CN209979482U - Gas sensor for infrared spectroscopic analysis - Google Patents

Gas sensor for infrared spectroscopic analysis Download PDF

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Publication number
CN209979482U
CN209979482U CN201822091728.6U CN201822091728U CN209979482U CN 209979482 U CN209979482 U CN 209979482U CN 201822091728 U CN201822091728 U CN 201822091728U CN 209979482 U CN209979482 U CN 209979482U
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plane
infrared
gas sensor
optical cavity
detector
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许晴
于海洋
崔鹏程
张�杰
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SHANGHAI AEGIS INDUSTRIAL SAFETY Corp
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SHANGHAI AEGIS INDUSTRIAL SAFETY Corp
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Abstract

The utility model relates to an infrared spectrum analysis gas sensor, which comprises an optical cavity; the infrared light source is connected with the optical cavity; and the detector is connected with the optical cavity and the infrared light source. Adopted the utility model discloses an infrared spectroscopic analysis gas sensor utilizes the ellipsoid to have the reflection focusing system that combines together with the plane of having designed of the characteristics of spotlight to optimize ellipse parameter and position through optics emulation software, realized long light path, the optics cavity of high focus in less space. Compared with the prior art, the infrared gas sensor has longer optical path and higher efficiency, so that the prepared infrared gas sensor has higher detection precision and sensitivity, and has the advantages of simple structure, convenience in installation, stability, reliability and the like.

Description

Gas sensor for infrared spectroscopic analysis
Technical Field
The utility model relates to a sensor field especially relates to the gas sensor field, specifically indicates an infrared spectroscopic analysis gas sensor.
Background
Infrared spectroscopic analysis gas sensors use the principle (NDIR) that a gas molecule to be detected can absorb a specific infrared wavelength and the absorption amount increases as the concentration of the gas molecule increases. General infrared gas sensor mainly contains the utility model relates to an optical cavity for the infrared light source of transmission infrared light and be used for detecting infrared light intensity's infrared detector. Infrared light emitted by the infrared light source is reflected for multiple times in the optical cavity and then is irradiated on the infrared detector, the concentration of gas to be detected in the optical cavity is different, the intensity of the infrared light detected by the infrared detector is different, and the output signal of the detected infrared detector is converted into the concentration of the gas to be detected through certain signal processing and algorithm.
The detection precision and resolution of the infrared gas sensor are important indexes of the infrared detector, and in order to improve the detection precision of the infrared detector, the design of the optical cavity needs to have the characteristics of long light path and light condensation. In the early days, the design of the optical cavity mainly adopts a straight cylinder type light path, the size of the sensor is larger, the light utilization rate is poorer, and the design of some small-size light-gathering optical cavities is available at present, the structures are different, and the light-gathering effect has larger difference. With the development of low power consumption and miniaturization of the sensor, the trend of infrared gas sensor development is to design an optical cavity with high efficiency and small size.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the shortcomings of the prior art and providing an infrared spectroscopic analysis gas sensor with simple structure, long optical path and high efficiency.
In order to achieve the above object, the infrared spectroscopic gas sensor of the present invention comprises:
the infrared spectroscopic analysis gas sensor is mainly characterized in that the sensor comprises:
the optical cavity is used for accommodating the gas to be detected and carrying out infrared spectrum analysis on the gas to be detected;
the infrared light source is connected with the optical cavity and used for generating convergent or discrete infrared light;
and the detector is connected with the optical cavity and the infrared light source and is used for receiving the infrared light reflected by the optical cavity for many times.
Preferably, the optical cavity comprises an upper cover and a lower cover, and the upper cover and the lower cover are connected with each other.
Preferably, the upper cover comprises a first elliptical surface, a second plane, a third plane, a fourth elliptical surface, a fifth plane, a sixth elliptical surface, a seventh reflecting surface and an eighth plane, and the first elliptical surface, the second plane, the third plane, the fourth elliptical surface, the fifth plane, the sixth elliptical surface, the seventh reflecting surface and the eighth plane are all located inside the upper cover and are all connected with each other.
Preferably, the lower cover includes a ninth reflective plane, and the ninth reflective plane is located on the top of the lower cover and connected to the upper cover.
Preferably, the lower cover of the optical cavity is provided with a circuit board slot for data acquisition and communication.
