CN109343068A - A kind of measuring device and measuring method of space length - Google Patents

A kind of measuring device and measuring method of space length Download PDF

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Publication number
CN109343068A
CN109343068A CN201811524975.9A CN201811524975A CN109343068A CN 109343068 A CN109343068 A CN 109343068A CN 201811524975 A CN201811524975 A CN 201811524975A CN 109343068 A CN109343068 A CN 109343068A
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optical
laser
detection
port
circulator
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李沼云
刘鹏飞
卢建福
张昕
阳华
王航
欧阳竑
王侠
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CETC 34 Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only

Abstract

The invention discloses a kind of measuring device and measuring method of space length, the super continuous spectrums laser of this measuring device accesses optical combiner through reference optical fiber through the reference laser that optical splitter separates, detection laser emits through optical circulator to the detection optical transmitting set of space length L, the light being reflected back is through circulator to optical combiner, each wavelength laser after grating dispersion device dispersion reaches CCD waveguide array detector, and the output of CCD connects data processing unit.The coherent laser beam that this measurement method generates for super continuous spectrums laser, dispersion beam splitting, CCD waveguide array detector sample it to obtain wavelength-strength signal, and Fourier transformation obtains spatial-intensity relationship, realizes the measurement of high-precision space length.High-precision linear measure longimetry can be realized without wavelength tuning in the present invention, and measurement accuracy is high, and realization principle is simple.

Description

A kind of measuring device and measuring method of space length
Technical field
The present invention relates to a kind of length measurement technique fields, and in particular to a kind of space length measuring device and measurement side Method.
Background technique
Length carries out high-precision measurement as one of seven fundamental physical quantities, to it, the basic exploratory development to forward position Application with advanced technology has vital meaning.With industrial technologies such as aerospace, car networking, laser radar ranges Fast development, the demand to space length accurate measurement is also more more and more urgent." space length " refers to that tested media is rolled over The length that rate is surveyed by 1 (such as vacuum or air), that is, the distance that laser transmits in air are penetrated, is different from light in other Jie Light path in matter.
It is at present laser light splitting, the detection through certain space distance L with the method for common laser of narrowband measurement space length Light and reference light are relevant, and both CCD sampled measurements phase interference state obtains space length L.But due to laser of narrowband spectrum Very narrow, the data sample of CCD sampling is limited, is unable to get high-precision resolution ratio.In addition common laser of narrowband spectrum is uneven, The error of CCD sampled data is larger, and the accuracy of measurement is not high, and current highest measurement accuracy is only 20 μm.
A kind of space length measurement method of more high measurement accuracy is needed at present.
Summary of the invention
The purpose of the present invention is designing a kind of space length measuring device, using super continuous spectrums laser, through optical splitter point Reference laser and detection laser, reference laser access optical combiner through reference optical fiber out, and detection laser is accessed through optical circulator and examined Survey optical transmitting set, the detection reflective optical system of transmitting to distance L;The light being reflected back is through circulator to optical combiner, after closing beam interferometer Into grating dispersion device, each wavelength laser after dispersion completely arrives at the detection window of ccd array detector, CCD waveguide array The output end of detector accesses data processing unit through electrical signal line.
It is another object of the present invention to design a kind of space length measurement method, space length designed by the invention is surveyed Device is measured, reference laser accesses optical combiner through reference optical fiber;Laser is detected through optical circulator, detection optical transmitting set, detection light Reflector becomes reception laser and also accesses optical combiner, closes beam, multi-wavelength light interference, interference in the two-beam of optical combiner input Laser is output to grating dispersion device, multi-wavelength light dispersion beam splitting, the waveguide array detector for being irradiated to CCD, and CCD waveguide array is visited Device to be surveyed it is sampled to obtain wavelength-strength signal, Fourier transformation obtains spatial-intensity relationship, realize the measurement of space length, With measurement accuracy height, the simple feature of realization principle.
A kind of space length measuring device that the present invention designs, including super continuous spectrums laser source, optical splitter, reference light Fibre, optical circulator, detection optical transmitting set, detection reflective optical system, optical combiner, grating dispersion device, CCD waveguide array detector and Data processing unit.
