upper cover 1
Optical cavity lower cover 2
Infrared detector 3
Infrared light source 4
Signal acquisition and communication circuit board 5
Communication pin header 6
Waterproof breathable film 7
First elliptical plane M1
Second plane M2
Third plane M3
A point M3a of the focal point F2 on the third plane
A point M3b of the focal point F3 on the third plane
Fourth elliptical plane M4
Fifth plane M5
Sixth elliptical plane M6
Seventh reflecting surface M7
Eighth plane M8
Ninth reflecting plane M9
Infrared light L1, L2, L3
Focal point F1 when the first elliptical surface is an elliptical cylindrical surface
Focal point F2, F3 when the fourth elliptical surface is an elliptical cylindrical surface
Focal point F4 when the sixth elliptical surface is an elliptical cylindrical surface
Detailed Description
In order to more clearly describe the technical contents of the present invention, a further description will be made below in connection with specific embodiments.
The gas sensor based on infrared spectrum analysis, wherein the sensor comprises:
the optical cavity is used for accommodating the detected gas and carrying out infrared spectrum analysis on the detected gas;
the infrared light source is connected with the optical cavity and is used for generating convergent or discrete infrared light;
and the detector is connected with the optical cavity and the infrared light source and is used for receiving the infrared light reflected by the optical cavity for multiple times.
As a preferred embodiment of the present invention, the optical cavity includes an upper cover and a lower cover, which are both interconnected.
As a preferred embodiment of the present invention, the upper cover includes a first elliptical plane M1, a second plane M2, a third plane M3, a fourth elliptical plane M4, a fifth plane M5, a sixth elliptical plane M6, a seventh reflecting plane M7, and an eighth plane M8, and the first elliptical plane M1, the second plane M2, the third plane M3, the fourth elliptical plane M4, the fifth plane M5, the sixth elliptical plane M6, the seventh reflecting plane M7, and the eighth plane M8 are all located inside the upper cover and are all interconnected.
As a preferred embodiment of the present invention, the lower cover includes a ninth reflection plane M9, and the ninth reflection plane M9 is located at the top of the lower cover and connected to the upper cover.
As a preferred embodiment of the invention, the lower cover of the optical cavity is provided with a circuit board clamping groove for data acquisition and communication.
As a preferred embodiment of the invention, the depth of the circuit board clamping groove is not more than 2mm and not less than 0.5mm.
As a preferred embodiment of the present invention, the infrared light source is a columnar light source, and is mounted on the circuit board slot and placed at the focal point F1 of the first elliptical surface M1.
As a preferred embodiment of the present invention, the detector is mounted on the circuit board slot and is disposed at the bottom of the seventh reflecting surface M7.
In a preferred embodiment of the present invention, the seventh reflecting surface is a paraboloid, and the center of the sensor is the focal point of the seventh reflecting surface M7.
In a preferred embodiment of the present invention, the seventh reflecting surface is an ellipsoid, and the center of the sensor element of the detector is one of the focal points of the seventh reflecting surface M7.
In a preferred embodiment of the present invention, the seventh reflecting surface is a spherical surface, and the center of the sensor element of the detector is the center of the sphere of the seventh reflecting surface M7.
As a preferred embodiment of the present invention, the seventh reflecting surface M7 is inclined downward when the seventh reflecting surface is a plane.
As a preferred embodiment of the present invention, the seventh reflecting surface includes a plurality of curved surfaces and a plane, and the plurality of curved surfaces includes a paraboloid, an ellipsoid and a spherical surface, and then the center of the sensitive element of the detector is the focus or the center of the plurality of curved surfaces.