Preferably, the depth of the circuit board clamping groove is not more than 2mm and not less than 0.5 mm.
Preferably, the infrared light source is a columnar light source, is mounted on the circuit board clamping groove, and is placed at the focus of the first elliptical surface.
Preferably, the detector is mounted on the circuit board slot and placed at the bottom of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a paraboloid, and the center of the sensing element of the detector is the focal point of the seventh reflecting surface.
Preferably, the seventh reflecting surface is an ellipsoid, and the center of the sensing element of the detector is one of the focal points of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a spherical surface, and the center of the sensing element of the detector is the spherical center of the seventh reflecting surface.
Preferably, the seventh reflecting surface is a plane, and the seventh reflecting surface is inclined downward.
Preferably, the seventh reflecting surface includes a plurality of curved surfaces and a flat surface, the plurality of curved surfaces includes a paraboloid, an ellipsoid and a sphere, and the center of the sensing element of the detector is the focus or the sphere center of the plurality of curved surfaces.
Adopted the utility model discloses an infrared spectroscopic analysis gas sensor utilizes the ellipsoid to have the reflection focusing system that combines together with the plane of having designed of the characteristics of spotlight to optimize ellipse parameter and position through optics emulation software, realized long light path, the optics cavity of high focus in less space. Compared with the prior art, the infrared gas sensor has longer optical path and higher efficiency, so that the prepared infrared gas sensor has higher detection precision and sensitivity, and has the advantages of simple structure, convenience in installation, stability, reliability and the like.
Drawings
Fig. 1 is a bottom view of the optical cavity upper cover of the infrared spectroscopic gas sensor of the present invention.
Fig. 2 is a top view of the infrared spectroscopic gas sensor of the present invention after the optical cavity upper cover is removed.
Fig. 3 is a cross-sectional view of the infrared spectroscopic gas sensor of the present invention 1.
Fig. 4 is a cross-sectional view 2 of the infrared spectroscopic gas sensor of the present invention.
Fig. 5 is an exploded view of the infrared spectroscopic gas sensor of the present invention.
Reference numerals:
optical cavity upper cover 1
Optical cavity lower cover 2
Infrared detector 3
Infrared light source 4
Signal acquisition and communication circuit board 5
Communication pin header 6
Waterproof breathable film 7
First ellipsoid M1
Second plane M2
Third plane M3
Point M3a of the focal point F2 in the third plane
Point M3b of the focal point F3 in the third plane
Fourth ellipsoid M4
Fifth plane M5
Sixth ellipsoid M6
Seventh reflective surface M7
Eighth plane M8
Ninth reflection plane M9
Infrared light L1, L2, L3
Focal point F1 when the first ellipsoid is an ellipsoid
Foci F2, F3 when the fourth ellipsoid is an ellipsoid
Focal point F4 when the sixth ellipsoid is an ellipsoid
Detailed Description
In order to more clearly describe the technical content of the present invention, the following further description is given with reference to specific embodiments.
The technical solution of the infrared spectroscopic gas sensor of the present invention is mainly to protect the hardware structure and the connection relationship of the whole hardware function platform supporting the realization of the corresponding function, and each of the functional modules and the module units included therein can correspond to the actual known hardware device or the specific hardware circuit in the integrated circuit structure, so that only the improvement of the specific hardware topology connection structure and the specific hardware circuit is involved, the improvement of the hardware part exists, which does not depend on the computer control software, and which does not belong to the carrier only executing the control software or the computer program, therefore, the application of any control software or computer program is not involved in solving the corresponding technical problem and obtaining the corresponding technical effect, that is, the present invention can solve the problem only by the improvement of the actual known hardware device or the hardware circuit structure related to these modules and units Technical problem and corresponding technical result are achieved without the aid of special control software or computer programs for realizing the corresponding functions.
The infrared spectroscopic gas sensor, wherein said sensor comprises:
the optical cavity is used for accommodating the gas to be detected and carrying out infrared spectrum analysis on the gas to be detected;
the infrared light source is connected with the optical cavity and used for generating convergent or discrete infrared light;
and the detector is connected with the optical cavity and the infrared light source and is used for receiving the infrared light reflected by the optical cavity for many times.
As a preferred embodiment of the present invention, the optical cavity comprises an upper cover and a lower cover, and the upper cover and the lower cover are connected to each other.