The super continuous spectrums laser source connects optical splitter, the reference of the output port output of optical splitter through optical fiber Laser connects an input port of optical combiner, the detection laser of the another output mouth output of optical splitter through reference optical fiber The first port of optical circulator is connect through optical fiber, the second port of optical circulator is through optical fiber connecting detection optical transmitting set, detection light hair It is atmosphere or vacuum, the two distance L between emitter and detection reflective optical system;The third port of optical circulator connects photosynthetic through optical fiber Another input port of road device, two-way inputs photosynthetic beam interferometer in optical combiner, and the interference laser of optical combiner output connects Enter grating dispersion device, the detection window of the output end face CCD waveguide array detector of grating dispersion device, grating dispersion device dispersion Each wavelength laser afterwards completely arrives at the detection window of ccd array detector, and the output end of CCD waveguide array detector is through telecommunications Number line accesses data processing unit.
The broad band laser spectral centroid wavelength that the super continuous spectrums laser source generates is 1525nm~1625nm, spectral width For 0.8nm~80nm.
The detection reflective optical system is the reflector that frequency domain reflection is carried out to broad band laser.
A kind of space length measurement method that the present invention designs, the space length measuring device designed using the present invention.Institute The broad band laser access optical splitter that super continuous spectrums laser source generates steady and continuous is stated, is divided into reference laser and detection swashs Light.The broad band laser of the steady and continuous refers to spectral flatness better than 7dB/nm, and output power variation is less than or waits per minute In the broad band laser of 0.5dB.Reference laser accesses optical combiner through reference optical fiber;Detection laser enters the first end of optical circulator Mouthful, it is output to detection optical transmitting set through second port, detection optical transmitting set will test laser orientation and emit to form transmitting laser, examines The space length surveying optical transmitting set and detecting between reflective optical system is L, and the detection reflective optical system will test optical transmitting set transmitting Transmitting laser reflection return detection optical transmitting set, formed reflection laser.Detection light transmitter receipt reflection laser, which makes, to be connect Laser is received, and is sent into the second port of optical circulator, the reception laser that second port inputs is sent to third port by optical circulator It is output to optical combiner.It is exported in the optical combiner by the reference laser of reference optical fiber and optical circulator third port It receives laser and carries out conjunction beam interferometer, form interference laser and be output to grating dispersion device.The grating dispersion device is defeated by optical combiner Interference laser out carries out spatial dispersion, is split by different wave length, the light distribution for forming different wave length is different in space The spatial beam of position, the spatial beam are irradiated on CCD waveguide array detector, and CCD waveguide array detector is to different waves The strength signal of long light is sampled, and wavelength-strength signal is obtained, this signal is sent to data processing unit.The CCD wavelength The wavelength sampling interval of detector array is 0.2pm~2pm.
It is indicated by the intensity of the reference laser of reference optical fiber are as follows:
The reception laser intensity of circulator third port output indicates are as follows:
λ in formulaiIndicate that some wavelength of super continuous spectrums laser, that is, CCD waveguide array detector swash super continuous spectrums Some sampling wavelength in light series of samples;
N indicates optical fibre refractivity;
Exp { } indicates exponential function;
LTIndicate the fiber lengths for reaching optical combiner through reference optical fiber by optical splitter;
LRIt indicates by optical splitter through circulator first port, circulator second port to optical transmitting set, again by light emitting Device returns to circulator second port, circulator third port, reaches the fiber lengths of optical combiner;
Its nLTIndicate the light path of the reference laser through reference optical fiber;
(nLR+ 2L) indicate that through circulator first port, arrival optical transmitting set, it is anti-to reach light through space length L for detection laser Emitter, then optical transmitting set is returned through space length L, the second port through optical circulator to third port and it is output to photosynthetic road The sum of laser light path of device;
Wavelength-strength signal indicates are as follows:
Reference optical fiber is adjusted, nL is madeT=nLR, then:
The data processing unit, the wavelength that CCD waveguide array detector is sent-strength signal carry out Fourier Transformation, by the relationship P (λ between wavelength-intensityi), the relationship K (x being changed between spatial-intensityi),
K(xi)=FFT { P (λi)}
=δ (xi-0)+δ(xi-2L)
Wherein FFT { } indicates Fourier transformation, and δ () indicates delta function;
It is obtained from above formula, in xiAt=0, K (x0) there is a peak value, indicate detection light emitter position;In xiAt=L, K(xL) also there is a peak value, indicate detection light reflector locations, xL-x0=L obtains measured space length.
The wavelength that the data processing unit sends CCD waveguide array detector-strength signal carries out Fourier Transformation, by wavelength-intensity relationship, be changed into spatial-intensity relationship, obtain detection optical transmitting set and detect reflective optical system it Between space length value.