In a specific embodiment of the invention, the invention comprises an optical cavity for containing a gas to be measured and performing infrared spectroscopic analysis on the gas to be measured, an infrared light source for generating convergent or divergent infrared light, and a detector for receiving the infrared light after multiple reflections from the optical cavity, wherein:
the optical cavity consists of an upper cover and a lower cover, wherein a plurality of reflecting surfaces are arranged in the upper cover of the optical cavity, each reflecting surface consists of a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflecting surface M7 and an eighth plane M8, and a ninth reflecting plane M9 is arranged at the top of the lower cover of the optical cavity; the infrared light source is placed on one focal point F1 of the first elliptical surface, the detector is placed below the seventh reflecting surface M7, the other focal point of the first elliptical surface except for the focal point F1 where the infrared light source is placed is in mirror symmetry with one focal point F2 of the fourth elliptical surface M4 about the second plane M2, and the two focal points of the fourth elliptical surface M4 are on the third plane M3; the eighth plane M8 and the ninth plane M9 are configured to constrain infrared light emitted by the infrared light source to be within the optical cavity, and the seventh reflecting surface M7 is configured to focus infrared light reflected by the plurality of reflecting surfaces onto the detector.
The surface of the lower cover of the optical cavity is provided with the infrared light source and the detector mounting hole, the lower cover of the optical cavity is provided with a circuit board clamping groove for data acquisition and communication, and the depth of the clamping groove is 0.5-2 mm; and a cavity of 0.5-3 mm is formed between the optical cavity lower cover and the circuit board after the optical cavity lower cover and the circuit board are installed and is used for accommodating electronic elements.
The infrared light source is a columnar light source and is arranged on the circuit board, and a light-emitting area of the infrared light source extends into the optical cavity; the detector is arranged on the circuit board, and the detector is arranged at the bottom of the seventh paraboloid M7 and does not extend into the light path.
The seventh reflecting surface is a paraboloid, and the center of a sensitive element of the detector is a focus of the seventh reflecting surface;
or the seventh reflecting surface is an ellipsoid, and the center of a sensitive element of the detector is a focus of the seventh reflecting surface;
or the seventh reflecting surface is a spherical surface, and the center of a sensitive element of the detector is the center of the sphere of the seventh reflecting surface;
or the seventh reflecting surface is a plane, and the seventh reflecting surface is inclined downwards;
or the seventh reflecting surface is a combination of a plurality of curved surfaces and/or planes, the plurality of curved surfaces are paraboloids or ellipsoids or spherical surfaces, and the center of a sensitive element of the detector is the focus or the center of sphere of the plurality of curved surfaces;
the upper cover of the optical cavity is provided with a plurality of vent holes, and the vent holes are provided with waterproof breathable films outside the optical cavity.
The circuit board is provided with a plurality of interfaces which are respectively positioned at two sides of the circuit board.
The gas sensor based on infrared spectrum analysis comprises an optical cavity for containing gas to be detected and carrying out infrared spectrum analysis on the gas to be detected, an infrared light source for generating converged or scattered infrared light, a detector for receiving the infrared light reflected by the optical cavity for multiple times, and a circuit board for signal acquisition and communication.
Based on the above, the optical cavity comprises upper cover and lower cover, wherein, the upper cover of optical cavity is inside to be constituteed by a plurality of reflecting surfaces and to provide certain space and hold the gas of being surveyed, be provided with on the lower cover of optical cavity be used for fixing infrared light source of transmission infrared light with infrared detector of receiving infrared light, the lower cover lower part of optical cavity is equipped with the fixed signal acquisition and communication circuit board's draw-in groove, the lower cover of optical cavity with have 0.5 ~ 3 mm's space to be used for holding electronic component between signal acquisition and the communication circuit board.
Based on the above, the optical cavity is internally composed of a plurality of reflecting surfaces, and the reflecting surfaces comprise: the first elliptical plane M1, the second plane M2, the third plane M3, the fourth elliptical plane M4, the fifth plane M5, the sixth elliptical plane M6, the seventh reflective plane M7, the eighth plane M8, and the ninth reflective plane M9. The reflective surfaces inside the optical cavity are specular. The infrared light emitted by the infrared light source reaches the infrared detector for receiving the infrared light after being reflected or/and condensed by the reflecting surfaces.
Based on the above, the infrared light source is a columnar light source, and the top is matched with the light source mounting protrusion on the optical cavity.
Based on the above, the circuit board for signal acquisition and communication is provided with a through hole capable of being welded with a communication interface.