As a preferred embodiment of the present invention, the upper cover includes a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflective surface M7 and an eighth plane M8, and the first elliptical surface M1, the second plane M2, the third plane M3, the fourth elliptical surface M4, the fifth plane M5, the sixth elliptical surface M6, the seventh reflective surface M7 and the eighth plane M8 are all located inside the upper cover and are all connected to each other.
As a preferred embodiment of the present invention, the lower cover includes a ninth reflection plane M9, and the ninth reflection plane M9 is located at the top of the lower cover and connected to the upper cover.
As the preferred embodiment of the present invention, the lower cover of the optical cavity is provided with a circuit board slot for data acquisition and communication.
As the utility model discloses a preferred embodiment, the degree of depth of circuit board draw-in groove be not more than 2mm and be not less than 0.5 mm.
As a preferred embodiment of the present invention, the infrared light source is a cylindrical light source, is installed on the circuit board slot, and is placed at the focus F1 of the first elliptical surface M1.
As a preferred embodiment of the present invention, the detector is mounted on the circuit board slot and disposed at the bottom of the seventh reflective surface M7.
As a preferred embodiment of the present invention, the seventh reflecting surface is a paraboloid, and the center of the sensing element of the detector is the focus of the seventh reflecting surface M7.
As a preferred embodiment of the present invention, the seventh reflecting surface is an ellipsoid, and the center of the sensing element of the detector is one of the focal points of the seventh reflecting surface M7.
As a preferred embodiment of the present invention, the seventh reflecting surface is a spherical surface, and the center of the sensing element of the detector is the spherical center of the seventh reflecting surface M7.
In a preferred embodiment of the present invention, the seventh reflecting surface is a plane, and the seventh reflecting surface M7 is inclined downward.
As a preferred embodiment of the present invention, the seventh reflecting surface includes a plurality of curved surfaces and a flat surface, the plurality of curved surfaces include a paraboloid, an ellipsoid and a spherical surface, and the center of the sensitive element of the detector is the focus or the center of the sphere of the plurality of curved surfaces.
The utility model discloses an among the concrete embodiment, the utility model discloses a be used for holding by survey gas and to being carried out infrared spectroscopic analysis's optical cavity, producing the infrared light source who assembles or discrete infrared light by survey gas to and be used for receiving the detector of the infrared light after optical cavity multiple reflection, wherein:
the optical cavity consists of an upper cover and a lower cover, wherein a plurality of reflecting surfaces are arranged inside the upper cover of the optical cavity, the reflecting surfaces consist of a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflecting surface M7 and an eighth plane M8, and a ninth reflecting surface M9 is arranged at the top of the lower cover of the optical cavity; the infrared light source is placed on one focal point of the first elliptical surface F1, the detector is placed below the seventh reflecting surface M7, the other focal point of the first elliptical surface except for the focal point F1 where the position of the infrared light source is placed is mirror-symmetrical with one focal point F2 of the fourth elliptical surface M4 about the second plane M2, and the two focal points of the fourth elliptical surface M4 are on the third plane M3; the eighth plane M8 and the ninth plane M9 are used for constraining the infrared light emitted from the infrared light source to be in the optical cavity, and the seventh reflective surface M7 is used for focusing the infrared light reflected by the plurality of reflective surfaces onto the detector.
The infrared light source and the detector mounting hole are formed in the surface of the lower cover of the optical cavity, a circuit board clamping groove for data acquisition and communication is formed in the lower cover of the optical cavity, and the depth of the clamping groove is 0.5-2 mm; the optical cavity lower cover and the middle of the circuit board after installation form a 0.5-3 mm cavity for accommodating electronic elements.
The infrared light source is a columnar light source and is arranged on the circuit board, and a light emitting area of the infrared light source extends into the optical cavity; the detector is arranged on the circuit board, and the detector is arranged at the bottom of the seventh paraboloid M7 and does not extend into the light path.