Compared with prior art, a kind of space length measuring device and measuring method of the present invention have the advantage that 1, sheet The scheme that invention provides is based on super continuous spectrums laser and CCD detection carries out space length measurement, and super continuous spectrums laser generates light Spectral width reaches the coherent laser beam of tens nanometer, and high-precision linear measure longimetry can be realized without wavelength tuning;Connect if 2, surpassing The central wavelength of continuous spectrum laser is 1550nm, and spectral width 80nm, measurement accuracy resolution ratio can reach 15 μm, than existing skill The measurement accuracy of art is about high by 25%;3, using existing optical instrument, it is easy to accomplish;Suitable for aerospace, car networking, laser The high-acruracy survey to space length such as radar range finding.
Detailed description of the invention
Fig. 1 is this space length measuring device example structure block diagram;
Fig. 2 is gained wavelength-strength relationship curve graph in this space length measurement method embodiment;
Fig. 3 is gained spatial-intensity graph of relation in this space length measurement method embodiment;
Fig. 4 is this space length measurement method embodiment intermediate-resolution schematic diagram.
Specific embodiment
Further to illustrate the present invention to reach the technical means and efficacy that predetermined purpose is taken, below in conjunction with attached Figure, the present invention is described in detail as after.
This space length measuring device embodiment is as shown in Figure 1, include super continuous spectrums laser source, optical splitter, reference light Fibre, optical circulator, detection optical transmitting set, detection reflective optical system, optical combiner, grating dispersion device, CCD waveguide array detector and Data processing unit.Solid line connecting line indicates optical fiber connection in figure, and dashed connection line indicates the light connects in atmosphere, click and sweep connection Line indicates electric signal connection.
The broad band laser spectral wavelength ranges that this example super continuous spectrums laser source generates are 1550nm ± 40nm.
This example super continuous spectrums laser source connects optical splitter, the reference of the output port output of optical splitter through optical fiber Laser connects an input port of optical combiner, the detection laser of the another output mouth output of optical splitter through reference optical fiber The first port of optical circulator is connect 1. through optical fiber, and the second port of optical circulator is 2. through optical fiber connecting detection optical transmitting set, this example Detecting between optical transmitting set and detection reflective optical system is atmosphere, the two distance L;This example detect reflective optical system be to broad band laser into The reflector of line frequency domain reflection.3. the third port of optical circulator connects grating dispersion device, the output of grating dispersion device through optical fiber Rectify the detection window to CCD waveguide array detector, be therebetween also atmosphere, each wavelength after grating dispersion device dispersion swashs Light completely arrives at the detection window of ccd array detector, and the output end of CCD waveguide array detector accesses data through electrical signal line Processing unit.
Space length measurement method embodiment
This space length measurement method embodiment carries out in above-mentioned space length measuring device embodiment.This example is super to be connected Continuous spectrum laser source generates spectral flatness and is less than 7dB/nm, and output power variation is less than the broad band laser of 0.5dB, center per minute Wavelength X0=1550nm, spectral width △ λ=80nm.
The broad band laser that super continuous spectrums laser source generates accesses the optical splitter, is divided into reference laser and detection laser. Reference laser accesses optical combiner through reference optical fiber;1. detection laser enters the first port of optical circulator, 2. through second port Be output to detection optical transmitting set, detection optical transmitting set will test laser orientation and emit to form transmitting laser, detection optical transmitting set with Detecting the space length between reflective optical system is L, and the transmitting laser that the detection reflective optical system will test optical transmitting set transmitting is anti- It is emitted back towards detection optical transmitting set, forms reflection laser.Detection light transmitter receipt reflection laser makes reception laser, and is sent into 2., 2. reception laser that second port inputs is sent to third port and is 3. output to light the second port of optical circulator by optical circulator Combiner.By the reception laser of the reference laser of reference optical fiber and the output of optical circulator third port in the optical combiner Conjunction beam interferometer is carried out, interference laser is formed and is output to grating dispersion device.The interference that the grating dispersion device exports optical combiner Laser carries out spatial dispersion, is split by different wave length, forms sky of the light distribution in the different position in space of different wave length Between light beam, which is irradiated on CCD waveguide array detector, and CCD waveguide array detector is to the strong of different wavelengths of light Degree signal is sampled, and obtains wavelength-strength signal, this signal is sent to data processing unit.
The wavelength that the data processing unit sends CCD waveguide array detector-strength signal carries out Fourier Transformation, by wavelength-intensity relationship, be changed into spatial-intensity relationship, obtain detection optical transmitting set and detect reflective optical system it Between space length value.