The technical scheme of the invention is described in detail below through examples and with reference to the accompanying drawings.
The gas sensor based on infrared spectrum analysis comprises a waterproof and breathable film 7, an optical cavity upper cover 1, an optical cavity lower cover 2, a signal acquisition and communication circuit board 5, an infrared light source 4, an infrared detector 3 and a communication pin header 6 which are welded on the signal acquisition and communication circuit board, as shown in fig. 1 to 5 from top to bottom. The center of the optical cavity upper cover 1 is provided with a clamping groove for installing the waterproof breathable film 7, so that the top of the waterproof breathable film 7 and the upper surface of the optical cavity upper cover 1 are located on the same plane. Two mounting holes are formed in the optical cavity lower cover 2 and are used for mounting the infrared light source 4 and the infrared detector 3 respectively. The signal acquisition and communication circuit board 5 is provided with a plurality of mounting holes for welding the pin header 6. The optical cavity upper cover 1 and the optical cavity lower cover 2 are fixed by glue, and the signal acquisition and communication circuit board 5 is clamped into clamping grooves at two ends of the optical cavity lower cover 2 and fixed by glue.
The optical cavity is composed of an optical cavity upper cover 1 and an optical cavity lower cover 2, and an optical measurement air chamber is formed, a plurality of reflecting surfaces are arranged inside the optical cavity upper cover 1, the optical cavity comprises a first elliptical surface M1, a second elliptical surface M2, a third elliptical surface M3, a fourth elliptical surface M4, a fifth elliptical surface M5, a sixth elliptical surface M6, a seventh reflecting surface M7 and an eighth elliptical surface M8, a reflecting surface M9 is arranged on the upper surface of the optical cavity lower cover 2, and the reflecting surfaces M8 and M9 are planes and are used for restraining infrared light emitted by the infrared light source 4 in the measurement air chamber formed by the optical cavity. The infrared light emitted by the infrared light source 4 is reflected and converged by the reflecting surface M1, then is emitted to the reflecting surface M2, reflected and converged by the M2, then is emitted to the reflecting surface M3, reflected and converged by the M3, then is emitted to the reflecting surface M4, reflected and converged by the M4, then is emitted to the reflecting surface M3, reflected and converged by the M3, then is emitted to the reflecting surface M5, reflected and converged by the reflecting surface M5, then is emitted to the reflecting surface M7, reflected and converged by the reflecting surface M7, and finally emitted to the infrared detector 3.
The invention provides a specific embodiment, the reflecting surface M1 is an elliptic cylindrical surface, and the infrared light source 1 is placed on one focal point F1 of the ellipse.
The reflecting surface M4 is an elliptic cylindrical surface, and two focuses F2 and F3 of the elliptic cylindrical surface M4 are on the reflecting plane M3.
The other focal point of the reflecting elliptic cylinder M1 divided by F1 is mirror-symmetrical with one focal point F2 of the reflecting elliptic surface M4 with respect to the reflecting plane M2.
The reflecting surface M6 is an elliptic cylindrical surface, and the center of the reflecting surface M7 is positioned on one focal point F4 of the elliptic cylindrical surface M6.
The other focal point of the reflecting elliptic cylinder M6 except F4 is mirror-symmetrical with one focal point F3 of the reflecting elliptic surface M4 with respect to the reflecting plane M5.
The reflecting surface M7 is a parabolic spherical surface, and the center of the sensitive element of the detector is positioned on the focus of the parabolic spherical surface M7.
In other embodiments, the reflecting surface M7 is an ellipsoid, and the sensitive element of the detector is centered on a focal point of the ellipsoid M7. Or the reflecting surface M7 is a spherical surface, and the center of the sensitive element of the detector is arranged on the spherical center of the reflecting spherical surface M7. Or the reflecting surface M7 is a plane, and the reflecting plane M7 is inclined downwards. Or the reflecting surface M7 is a combination of a plurality of curved surfaces and/or planes, the plurality of curved surfaces are paraboloids or ellipsoids or spherical surfaces, and the center of the sensitive element of the detector is positioned on the focus or the sphere center of the plurality of curved surfaces.