The seventh reflecting surface is a paraboloid, and the center of a sensitive element of the detector is the focus of the seventh reflecting surface;
or the seventh reflecting surface is an ellipsoid, and the center of the sensitive element of the detector is a focus of the seventh reflecting surface;
or the seventh reflecting surface is a spherical surface, and the center of the sensitive element of the detector is the spherical center of the seventh reflecting surface;
or the seventh reflecting surface is a plane, and the seventh reflecting surface inclines downwards;
or the seventh reflecting surface is a combination of a plurality of curved surfaces and/or planes, the plurality of curved surfaces are paraboloids, elliptic surfaces or spherical surfaces, and the center of the sensitive element of the detector is the focus or the spherical center of the plurality of curved surfaces;
the upper cover of the optical cavity is provided with a plurality of vent holes, and the outer side of the optical cavity is provided with a waterproof breathable film.
The circuit board is provided with a plurality of interfaces which are respectively positioned at two sides of the circuit board.
The gas sensor for infrared spectroscopic analysis comprises an optical cavity for accommodating the gas to be detected and carrying out infrared spectroscopic analysis on the gas to be detected, an infrared light source for generating convergent or discrete infrared light, a detector for receiving the infrared light after multiple reflections of the optical cavity, and a circuit board for signal acquisition and communication.
Based on the above, the optical cavity is internally composed of a plurality of reflecting surfaces, and the reflecting surfaces include: a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflective surface M7, an eighth plane M8, and a ninth reflective surface M9. The reflective surface surfaces inside the optical cavity are specular. The infrared light emitted by the infrared light source reaches the infrared detector for receiving the infrared light after being reflected or/and condensed by the reflecting surfaces.
Based on the above, the optical cavity is internally composed of a plurality of reflecting surfaces, and the reflecting surfaces include: a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflective surface M7, an eighth plane M8, and a ninth reflective surface M9. The reflective surface surfaces inside the optical cavity are specular. The infrared light emitted by the infrared light source reaches the infrared detector for receiving the infrared light after being reflected or/and condensed by the reflecting surfaces.
Based on the above, the infrared light source is a columnar light source, and the top of the columnar light source is matched with the light source mounting protrusion on the optical cavity.
Based on the above, the circuit board for signal acquisition and communication is provided with a through hole capable of welding the communication interface.
The technical solution of the present invention will be described in detail below by way of examples with reference to the accompanying drawings.
The utility model discloses an infrared spectroscopic analysis gas sensor, as shown in fig. 1 to 5, from the top down including waterproof ventilated membrane 7, optics cavity upper cover 1, optics cavity lower cover 2, signal acquisition and communication circuit board 5, the welding is in infrared light source 4 and infrared detector 3 and communication row needle 6 on signal acquisition and the communication circuit board. The optical cavity upper cover 1 is provided with a clamping groove at the center for installing the waterproof breathable film 7, so that the top of the waterproof breathable film 7 and the upper surface of the optical cavity upper cover 1 are positioned on the same plane. And the optical cavity lower cover 2 is provided with two mounting holes which are respectively used for mounting the infrared light source 4 and the infrared detector 3. The signal acquisition and communication circuit board 5 is provided with a plurality of mounting holes for welding the pin header 6. The optical cavity upper cover 1 and the optical cavity lower cover 2 are fixed by glue, and the signal acquisition and communication circuit board 5 is clamped into clamping grooves at two ends of the optical cavity lower cover 2 and is fixed by glue.
The optical cavity comprises an optical cavity upper cover 1 and an optical cavity lower cover 2 which form an optical measurement air chamber, wherein a plurality of reflecting surfaces are arranged inside the optical cavity upper cover 1 and comprise a first elliptical surface M1, a second plane M2, a third plane M3, a fourth elliptical surface M4, a fifth plane M5, a sixth elliptical surface M6, a seventh reflecting surface M7 and an eighth plane M8, the reflecting surface M9 is arranged on the upper surface of the optical cavity lower cover 2, and the reflecting surfaces M8 and M9 are planes and used for restraining infrared light emitted by the infrared light source 4 in the measurement air chamber formed by the optical cavity. The infrared light emitted by the infrared light source 4 is reflected and converged by the reflecting surface M1, then emitted to the reflecting surface M2, reflected by M2, converged to the reflecting surface M3, reflected by M3, emitted to the reflecting surface M4, reflected by M4, emitted to the reflecting surface M3, reflected by M3, emitted to the reflecting surface M5, reflected by the reflecting surface M5, emitted to the reflecting surface M6, reflected and focused by the reflecting surface M6, emitted to the reflecting surface M7, reflected by the reflecting surface M7, and emitted to the infrared detector 3.
