CN109341844B - 一种震动检测仪及其检测方法 - Google Patents
一种震动检测仪及其检测方法 Download PDFInfo
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- CN109341844B CN109341844B CN201811489370.0A CN201811489370A CN109341844B CN 109341844 B CN109341844 B CN 109341844B CN 201811489370 A CN201811489370 A CN 201811489370A CN 109341844 B CN109341844 B CN 109341844B
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- vibration
- frequency
- quartz crystal
- piezoelectric quartz
- alarm
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- 238000001514 detection method Methods 0.000 title claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 137
- 239000010453 quartz Substances 0.000 claims abstract description 133
- 239000013078 crystal Substances 0.000 claims abstract description 101
- 229910052751 metal Inorganic materials 0.000 claims description 56
- 239000002184 metal Substances 0.000 claims description 56
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 230000035939 shock Effects 0.000 claims 7
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000012544 monitoring process Methods 0.000 abstract description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 108
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
Abstract
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Citations (12)
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GB2282297B (en) * | 1993-09-23 | 1998-03-11 | Holroyd Instr Ltd | Improved resonant acoustic emission transducer |
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CN103952757A (zh) * | 2014-04-21 | 2014-07-30 | 山东大学 | 三硼酸铋晶体高温压电切型及其在高温压电领域的应用 |
CN104019886A (zh) * | 2014-06-11 | 2014-09-03 | 常州智梭传感科技有限公司 | 基于声表面波的具有温度补偿的感测振动传感结构 |
CN105897217A (zh) * | 2015-08-18 | 2016-08-24 | 应达利电子股份有限公司 | 一种石英晶体谐振器、智能压力传感器及其传感测量方法 |
CN106092002A (zh) * | 2016-06-07 | 2016-11-09 | 应达利电子股份有限公司 | 用于成膜厚度监测的石英晶体谐振器、监测仪及监测方法 |
CN209166641U (zh) * | 2018-12-06 | 2019-07-26 | 应达利电子股份有限公司 | 一种震动检测仪 |
-
2018
- 2018-12-06 CN CN201811489370.0A patent/CN109341844B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55141639A (en) * | 1979-04-20 | 1980-11-05 | Nissan Motor Co Ltd | Vibration sensor |
JPS5612515A (en) * | 1979-07-13 | 1981-02-06 | Nissan Motor Co Ltd | Oscillation sensor |
GB2282297B (en) * | 1993-09-23 | 1998-03-11 | Holroyd Instr Ltd | Improved resonant acoustic emission transducer |
CN1858564A (zh) * | 2006-06-06 | 2006-11-08 | 北京航空航天大学 | 电阻拾振式硅微机械谐振传感器的锁相闭环系统 |
CN1949105A (zh) * | 2006-11-08 | 2007-04-18 | 北京航空航天大学 | 谐振式传感器基于幅频特性的闭环控制系统 |
CN101622519A (zh) * | 2007-02-22 | 2010-01-06 | 微动公司 | 振动管道诊断系统和方法 |
CN102435342A (zh) * | 2011-10-11 | 2012-05-02 | 应达利电子(深圳)有限公司 | 一种基于at切石英晶体谐振器的温度测量仪及测量方法 |
CN103952757A (zh) * | 2014-04-21 | 2014-07-30 | 山东大学 | 三硼酸铋晶体高温压电切型及其在高温压电领域的应用 |
CN104019886A (zh) * | 2014-06-11 | 2014-09-03 | 常州智梭传感科技有限公司 | 基于声表面波的具有温度补偿的感测振动传感结构 |
CN105897217A (zh) * | 2015-08-18 | 2016-08-24 | 应达利电子股份有限公司 | 一种石英晶体谐振器、智能压力传感器及其传感测量方法 |
CN106092002A (zh) * | 2016-06-07 | 2016-11-09 | 应达利电子股份有限公司 | 用于成膜厚度监测的石英晶体谐振器、监测仪及监测方法 |
CN209166641U (zh) * | 2018-12-06 | 2019-07-26 | 应达利电子股份有限公司 | 一种震动检测仪 |
Non-Patent Citations (6)
Title |
---|
"A high sensitivity uniaxial resonant accelerometer";Comi C 等;《International conference on micro electro mechanical system》;20101231;260-263页 * |
"微机械谐振式加速度计的研究现状及发展趋势";高杨 等;《强激光与粒子束》;20171231;第29卷(第8期);080201页 * |
"石英谐振式加速度计";杨贵玉 等;《遥测遥控》;20071231;第28卷;150-155页 * |
"硅微谐振式加速度计技术现状及展望";万蔡辛 等;《导航与控制》;20101231;第9卷(第2期);72-79页 * |
"硅谐振式加速度计(SOA)的技术及发展";姚保寅 等;《导航与控制》;20111231;第10卷(第1期);33-40页 * |
"高精度石英振梁谐振式传感器测试系统设计";孙登强 等;《仪表技术与传感器》;20180630(第6期);5-10页 * |
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