The purpose of the reflecting surface M7, whether it is an ellipsoid, a sphere, a plane or a combination of curved surfaces and/or planes, is to reflect as much infrared light that is directed onto the reflecting surface M7 as possible onto the sensitive area of the infrared detector 4, so as to increase the output of the infrared detector 4.
The infrared light source 4 emits divergent infrared light L1, L2 and L3, the divergent infrared light is reflected by the reflection elliptical cylindrical surface M1 and is converged towards the other focal point except the focal point F1 of the reflection elliptical cylindrical surface M1, the divergent infrared light is reflected by the reflection elliptical cylindrical surface M2 and is focused on the focal point F2 on the reflection elliptical cylindrical surface M3, the divergent infrared light is reflected by the reflection elliptical cylindrical surface M3 and is converged on the other focal point F3 of the reflection elliptical cylindrical surface M4, the divergent infrared light is reflected by the reflection elliptical cylindrical surface M3 and is irradiated onto the reflection elliptical cylindrical surface M5, the divergent infrared light is reflected by the reflection elliptical cylindrical surface M5 and is converged on the one focal point F4 of the reflection elliptical cylindrical surface M6, and the reflected infrared light is focused on the reflection elliptical cylindrical surface M7 and reaches the sensitive area of the infrared detector 3. In the process that the infrared light L1, L2, L3 emitted from the infrared light source 4 reaches the infrared detector 3 after being reflected for multiple times, the infrared light will be reflected for multiple times by the reflection planes M8 and M9, as shown in fig. 3 and fig. 4, but the propagation direction of the infrared light in the horizontal direction in the optical cavity is not affected, as shown in fig. 1.
The surfaces of the reflecting surfaces M1, M2, M3, M4, M5, M6, M7, M8 and M9 are required to be processed into mirror surfaces, and the surfaces are coated with films, wherein the film materials are gold, silver, aluminum or copper.
The optical cavity upper cover 1 is provided with a plurality of vent holes, and the vent holes are used for facilitating the gas to be detected to enter the optical cavity for concentration detection. The waterproof and breathable film 7 is arranged above the vent holes, and the waterproof and breathable film 7 is used for isolating dust and water vapor from entering and polluting the optical cavity.
The gas sensor based on infrared spectrum analysis of the invention designs a reflection focusing system combined with a plane by utilizing the characteristic of light condensation of an elliptical surface, optimizes elliptical parameters and positions by optical simulation software, and realizes a long-optical-path and high-focusing optical cavity in a smaller space. Compared with the prior art, the infrared gas sensor has the advantages of longer optical path, higher efficiency, higher detection precision and sensitivity, simple structure, convenience in installation, stability, reliability and the like.
In this specification, the invention has been described with reference to specific embodiments thereof. It will be apparent, however, that various modifications and changes may be made without departing from the spirit and scope of the invention. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense.
Claims (11)
1. A gas sensor based on infrared spectroscopy, said sensor comprising:
the optical cavity is used for accommodating the detected gas and carrying out infrared spectrum analysis on the detected gas;
the infrared light source is connected with the optical cavity and is used for generating convergent or discrete infrared light;
the detector is connected with the optical cavity and the infrared light source and is used for receiving infrared light reflected by the optical cavity for multiple times;
the optical cavity comprises an upper cover and a lower cover which are mutually connected; a plurality of reflecting surfaces are arranged in the optical cavity upper cover, and each reflecting surface comprises a first elliptical surface (M1), a second plane (M2), a third plane (M3), a fourth elliptical surface (M4), a fifth plane (M5), a sixth elliptical surface (M6), a seventh reflecting surface (M7) and an eighth plane (M8);
the first elliptical surface (M1) is an elliptical cylindrical surface, the infrared light source is placed on one focal point F1 of the first elliptical surface (M1), the fourth elliptical surface (M4) is an elliptical cylindrical surface, two focal points F2 and F3 of the fourth elliptical surface (M4) are on the third plane (M3), the other focal point of the first elliptical surface (M1) divided by F1 is in mirror symmetry with one focal point F2 of the fourth elliptical surface (M4) about the second plane (M2), the sixth elliptical surface (M6) is an elliptical cylindrical surface, the center of the seventh reflecting surface (M7) is on one focal point F4 of the sixth elliptical surface (M6), and the other focal point of the sixth elliptical surface (M6) divided by F4 is in mirror symmetry with one focal point F3 of the fourth elliptical surface (M4) about the fifth plane (M5); the detector is placed under the seventh reflecting surface (M7);
the infrared light emitted by the infrared light source is reflected and converged by the first elliptical surface (M1), then emitted to the second plane (M2), reflected and converged by the second plane (M2), emitted to the third plane (M3), reflected and converged by the third plane (M3), emitted to the fourth elliptical surface (M4), reflected and converged by the fourth elliptical surface (M4), emitted to the fifth plane (M5), reflected and converged by the fifth plane (M5), emitted to the sixth elliptical surface (M6), reflected and converged by the sixth elliptical surface (M6), emitted to the seventh reflecting surface (M7), reflected and converged by the seventh reflecting surface (M7), and finally emitted to the detector.