The utility model provides a specific implementation mode, plane of reflection M1 is the elliptic cylinder face, infrared light source 1 is placed on a focus F1 of ellipse.
The reflecting surface M4 is an elliptical cylinder, and the two foci F2 and F3 of the elliptical cylinder M4 are on the reflecting plane M3.
The other focus of the reflection elliptic cylindrical surface M1 except F1 is mirror-symmetrical with one of the focuses F2 of the reflection elliptic surface M4 with respect to the reflection plane M2.
The reflecting surface M6 is an elliptic cylindrical surface, and the center of the reflecting surface M7 is at a focus F4 of the elliptic cylindrical surface M6.
The other focus of the reflection elliptic cylindrical surface M6 except F4 is mirror-symmetrical with one of the focuses F3 of the reflection elliptic surface M4 with respect to the reflection plane M5.
The reflecting surface M7 is a parabolic sphere, and the sensitive element of the detector is centered on the focus of the parabolic sphere M7.
In other embodiments, the reflective surface M7 is an ellipsoid, and the sensing element of the detector is centered on a focal point of the ellipsoid M7. Or the reflecting surface M7 is a spherical surface, and the center of the sensitive element of the detector is on the spherical center of the reflecting spherical surface M7. Or the reflecting surface M7 is a plane, and the reflecting plane M7 inclines downwards. Or the reflecting surface M7 is a combination of a plurality of curved surfaces and/or planes, the plurality of curved surfaces are paraboloids or ellipsoids or spherical surfaces, and the center of the sensitive element of the detector is on the focus or the spherical center of the plurality of curved surfaces.
The purpose of the reflecting surface M7, whether it is an ellipsoid, a sphere, a plane or a combination of curved surfaces and/or planes, is to reflect as much infrared light as possible toward the reflecting surface M7 onto the sensitive area of the infrared detector 4, thereby increasing the output of the infrared detector 4.
The infrared light source 4 emits divergent infrared light L1, l2 and L3, which are reflected by the reflective elliptical cylindrical surface M1 and then converge to emit to another focal point of the reflective cylindrical surface M1 except the focal point F1, are reflected by the reflective plane M2 and then focus on the focal point F2 on the reflective plane M3, are reflected by the reflective plane M3 and then emit to the reflective elliptical cylindrical surface M4, are reflected by the reflective elliptical cylindrical surface M4 and then focus on another focal point F3 of the reflective elliptical cylindrical surface, are reflected by the reflective plane M3 and then emit to the reflective plane M5, are reflected by the reflective plane M5 and then emit to the reflective elliptical cylindrical surface M6, are reflected by the reflective elliptical cylindrical surface M6 and then focus on one focal point F4 of the reflective elliptical cylindrical surface M6, and reach the sensitive area of the infrared detector 3 after being reflected and focused by the reflective paraboloid M7. In the process that the infrared light L1, L2, and L3 emitted from the infrared light source 4 reaches the infrared detector 3 after multiple reflections, the infrared light passes through the multiple reflections of the reflection planes M8 and M9, as shown in fig. 3 and 4, but does not affect the propagation direction of the infrared light in the horizontal direction in the optical cavity, as shown in fig. 1.
The surfaces of the reflecting surfaces M1, M2, M3, M4, M5, M6, M7, M8 and M9 need to be processed into mirror surfaces, and the surfaces are coated with films, and the materials of the films are gold, silver, aluminum or copper.
A plurality of vent holes are formed in the optical cavity upper cover 1, and the vent holes are used for facilitating the gas to be detected to enter the optical cavity for concentration detection. The waterproof breathable film 7 is arranged above the vent hole, and the waterproof breathable film 7 is used for isolating dust and water vapor and preventing the dust and the water vapor from entering and polluting the optical cavity.
Adopted the utility model discloses an infrared spectroscopic analysis gas sensor utilizes the ellipsoid to have the reflection focusing system that combines together with the plane of having designed of the characteristics of spotlight to optimize ellipse parameter and position through optics emulation software, realized long light path, the optics cavity of high focus in less space. Compared with the prior art, the infrared gas sensor has longer optical path and higher efficiency, so that the prepared infrared gas sensor has higher detection precision and sensitivity, and has the advantages of simple structure, convenience in installation, stability, reliability and the like.