It is indicated by the intensity of the reference laser of reference optical fiber are as follows:
3. reception laser intensity that circulator third port exports indicates are as follows:
λ in formulaiIndicate that some wavelength of super continuous spectrums laser, that is, CCD waveguide array detector swash super continuous spectrums Some sampling wavelength in light series of samples;According to the spectrum width of super continuous spectrums laser and wavelength sampling interval, determine multiple discrete Value λiNumber, this example wavelength sampling interval 1pm.
N indicates optical fibre refractivity;
Exp { } indicates exponential function;
LTIndicate the fiber lengths for reaching optical combiner through reference optical fiber by optical splitter;
LRIndicate by optical splitter through circulator first port 1., circulator second port is 2. to optical transmitting set, again by light Transmitter return circulator second port 2., circulator third port 3., reach the fiber lengths of optical combiner;
Its nLTIndicate the light path of the reference laser through reference optical fiber,
(nLR+ 2L) indicate 1. detection laser, reaches optical transmitting set, becomes transmitting laser, through sky through circulator first port Between length L reach reflective optical system, formed reflection laser, then through space length L return optical transmitting set become receive laser, through the ring of light 3. and the sum of the laser light path for being output to optical combiner 2. the second port of shape device arrives third port.
The interference laser that this example grating dispersion device exports optical combiner carries out spatial dispersion, by the light distribution of different wave length The position different to space, and be irradiated on CCD waveguide array detector.
This example CCD waveguide array detector receives the spatial beam of the different wave length of grating dispersion device dispersion, different wave length The intensity of light is different, that is, forms wavelength-strength signal, and send data processing unit for this signal.This example wavelength-intensity Relation curve is as shown in Fig. 2, the abscissa of Fig. 2 is wavelength Xi, unit nm;Ordinate is that CCD waveguide array detector obtains Light intensity P (λi), unit is normalizated unit (a.u).
Wavelength-strength signal indicates are as follows:
Reference optical fiber is adjusted, nL is madeT=nLR=L0, then:
That is:
The data processing unit, the wavelength that CCD waveguide array detector is sent-strength signal carry out Fourier Transformation, by the relationship P (λ between wavelength-intensityi), the relationship K (x being changed between spatial-intensityi), to realize detection The measurement of space length L between optical transmitting set and detection reflective optical system.Resulting spatial-intensity curve after this example Fourier transformation As shown in figure 3, the abscissa of Fig. 3 is spatial position xi, unit m;Ordinate is the intensity K (x of the light after Fourier transformationi), Unit is normalizated unit (a.u).
Transformation of the wavelength-between intensity and spatial-intensity is expressed as:
K(xi)=FFT { P (λi)}
=δ (xi-0)+δ(xi-2L)
Wherein FFT { } indicates Fourier transformation, and δ () indicates delta function, wherein xiThe point of representation space coordinate, i =1,2,3 ....It is obtained from above formula, in xiAt=0, K (x0) there is a peak value, indicate detection light emitter position;In xi=L Place, K (xL) also there is a peak value, indicate detection light reflector locations, the distance between two peak values xL-x0=L is to get to being surveyed The space length of amount.
As shown in figure 4, ordinate is the intensity K (x of light in schemingi), unit is normalizated unit (a.u), abscissa xi- L, unit be μm, to explicitly indicate that out space length Measurement Resolution Δ x.
Space length Measurement Resolution are as follows:
λ in formula0Indicate the central wavelength of super continuous spectrums laser, △ λ is the spectral width of super continuous spectrums laser.This example is super to be connected The central wavelength of continuous spectrum laser is 1550nm, and spectral width 80nm, the space length L of this example measurement are 0.5m, and measurement is differentiated Rate reaches 15 μm, and final measured result is 0.5003507m, error 0.07%.
Above-described embodiment is only further described the purpose of the present invention, technical scheme and beneficial effects specific A example, present invention is not limited to this.All any modifications made within the scope of disclosure of the invention, change equivalent replacement Into etc., it is all included in the scope of protection of the present invention.

Claims (7)

1. a kind of space length measuring device, including super continuous spectrums laser source, optical splitter, reference optical fiber, optical circulator, detection Optical transmitting set, detection reflective optical system, optical combiner, grating dispersion device, CCD waveguide array detector and data processing unit;
The super continuous spectrums laser source connects optical splitter, the reference laser of the output port output of optical splitter through optical fiber An input port of optical combiner is connect through reference optical fiber, the detection laser of the another output mouth output of optical splitter is through light Fibre connects the first port of optical circulator, and the second port of optical circulator detects optical transmitting set through optical fiber connecting detection optical transmitting set It is atmosphere or vacuum, the two distance L between detection reflective optical system;The third port of optical circulator connects grating dispersion through optical fiber Device, the detection window of the output end face CCD waveguide array detector of grating dispersion device, each wavelength after grating dispersion device dispersion Laser completely arrives at the detection window of ccd array detector, and the output end of CCD waveguide array detector accesses number through electrical signal line According to processing unit.