2. The gas sensor based on infrared spectroscopy according to claim 1, wherein the lower cover comprises a ninth reflection plane (M9), the ninth reflection plane (M9) being located at the top of the lower cover.
3. The gas sensor based on infrared spectrum analysis according to claim 1, wherein the lower cover of the optical cavity is provided with a circuit board clamping groove for data acquisition and communication.
4. The gas sensor based on infrared spectroscopy according to claim 3, wherein the depth of the circuit board card slot is not more than 2mm and not less than 0.5mm.
5. The gas sensor based on infrared spectroscopy according to claim 3, wherein the infrared light source is a columnar light source, and is mounted on the circuit board slot and placed at the focal point (F1) of the first elliptical surface (M1).
6. The gas sensor based on infrared spectroscopy according to claim 5, wherein the detector is mounted on the circuit board slot and is disposed at the bottom of the seventh reflecting surface (M7).
7. The gas sensor based on infrared spectroscopy according to claim 6, wherein the seventh reflecting surface is a paraboloid, and the center of the sensor element of the detector is the focal point of the seventh reflecting surface (M7).
8. The gas sensor based on infrared spectroscopy according to claim 6, wherein the seventh reflecting surface is an ellipsoid, and the center of the sensor element of the detector is one of the focal points of the seventh reflecting surface (M7).
9. The gas sensor based on infrared spectroscopy according to claim 6, wherein the seventh reflecting surface is a spherical surface, and the center of the sensor element of the detector is the center of the sphere of the seventh reflecting surface (M7).
10. The gas sensor based on infrared spectroscopy according to claim 6, wherein the seventh reflecting surface (M7) is inclined downward when the seventh reflecting surface is a plane.
11. The gas sensor based on infrared spectroscopy according to claim 6, wherein the seventh reflecting surface comprises a plurality of curved surfaces and a plane, and the plurality of curved surfaces comprises a paraboloid, an ellipsoid and a sphere, and the center of the sensor is a focus or a sphere of the plurality of curved surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811524404.5A CN109358019B (en) | 2018-12-13 | 2018-12-13 | Gas sensor based on infrared spectrum analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811524404.5A CN109358019B (en) | 2018-12-13 | 2018-12-13 | Gas sensor based on infrared spectrum analysis |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109358019A CN109358019A (en) | 2019-02-19 |
| CN109358019B true CN109358019B (en) | 2023-12-22 |
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| CN111562232A (en) * | 2020-05-26 | 2020-08-21 | 中国科学院上海微系统与信息技术研究所 | Horizontal miniature infrared gas sensor |
| CN112683406B (en) * | 2020-12-02 | 2021-10-01 | 江苏新力科技实业有限公司 | Non-contact remote infrared temperature sensor |
| CN115165788B (en) * | 2022-07-20 | 2023-06-16 | 深圳市诺安智能股份有限公司 | High-resolution miniature infrared gas sensor and implementation method thereof |
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