In this specification, the invention has been described with reference to specific embodiments thereof. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the invention. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense.

Claims (11)

1. An infrared spectrum analysis gas sensor is characterized in that the sensor comprises an optical cavity, an infrared light source and a detector, wherein the infrared light source is connected with the optical cavity, and the detector is connected with the optical cavity and the infrared light source;
the optical cavity comprises an upper cover and a lower cover which are connected with each other;
the upper cover comprises a first elliptical surface (M1), a second plane (M2), a third plane (M3), a fourth elliptical surface (M4), a fifth plane (M5), a sixth elliptical surface (M6), a seventh reflecting surface (M7) and an eighth plane (M8), wherein the first elliptical surface (M1), the second plane (M2), the third plane (M3), the fourth elliptical surface (M4), the fifth plane (M5), the sixth elliptical surface (M6), the seventh reflecting surface (M7) and the eighth plane (M8) are all located inside the upper cover and are all connected with one another.
2. The infrared spectroscopic gas sensor of claim 1 wherein said lower cover includes a ninth reflective plane (M9), said ninth reflective plane (M9) being located at the top of said lower cover and being connected to said upper cover.
3. The infrared spectroscopic gas sensor of claim 1 wherein the optical cavity has a circuit board slot in its lower cover.
4. The infrared spectroscopic gas sensor of claim 3 wherein the depth of the circuit board card slot is no greater than 2mm and no less than 0.5 mm.
5. The infrared spectroscopic gas sensor of claim 3 wherein said infrared light source is a cylindrical light source mounted on said circuit board card slot at the focus F1 of said first elliptical surface (M1).
6. The infrared spectroscopic gas sensor of claim 3 wherein said detector is mounted on said circuit board card slot and positioned at the bottom of said seventh reflective surface (M7).
7. The infrared spectroscopic gas sensor of claim 6 wherein said seventh reflective surface is parabolic and the center of the sensor element of said detector is the focal point of said seventh reflective surface (M7).
8. The infrared spectroscopic gas sensor of claim 6 wherein said seventh reflecting surface is ellipsoidal and the center of the sensor element of said detector is one of the focal points of said seventh reflecting surface (M7).
9. The infrared spectroscopic gas sensor of claim 6 wherein said seventh reflective surface is spherical and the center of the sensor element of said detector is the spherical center of said seventh reflective surface (M7).
10. The infrared spectroscopic gas sensor of claim 6 wherein said seventh reflective surface is planar and said seventh reflective surface (M7) is inclined downwardly.
11. The infrared spectroscopic gas sensor of claim 6 wherein the seventh reflecting surface comprises a plurality of curved surfaces and a flat surface, the plurality of curved surfaces comprising a paraboloid, an ellipsoid and a sphere, and the center of the sensor element of the detector is the focal point or the spherical center of the plurality of curved surfaces.
CN201822091728.6U 2018-12-13 2018-12-13 Gas sensor for infrared spectroscopic analysis Active CN209979482U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109358019A (en) * 2018-12-13 2019-02-19 上海翼捷工业安全设备股份有限公司 Gas sensor based on infrared spectrum analysis
US20210247312A1 (en) * 2020-02-07 2021-08-12 Lumileds Llc Gas sensing system having quadric reflective surface
CN115165788A (en) * 2022-07-20 2022-10-11 深圳市诺安智能股份有限公司 High-resolution miniature infrared gas sensor and implementation method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109358019A (en) * 2018-12-13 2019-02-19 上海翼捷工业安全设备股份有限公司 Gas sensor based on infrared spectrum analysis
CN109358019B (en) * 2018-12-13 2023-12-22 上海翼捷工业安全设备股份有限公司 Gas sensor based on infrared spectrum analysis
US20210247312A1 (en) * 2020-02-07 2021-08-12 Lumileds Llc Gas sensing system having quadric reflective surface
US11740179B2 (en) * 2020-02-07 2023-08-29 Lumileds Llc Gas sensing system having quadric reflective surface
CN115165788A (en) * 2022-07-20 2022-10-11 深圳市诺安智能股份有限公司 High-resolution miniature infrared gas sensor and implementation method thereof
CN115165788B (en) * 2022-07-20 2023-06-16 深圳市诺安智能股份有限公司 High-resolution miniature infrared gas sensor and implementation method thereof

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