2. space length measuring device according to claim 1, it is characterised in that:
The broad band laser spectral centroid wave-length coverage that the super continuous spectrums laser source generates is 1525nm~1625nm, spectral width For 0.8nm~80nm.
3. space length measuring device according to claim 1, it is characterised in that:
The detection reflective optical system is the reflector that frequency domain reflection is carried out to broad band laser.
4. a kind of space length measurement method uses according to claim 1 to space length measuring device described in 3, special Sign is:
The super continuous spectrums laser source generates spectral flatness and is less than or equal to per minute better than 7dB/nm, output power variation The broad band laser of 0.5dB accesses the optical splitter, is divided into reference laser and detection laser;Reference laser is accessed through reference optical fiber Optical combiner;Detection laser enters the first port of optical circulator, is output to detection optical transmitting set, detection light hair through second port Emitter will test laser orientation and emit to form transmitting laser, and the space length for detecting optical transmitting set and detecting between reflective optical system is L, the transmitting laser reflection that the detection reflective optical system will test optical transmitting set transmitting return detection optical transmitting set, form reflection and swash Light;Detection light transmitter receipt reflection laser makes reception laser, and is sent into the second port of optical circulator, optical circulator The reception laser that second port inputs is sent to third port and is output to optical combiner;Pass through reference light in the optical combiner Fine reference laser and the reception laser of optical circulator third port output carry out conjunction beam interferometer, form interference laser and are output to light Grid dispersor;The interference laser that the grating dispersion device exports optical combiner carries out spatial dispersion, is divided by different wave length Beam, forms spatial beam of the light distribution in the different position in space of different wave length, which is irradiated to CCD waveguide array On detector, CCD waveguide array detector samples the strength signal of different wavelengths of light, obtains wavelength-strength signal, this Signal is sent to data processing unit;
The wavelength that the data processing unit sends CCD waveguide array detector-strength signal carries out Fourier transformation, By wavelength-intensity relationship, it is changed into spatial-intensity relationship, obtains detection optical transmitting set and detects and is empty between reflective optical system Between length value.
5. space length measurement method according to claim 4, it is characterised in that:
The wavelength sampling interval of the CCD waveguide array detector is 0.2pm~2pm.
6. space length measurement method according to claim 4, it is characterised in that:
It is indicated by the intensity of the reference laser of reference optical fiber are as follows:
The reception laser intensity of circulator third port output indicates are as follows:
λ in formulaiIndicate some wavelength of super continuous spectrums laser, that is, CCD waveguide array detector is to super continuous spectrums laser array Some sampling wavelength in sampling;
N indicates optical fibre refractivity;
Exp { } indicates exponential function;
LTIndicate the fiber lengths for reaching optical combiner through reference optical fiber by optical splitter;
LRIndicate by optical splitter through circulator first port 1., circulator second port is 2. to optical transmitting set, again by optical transmitting set Return circulator second port 2., circulator third port 3., reach the fiber lengths of optical combiner;
Its nLTIndicate the light path of the reference laser through reference optical fiber;
(nLR+ 2L) indicate that detection laser through circulator first port, arrival optical transmitting set, reaches reflective optical system through space length L, Optical transmitting set is returned through space length L again, the second port through optical circulator to third port and is output to optical combiner The sum of laser light path;
Wavelength-strength signal indicates are as follows:
Reference optical fiber is adjusted, nL is madeT=nLR, then:
The data processing unit, the wavelength that CCD waveguide array detector is sent-strength signal carry out Fourier's change It changes, by the relationship P (λ between wavelength-intensityi), the relationship K (x being changed between spatial-intensityi),
K(xi)=FFT { P (λi)}
=δ (xi-0)+δ(xi-2L)
Wherein FFT { } indicates Fourier transformation, and δ () indicates delta function;
It is obtained from above formula, in xiAt=0, K (x0) there is a peak value, indicate detection light emitter position;In xiAt=L, K (xL) Also there is a peak value, indicate detection light reflector locations, xL-x0=L obtains measured space length.
7. space length measurement method according to claim 4, it is characterised in that:
Space length Measurement Resolution are as follows:
λ in formula0Indicate the central wavelength of super continuous spectrums laser, △ λ is the spectral width of super continuous spectrums laser.
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